CN117295931A - 用于监测辐射发射元件的发射温度的装置和方法 - Google Patents

用于监测辐射发射元件的发射温度的装置和方法 Download PDF

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Publication number
CN117295931A
CN117295931A CN202280033179.3A CN202280033179A CN117295931A CN 117295931 A CN117295931 A CN 117295931A CN 202280033179 A CN202280033179 A CN 202280033179A CN 117295931 A CN117295931 A CN 117295931A
Authority
CN
China
Prior art keywords
radiation
emitting element
radiation emitting
emission temperature
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280033179.3A
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English (en)
Chinese (zh)
Inventor
C·M·奥古恩
F·霍尔穆特
S·瓦鲁施
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TrinamiX GmbH
Original Assignee
TrinamiX GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TrinamiX GmbH filed Critical TrinamiX GmbH
Publication of CN117295931A publication Critical patent/CN117295931A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0801—Means for wavelength selection or discrimination
    • G01J5/0802—Optical filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/06—Control, e.g. of temperature, of power
    • H05B6/062—Control, e.g. of temperature, of power for cooking plates or the like
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J5/061—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by controlling the temperature of the apparatus or parts thereof, e.g. using cooling means or thermostats
    • G01J2005/063—Heating; Thermostating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2213/00—Aspects relating both to resistive heating and to induction heating, covered by H05B3/00 and H05B6/00
    • H05B2213/07—Heating plates with temperature control means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
  • Electric Stoves And Ranges (AREA)
CN202280033179.3A 2021-05-07 2022-05-06 用于监测辐射发射元件的发射温度的装置和方法 Pending CN117295931A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP21172760 2021-05-07
EP21172760.7 2021-05-07
PCT/EP2022/062260 WO2022234073A1 (en) 2021-05-07 2022-05-06 Device and method for monitoring an emission temperature of a radiation emitting element

Publications (1)

Publication Number Publication Date
CN117295931A true CN117295931A (zh) 2023-12-26

Family

ID=75870482

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280033179.3A Pending CN117295931A (zh) 2021-05-07 2022-05-06 用于监测辐射发射元件的发射温度的装置和方法

Country Status (6)

Country Link
US (1) US20240319011A1 (cg-RX-API-DMAC7.html)
EP (1) EP4334689A1 (cg-RX-API-DMAC7.html)
JP (1) JP2024519730A (cg-RX-API-DMAC7.html)
KR (1) KR20240004475A (cg-RX-API-DMAC7.html)
CN (1) CN117295931A (cg-RX-API-DMAC7.html)
WO (1) WO2022234073A1 (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN121346983A (zh) * 2025-12-03 2026-01-16 盛吉盛半导体科技(北京)有限公司 一种基于透射与辐射的晶圆测温方法、装置、设备及介质

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024213601A1 (en) 2023-04-12 2024-10-17 Trinamix Gmbh Calibration and operation methods for devices for monitoring an emission temperature

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JP2007311283A (ja) * 2006-05-22 2007-11-29 Matsushita Electric Ind Co Ltd 誘導加熱調理器
JP2011138733A (ja) * 2010-01-04 2011-07-14 Mitsubishi Electric Corp 誘導加熱調理器
EP2704521A1 (de) * 2012-09-03 2014-03-05 BSH Bosch und Siemens Hausgeräte GmbH Hausgerätevorrichtung

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DE19906115C1 (de) 1999-02-13 2000-08-31 Schott Glas Verfahren zum Erkennen des Leerkochens von Geschirr bei Kochfeldern mit einer Glaskeramik-Kochfläche und zugehörige Vorrichtung
US6169486B1 (en) * 1999-07-19 2001-01-02 General Electric Company Monitoring and control system for monitoring the temperature of a glass ceramic cooktop
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JP2006292439A (ja) * 2005-04-06 2006-10-26 Hamamatsu Photonics Kk 温度検出装置
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JP2003109736A (ja) * 2001-09-28 2003-04-11 Osaka Gas Co Ltd クッキングヒータ装置
JP2007311283A (ja) * 2006-05-22 2007-11-29 Matsushita Electric Ind Co Ltd 誘導加熱調理器
JP2011138733A (ja) * 2010-01-04 2011-07-14 Mitsubishi Electric Corp 誘導加熱調理器
EP2704521A1 (de) * 2012-09-03 2014-03-05 BSH Bosch und Siemens Hausgeräte GmbH Hausgerätevorrichtung

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN121346983A (zh) * 2025-12-03 2026-01-16 盛吉盛半导体科技(北京)有限公司 一种基于透射与辐射的晶圆测温方法、装置、设备及介质

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Publication number Publication date
EP4334689A1 (en) 2024-03-13
KR20240004475A (ko) 2024-01-11
WO2022234073A1 (en) 2022-11-10
JP2024519730A (ja) 2024-05-21
US20240319011A1 (en) 2024-09-26

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