CN115584490A - 用于膜轮廓调节的喷头帘式气体方法和系统 - Google Patents

用于膜轮廓调节的喷头帘式气体方法和系统 Download PDF

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CN115584490A
CN115584490A CN202211279875.0A CN202211279875A CN115584490A CN 115584490 A CN115584490 A CN 115584490A CN 202211279875 A CN202211279875 A CN 202211279875A CN 115584490 A CN115584490 A CN 115584490A
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gas
curtain gas
curtain
chamber
substrate
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伊时塔克·卡里姆
阿德里安·拉瓦伊
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Lam Research Corp
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Lam Research Corp
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523—Pulsed gas flow or change of composition over time
    • C23C16/45525—Atomic layer deposition [ALD]
    • H10P14/6339—
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
CN202211279875.0A 2016-06-17 2017-06-19 用于膜轮廓调节的喷头帘式气体方法和系统 Pending CN115584490A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15/186,275 US9738977B1 (en) 2016-06-17 2016-06-17 Showerhead curtain gas method and system for film profile modulation
US15/186,275 2016-06-17
CN201710462095.2A CN107523804A (zh) 2016-06-17 2017-06-19 用于膜轮廓调节的喷头帘式气体方法和系统

Related Parent Applications (1)

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CN201710462095.2A Division CN107523804A (zh) 2016-06-17 2017-06-19 用于膜轮廓调节的喷头帘式气体方法和系统

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