CN1153981C - 形成在半导体基片上的磁传感器 - Google Patents

形成在半导体基片上的磁传感器 Download PDF

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Publication number
CN1153981C
CN1153981C CNB001184946A CN00118494A CN1153981C CN 1153981 C CN1153981 C CN 1153981C CN B001184946 A CNB001184946 A CN B001184946A CN 00118494 A CN00118494 A CN 00118494A CN 1153981 C CN1153981 C CN 1153981C
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China
Prior art keywords
magnetic
plane
magnetic core
sensor
field
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Expired - Fee Related
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CNB001184946A
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English (en)
Chinese (zh)
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CN1274853A (zh
Inventor
L・奇斯
L·奇斯
克
P·克吉克
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Asulab AG
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Asulab AG
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/04—Measuring direction or magnitude of magnetic fields or magnetic flux using the flux-gate principle

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Magnetic Variables (AREA)
  • Measurement And Recording Of Electrical Phenomena And Electrical Characteristics Of The Living Body (AREA)
CNB001184946A 1999-05-12 2000-05-10 形成在半导体基片上的磁传感器 Expired - Fee Related CN1153981C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP99109504.3 1999-05-12
EP99109504 1999-05-12

Publications (2)

Publication Number Publication Date
CN1274853A CN1274853A (zh) 2000-11-29
CN1153981C true CN1153981C (zh) 2004-06-16

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CNB001184946A Expired - Fee Related CN1153981C (zh) 1999-05-12 2000-05-10 形成在半导体基片上的磁传感器

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US (1) US6404192B1 (ja)
JP (1) JP2001013231A (ja)
CN (1) CN1153981C (ja)
DE (1) DE69925573T2 (ja)

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DE102009028815A1 (de) 2009-08-21 2011-02-24 Robert Bosch Gmbh Magnetfeldsensor und Verfahren zur Herstellung eines Magnetfeldsensors
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DE102009047624A1 (de) * 2009-12-08 2011-06-09 Robert Bosch Gmbh Magnetfeldsensor
IT1397983B1 (it) * 2010-02-05 2013-02-04 St Microelectronics Srl Sensore magnetico integrato di rilevamento di campi magnetici verticali e relativo procedimento di fabbricazione
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KR101127478B1 (ko) 2010-12-21 2012-03-22 한국과학기술원 관통 실리콘 비아를 이용한 전류 측정 소자, 이의 제조 방법 및 이를 포함하는 전류 측정 회로
JP5865813B2 (ja) * 2011-10-20 2016-02-17 京セラドキュメントソリューションズ株式会社 差動トランス式磁気センサー
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ITTO20120290A1 (it) 2012-04-02 2013-10-03 St Microelectronics Srl Sensore inerziale di tipo magnetico, e metodo per operare il sensore inerziale
DE102012209232A1 (de) * 2012-05-31 2013-12-05 Robert Bosch Gmbh Magnetfeldsensor
CN102928793B (zh) * 2012-11-19 2015-03-25 中国科学院上海微系统与信息技术研究所 微机械磁场传感器及其应用
US9209385B2 (en) 2013-02-04 2015-12-08 Stmicroelectronics S.R.L. Magnetic sensor integrated in a chip for detecting magnetic fields perpendicular to the chip and manufacturing process thereof
KR101558059B1 (ko) * 2013-12-09 2015-10-06 삼성전기주식회사 직교형 플럭스게이트 센서
KR20150066831A (ko) * 2013-12-09 2015-06-17 삼성전기주식회사 직교형 플럭스게이트 센서
EP3141920B1 (en) * 2014-05-09 2021-04-14 Aichi Steel Corporation Magnetic detection device and method for producing same
JP6398830B2 (ja) * 2015-03-26 2018-10-03 愛知製鋼株式会社 磁気インピーダンスセンサ
US10280070B2 (en) 2015-09-30 2019-05-07 Stmicroelectronics S.R.L. Magnetic inertial sensor energy harvesting and scavenging methods, circuits and systems
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US20210190893A1 (en) 2017-10-06 2021-06-24 Melexis Technologies Nv Magnetic sensor sensitivity matching calibration
EP3477322B1 (en) 2017-10-27 2021-06-16 Melexis Technologies SA Magnetic sensor with integrated solenoid
US10868479B2 (en) 2018-10-04 2020-12-15 Stmicroelectronics S.R.L. Inverse electrowetting and magnetic energy harvesting and scavenging methods, circuits and systems
AT522600B1 (de) * 2019-04-15 2023-03-15 Braunschmid Dipl Ing Msc Franz Flachspule für drahtlose Energieübertragung
CN114487941B (zh) * 2022-04-06 2022-07-12 南方电网数字电网研究院有限公司 磁传感器、磁场测量方法及磁传感器的制备方法

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Also Published As

Publication number Publication date
JP2001013231A (ja) 2001-01-19
US6404192B1 (en) 2002-06-11
CN1274853A (zh) 2000-11-29
DE69925573T2 (de) 2006-04-27
DE69925573D1 (de) 2005-07-07

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Granted publication date: 20040616

Termination date: 20110510