IT1403298B1 - Elemento sensore per misurare campi magnetici, sensore di campo magnetico e procedimento atto alla fabbricazione di un elemento sensore - Google Patents

Elemento sensore per misurare campi magnetici, sensore di campo magnetico e procedimento atto alla fabbricazione di un elemento sensore

Info

Publication number
IT1403298B1
IT1403298B1 ITMI2011A000008A ITMI20110008A IT1403298B1 IT 1403298 B1 IT1403298 B1 IT 1403298B1 IT MI2011A000008 A ITMI2011A000008 A IT MI2011A000008A IT MI20110008 A ITMI20110008 A IT MI20110008A IT 1403298 B1 IT1403298 B1 IT 1403298B1
Authority
IT
Italy
Prior art keywords
sensor element
sensor
procedure
manufacturing
magnetic field
Prior art date
Application number
ITMI2011A000008A
Other languages
English (en)
Inventor
Torsten Ohms
Marian Keck
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20110008A1 publication Critical patent/ITMI20110008A1/it
Application granted granted Critical
Publication of IT1403298B1 publication Critical patent/IT1403298B1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/07—Hall effect devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/07—Hall effect devices
    • G01R33/072—Constructional adaptation of the sensor to specific applications
    • G01R33/075—Hall devices configured for spinning current measurements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N52/00—Hall-effect devices
    • H10N52/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N52/00—Hall-effect devices
    • H10N52/101—Semiconductor Hall-effect devices

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Hall/Mr Elements (AREA)
  • Measuring Magnetic Variables (AREA)
ITMI2011A000008A 2010-01-11 2011-01-10 Elemento sensore per misurare campi magnetici, sensore di campo magnetico e procedimento atto alla fabbricazione di un elemento sensore IT1403298B1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102010000769A DE102010000769A1 (de) 2010-01-11 2010-01-11 Sensorelement zur Magnetfeldmessung, Magnetfeld-Sensor und Verfahren zur Herstellung eines Sensorelements

Publications (2)

Publication Number Publication Date
ITMI20110008A1 ITMI20110008A1 (it) 2011-07-12
IT1403298B1 true IT1403298B1 (it) 2013-10-17

Family

ID=43975353

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI2011A000008A IT1403298B1 (it) 2010-01-11 2011-01-10 Elemento sensore per misurare campi magnetici, sensore di campo magnetico e procedimento atto alla fabbricazione di un elemento sensore

Country Status (4)

Country Link
CN (1) CN102169955B (it)
DE (1) DE102010000769A1 (it)
FR (1) FR2955211B1 (it)
IT (1) IT1403298B1 (it)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2778704B1 (en) * 2013-03-11 2015-09-16 Ams Ag Magnetic field sensor system
DE102013209514A1 (de) 2013-05-22 2014-11-27 Micronas Gmbh Dreidimensionaler Hallsensor zum Detektieren eines räumlichen Magnetfeldes
CN107966669B (zh) * 2017-12-19 2019-11-08 大连理工大学 适用于高温工作环境的半导体三维霍尔传感器及其制作方法
DE102018009110A1 (de) * 2018-11-21 2020-05-28 Tdk-Micronas Gmbh SCI-Halbleiterstruktur und Verfahren zur Herstellung einer SOI-Halbleiterstruktur
DE102018009162A1 (de) * 2018-11-22 2020-05-28 Tdk-Micronas Gmbh Halbleitersensorstruktur
DE102019000165B4 (de) * 2019-01-14 2024-06-27 Tdk-Micronas Gmbh Halbleitersensorstruktur
CN117098447B (zh) * 2023-10-20 2024-02-06 北京智芯微电子科技有限公司 垂直霍尔传感器及制造方法、芯片

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5543988A (en) * 1993-04-30 1996-08-06 International Business Machines Corporation Hall sensor with high spatial resolution in two directions concurrently
DE10244096B4 (de) * 2002-09-23 2015-05-28 Robert Bosch Gmbh Spinning-Current-Hallsensor mit homogener Raumladungszone
DE10313642A1 (de) 2003-03-26 2004-10-14 Micronas Gmbh Offset-reduzierter Hall-sensor
JP4466276B2 (ja) * 2004-08-17 2010-05-26 株式会社デンソー 縦型ホール素子およびその製造方法
JP4674578B2 (ja) * 2006-01-13 2011-04-20 株式会社デンソー 磁気センサ及び磁気検出方法

Also Published As

Publication number Publication date
DE102010000769A1 (de) 2011-07-14
CN102169955B (zh) 2015-09-09
ITMI20110008A1 (it) 2011-07-12
CN102169955A (zh) 2011-08-31
FR2955211B1 (fr) 2016-02-19
FR2955211A1 (fr) 2011-07-15

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