CN116153847B - 一种芯片封装夹持装置 - Google Patents

一种芯片封装夹持装置 Download PDF

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CN116153847B
CN116153847B CN202310395905.2A CN202310395905A CN116153847B CN 116153847 B CN116153847 B CN 116153847B CN 202310395905 A CN202310395905 A CN 202310395905A CN 116153847 B CN116153847 B CN 116153847B
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CN116153847A (zh
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谭爱军
张成爽
刘冰
刘跃祖
尚建国
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Shandong Taixin Electronic Technology Co ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68742Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68721Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge clamping, e.g. clamping ring
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68785Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

本发明公开了一种芯片封装夹持装置,涉及芯片加工制造技术领域,包括底板,底板上设有升降座,升降座连接升降驱动机构,升降座的顶端设有自动对中机构,所述升降座的上方设有夹紧机构;所述自动对中机构包括转动连接于升降座顶端的放置座,放置座的顶端设有两组平移推动组件,每组平移推动组件均包括多个嵌设于放置座顶部的平移推辊,本发明通过设置升降驱动机构和自动对中机构能够实现对芯片的取放以及位置初步对中调整,通过设置夹紧机构能够采用气动夹紧的形式对芯片进行夹持,能够使芯片在封装时保持稳定状态,并且气动夹持具有压力稳定的特征,能够避免对芯片造成损坏,对芯片的封装具有良好的辅助效果。

Description

一种芯片封装夹持装置
技术领域
本发明涉及芯片加工制造技术领域,具体是一种芯片封装夹持装置。
背景技术
集成电路封装是伴随集成电路的发展而前进的。随着宇航、航空、机械、轻工、化工等各个行业的不断发展,整机也向着多功能、小型化方向变化。这样,就要求集成电路的集成度越来越高,功能越来越复杂。相应地要求集成电路封装密度越来越大,引线数越来越多,而体积越来越小,重量越来越轻,更新换代越来越快,封装结构的合理性和科学性将直接影响集成电路的质量。
现有芯片封装设备主要采用固定尺寸的方式对芯片板进行装夹,如果换用不同尺寸的芯片板进行加工,需要对夹具进行更换,甚至要重新采购新的设备,这样不仅成本高且采购周期也较长,严重影响生产效率,因此有待于进行进一步的改进。
发明内容
本发明提供一种芯片封装夹持装置,解决了上述背景技术中所提出的问题。
为实现上述目的,本发明提供如下技术方案:
一种芯片封装夹持装置,包括底板,底板上设有升降座,升降座连接升降驱动机构,升降座的顶端设有自动对中机构,所述升降座的上方设有夹紧机构;
所述自动对中机构包括转动连接于升降座顶端的放置座,放置座的顶端设有两组平移推动组件,每组平移推动组件均包括多个嵌设于放置座顶部的平移推辊,平移推辊与放置座转动连接,平移推辊连接转动驱动机构;
所述转动驱动机构包括设置于放置座内的传动带,传动带的内部两侧均设有传动辊,传动辊与放置座转动连接,传动带的顶面与平移推辊的底面相贴合,所述放置座内固定设有传动电机,传动电机的输出轴与传动辊同轴固定连接;
所述夹紧机构包括两个固定侧座,固定侧座与底板之间固定连接有支撑柱,两个固定侧座之间设有两个夹持杆,夹持杆与固定侧座之间设有夹持驱动机构。
作为本发明的一种优选技术方案,所述夹持驱动机构包括贯穿于两个固定侧座的连通管,每个固定侧座内均开设有侧槽,每个侧槽内均滑动连接有两个移动块,两个移动块分别与两个夹持杆固定连接,侧槽内的两端均固定设有伸缩杆,伸缩杆的伸缩端与移动块固定连接,伸缩杆与连通管之间固定连接有连通支管,所述固定侧座上固定设有与连通管相连接的气动控制组件。
作为本发明的一种优选技术方案,所述连通管还连接有稳压组件,所述稳压组件包括固定设置于固定侧座外部的固定管,固定管的外部套设有活动套,活动套与固定管滑动连接,活动套与固定侧座之间固定连接有弹簧,弹簧套设于固定管的外部,所述固定侧座的外部固定连接有固定板,固定板上固定设有感应块,感应块位于活动套的端部一侧。
作为本发明的一种优选技术方案,所述升降驱动机构包括固定设置于升降座底部两端的两个升降支脚,两个升降支脚之间固定连接有升降板,所述底板上固定设有驱动电机,所述驱动电机的输出轴同轴固定连接有驱动螺杆,驱动螺杆贯穿升降支脚并与之螺纹连接。
作为本发明的一种优选技术方案,所述底板的顶端固定连接有导向架,导向架竖向贯穿升降支脚,升降支脚与导向架滑动连接,所述驱动螺杆的顶端固定设有限位端块。
作为本发明的一种优选技术方案,两个所述夹持杆的相邻侧均固定设有保护垫,保护垫为硅胶垫。
作为本发明的一种优选技术方案,所述气动控制组件包括固定筒,固定筒内固定设有微型气泵,微型气泵的输入端与外界相连通,微型气泵的输出端与连通管相连接。
作为本发明的一种优选技术方案,所述固定管的外部固定连接密封圈,密封圈与活动套滑动连接。
本发明具有以下有益之处:本发明通过设置升降驱动机构和自动对中机构能够实现对芯片的取放以及位置初步对中调整,通过设置夹紧机构能够采用气动夹紧的形式对芯片进行夹持,能够使芯片在封装时保持稳定状态,并且气动夹持具有压力稳定的特征,能够避免对芯片造成损坏,对芯片的封装具有良好的辅助效果。
附图说明
图1为芯片封装夹持装置的立体结构示意图。
图2为芯片封装夹持装置中稳压组件的立体结构示意图。
图3为芯片封装夹持装置中活动套内部的结构示意图。
图4为芯片封装夹持装置中转动驱动机构的结构示意图。
图5为芯片封装夹持装置中固定侧座内部的结构示意图。
图中:1、底板;2、升降座;3、升降支脚;4、导向架;5、驱动电机;6、驱动螺杆;7、升降板;8、放置座;9、平移推辊;10、固定侧座;11、支撑柱;12、侧槽;13、夹持杆;14、连通管;15、气动控制组件;16、稳压组件;17、固定板;18、感应块;19、固定管;20、弹簧;21、活动套;22、密封圈;23、传动带;24、传动辊;25、传动电机;26、连通支管;27、伸缩杆;28、移动块。
具体实施方式
以下结合附图对本发明的优选实施例进行说明,应当理解,此处所描述的优选实施例仅用于说明和解释本发明,并不用于限定本发明。
需要说明的是,术语“中心”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。
请参阅图1-5,一种芯片封装夹持装置,包括底板1,底板1上设有升降座2,升降座2连接升降驱动机构,升降座2的顶端设有自动对中机构,所述升降座2的上方设有夹紧机构;
所述自动对中机构包括转动连接于升降座2顶端的放置座8,放置座8的顶端设有两组平移推动组件,每组平移推动组件均包括多个嵌设于放置座8顶部的平移推辊9,平移推辊9与放置座8转动连接,平移推辊9连接转动驱动机构;
所述转动驱动机构包括设置于放置座8内的传动带23,传动带23的内部两侧均设有传动辊24,传动辊24与放置座8转动连接,传动带23的顶面与平移推辊9的底面相贴合,所述放置座8内固定设有传动电机25,传动电机25的输出轴与传动辊24同轴固定连接;
所述夹紧机构包括两个固定侧座10,固定侧座10与底板1之间固定连接有支撑柱11,两个固定侧座10之间设有两个夹持杆13,夹持杆13与固定侧座10之间设有夹持驱动机构。
进一步的,所述夹持驱动机构包括贯穿于两个固定侧座10的连通管14,每个固定侧座10内均开设有侧槽12,每个侧槽12内均滑动连接有两个移动块28,两个移动块28分别与两个夹持杆13固定连接,侧槽12内的两端均固定设有伸缩杆27,伸缩杆27的伸缩端与移动块28固定连接,伸缩杆27与连通管14之间固定连接有连通支管26,所述固定侧座10上固定设有与连通管14相连接的气动控制组件15。
进一步的,所述连通管14还连接有稳压组件16,所述稳压组件16包括固定设置于固定侧座10外部的固定管19,固定管19的外部套设有活动套21,活动套21与固定管19滑动连接,活动套21与固定侧座10之间固定连接有弹簧20,弹簧20套设于固定管19的外部,所述固定侧座10的外部固定连接有固定板17,固定板17上固定设有感应块18,感应块18位于活动套21的端部一侧。
所述固定管19的外部固定连接密封圈22,密封圈22与活动套21滑动连接。
进一步的,所述升降驱动机构包括固定设置于升降座2底部两端的两个升降支脚3,两个升降支脚3之间固定连接有升降板7,所述底板1上固定设有驱动电机5,所述驱动电机5的输出轴同轴固定连接有驱动螺杆6,驱动螺杆6贯穿升降支脚3并与之螺纹连接。
进一步的,所述底板1的顶端固定连接有导向架4,导向架4竖向贯穿升降支脚3,升降支脚3与导向架4滑动连接,所述驱动螺杆6的顶端固定设有限位端块。
进一步的,两个所述夹持杆13的相邻侧均固定设有保护垫,保护垫为硅胶垫。
所述气动控制组件15包括固定筒,固定筒内固定设有微型气泵,微型气泵的输入端与外界相连通,微型气泵的输出端与连通管14相连接。
本发明在实施过程中,首先将芯片置于放置座8上,然后控制传动电机25启动,两个传动电机25分别带动两个传动带23朝着相靠近的方向运转,从而带动芯片移动,直至芯片位于两组平移推动组件之间,然后控制驱动电机5启动,驱动电机5带动驱动螺杆6转动,从而通过升降板7和升降支脚3带动升降座2和放置座8上移,直至传动辊24的顶面与夹持杆13的底面相接触,然后控制固定筒内的微型气泵启动,向连通管14内输入空气实现加压,在气压逐渐增强的过程中,伸缩杆27伸长,带动移动块28和加持杆移动,两个加持杆相互靠近移动,直至对芯片进行夹持,随着气压的逐渐增大,空气顶动活动套21移动,此时弹簧20被拉伸,直至活动套21与感应块18接触,然后微型气泵停止工作,连通管14内的气压保持稳定。
通过调整弹簧20的弹性系数能够对夹持杆13的夹持力进行调整。
在解除夹持状态时,可控制微型气泵反向输出,将连通管14内的空气抽离,并且使伸缩杆27带动夹持杆13复位。
最后应说明的是:以上所述仅为本发明的优选实施例而已,并不用于限制本发明,尽管参照前述实施例对本发明进行了详细的说明,对于本领域的技术人员来说,其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换。凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。

Claims (6)

1.一种芯片封装夹持装置,包括底板(1),其特征在于,底板(1)上设有升降座(2),升降座(2)连接升降驱动机构,升降座(2)的顶端设有自动对中机构,所述升降座(2)的上方设有夹紧机构;
所述自动对中机构包括转动连接于升降座(2)顶端的放置座(8),放置座(8)的顶端设有两组平移推动组件,每组平移推动组件均包括多个嵌设于放置座(8)顶部的平移推辊(9),平移推辊(9)与放置座(8)转动连接,平移推辊(9)连接转动驱动机构;
所述转动驱动机构包括设置于放置座(8)内的传动带(23),传动带(23)的内部两侧均设有传动辊(24),传动辊(24)与放置座(8)转动连接,传动带(23)的顶面与平移推辊(9)的底面相贴合,所述放置座(8)内固定设有传动电机(25),传动电机(25)的输出轴与传动辊(24)同轴固定连接;
所述夹紧机构包括两个固定侧座(10),固定侧座(10)与底板(1)之间固定连接有支撑柱(11),两个固定侧座(10)之间设有两个夹持杆(13),夹持杆(13)与固定侧座(10)之间设有夹持驱动机构;
所述夹持驱动机构包括贯穿于两个固定侧座(10)的连通管(14),每个固定侧座(10)内均开设有侧槽(12),每个侧槽(12)内均滑动连接有两个移动块(28),两个移动块(28)分别与两个夹持杆(13)固定连接,侧槽(12)内的两端均固定设有伸缩杆(27),伸缩杆(27)的伸缩端与移动块(28)固定连接,伸缩杆(27)与连通管(14)之间固定连接有连通支管(26),所述固定侧座(10)上固定设有与连通管(14)相连接的气动控制组件(15);
所述连通管(14)还连接有稳压组件(16),所述稳压组件(16)包括固定设置于固定侧座(10)外部的固定管(19),固定管(19)的外部套设有活动套(21),活动套(21)与固定管(19)滑动连接,活动套(21)与固定侧座(10)之间固定连接有弹簧(20),弹簧(20)套设于固定管(19)的外部,所述固定侧座(10)的外部固定连接有固定板(17),固定板(17)上固定设有感应块(18),感应块(18)位于活动套(21)的端部一侧。
2.根据权利要求1所述的芯片封装夹持装置,其特征在于,所述升降驱动机构包括固定设置于升降座(2)底部两端的两个升降支脚(3),两个升降支脚(3)之间固定连接有升降板(7),所述底板(1)上固定设有驱动电机(5),所述驱动电机(5)的输出轴同轴固定连接有驱动螺杆(6),驱动螺杆(6)贯穿升降支脚(3)并与之螺纹连接。
3.根据权利要求2所述的芯片封装夹持装置,其特征在于,所述底板(1)的顶端固定连接有导向架(4),导向架(4)竖向贯穿升降支脚(3),升降支脚(3)与导向架(4)滑动连接,所述驱动螺杆(6)的顶端固定设有限位端块。
4.根据权利要求1所述的芯片封装夹持装置,其特征在于,两个所述夹持杆(13)的相邻侧均固定设有保护垫,保护垫为硅胶垫。
5.根据权利要求1所述的芯片封装夹持装置,其特征在于,所述气动控制组件(15)包括固定筒,固定筒内固定设有微型气泵,微型气泵的输入端与外界相连通,微型气泵的输出端与连通管(14)相连接。
6.根据权利要求1所述的芯片封装夹持装置,其特征在于,所述固定管(19)的外部固定连接密封圈(22),密封圈(22)与活动套(21)滑动连接。
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US4096953A (en) * 1977-03-21 1978-06-27 Cincinnati Milacron Inc. Mechanism to transfer workpieces between locations
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