CN1169268C - 光学半导体器件的制造方法 - Google Patents

光学半导体器件的制造方法 Download PDF

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Publication number
CN1169268C
CN1169268C CNB981200516A CN98120051A CN1169268C CN 1169268 C CN1169268 C CN 1169268C CN B981200516 A CNB981200516 A CN B981200516A CN 98120051 A CN98120051 A CN 98120051A CN 1169268 C CN1169268 C CN 1169268C
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China
Prior art keywords
layer
growth
source material
pulse
iii family
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Expired - Fee Related
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CNB981200516A
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English (en)
Chinese (zh)
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CN1213197A (zh
Inventor
阪田康隆
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Renesas Electronics Corp
Original Assignee
NEC Compound Semiconductor Devices Ltd
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Application filed by NEC Compound Semiconductor Devices Ltd filed Critical NEC Compound Semiconductor Devices Ltd
Publication of CN1213197A publication Critical patent/CN1213197A/zh
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H01S5/227—Buried mesa structure ; Striped active layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/005—Processes
    • H01L33/0062—Processes for devices with an active region comprising only III-V compounds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S2304/00—Special growth methods for semiconductor lasers
    • H01S2304/04—MOCVD or MOVPE
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H01S5/227—Buried mesa structure ; Striped active layer
    • H01S5/2272—Buried mesa structure ; Striped active layer grown by a mask induced selective growth
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H01S5/227—Buried mesa structure ; Striped active layer
    • H01S5/2275—Buried mesa structure ; Striped active layer mesa created by etching
    • H01S5/2277—Buried mesa structure ; Striped active layer mesa created by etching double channel planar buried heterostructure [DCPBH] laser

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Geometry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)
  • Optical Integrated Circuits (AREA)
CNB981200516A 1997-09-30 1998-09-28 光学半导体器件的制造方法 Expired - Fee Related CN1169268C (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP266645/97 1997-09-30
JP9266645A JP3045115B2 (ja) 1997-09-30 1997-09-30 光半導体装置の製造方法
JP266645/1997 1997-09-30

Publications (2)

Publication Number Publication Date
CN1213197A CN1213197A (zh) 1999-04-07
CN1169268C true CN1169268C (zh) 2004-09-29

Family

ID=17433716

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB981200516A Expired - Fee Related CN1169268C (zh) 1997-09-30 1998-09-28 光学半导体器件的制造方法

Country Status (5)

Country Link
US (1) US6036771A (de)
EP (1) EP0905798A3 (de)
JP (1) JP3045115B2 (de)
KR (1) KR100305301B1 (de)
CN (1) CN1169268C (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2269872A1 (en) * 1998-04-23 1999-10-23 Nec Corporation A method of manufacturing a semiconductor optical waveguide array and an array-structured semiconductor optical device
JP3287311B2 (ja) * 1998-08-05 2002-06-04 日本電気株式会社 半導体レーザ装置の製造方法
JP2000260714A (ja) * 1999-03-08 2000-09-22 Nec Corp 有機金属気相成長による成膜方法及びこれを用いた半導体レーザの製造方法
JP3267582B2 (ja) 1999-06-17 2002-03-18 日本電気株式会社 半導体レーザの製造方法
US6654533B1 (en) 2000-06-16 2003-11-25 Metrophotonics Inc. Polarization independent waveguide structure
KR100480803B1 (ko) * 2000-12-21 2005-04-07 주식회사 하이닉스반도체 강유전체 커패시터의 제조방법
JP2003060306A (ja) * 2001-08-13 2003-02-28 Rohm Co Ltd リッジ型半導体レーザ素子
JP2012248812A (ja) * 2011-05-31 2012-12-13 Sumitomo Electric Ind Ltd 半導体光集積素子の製造方法
CN109524423A (zh) * 2018-09-29 2019-03-26 中国科学院半导体研究所 可伪装可形变的智能可见光至近红外探测器及其制备方法
JP6707676B2 (ja) * 2019-01-07 2020-06-10 東芝デバイス＆ストレージ株式会社 半導体装置の製造方法

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0782991B2 (ja) * 1984-07-26 1995-09-06 新技術事業団 化合物半導体単結晶薄膜の成長法
GB2162862B (en) * 1984-07-26 1988-10-19 Japan Res Dev Corp A method of growing a thin film single crystalline semiconductor
JPH0657636B2 (ja) * 1985-05-29 1994-08-03 日本電信電話株式会社 化合物半導体薄膜形成法
JP2757407B2 (ja) * 1988-12-20 1998-05-25 富士通株式会社 化合物半導体の結晶成長方法
JPH03218621A (ja) * 1989-11-30 1991-09-26 Toshiba Corp 薄膜の選択成長方法及び薄膜の選択成長装置
JPH03201425A (ja) * 1989-12-28 1991-09-03 Fujitsu Ltd 半導体装置
JP2815068B2 (ja) * 1990-12-20 1998-10-27 富士通株式会社 気相成長方法及び装置
JP2773849B2 (ja) * 1992-02-12 1998-07-09 シャープ株式会社 気相の成長方法及び光励起気相成長装置
JP3223575B2 (ja) * 1992-06-02 2001-10-29 三菱化学株式会社 化合物半導体とその製造方法
DE69323127T2 (de) * 1992-08-10 1999-07-22 Canon Kk Halbleitervorrichtung und Herstellungsverfahren
JP2546135B2 (ja) * 1993-05-31 1996-10-23 日本電気株式会社 半導体微細形状の形成方法、ＩｎＰ回折格子の製造方法および分布帰還型レーザの製造方法
JPH0714787A (ja) * 1993-06-22 1995-01-17 Mitsubishi Chem Corp Ｉｉ−ｖｉ族化合物半導体の製造方法
DE4421539C2 (de) * 1993-06-22 2001-03-22 Mitsubishi Chem Corp Verfahren zur Herstellung eines Halbleiters aus einer Verbindung der Gruppe II-VI
US5737353A (en) * 1993-11-26 1998-04-07 Nec Corporation Multiquantum-well semiconductor laser
JP3425150B2 (ja) * 1994-02-11 2003-07-07 コーニンクレッカ、フィリップス、エレクトロニクス、エヌ．ヴィ． 位相調整アレイを有する光学装置
GB9425729D0 (en) * 1994-09-14 1995-02-22 British Telecomm Otical device
JPH08245291A (ja) * 1995-03-10 1996-09-24 Sumitomo Electric Ind Ltd Ｉｉｉ−ｖ族化合物半導体結晶の成長方法
JP2900824B2 (ja) * 1995-03-31 1999-06-02 日本電気株式会社 光半導体装置の製造方法
US5847415A (en) * 1995-03-31 1998-12-08 Nec Corporation Light emitting device having current blocking structure
JP2870632B2 (ja) * 1995-07-13 1999-03-17 日本電気株式会社 半導体光集積回路およびその製造方法
JP2982685B2 (ja) * 1996-03-28 1999-11-29 日本電気株式会社 光半導体装置

Also Published As

Publication number Publication date
EP0905798A2 (de) 1999-03-31
KR19990030322A (ko) 1999-04-26
KR100305301B1 (ko) 2001-09-24
CN1213197A (zh) 1999-04-07
EP0905798A3 (de) 2000-03-29
US6036771A (en) 2000-03-14
JP3045115B2 (ja) 2000-05-29
JPH11112102A (ja) 1999-04-23

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