CN116057293A - 加压流体供给系统 - Google Patents

加压流体供给系统 Download PDF

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Publication number
CN116057293A
CN116057293A CN202180058352.0A CN202180058352A CN116057293A CN 116057293 A CN116057293 A CN 116057293A CN 202180058352 A CN202180058352 A CN 202180058352A CN 116057293 A CN116057293 A CN 116057293A
Authority
CN
China
Prior art keywords
pressurized fluid
fluid supply
flow rate
solenoid valve
support member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
CN202180058352.0A
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English (en)
Chinese (zh)
Inventor
中村牧人
室田真弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fanuc Corp
Original Assignee
Fanuc Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fanuc Corp filed Critical Fanuc Corp
Publication of CN116057293A publication Critical patent/CN116057293A/zh
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/021—Valves for interconnecting the fluid chambers of an actuator
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0629—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion
    • F16C32/064—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion the liquid being supplied under pressure
    • F16C32/0644—Details of devices to control the supply of liquids to the bearings
    • F16C32/0648—Details of devices to control the supply of liquids to the bearings by sensors or pressure-responsive control devices in or near the bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B19/00—Testing; Calibrating; Fault detection or monitoring; Simulation or modelling of fluid-pressure systems or apparatus not otherwise provided for
    • F15B19/005—Fault detection or monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/40—Flow control
    • F15B2211/405—Flow control characterised by the type of flow control means or valve
    • F15B2211/40523—Flow control characterised by the type of flow control means or valve with flow dividers
    • F15B2211/4053—Flow control characterised by the type of flow control means or valve with flow dividers using valves

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
CN202180058352.0A 2020-07-30 2021-07-27 加压流体供给系统 Withdrawn CN116057293A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020129028 2020-07-30
JP2020-129028 2020-07-30
PCT/JP2021/027621 WO2022025017A1 (ja) 2020-07-30 2021-07-27 加圧流体供給システム

Publications (1)

Publication Number Publication Date
CN116057293A true CN116057293A (zh) 2023-05-02

Family

ID=80036475

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180058352.0A Withdrawn CN116057293A (zh) 2020-07-30 2021-07-27 加压流体供给系统

Country Status (5)

Country Link
US (1) US20230272808A1 (https=)
JP (1) JPWO2022025017A1 (https=)
CN (1) CN116057293A (https=)
DE (1) DE112021004087T5 (https=)
WO (1) WO2022025017A1 (https=)

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57184318U (https=) * 1981-05-18 1982-11-22
JPS6056823U (ja) * 1983-09-27 1985-04-20 日産自動車株式会社 静圧気体軸受の気体供給制御装置
US5865205A (en) * 1997-04-17 1999-02-02 Applied Materials, Inc. Dynamic gas flow controller
US6575164B1 (en) * 1998-10-15 2003-06-10 Ntc Technology, Inc. Reliability-enhanced apparatus operation for re-breathing and methods of effecting same
JP2000227118A (ja) * 1999-02-08 2000-08-15 Ntn Corp 気体軸受を用いた駆動装置の制御システム
JP4086057B2 (ja) * 2004-06-21 2008-05-14 日立金属株式会社 質量流量制御装置及びこの検定方法
CN101563663B (zh) * 2006-12-05 2011-09-21 株式会社堀场Stec 流量控制装置的检定方法
KR101028213B1 (ko) * 2007-12-27 2011-04-11 가부시키가이샤 호리바 에스텍 유량 비율 제어 장치
JP2010106927A (ja) * 2008-10-29 2010-05-13 Ntn Corp 静圧軸受ユニット
JP2010169657A (ja) * 2008-12-25 2010-08-05 Horiba Stec Co Ltd 質量流量計及びマスフローコントローラ
JP5562712B2 (ja) * 2010-04-30 2014-07-30 東京エレクトロン株式会社 半導体製造装置用のガス供給装置
WO2012153454A1 (ja) * 2011-05-10 2012-11-15 株式会社フジキン 流量モニタ付圧力式流量制御装置と、これを用いた流体供給系の異常検出方法並びにモニタ流量異常時の処置方法
US9846074B2 (en) * 2012-01-20 2017-12-19 Mks Instruments, Inc. System for and method of monitoring flow through mass flow controllers in real time
JP5665794B2 (ja) * 2012-04-27 2015-02-04 株式会社フジキン 半導体製造装置のガス分流供給装置
US8954258B2 (en) * 2012-10-01 2015-02-10 Dexen Industries, Inc. Electronically operated pressure reducing regulator
US9454158B2 (en) * 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
KR102208101B1 (ko) * 2016-10-14 2021-01-27 가부시키가이샤 후지킨 유체 제어 장치
JP6804294B2 (ja) 2016-12-28 2020-12-23 芝浦機械株式会社 空気静圧軸受装置
US20200042021A1 (en) * 2017-02-27 2020-02-06 Bhushan Somani Systems And Methods For Calibrating And Tuning A Mass Flow Controller
KR102250967B1 (ko) * 2017-03-28 2021-05-12 가부시키가이샤 후지킨 압력식 유량 제어 장치 및 유량 제어 방법
JP7068062B2 (ja) * 2018-06-18 2022-05-16 株式会社堀場製作所 流体制御装置、及び、流量比率制御装置
JP2020021176A (ja) * 2018-07-30 2020-02-06 株式会社堀場エステック 流量制御装置

Also Published As

Publication number Publication date
WO2022025017A1 (ja) 2022-02-03
JPWO2022025017A1 (https=) 2022-02-03
US20230272808A1 (en) 2023-08-31
DE112021004087T5 (de) 2023-06-15

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