EP2685272A4 - Magnetic sensor chip and magnetic sensor - Google Patents

Magnetic sensor chip and magnetic sensor

Info

Publication number
EP2685272A4
EP2685272A4 EP12756955.6A EP12756955A EP2685272A4 EP 2685272 A4 EP2685272 A4 EP 2685272A4 EP 12756955 A EP12756955 A EP 12756955A EP 2685272 A4 EP2685272 A4 EP 2685272A4
Authority
EP
European Patent Office
Prior art keywords
magnetic sensor
chip
sensor chip
magnetic
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP12756955.6A
Other languages
German (de)
French (fr)
Other versions
EP2685272A1 (en
Inventor
Wei Xiong
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of EP2685272A1 publication Critical patent/EP2685272A1/en
Publication of EP2685272A4 publication Critical patent/EP2685272A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/04—Measuring direction or magnitude of magnetic fields or magnetic flux using the flux-gate principle
    • G01R33/05—Measuring direction or magnitude of magnetic fields or magnetic flux using the flux-gate principle in thin-film element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00—Galvanomagnetic devices
    • H10N50/10—Magnetoresistive devices
EP12756955.6A 2011-03-11 2012-01-21 Magnetic sensor chip and magnetic sensor Withdrawn EP2685272A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN2011100584771A CN102683582A (en) 2011-03-11 2011-03-11 Method for manufacturing high sensitivity magnetic sensor chip
PCT/CN2012/000122 WO2012122851A1 (en) 2011-03-11 2012-01-21 Magnetic sensor chip and magnetic sensor

Publications (2)

Publication Number Publication Date
EP2685272A1 EP2685272A1 (en) 2014-01-15
EP2685272A4 true EP2685272A4 (en) 2016-01-06

Family

ID=46815209

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12756955.6A Withdrawn EP2685272A4 (en) 2011-03-11 2012-01-21 Magnetic sensor chip and magnetic sensor

Country Status (6)

Country Link
US (1) US9588192B2 (en)
EP (1) EP2685272A4 (en)
KR (1) KR101496078B1 (en)
CN (2) CN102683582A (en)
CA (1) CA2829680C (en)
WO (1) WO2012122851A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103088293B (en) * 2013-02-01 2014-08-20 天津大学 GdN film with large magnetoresistance effect, and preparation method thereof
CN105021117A (en) * 2015-06-29 2015-11-04 柳州蚊敌香业有限公司 Stay-wire type displacement sensor and measuring system based on the sensor
CN105306013B (en) * 2015-09-17 2018-03-09 北京航天控制仪器研究所 One kind is used for temperature controlled high accuracy and is segmented pulse generating method
JP7154280B2 (en) * 2017-04-24 2022-10-17 ルミレッズ ホールディング ベーフェー High brightness light conversion device
JP6885797B2 (en) * 2017-06-12 2021-06-16 昭和電工株式会社 Magnetic sensor and manufacturing method of magnetic sensor
JP7066132B2 (en) * 2018-04-05 2022-05-13 国立研究開発法人日本原子力研究開発機構 Magnetic sensor, material evaluation method using it, manufacturing method of magnetic sensor
DE102019118545B3 (en) * 2019-07-09 2020-10-29 Infineon Technologies Ag Sensor device with auxiliary structure for calibrating the sensor device
CN115942860A (en) * 2022-12-13 2023-04-07 南方电网数字电网研究院有限公司 Magnetic sensitive thin film transfer method and magnetic sensitive device

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10038159A1 (en) * 1999-08-05 2001-04-26 Delphi Tech Inc Magnetic sensor comprises a galvanomagnetic component made up of a number of layers where each layer has its own property and is different from the other layers
US20020060565A1 (en) * 1999-10-13 2002-05-23 Nve Corporation Magnetizable bead detector
JP2003107140A (en) * 2001-09-28 2003-04-09 Nec Tokin Corp Magnetic sensor
EP1408562A1 (en) * 2001-07-19 2004-04-14 Matsushita Electric Industrial Co., Ltd. Magnetic sensor and method for manufacturing the same
JP2006300540A (en) * 2005-04-15 2006-11-02 Daido Steel Co Ltd Thin-film magnetometric sensor
EP1729142A1 (en) * 2004-03-23 2006-12-06 Murata Manufacturing Co., Ltd. Long magnetic sensor
JP2008197002A (en) * 2007-02-14 2008-08-28 Fujikura Ltd Magnetic sensor
EP2159586A2 (en) * 2008-09-02 2010-03-03 Murata Manufacturing Co., Ltd Magnetic sensor
JP2010133855A (en) * 2008-12-05 2010-06-17 Murata Mfg Co Ltd Magnetic detection circuit element and magnetic sensor
WO2010122944A1 (en) * 2009-04-21 2010-10-28 アルプス電気株式会社 Magnetic sensor package

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5826308A (en) * 1981-08-07 1983-02-16 Matsushita Electric Ind Co Ltd Thin film element parts
JP3835354B2 (en) * 2001-10-29 2006-10-18 ヤマハ株式会社 Magnetic sensor
JP2003264323A (en) 2002-03-08 2003-09-19 Murata Mfg Co Ltd Magnetic sensor and its manufacturing method
JP4055609B2 (en) * 2003-03-03 2008-03-05 株式会社デンソー Magnetic sensor manufacturing method
KR100697123B1 (en) * 2003-07-18 2007-03-20 야마하 가부시키가이샤 Magnetic sensor and manufacturing method therefor
US7397077B2 (en) * 2004-09-02 2008-07-08 Samsung Electronics Co., Ltd. Magnetic memory devices having patterned heater layers therein that utilize thermally conductive sidewall materials to increase heat transfer when writing memory data
JP2008029125A (en) * 2006-07-21 2008-02-07 Sony Corp Electromagnetic induction processor
WO2008066118A1 (en) * 2006-11-30 2008-06-05 Asahi Kasei Kabushiki Kaisha Thin film laminated body, thin film magnetic sensor using the thin film laminated body and method for manufacturing the thin film laminated body
US8000065B2 (en) * 2009-01-28 2011-08-16 Tdk Corporation Magnetoresistive element and thin-film magnetic head
WO2010098884A1 (en) * 2009-02-26 2010-09-02 Jian-Ping Wang High magnetic moment particle detection
US8379350B2 (en) * 2010-06-30 2013-02-19 Tdk Corporation CPP-type magnetoresistive element including spacer layer
CN102456356B (en) * 2010-10-26 2015-09-30 新科实业有限公司 Magnetoresistive transducer, magnetic head, magnetic head fold piece combination and hard disk drive
US20120146165A1 (en) * 2010-12-09 2012-06-14 Udo Ausserlechner Magnetic field current sensors
US8400738B2 (en) * 2011-04-25 2013-03-19 Seagate Technology Llc Magnetic element with dual magnetic moments
US9024632B2 (en) * 2011-05-30 2015-05-05 Denso Corporation Magnetic sensor with a plurality of heater portions to fix the direction of magnetization of a pinned magnetic layer

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10038159A1 (en) * 1999-08-05 2001-04-26 Delphi Tech Inc Magnetic sensor comprises a galvanomagnetic component made up of a number of layers where each layer has its own property and is different from the other layers
US20020060565A1 (en) * 1999-10-13 2002-05-23 Nve Corporation Magnetizable bead detector
EP1408562A1 (en) * 2001-07-19 2004-04-14 Matsushita Electric Industrial Co., Ltd. Magnetic sensor and method for manufacturing the same
JP2003107140A (en) * 2001-09-28 2003-04-09 Nec Tokin Corp Magnetic sensor
EP1729142A1 (en) * 2004-03-23 2006-12-06 Murata Manufacturing Co., Ltd. Long magnetic sensor
JP2006300540A (en) * 2005-04-15 2006-11-02 Daido Steel Co Ltd Thin-film magnetometric sensor
JP2008197002A (en) * 2007-02-14 2008-08-28 Fujikura Ltd Magnetic sensor
EP2159586A2 (en) * 2008-09-02 2010-03-03 Murata Manufacturing Co., Ltd Magnetic sensor
JP2010133855A (en) * 2008-12-05 2010-06-17 Murata Mfg Co Ltd Magnetic detection circuit element and magnetic sensor
WO2010122944A1 (en) * 2009-04-21 2010-10-28 アルプス電気株式会社 Magnetic sensor package
US20120007593A1 (en) * 2009-04-21 2012-01-12 Alps Electric Co., Ltd. Magnetic sensor package

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2012122851A1 *

Also Published As

Publication number Publication date
US20140002074A1 (en) 2014-01-02
EP2685272A1 (en) 2014-01-15
CN103562739A (en) 2014-02-05
US9588192B2 (en) 2017-03-07
KR101496078B1 (en) 2015-02-25
CN102683582A (en) 2012-09-19
CA2829680A1 (en) 2012-09-20
CN103562739B (en) 2016-04-20
KR20130132628A (en) 2013-12-04
CA2829680C (en) 2019-11-12
WO2012122851A1 (en) 2012-09-20

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Legal Events

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PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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Effective date: 20131001

AK Designated contracting states

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Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

DAX Request for extension of the european patent (deleted)
RA4 Supplementary search report drawn up and despatched (corrected)

Effective date: 20151209

RIC1 Information provided on ipc code assigned before grant

Ipc: H01L 43/12 20060101ALI20151203BHEP

Ipc: G01R 33/05 20060101ALI20151203BHEP

Ipc: B82Y 25/00 20110101ALI20151203BHEP

Ipc: G01R 33/09 20060101AFI20151203BHEP

Ipc: H01L 43/08 20060101ALI20151203BHEP

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Effective date: 20160716