CN1216417C - 非易失存储器 - Google Patents
非易失存储器 Download PDFInfo
- Publication number
- CN1216417C CN1216417C CN00805606.4A CN00805606A CN1216417C CN 1216417 C CN1216417 C CN 1216417C CN 00805606 A CN00805606 A CN 00805606A CN 1216417 C CN1216417 C CN 1216417C
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- CN
- China
- Prior art keywords
- transistor
- grid
- unit
- reading
- floating boom
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 230000015654 memory Effects 0.000 title claims abstract description 15
- 238000007667 floating Methods 0.000 claims abstract description 45
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 238000002347 injection Methods 0.000 claims abstract description 21
- 239000007924 injection Substances 0.000 claims abstract description 21
- 239000003990 capacitor Substances 0.000 claims abstract description 20
- 239000002784 hot electron Substances 0.000 claims abstract description 14
- 238000000034 method Methods 0.000 claims description 22
- 238000003860 storage Methods 0.000 claims description 16
- 229910052785 arsenic Inorganic materials 0.000 claims description 5
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000002800 charge carrier Substances 0.000 claims 1
- 238000002513 implantation Methods 0.000 claims 1
- 238000005516 engineering process Methods 0.000 description 12
- 230000008569 process Effects 0.000 description 11
- 230000008878 coupling Effects 0.000 description 8
- 238000010168 coupling process Methods 0.000 description 8
- 238000005859 coupling reaction Methods 0.000 description 8
- 230000004888 barrier function Effects 0.000 description 7
- 238000009792 diffusion process Methods 0.000 description 7
- 230000008859 change Effects 0.000 description 6
- 230000005684 electric field Effects 0.000 description 5
- 230000005611 electricity Effects 0.000 description 5
- 230000005641 tunneling Effects 0.000 description 5
- 230000006870 function Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 229910052787 antimony Inorganic materials 0.000 description 2
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000008672 reprogramming Effects 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66825—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a floating gate
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
- G11C16/0408—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors
- G11C16/0433—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors comprising cells containing a single floating gate transistor and one or more separate select transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42324—Gate electrodes for transistors with a floating gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42324—Gate electrodes for transistors with a floating gate
- H01L29/42328—Gate electrodes for transistors with a floating gate with at least one additional gate other than the floating gate and the control gate, e.g. program gate, erase gate or select gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
- H01L29/7881—Programmable transistors with only two possible levels of programmation
- H01L29/7884—Programmable transistors with only two possible levels of programmation charging by hot carrier injection
- H01L29/7885—Hot carrier injection from the channel
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
Abstract
Description
Erase Program Read(Selected) (Unselected) (Selected) (Unselected) (Selected) (Unselected) | |||
Drain(55)Source(56)Select(51)Control(57)N-well(29)P-well(28) | ≥Vcc *0or≥VccFloat FloatVss Vss-7to-14V Vss≥Vcc ≥Vcc≥Vcc ≥Vcc | ≥Vcc *0or≥VccVs FloatVss to Vs Vss to VsVpp VssVcc to Vss Vcc to VssVbias Vbias | ~1.5v *0or~1.5VVss VssVcc Vss2 to 5V VssVcc VccVss Vss |
*0 is for unselected column.Vpp≈7 to 14 volts. |
Claims (19)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/277640 | 1999-03-26 | ||
US09/277,640 US6159800A (en) | 1997-04-11 | 1999-03-26 | Method of forming a memory cell |
US09/277,640 | 1999-03-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1345466A CN1345466A (zh) | 2002-04-17 |
CN1216417C true CN1216417C (zh) | 2005-08-24 |
Family
ID=23061761
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN00805606.4A Expired - Fee Related CN1216417C (zh) | 1999-03-26 | 2000-02-25 | 非易失存储器 |
Country Status (7)
Country | Link |
---|---|
US (1) | US6159800A (zh) |
EP (1) | EP1173887A1 (zh) |
JP (1) | JP2000277636A (zh) |
CN (1) | CN1216417C (zh) |
AU (1) | AU3607400A (zh) |
TW (1) | TW430998B (zh) |
WO (1) | WO2000059032A1 (zh) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5014543B2 (ja) * | 1999-07-29 | 2012-08-29 | エヌエックスピー ビー ヴィ | 半導体装置 |
US6628544B2 (en) * | 1999-09-30 | 2003-09-30 | Infineon Technologies Ag | Flash memory cell and method to achieve multiple bits per cell |
JP4540899B2 (ja) * | 2001-09-13 | 2010-09-08 | パナソニック株式会社 | 半導体装置の製造方法 |
KR100487560B1 (ko) | 2003-03-10 | 2005-05-03 | 삼성전자주식회사 | 선택 트랜지스터를 갖는 이이피롬 및 그 제조방법 |
JP3700708B2 (ja) * | 2003-03-26 | 2005-09-28 | ソニー株式会社 | 半導体装置の製造方法 |
JP4393106B2 (ja) * | 2003-05-14 | 2010-01-06 | シャープ株式会社 | 表示用駆動装置及び表示装置、並びに携帯電子機器 |
CN1328794C (zh) * | 2003-08-29 | 2007-07-25 | 中芯国际集成电路制造(上海)有限公司 | 一种电可擦除可编程只读存储器的制造方法 |
US20050274994A1 (en) * | 2004-06-14 | 2005-12-15 | Rhodes Howard E | High dielectric constant spacer for imagers |
CN101459137B (zh) * | 2007-12-13 | 2011-03-23 | 中芯国际集成电路制造(上海)有限公司 | Dram单元晶体管器件和方法 |
EP2860767A1 (en) | 2013-10-10 | 2015-04-15 | ams AG | CMOS compatible ultraviolet sensor device and method of producing a CMOS compatible ultraviolet sensor device |
CN108806751B (zh) * | 2017-04-26 | 2021-04-09 | 中芯国际集成电路制造(上海)有限公司 | 多次可程式闪存单元阵列及其操作方法、存储器件 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60246677A (ja) * | 1984-05-22 | 1985-12-06 | Seiko Instr & Electronics Ltd | 不揮発性半導体メモリ |
US5340760A (en) * | 1986-05-26 | 1994-08-23 | Kazuhiro Komori | Method of manufacturing EEPROM memory device |
JP2509707B2 (ja) * | 1989-09-04 | 1996-06-26 | 株式会社東芝 | 半導体装置の製造方法 |
JP2577093B2 (ja) * | 1989-09-14 | 1997-01-29 | 三星電子株式会社 | マルチゲート型mos トランジスタ構造を具備した半導体素子のセルフアライメントイオン注入方法 |
JP3109537B2 (ja) * | 1991-07-12 | 2000-11-20 | 日本電気株式会社 | 読み出し専用半導体記憶装置 |
US5471422A (en) * | 1994-04-11 | 1995-11-28 | Motorola, Inc. | EEPROM cell with isolation transistor and methods for making and operating the same |
KR0161403B1 (ko) * | 1995-03-31 | 1998-12-01 | 김광호 | 반도체 메모리장치 및 그 제조방법 |
KR100413652B1 (ko) * | 1995-09-11 | 2004-05-27 | 마츠시타 덴끼 산교 가부시키가이샤 | 반도체기억장치및그구동방법 |
US5780893A (en) * | 1995-12-28 | 1998-07-14 | Nippon Steel Corporation | Non-volatile semiconductor memory device including memory transistor with a composite gate structure |
JP3390319B2 (ja) * | 1997-02-03 | 2003-03-24 | シャープ株式会社 | 半導体装置及びその製造方法 |
US5895241A (en) * | 1997-03-28 | 1999-04-20 | Lu; Tao Cheng | Method for fabricating a cell structure for mask ROM |
US6027974A (en) * | 1997-04-11 | 2000-02-22 | Programmable Silicon Solutions | Nonvolatile memory |
US5867425A (en) * | 1997-04-11 | 1999-02-02 | Wong; Ting-Wah | Nonvolatile memory capable of using substrate hot electron injection |
-
1999
- 1999-03-26 US US09/277,640 patent/US6159800A/en not_active Expired - Lifetime
- 1999-12-28 TW TW088123107A patent/TW430998B/zh not_active IP Right Cessation
-
2000
- 2000-02-10 JP JP2000033103A patent/JP2000277636A/ja active Pending
- 2000-02-25 AU AU36074/00A patent/AU3607400A/en not_active Abandoned
- 2000-02-25 EP EP00914721A patent/EP1173887A1/en not_active Withdrawn
- 2000-02-25 WO PCT/US2000/004894 patent/WO2000059032A1/en not_active Application Discontinuation
- 2000-02-25 CN CN00805606.4A patent/CN1216417C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
AU3607400A (en) | 2000-10-16 |
US6159800A (en) | 2000-12-12 |
EP1173887A1 (en) | 2002-01-23 |
WO2000059032A1 (en) | 2000-10-05 |
CN1345466A (zh) | 2002-04-17 |
TW430998B (en) | 2001-04-21 |
JP2000277636A (ja) | 2000-10-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C06 | Publication | ||
PB01 | Publication | ||
ASS | Succession or assignment of patent right |
Owner name: ALTERA CORP. Free format text: FORMER OWNER: PROGRAMMABLE SILICON SOLUTIONS Effective date: 20050311 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20050311 Address after: American California Applicant after: Altera Corp. Address before: American California Applicant before: Programmable Silicon Solutions |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20050824 Termination date: 20180225 |
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CF01 | Termination of patent right due to non-payment of annual fee |