CN1191642C - 微驱动器及其制造方法 - Google Patents
微驱动器及其制造方法 Download PDFInfo
- Publication number
- CN1191642C CN1191642C CNB991263669A CN99126366A CN1191642C CN 1191642 C CN1191642 C CN 1191642C CN B991263669 A CNB991263669 A CN B991263669A CN 99126366 A CN99126366 A CN 99126366A CN 1191642 C CN1191642 C CN 1191642C
- Authority
- CN
- China
- Prior art keywords
- piezoelectrics
- base plate
- microdrive
- upper electrode
- power lead
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/877—Conductive materials
Abstract
Description
Claims (22)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR19990002281 | 1999-01-25 | ||
KR2281/1999 | 1999-01-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1262529A CN1262529A (zh) | 2000-08-09 |
CN1191642C true CN1191642C (zh) | 2005-03-02 |
Family
ID=19572325
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB991263669A Expired - Fee Related CN1191642C (zh) | 1999-01-25 | 1999-12-17 | 微驱动器及其制造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US6351057B1 (zh) |
JP (1) | JP3515028B2 (zh) |
CN (1) | CN1191642C (zh) |
DE (1) | DE19959169C2 (zh) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6351057B1 (en) * | 1999-01-25 | 2002-02-26 | Samsung Electro-Mechanics Co., Ltd | Microactuator and method for fabricating the same |
JP2002321358A (ja) * | 2001-04-24 | 2002-11-05 | Sii Printek Inc | インクジェットヘッド及びコンタクト電極の形成方法 |
DE10126656A1 (de) | 2001-06-01 | 2002-12-05 | Endress & Hauser Gmbh & Co Kg | Elektromechanischer Wandler mit mindestens einem piezoelektrischen Element |
DE10141820A1 (de) * | 2001-08-27 | 2003-03-20 | Elliptec Resonant Actuator Ag | Piezomotor mit Kupferelektroden |
JP3846271B2 (ja) * | 2001-11-05 | 2006-11-15 | 松下電器産業株式会社 | 薄膜圧電体素子およびその製造方法 |
WO2005058459A1 (ja) * | 2003-12-17 | 2005-06-30 | Matsushita Electric Industrial Co., Ltd. | 成分分離デバイスおよびその製造方法並びにこれを用いた成分の分離方法 |
JP2011018723A (ja) * | 2009-07-08 | 2011-01-27 | Seiko Epson Corp | 圧電素子およびその製造方法、圧電アクチュエーター、液体噴射ヘッド、並びに、液体噴射装置 |
CN101895230B (zh) * | 2010-06-24 | 2013-01-23 | 西安电子科技大学 | 基于屈曲的低电压变形微驱动器 |
JP5696686B2 (ja) | 2011-08-30 | 2015-04-08 | 株式会社豊田中央研究所 | 半導体装置 |
JP2016219452A (ja) * | 2015-05-14 | 2016-12-22 | 富士通株式会社 | 多層基板及び多層基板の製造方法 |
US11289641B2 (en) | 2018-09-19 | 2022-03-29 | Sae Magnetics (H.K.) Ltd. | Thin-film piezoelectric-material element, method of manufacturing the same, head gimbal assembly and hard disk drive |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3004331C2 (de) * | 1980-02-06 | 1983-06-23 | Siemens AG, 1000 Berlin und 8000 München | Zu Dickenscherungsschwingungen anregbare Resonatorplatte |
JPS58137317A (ja) * | 1982-02-09 | 1983-08-15 | Nec Corp | 圧電薄膜複合振動子 |
JPS60189307A (ja) * | 1984-03-09 | 1985-09-26 | Toshiba Corp | 圧電薄膜共振器およびその製造方法 |
JPS61127217A (ja) * | 1984-11-26 | 1986-06-14 | Toshiba Corp | 圧電薄膜共振子 |
US4680595A (en) * | 1985-11-06 | 1987-07-14 | Pitney Bowes Inc. | Impulse ink jet print head and method of making same |
SG83626A1 (en) * | 1989-07-11 | 2001-10-16 | Seiko Epson Corp | Piezoelectric/electrostrictive actuator having at least one piezoelectric/electrostrictive film |
JPH07108102B2 (ja) * | 1990-05-01 | 1995-11-15 | 日本碍子株式会社 | 圧電/電歪膜型アクチュエータの製造方法 |
US5210455A (en) * | 1990-07-26 | 1993-05-11 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion |
US5265315A (en) * | 1990-11-20 | 1993-11-30 | Spectra, Inc. | Method of making a thin-film transducer ink jet head |
US5185589A (en) * | 1991-05-17 | 1993-02-09 | Westinghouse Electric Corp. | Microwave film bulk acoustic resonator and manifolded filter bank |
US5459501A (en) * | 1993-02-01 | 1995-10-17 | At&T Global Information Solutions Company | Solid-state ink-jet print head |
US5587620A (en) * | 1993-12-21 | 1996-12-24 | Hewlett-Packard Company | Tunable thin film acoustic resonators and method for making the same |
US5612536A (en) * | 1994-02-07 | 1997-03-18 | Matsushita Electric Industrial Co., Ltd. | Thin film sensor element and method of manufacturing the same |
US5692279A (en) * | 1995-08-17 | 1997-12-02 | Motorola | Method of making a monolithic thin film resonator lattice filter |
JPH1032454A (ja) * | 1996-07-15 | 1998-02-03 | Olympus Optical Co Ltd | マイクロ圧電振動子 |
JPH1086366A (ja) * | 1996-09-18 | 1998-04-07 | Fuji Electric Co Ltd | セラミックス素子の製造方法 |
JP3340043B2 (ja) * | 1996-12-26 | 2002-10-28 | 京セラ株式会社 | 圧電アクチュエータとその製造方法 |
KR100540644B1 (ko) * | 1998-02-19 | 2006-02-28 | 삼성전자주식회사 | 마이크로 엑츄에이터 제조방법 |
JP2000085124A (ja) * | 1998-09-14 | 2000-03-28 | Matsushita Electric Ind Co Ltd | インクジェットヘッド及びその製造方法 |
US6351057B1 (en) * | 1999-01-25 | 2002-02-26 | Samsung Electro-Mechanics Co., Ltd | Microactuator and method for fabricating the same |
KR100289606B1 (ko) * | 1999-01-25 | 2001-05-02 | 이형도 | 잉크젯 프린트헤드용 챔버판의 패터닝방법과 그에 의해 제조되는 액츄에이터 |
-
1999
- 1999-12-01 US US09/452,553 patent/US6351057B1/en not_active Expired - Fee Related
- 1999-12-06 JP JP34608899A patent/JP3515028B2/ja not_active Expired - Fee Related
- 1999-12-08 DE DE1999159169 patent/DE19959169C2/de not_active Expired - Fee Related
- 1999-12-17 CN CNB991263669A patent/CN1191642C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2000211136A (ja) | 2000-08-02 |
CN1262529A (zh) | 2000-08-09 |
JP3515028B2 (ja) | 2004-04-05 |
US6351057B1 (en) | 2002-02-26 |
DE19959169A1 (de) | 2000-08-17 |
DE19959169C2 (de) | 2003-07-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1191642C (zh) | 微驱动器及其制造方法 | |
JP4338341B2 (ja) | 圧電セラミック多層アクチュエータの外部電極 | |
US7044586B2 (en) | Piezoelectric/electrostrictive film type actuator and method of manufacturing the actuator | |
CN1170990A (zh) | 压电薄膜元件 | |
CN1841599A (zh) | 阵列型多层陶瓷电容及其制造方法 | |
CN1154126C (zh) | 电感元件和无线终端设备 | |
GB2334483A (en) | Forming an oxide piezoelectric element(s) and upper electrode layer(s) of an inkjet printhead microactuator using a photoresist film(s) and etching process | |
EP1830414A1 (en) | Element mounting substrate and method for manufacturing same | |
JPWO2003061023A1 (ja) | 圧電/電歪デバイス及びその製造方法 | |
CN1606503A (zh) | 液体喷出头 | |
CN1287686A (zh) | 制造多层陶瓷基片的方法 | |
JPH0549270A (ja) | 圧電/電歪アクチユエータ | |
CN1934691A (zh) | 结合结构、引线结合方法、致动装置和液体喷射头 | |
CN1269299C (zh) | 压电致动器、包含它的液体喷头及其制造方法 | |
CN101052531A (zh) | 热打印头及其制造方法 | |
JP2001250996A (ja) | 圧電/電歪デバイス | |
CN1468321A (zh) | 压电薄膜以及其制造方法、以及具备该压电薄膜的压电元件、以及使用该压电元件的喷墨头、以及具备该喷墨头的喷墨式记录装置 | |
CN1849220A (zh) | 热敏打印头及其制造方法 | |
CN1050229C (zh) | 压电/电致伸缩膜元件及其制作方法 | |
JP2002261437A (ja) | 配線基板の製造方法 | |
JP3592057B2 (ja) | 圧電ユニットの製造方法及びインクジェットヘッドの製造方法 | |
CN1220994C (zh) | 积层电子元件 | |
US6457221B1 (en) | Manufacturing method of actuator for ink jet printer head | |
US20040104976A1 (en) | Pressure chamber of a piezoelectric ink jet print head and fabrication method thereof | |
JPH0132759Y2 (zh) |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C06 | Publication | ||
PB01 | Publication | ||
ASS | Succession or assignment of patent right |
Owner name: SAMSUNG ELECTRONICS CO., LTD Free format text: FORMER OWNER: SAMSUNG ELECTRO-MECHANICS CO., LTD Effective date: 20020327 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20020327 Address after: Gyeonggi Do, South Korea Applicant after: Samsung Electronics Co., Ltd. Address before: Gyeonggi Do, South Korea Applicant before: Samsung Electro-Mechanics Co., Ltd. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20050302 Termination date: 20101217 |