CN116425540A - 压电陶瓷管式超声马达及其制备方法 - Google Patents
压电陶瓷管式超声马达及其制备方法 Download PDFInfo
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Abstract
本发明提供一种压电陶瓷管式超声马达及其制备方法，所述制备方法包括采用注射成型制备压电陶瓷管的步骤，其中，注射原料为混炼后的压电陶瓷粉料和粘结剂，以重量百分比计，所述粘结剂为石蜡50％‑60％、聚丙烯20％‑30％、聚乙烯10％‑20％和硬脂酸5％‑15％的混合物。本发明通过选用合适的粘结剂体系，从而成功地注射成型得到理想的压电陶瓷管，进而进一步制备质量优的压电陶瓷管式超声马达，在驱动电压45V条件下，驱动频率为103‑109KHz，转速为800‑1000r/min，寿命>90小时。
Description
技术领域
本发明涉及压电陶瓷增材制备技术领域，尤其涉及一种压电陶瓷管式超声马达及其制备方法。
背景技术
超声马达又称超声电机(ultrasonic motor，简称USM)是20世纪80年代才诞生的一种全新概念的电机种类。超声电机采用与传统电磁式电机截然不同的全新原理和全新结构形式，不需要磁铁和线圈，而利用压电材料的逆压电效应激发的某种特定模态的超声振动，定子通过摩擦驱动转子运动，从而获得机械输出的一种驱动器。
逆压电效应是在压电材料的相应部位间加上电压，产生一定的电荷分布，材料会发生相应的形变，在此种压电材料上加上某种特定频率的交变正弦信号，材料就会产生随所加电压的变化规律而变化的机械形变。这种机械形变推动周围介质振动，产生疏密相间的机械波，如果其振动频率在超声范围，这种机械波就叫超声波。
弯曲旋转超声马达因其结构简单、控制方便、易于实现微细化，一直是各国学者研究的热点，目前已在照相机、精密微动台等驱动系统中得到应用。其中由压电管与金属帽粘结构成复合定子的压电管式弯曲旋转超声马达因其具有制作容易性和稳定等特点吸引了很多研究者的目光。该压电陶瓷管是一个中空的圆柱形陶瓷管，在其内圆柱表面涂以导电涂层，而外表面为四个面积相等但彼此间绝缘的导电层。陶瓷管需经极化处理，极化后压电陶瓷管两端加金属帽形成复合结构作为定子，以改善定子和转子的摩擦接触，有利于提高马达的转速和输出更大的力矩，也使加工和装配容易。转子固定在穿过陶瓷管的细轴上，调节压在弹簧上的螺栓以改变定子和转子之间的预紧力。整个马达的结构如图1所示。为驱动马达旋转，压电陶瓷管外壁的电极沿圆周分成四等分，内壁接地，按照图2所示接入四路彼此相位差90°的驱动电压信号，锆钛酸铅压电陶瓷管将在垂直于轴线的方向做弯曲复合振动，使陶瓷管端部产生摆头旋转，通过定子和转子之间的接触摩擦力驱动转子旋转。
传统的压电陶瓷管的成型工艺有干压工艺、注射工艺、流延工艺等。其中，陶瓷注射成型(CIM)是一种高效精密加工技术，具有形状自由度高、生产快速、结构组织均匀等优点。采用注射成型工艺制备压电陶瓷管式超声马达其中一个难点就是粘结剂的选用，CN113045313A选用了热固性树脂作为粘结剂，其连续生产性差，在注射成型后，还需要硫化机进行热固化成型，对于生产尺寸精度要求高的毫米级套管并不适用。
发明内容
针对现有技术存在的不足，本发明提供一种压电陶瓷管式超声马达及其制备方法。
本发明提供一种压电陶瓷管式超声马达的制备方法，包括采用注射成型制备压电陶瓷管的步骤，其中，注射原料为混炼后的压电陶瓷粉料和粘结剂，以重量百分比计，所述粘结剂为石蜡50％-60％、聚丙烯20％-30％、聚乙烯10％-20％和硬脂酸5％-15％的混合物。
其中混炼可在双辊混炼机中进行，混炼条件为150-160℃下混炼4-5h。聚乙烯、聚丙烯优选分子量为30000左右。
根据本发明提供的压电陶瓷管式超声马达的制备方法，所述压电陶瓷粉料占所述压电陶瓷粉料和所述粘结剂总体积的45-50％。
粘结剂的配比和压电陶瓷粉料所占的体积比是注射成败的关键。当注射原料中的粘结剂比例较低时，注射时的高粘度会导致产品易产生开裂等重大缺陷。当粘结剂含量较高时，产品易产生不均匀性。本发明经过大量研究，最终找到了上述的最佳固体加载量和合适的粘结剂配比。
根据本发明提供的压电陶瓷管式超声马达的制备方法，所述压电陶瓷粉料的化学通式为aPb(Mn1/3Nb2/3)O3-(0.94-a)Pb(Zr0.5Ti0.5)-0.06Bi(Ni1/2Ti1/2)O3+xwt％Li2CO3，其中0<a≤0.12；0<x≤1。
超声马达的工作频率较高，长时间振动极易产生热量导致产品失效。为保证其使用寿命，压电材料需要具有高的压电性能(D33>300PC/N)，低的介电损耗(<0.80％)，超声马达是基于压电陶瓷逆压电效应而工作，逆压电效应会产生机械损耗。机械损耗是内部能量消耗的一个物理量，因此机械损耗越小越好，则代表着机械品质因素越大越好(Qm>500)。因此，本发明采用的压电陶瓷粉料为申请人自主研发的高频超声硬瓷压电材料，可参见CN114890789A。
具体地，本发明所述压电陶瓷粉料的制备方法包括：按照化学通式配料后进行球磨获得球磨料，将所述球磨料烘干后过20-40目筛网，在650-700℃下保温2-3h得到粉料，将所述粉料二次球磨后烘干再过40-80目筛网，得到所述压电陶瓷粉料。
根据本发明提供的压电陶瓷管式超声马达的制备方法，所述注射成型的压力为70-80MPa，温度为160-170℃。所述注射成型可采用注射机。其中需要根据压电陶瓷粉料的收缩比，制作出合适的模具尺寸，从而注射得到压电陶瓷管生坯。
根据本发明提供的压电陶瓷管式超声马达的制备方法，注射得到压电陶瓷管生坯后进行溶剂脱脂和热脱脂，所述溶剂脱脂为在40-50℃正己烷溶液中浸泡20-24h，所述热脱脂包括从室温升温到200-300℃，保温时间180-240min，再升温到400-450℃，保温时间180-240min，继续升温到550-600℃，保温时间120-180min，全过程的升温速率控制在0.30-0.50℃/min。
溶剂脱脂和热脱脂是注射产品常用的排胶方法。在本发明的体系中，必须搭配使用溶剂脱脂和热脱脂，才能既将粘结剂排净，又保证产品不会产生很多的微裂纹缺陷。其中，在200-300℃，石蜡和硬脂酸开始分解，在400-450℃，聚丙烯和聚乙烯开始分解。保温时间太短不利于胶体排净，太长会增加使用成本。本发明还发现，当升温速率高于0.50℃/min时，易产生微裂纹，因此将全过程的升温速率控制在0.30-0.50℃/min。
根据本发明提供的压电陶瓷管式超声马达的制备方法，所述热脱脂后进行烧结得到压电陶瓷管，烧结的条件为820-850℃保温1.5-2h。
根据本发明提供的压电陶瓷管式超声马达的制备方法，对所述压电陶瓷管进行金属化，分为曲面金属化和内孔金属化；选用银浆黏度分别为800-1000Mpa·S和1200-1500Mpa·S。
进一步地，选用设备喷银机，曲面金属化时，将压电陶瓷管插入一根可旋转的铜棒中，喷嘴距离曲面上表面6-8mm，喷射时间4-6秒，在喷射银浆的同时，铜棒带着陶瓷管完成每2-3秒一周的运动；内孔金属化时，立放压电陶瓷管，喷嘴距离内孔上表面2-3mm，喷射时间2-3秒。将喷银结束后的压电陶瓷管在马弗炉中以每分钟5-10℃的速度升温到630-670℃，并且保温20-40min进行烧银。
本发明研究发现，将银浆黏度分别控制在上述范围内，才能不会因银浆黏度太低而导致银层太薄，极易发生漏瓷，也不会因黏度太高而影响喷射效果。另外，金属化的面积和喷射时间的长短要匹配，要保证银层厚度5-8um。
根据本发明提供的压电陶瓷管式超声马达的制备方法，金属化后进行激光刻蚀，将所述压电陶瓷管的外侧电极均匀的分成四等份，其中激光功率为40％-50％。
将激光刻蚀银层的功率控制在上述范围内，不会因功率太高而损伤瓷体，影响产品的性能，也不会因功率太低而导致银层未能全部去除干净。
在本发明的一些实施例中，将压电陶瓷管插入一根可旋转的铜棒中，将铜棒带动压电陶瓷管设置成间歇式，每秒旋转1.57mm，间隔5-10秒，Q频5000-10000，间隔时间正是激光刻蚀银层的时间，刻蚀完成后激光间歇1秒，待压电陶瓷管旋转到下一待刻蚀位置。
进一步地，激光刻蚀完成后进行极化，再将极化后的压电陶瓷管加上金属帽做成定子，在加上转子和弹簧，做成压电陶瓷管式超声马达成品。
其中，极化步骤包括：将刻蚀后的压电陶瓷管放在硅油中，升温到100-130℃，沿壁厚方向，从内到外，加电压0.9-1.2KV，保持20-40分钟。
本发明还提供一种压电陶瓷管式超声马达，由上述任一所述制备方法制备得到。所述压电陶瓷管式超声马达的陶瓷管外径为2.00±0.02mm，内径为1.40±0.02mm，高度为6.00±0.01mm，内电极为全银电极，外电极均匀划分为四份，电极间隙0.30mm，外电极与上下端面空隙0.30mm。
本发明提供的压电陶瓷管式超声马达在驱动电压45V条件下，驱动频率为103-109KHz，转速为800-1000r/min，寿命>90小时。
本发明提供了一种压电陶瓷管式超声马达及其制备方法，通过选用合适的粘结剂体系，从而成功地注射成型得到理想的压电陶瓷管，进而进一步制备质量优的压电陶瓷管式超声马达。
附图说明
图1为压电陶瓷管式超声马达的结构示意图；
图2为压电陶瓷管式超声马达驱动接线图；
图3为本发明实施例1得到的压电陶瓷管式超声马达的实物图。
具体实施方式
为使本发明的目的、技术方案和优点更加清楚，下面将对本发明中的技术方案进行清楚、完整地描述，显然，所描述的实施例是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
实施例1
本实施例提供一种压电陶瓷管式超声马达，其实物图如图3所示，其中压电陶瓷管的外径为2.00mm，内径为1.40mm，高度为6.00mm，内电极为全银电极，外电极均匀划分为四份，电极间隙0.30mm，外电极与上下端面空隙0.30mm。
其制备方法如下：
步骤一：选择压电材料：压电陶瓷粉料的化学式为0.04Pb(Mn1/3Nb2/3)O3-0.90Pb(Zr0.5Ti0.5)-0.06Bi(Ni1/2Ti1/2)O3+0.3wt％Li2CO3，按照化学式配料后进行球磨获得球磨料，将球磨料烘干后过40目筛网，在700℃下保温2h得到粉料，将粉料二次球磨后在150℃的烘箱中烘干，之后过40目筛网，取筛后的粉体作为混练所使用的压电陶瓷粉料。
步骤二：注射成型工艺：注射成型工艺分为混练、注射成型、溶脱、热脱和烧结。采用石蜡(PW)重量占比55％、聚丙烯(PP)25％、聚乙烯(PE)15％和硬脂酸(SA)5％的混合物作为粘结剂体系。压电陶瓷粉料占压电陶瓷粉料和粘结剂总体积的47％，在160℃下在双辊混炼机中混练4h。混练后的喂料采用注射机进行注射成型，注射压力80MPa，注射温度170℃，根据压电陶瓷粉料的收缩比，开出合适的模具尺寸，注射出压电陶瓷管生坯。然后将压电陶瓷管生坯在40℃正己烷溶液中浸泡24h进行溶剂脱脂。在排胶炉中进行热脱脂，从室温升温到250℃，保温时间240min，再升温到450℃，保温时间240min，继续升温到600℃，保温时间180min，全过程的升温速率控制在0.40℃/min。产品的烧结以4℃/min升温到830℃，保温120min。
步骤三：金属化：压电陶瓷管的金属化分为曲面金属化和内孔金属化。选用银浆黏度分别为800Mpa·S和1200Mpa·S。选用设备喷银机，曲面金属化时，将陶瓷管插入一根可旋转的铜棒中，喷嘴距离曲面上表面7mm，喷射时间4秒，在喷射银浆的同时，铜棒带着陶瓷管完成每2秒一周的运动。内孔金属化时，立放陶瓷管，喷嘴距离内孔上表面2mm，喷射时间2秒。将喷银结束后的陶瓷管在马弗炉中以每分钟5℃的速度升温到650℃，并且保温20min进行烧银。
步骤四：激光刻蚀：为了驱动压电管式马达的旋转，需要将管式外侧电极均匀的分成四等份。将压电管插入一根可旋转的铜棒中，将铜棒带动套管设置成间歇式，每秒旋转1.57mm，间隔5秒，Q频10000，间隔时间正是激光刻蚀银层的时间，刻蚀完成后激光间歇1秒，待套管旋转到下一待刻蚀位置。激光功率40％。
步骤五：极化：将刻蚀后的陶瓷管放在硅油中，升温到120℃，沿壁厚方向，从内到外，加电压0.9KV，保持30分钟，制得极化后的压电陶瓷管。
测试：将实施例1所制备的压电陶瓷管室温下静置24h，在陶瓷管上加入金属帽做成定子，再加上转子和弹簧，做成压电陶瓷管式超声马达成品，结构示意图如图1所示，加入相位差90°的驱动电压信号，进行性能测试。其结果列于表1。
表1
CN113045313A热固化注射成型方式不适合生产毫米级压电套管，本发明在特定的粘结剂配方加持下，其技术具有连续性好，产品精度高的特性，产品连续工作稳定性高，长时间运转，并没有出现驱动频率明显降低的情况。
最后应说明的是：以上实施例仅用以说明本发明的技术方案，而非对其限制；尽管参照前述实施例对本发明进行了详细的说明，本领域的普通技术人员应当理解：其依然可以对前述各实施例所记载的技术方案进行修改，或者对其中部分技术特征进行等同替换；而这些修改或者替换，并不使相应技术方案的本质脱离本发明各实施例技术方案的精神和范围。
Claims (10)
1.一种压电陶瓷管式超声马达的制备方法，其特征在于，包括采用注射成型制备压电陶瓷管的步骤，其中，注射原料为混炼后的压电陶瓷粉料和粘结剂，以重量百分比计，所述粘结剂为石蜡50％-60％、聚丙烯20％-30％、聚乙烯10％-20％和硬脂酸5％-15％的混合物。
2.根据权利要求1所述的压电陶瓷管式超声马达的制备方法，其特征在于，所述压电陶瓷粉料占所述压电陶瓷粉料和所述粘结剂总体积的45-50％。
3.根据权利要求1或2所述的压电陶瓷管式超声马达的制备方法，其特征在于，所述压电陶瓷粉料的化学通式为aPb(Mn1/3Nb2/3)O3-(0.94-a)Pb(Zr0.5Ti0.5)-0.06Bi(Ni1/2Ti1/2)O3+xwt％Li2CO3，其中0<a≤0.12；0<x≤1。
4.根据权利要求3所述的压电陶瓷管式超声马达的制备方法，其特征在于，所述压电陶瓷粉料的制备方法包括：按照化学通式配料后进行球磨获得球磨料，将所述球磨料烘干后过20-40目筛网，在650-700℃下保温2-3h得到粉料，将所述粉料二次球磨后烘干再过40-80目筛网，得到所述压电陶瓷粉料。
5.根据权利要求1或2所述的压电陶瓷管式超声马达的制备方法，其特征在于，所述注射成型的压力为70-80MPa，温度为160-170℃。
6.根据权利要求5所述的压电陶瓷管式超声马达的制备方法，其特征在于，注射得到压电陶瓷管生坯后进行溶剂脱脂和热脱脂，所述溶剂脱脂为在40-50℃正己烷溶液中浸泡20-24h，所述热脱脂包括从室温升温到200-300℃，保温时间180-240min，再升温到400-450℃，保温时间180-240min，继续升温到550-600℃，保温时间120-180min，全过程的升温速率控制在0.30-0.50℃/min。
7.根据权利要求6所述的压电陶瓷管式超声马达的制备方法，其特征在于，所述热脱脂后进行烧结得到压电陶瓷管，烧结的条件为820-850℃保温1.5-2h。
8.根据权利要求7所述的压电陶瓷管式超声马达的制备方法，其特征在于，对所述压电陶瓷管进行金属化，分为曲面金属化和内孔金属化；选用银浆黏度分别为800-1000Mpa·S和1200-1500Mpa·S。
9.根据权利要求8所述的压电陶瓷管式超声马达的制备方法，其特征在于，金属化后进行激光刻蚀，将所述压电陶瓷管的外侧电极均匀的分成四等份，其中激光功率为40％-50％。
10.一种压电陶瓷管式超声马达，其特征在于，由权利要求1-9任一项所述的制备方法制备得到，所述压电陶瓷管式超声马达的陶瓷管外径为2.00±0.02mm，内径为1.40±0.02mm，高度为6.00±0.01mm，内电极为全银电极，外电极均匀划分为四份，电极间隙0.30mm，外电极与上下端面空隙0.30mm；
所述压电陶瓷管式超声马达在驱动电压45V条件下，驱动频率为103-109KHz，转速为800-1000r/min，寿命>90小时。
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