CN1153981C - 形成在半导体基片上的磁传感器 - Google Patents
形成在半导体基片上的磁传感器 Download PDFInfo
- Publication number
- CN1153981C CN1153981C CNB001184946A CN00118494A CN1153981C CN 1153981 C CN1153981 C CN 1153981C CN B001184946 A CNB001184946 A CN B001184946A CN 00118494 A CN00118494 A CN 00118494A CN 1153981 C CN1153981 C CN 1153981C
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- China
- Prior art keywords
- magnetic
- plane
- magnetic core
- sensor
- field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 230000005291 magnetic effect Effects 0.000 title claims abstract description 97
- 239000000758 substrate Substances 0.000 title claims abstract description 15
- 239000004065 semiconductor Substances 0.000 title claims abstract description 5
- 238000004804 winding Methods 0.000 claims abstract 2
- 238000012360 testing method Methods 0.000 claims description 22
- 238000005516 engineering process Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 2
- 230000005294 ferromagnetic effect Effects 0.000 abstract description 8
- 238000001514 detection method Methods 0.000 abstract description 4
- 230000005284 excitation Effects 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 2
- 101150081099 OGA gene Proteins 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 4
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- 229910052710 silicon Inorganic materials 0.000 description 3
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
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- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
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- 230000014509 gene expression Effects 0.000 description 1
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- 238000009434 installation Methods 0.000 description 1
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- 230000000306 recurrent effect Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
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- 230000007704 transition Effects 0.000 description 1
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Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/04—Measuring direction or magnitude of magnetic fields or magnetic flux using the flux-gate principle
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Measuring Magnetic Variables (AREA)
- Measurement And Recording Of Electrical Phenomena And Electrical Characteristics Of The Living Body (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP99109504.3 | 1999-05-12 | ||
EP99109504 | 1999-05-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1274853A CN1274853A (zh) | 2000-11-29 |
CN1153981C true CN1153981C (zh) | 2004-06-16 |
Family
ID=8238164
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB001184946A Expired - Fee Related CN1153981C (zh) | 1999-05-12 | 2000-05-10 | 形成在半导体基片上的磁传感器 |
Country Status (4)
Country | Link |
---|---|
US (1) | US6404192B1 (ja) |
JP (1) | JP2001013231A (ja) |
CN (1) | CN1153981C (ja) |
DE (1) | DE69925573T2 (ja) |
Families Citing this family (50)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10057773B4 (de) * | 2000-11-22 | 2021-05-27 | Werner Turck Gmbh & Co. Kg | Näherungsschalter |
JP4006674B2 (ja) | 2001-05-22 | 2007-11-14 | 日立金属株式会社 | 方位計 |
EP1260825A1 (de) * | 2001-05-25 | 2002-11-27 | Sentron Ag | Magnetfeldsensor |
EP1267427A1 (fr) * | 2001-06-12 | 2002-12-18 | Asulab S.A. | Procédé de fabrication en grand nombre d'une multiplicité de capteurs magnétiques |
SE0102475D0 (sv) * | 2001-07-10 | 2001-07-10 | Totalfoersvarets Forskningsins | Method of exploiting nonlinear dynamics in a fluxgate magnetometer and a low-power fluxgate magnetometer |
US7259556B2 (en) * | 2002-08-01 | 2007-08-21 | Melexis Technologies Sa | Magnetic field sensor and method for operating the magnetic field sensor |
DE10318350C5 (de) * | 2003-04-23 | 2010-08-19 | Werner Turck Gmbh & Co. Kg | Induktiver Näherungsschalter |
JP2004325344A (ja) * | 2003-04-25 | 2004-11-18 | Hirose Cherry Precision Co Ltd | 制御素子と一体化した感磁素子 |
JP4557134B2 (ja) | 2004-03-12 | 2010-10-06 | ヤマハ株式会社 | 磁気センサの製造方法、同磁気センサの製造方法に使用されるマグネットアレイ及び同マグネットアレイの製造方法 |
JP4023476B2 (ja) | 2004-07-14 | 2007-12-19 | 日立金属株式会社 | スピンバルブ型巨大磁気抵抗効果素子を持った方位計 |
KR100579483B1 (ko) * | 2004-08-09 | 2006-05-15 | 삼성전기주식회사 | 자기장 왜곡을 자동 보정하는 지자기 센서 및 그 방법 |
KR100594975B1 (ko) | 2005-02-03 | 2006-06-30 | 삼성전자주식회사 | 지자기 센서의 코일 제조 방법 |
JP3987941B2 (ja) * | 2005-03-14 | 2007-10-10 | 国立大学法人 岡山大学 | 磁気的インピーダンス計測装置 |
CA2617380A1 (en) * | 2005-08-04 | 2007-02-08 | Sascha Krueger | System and method for magnetic tracking of a sensor for interventional device localization |
JP4856915B2 (ja) * | 2005-09-12 | 2012-01-18 | オンセミコンダクター・トレーディング・リミテッド | 磁気センサの励磁コイル駆動回路 |
TWI390229B (zh) * | 2006-03-31 | 2013-03-21 | Citizen Electronics | 磁性感測器元件及磁性感測器 |
SG141274A1 (en) * | 2006-09-15 | 2008-04-28 | Nanyang Polytechnic | Packages of apparatus for non-invasive detection of pulse rate and blood flow anomalies |
US7530177B1 (en) | 2007-11-08 | 2009-05-12 | Mitutoyo Corporation | Magnetic caliper with reference scale on edge |
JP5172287B2 (ja) * | 2007-11-19 | 2013-03-27 | 株式会社東芝 | 集積回路装置 |
ATE526591T1 (de) * | 2008-02-26 | 2011-10-15 | Univ Wuerzburg J Maximilians | Sensor für elektromagnetische grössen und verfahren zur messung elektromagnetischer grössen |
FR2928006B1 (fr) * | 2008-02-26 | 2011-03-04 | Univ Claude Bernard Lyon | Procede de fabrication d'un capteur de champ magnetique et capteur de champ magnetique obtenu |
DE102008042800A1 (de) * | 2008-10-13 | 2010-04-15 | Robert Bosch Gmbh | Vorrichtung zur Messung von Richtung und/oder Stärke eines Magnetfeldes |
EP2194391B8 (en) * | 2008-12-03 | 2012-05-09 | STMicroelectronics Srl | Broad range magnetic sensor and manufacturing process thereof |
FR2942880A1 (fr) * | 2009-03-04 | 2010-09-10 | Commissariat Energie Atomique | Capteurs de courant et procede de fabrication de ces capteurs. |
US8339132B2 (en) | 2009-03-26 | 2012-12-25 | Aichi Steel Corporation | Magnetic detection device |
DE102009028815A1 (de) | 2009-08-21 | 2011-02-24 | Robert Bosch Gmbh | Magnetfeldsensor und Verfahren zur Herstellung eines Magnetfeldsensors |
US8633688B2 (en) * | 2009-11-30 | 2014-01-21 | Stmicroelectronics S.R.L. | Integrated magnetic sensor for detecting horizontal magnetic fields and manufacturing process thereof |
DE102009047624A1 (de) * | 2009-12-08 | 2011-06-09 | Robert Bosch Gmbh | Magnetfeldsensor |
IT1397983B1 (it) * | 2010-02-05 | 2013-02-04 | St Microelectronics Srl | Sensore magnetico integrato di rilevamento di campi magnetici verticali e relativo procedimento di fabbricazione |
JP5625723B2 (ja) * | 2010-10-15 | 2014-11-19 | ソニー株式会社 | 電子機器、給電方法および給電システム |
KR101127478B1 (ko) | 2010-12-21 | 2012-03-22 | 한국과학기술원 | 관통 실리콘 비아를 이용한 전류 측정 소자, 이의 제조 방법 및 이를 포함하는 전류 측정 회로 |
JP5865813B2 (ja) * | 2011-10-20 | 2016-02-17 | 京セラドキュメントソリューションズ株式会社 | 差動トランス式磁気センサー |
US9427172B2 (en) * | 2011-12-30 | 2016-08-30 | Mediguide Ltd. | Roll detection and six degrees of freedom sensor assembly |
US9000760B2 (en) | 2012-02-27 | 2015-04-07 | Everspin Technologies, Inc. | Apparatus and method for resetting a Z-axis sensor flux guide |
ITTO20120290A1 (it) | 2012-04-02 | 2013-10-03 | St Microelectronics Srl | Sensore inerziale di tipo magnetico, e metodo per operare il sensore inerziale |
DE102012209232A1 (de) * | 2012-05-31 | 2013-12-05 | Robert Bosch Gmbh | Magnetfeldsensor |
CN102928793B (zh) * | 2012-11-19 | 2015-03-25 | 中国科学院上海微系统与信息技术研究所 | 微机械磁场传感器及其应用 |
US9209385B2 (en) | 2013-02-04 | 2015-12-08 | Stmicroelectronics S.R.L. | Magnetic sensor integrated in a chip for detecting magnetic fields perpendicular to the chip and manufacturing process thereof |
KR101558059B1 (ko) * | 2013-12-09 | 2015-10-06 | 삼성전기주식회사 | 직교형 플럭스게이트 센서 |
KR20150066831A (ko) * | 2013-12-09 | 2015-06-17 | 삼성전기주식회사 | 직교형 플럭스게이트 센서 |
EP3141920B1 (en) * | 2014-05-09 | 2021-04-14 | Aichi Steel Corporation | Magnetic detection device and method for producing same |
JP6398830B2 (ja) * | 2015-03-26 | 2018-10-03 | 愛知製鋼株式会社 | 磁気インピーダンスセンサ |
US10280070B2 (en) | 2015-09-30 | 2019-05-07 | Stmicroelectronics S.R.L. | Magnetic inertial sensor energy harvesting and scavenging methods, circuits and systems |
US10869612B2 (en) * | 2016-01-03 | 2020-12-22 | Boston Scientific Scimed Inc. | Transducer with magnetic nanowire array |
EP3467528B1 (en) | 2017-10-06 | 2020-05-20 | Melexis Technologies NV | Magnetic sensor sensitivity matching calibration |
US20210190893A1 (en) | 2017-10-06 | 2021-06-24 | Melexis Technologies Nv | Magnetic sensor sensitivity matching calibration |
EP3477322B1 (en) | 2017-10-27 | 2021-06-16 | Melexis Technologies SA | Magnetic sensor with integrated solenoid |
US10868479B2 (en) | 2018-10-04 | 2020-12-15 | Stmicroelectronics S.R.L. | Inverse electrowetting and magnetic energy harvesting and scavenging methods, circuits and systems |
AT522600B1 (de) * | 2019-04-15 | 2023-03-15 | Braunschmid Dipl Ing Msc Franz | Flachspule für drahtlose Energieübertragung |
CN114487941B (zh) * | 2022-04-06 | 2022-07-12 | 南方电网数字电网研究院有限公司 | 磁传感器、磁场测量方法及磁传感器的制备方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2373096A (en) * | 1941-12-15 | 1945-04-10 | Sperry Gyroscope Co Inc | Magnetic pick-off for sensitive instruments |
GB1179841A (en) | 1966-03-10 | 1970-02-04 | Sperry Rand Ltd | Detecting distortion of terrestial magnetic field |
US4267640A (en) | 1979-04-30 | 1981-05-19 | Rca Corporation | System for ascertaining magnetic field direction |
DE3738455A1 (de) | 1986-11-25 | 1988-06-01 | Landis & Gyr Ag | Anordnung zum messen eines flussarmen magnetfeldes |
GB2201786B (en) | 1987-03-06 | 1990-11-28 | Gen Electric Plc | Magnetometers |
-
1999
- 1999-06-09 DE DE69925573T patent/DE69925573T2/de not_active Expired - Fee Related
-
2000
- 2000-05-10 CN CNB001184946A patent/CN1153981C/zh not_active Expired - Fee Related
- 2000-05-12 US US09/570,436 patent/US6404192B1/en not_active Expired - Fee Related
- 2000-05-12 JP JP2000140524A patent/JP2001013231A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
JP2001013231A (ja) | 2001-01-19 |
US6404192B1 (en) | 2002-06-11 |
CN1274853A (zh) | 2000-11-29 |
DE69925573T2 (de) | 2006-04-27 |
DE69925573D1 (de) | 2005-07-07 |
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Legal Events
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20040616 Termination date: 20110510 |