JPWO2022025017A1 - - Google Patents
Info
- Publication number
- JPWO2022025017A1 JPWO2022025017A1 JP2022539460A JP2022539460A JPWO2022025017A1 JP WO2022025017 A1 JPWO2022025017 A1 JP WO2022025017A1 JP 2022539460 A JP2022539460 A JP 2022539460A JP 2022539460 A JP2022539460 A JP 2022539460A JP WO2022025017 A1 JPWO2022025017 A1 JP WO2022025017A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/021—Valves for interconnecting the fluid chambers of an actuator
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0629—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion
- F16C32/064—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion the liquid being supplied under pressure
- F16C32/0644—Details of devices to control the supply of liquids to the bearings
- F16C32/0648—Details of devices to control the supply of liquids to the bearings by sensors or pressure-responsive control devices in or near the bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B19/00—Testing; Calibrating; Fault detection or monitoring; Simulation or modelling of fluid-pressure systems or apparatus not otherwise provided for
- F15B19/005—Fault detection or monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/40—Flow control
- F15B2211/405—Flow control characterised by the type of flow control means or valve
- F15B2211/40523—Flow control characterised by the type of flow control means or valve with flow dividers
- F15B2211/4053—Flow control characterised by the type of flow control means or valve with flow dividers using valves
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020129028 | 2020-07-30 | ||
| PCT/JP2021/027621 WO2022025017A1 (ja) | 2020-07-30 | 2021-07-27 | 加圧流体供給システム |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2022025017A1 true JPWO2022025017A1 (https=) | 2022-02-03 |
Family
ID=80036475
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022539460A Withdrawn JPWO2022025017A1 (https=) | 2020-07-30 | 2021-07-27 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20230272808A1 (https=) |
| JP (1) | JPWO2022025017A1 (https=) |
| CN (1) | CN116057293A (https=) |
| DE (1) | DE112021004087T5 (https=) |
| WO (1) | WO2022025017A1 (https=) |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57184318U (https=) * | 1981-05-18 | 1982-11-22 | ||
| JPS6056823U (ja) * | 1983-09-27 | 1985-04-20 | 日産自動車株式会社 | 静圧気体軸受の気体供給制御装置 |
| US5865205A (en) * | 1997-04-17 | 1999-02-02 | Applied Materials, Inc. | Dynamic gas flow controller |
| US6575164B1 (en) * | 1998-10-15 | 2003-06-10 | Ntc Technology, Inc. | Reliability-enhanced apparatus operation for re-breathing and methods of effecting same |
| JP2000227118A (ja) * | 1999-02-08 | 2000-08-15 | Ntn Corp | 気体軸受を用いた駆動装置の制御システム |
| JP4086057B2 (ja) * | 2004-06-21 | 2008-05-14 | 日立金属株式会社 | 質量流量制御装置及びこの検定方法 |
| CN101563663B (zh) * | 2006-12-05 | 2011-09-21 | 株式会社堀场Stec | 流量控制装置的检定方法 |
| KR101028213B1 (ko) * | 2007-12-27 | 2011-04-11 | 가부시키가이샤 호리바 에스텍 | 유량 비율 제어 장치 |
| JP2010106927A (ja) * | 2008-10-29 | 2010-05-13 | Ntn Corp | 静圧軸受ユニット |
| JP2010169657A (ja) * | 2008-12-25 | 2010-08-05 | Horiba Stec Co Ltd | 質量流量計及びマスフローコントローラ |
| JP5562712B2 (ja) * | 2010-04-30 | 2014-07-30 | 東京エレクトロン株式会社 | 半導体製造装置用のガス供給装置 |
| WO2012153454A1 (ja) * | 2011-05-10 | 2012-11-15 | 株式会社フジキン | 流量モニタ付圧力式流量制御装置と、これを用いた流体供給系の異常検出方法並びにモニタ流量異常時の処置方法 |
| US9846074B2 (en) * | 2012-01-20 | 2017-12-19 | Mks Instruments, Inc. | System for and method of monitoring flow through mass flow controllers in real time |
| JP5665794B2 (ja) * | 2012-04-27 | 2015-02-04 | 株式会社フジキン | 半導体製造装置のガス分流供給装置 |
| US8954258B2 (en) * | 2012-10-01 | 2015-02-10 | Dexen Industries, Inc. | Electronically operated pressure reducing regulator |
| US9454158B2 (en) * | 2013-03-15 | 2016-09-27 | Bhushan Somani | Real time diagnostics for flow controller systems and methods |
| KR102208101B1 (ko) * | 2016-10-14 | 2021-01-27 | 가부시키가이샤 후지킨 | 유체 제어 장치 |
| JP6804294B2 (ja) | 2016-12-28 | 2020-12-23 | 芝浦機械株式会社 | 空気静圧軸受装置 |
| US20200042021A1 (en) * | 2017-02-27 | 2020-02-06 | Bhushan Somani | Systems And Methods For Calibrating And Tuning A Mass Flow Controller |
| KR102250967B1 (ko) * | 2017-03-28 | 2021-05-12 | 가부시키가이샤 후지킨 | 압력식 유량 제어 장치 및 유량 제어 방법 |
| JP7068062B2 (ja) * | 2018-06-18 | 2022-05-16 | 株式会社堀場製作所 | 流体制御装置、及び、流量比率制御装置 |
| JP2020021176A (ja) * | 2018-07-30 | 2020-02-06 | 株式会社堀場エステック | 流量制御装置 |
-
2021
- 2021-07-27 JP JP2022539460A patent/JPWO2022025017A1/ja not_active Withdrawn
- 2021-07-27 DE DE112021004087.1T patent/DE112021004087T5/de not_active Withdrawn
- 2021-07-27 US US18/018,246 patent/US20230272808A1/en not_active Abandoned
- 2021-07-27 WO PCT/JP2021/027621 patent/WO2022025017A1/ja not_active Ceased
- 2021-07-27 CN CN202180058352.0A patent/CN116057293A/zh not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| WO2022025017A1 (ja) | 2022-02-03 |
| CN116057293A (zh) | 2023-05-02 |
| US20230272808A1 (en) | 2023-08-31 |
| DE112021004087T5 (de) | 2023-06-15 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20230207 |
|
| A761 | Written withdrawal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20231115 |