IT1397983B1 - Sensore magnetico integrato di rilevamento di campi magnetici verticali e relativo procedimento di fabbricazione - Google Patents

Sensore magnetico integrato di rilevamento di campi magnetici verticali e relativo procedimento di fabbricazione

Info

Publication number
IT1397983B1
IT1397983B1 ITTO2010A000083A ITTO20100083A IT1397983B1 IT 1397983 B1 IT1397983 B1 IT 1397983B1 IT TO2010A000083 A ITTO2010A000083 A IT TO2010A000083A IT TO20100083 A ITTO20100083 A IT TO20100083A IT 1397983 B1 IT1397983 B1 IT 1397983B1
Authority
IT
Italy
Prior art keywords
manufacturing procedure
detecting vertical
magnetic sensor
magnetic fields
integrated
Prior art date
Application number
ITTO2010A000083A
Other languages
English (en)
Inventor
Marco Morelli
Caterina Riva
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to ITTO2010A000083A priority Critical patent/IT1397983B1/it
Priority to US13/021,573 priority patent/US8736262B2/en
Publication of ITTO20100083A1 publication Critical patent/ITTO20100083A1/it
Application granted granted Critical
Publication of IT1397983B1 publication Critical patent/IT1397983B1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/07—Hall effect devices

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
ITTO2010A000083A 2010-02-05 2010-02-05 Sensore magnetico integrato di rilevamento di campi magnetici verticali e relativo procedimento di fabbricazione IT1397983B1 (it)

Priority Applications (2)

Application Number Priority Date Filing Date Title
ITTO2010A000083A IT1397983B1 (it) 2010-02-05 2010-02-05 Sensore magnetico integrato di rilevamento di campi magnetici verticali e relativo procedimento di fabbricazione
US13/021,573 US8736262B2 (en) 2010-02-05 2011-02-04 Integrated magnetic sensor for detecting vertical magnetic fields and manufacturing process thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO2010A000083A IT1397983B1 (it) 2010-02-05 2010-02-05 Sensore magnetico integrato di rilevamento di campi magnetici verticali e relativo procedimento di fabbricazione

Publications (2)

Publication Number Publication Date
ITTO20100083A1 ITTO20100083A1 (it) 2011-08-06
IT1397983B1 true IT1397983B1 (it) 2013-02-04

Family

ID=42797497

Family Applications (1)

Application Number Title Priority Date Filing Date
ITTO2010A000083A IT1397983B1 (it) 2010-02-05 2010-02-05 Sensore magnetico integrato di rilevamento di campi magnetici verticali e relativo procedimento di fabbricazione

Country Status (2)

Country Link
US (1) US8736262B2 (it)
IT (1) IT1397983B1 (it)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9104922B2 (en) * 2012-06-15 2015-08-11 Honeywell International Inc. Anisotropic magneto-resistance (AMR) gradiometer/magnetometer to read a magnetic track
ITTO20121067A1 (it) * 2012-12-12 2014-06-13 St Microelectronics Srl Sensore magnetoresistivo integrato in una piastrina per il rilevamento di campi magnetici perpendicolari alla piastrina nonche' suo procedimento di fabbricazione
US9885554B2 (en) * 2012-12-14 2018-02-06 Cts Corporation Magnetic sensing device
US9209385B2 (en) 2013-02-04 2015-12-08 Stmicroelectronics S.R.L. Magnetic sensor integrated in a chip for detecting magnetic fields perpendicular to the chip and manufacturing process thereof
KR101876587B1 (ko) * 2013-03-08 2018-08-03 매그나칩 반도체 유한회사 자기 센서 및 그 제조 방법
US9134385B2 (en) * 2013-05-09 2015-09-15 Honeywell International Inc. Magnetic-field sensing device
DE102013217305A1 (de) * 2013-08-30 2015-03-05 Robert Bosch Gmbh Sensorbauteil für eine Sensorvorrichtung und Herstellungsverfahren für ein Sensorbauteil einer Sensorvorrichtung
JP6604730B2 (ja) * 2015-03-17 2019-11-13 エイブリック株式会社 半導体装置
DE102015116845A1 (de) * 2015-10-05 2017-04-06 Kriwan Industrie-Elektronik Gmbh Maschine mit wenigstens einem Motor und einer Maschinenschutzschaltung
JP7095350B2 (ja) * 2018-03-27 2022-07-05 Tdk株式会社 磁気センサ
EP3992652A1 (en) * 2020-11-03 2022-05-04 Melexis Technologies SA Magnetic sensor device

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4772929A (en) 1987-01-09 1988-09-20 Sprague Electric Company Hall sensor with integrated pole pieces
DE59609089D1 (de) 1995-10-30 2002-05-23 Sentron Ag Zug Magnetfeldsensor und Strom- oder Energiesensor
ATE322023T1 (de) 1997-09-15 2006-04-15 Ams Internat Ag Eine stromüberwachungseinrichtung und ein verfahren zu ihrer herstellung
US6140139A (en) * 1998-12-22 2000-10-31 Pageant Technologies, Inc. Hall effect ferromagnetic random access memory device and its method of manufacture
DE69925573T2 (de) 1999-05-12 2006-04-27 Asulab S.A. Magnetischer F?hler hergestellt auf einem halbleitenden Substrat
JP3494921B2 (ja) * 1999-05-31 2004-02-09 矢崎総業株式会社 磁電変換素子及びその製造方法
JP2000349363A (ja) * 1999-06-07 2000-12-15 Yazaki Corp 磁電変換素子及びその製造方法
EP1164358B1 (de) 2000-06-16 2005-08-24 AMO Automatisierung Messtechnik Optik GmbH Induktives Längenmesssystem
JP4936299B2 (ja) 2000-08-21 2012-05-23 メレクシス・テクノロジーズ・ナムローゼフェンノートシャップ 磁場方向検出センサ
US20030112158A1 (en) 2001-11-05 2003-06-19 Babin Brian George Miniature magnetic device package
US6724652B2 (en) 2002-05-02 2004-04-20 Micron Technology, Inc. Low remanence flux concentrator for MRAM devices
US20040008022A1 (en) 2002-07-11 2004-01-15 Viola Jeffrey L. Current sensor
US7476953B2 (en) 2005-02-04 2009-01-13 Allegro Microsystems, Inc. Integrated sensor having a magnetic flux concentrator
WO2008146809A1 (ja) 2007-05-28 2008-12-04 Mitsubishi Electric Corporation 磁界検出装置
EP2194391B8 (en) 2008-12-03 2012-05-09 STMicroelectronics Srl Broad range magnetic sensor and manufacturing process thereof

Also Published As

Publication number Publication date
US20110193556A1 (en) 2011-08-11
US8736262B2 (en) 2014-05-27
ITTO20100083A1 (it) 2011-08-06

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