IT1402870B1 - Procedimento atto a definire la sensibilita' di un sensore di accelerazione oppure di campo magnetico - Google Patents

Procedimento atto a definire la sensibilita' di un sensore di accelerazione oppure di campo magnetico

Info

Publication number
IT1402870B1
IT1402870B1 ITMI2010A002090A ITMI20102090A IT1402870B1 IT 1402870 B1 IT1402870 B1 IT 1402870B1 IT MI2010A002090 A ITMI2010A002090 A IT MI2010A002090A IT MI20102090 A ITMI20102090 A IT MI20102090A IT 1402870 B1 IT1402870 B1 IT 1402870B1
Authority
IT
Italy
Prior art keywords
acceleration
sensitivity
defining
procedure
magnetic field
Prior art date
Application number
ITMI2010A002090A
Other languages
English (en)
Inventor
Alexander Buhmann
Johannes Classen
Holger Rank
Ramona Maas
Marian Keck
Arnd Kaelberer
Robert Sattler
Axel Franke
Hans-Joerg Faisst
Mirko Hattass
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20102090A1 publication Critical patent/ITMI20102090A1/it
Application granted granted Critical
Publication of IT1402870B1 publication Critical patent/IT1402870B1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/028—Electrodynamic magnetometers
    • G01R33/0286—Electrodynamic magnetometers comprising microelectromechanical systems [MEMS]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/003—Characterising MEMS devices, e.g. measuring and identifying electrical or mechanical constants
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
ITMI2010A002090A 2009-11-18 2010-11-11 Procedimento atto a definire la sensibilita' di un sensore di accelerazione oppure di campo magnetico IT1402870B1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102009046807.2A DE102009046807B4 (de) 2009-11-18 2009-11-18 Verfahren zur Empfindlichkeitsbestimmung eines Beschleunigungs- oder Magnetfeldsensors

Publications (2)

Publication Number Publication Date
ITMI20102090A1 ITMI20102090A1 (it) 2011-05-19
IT1402870B1 true IT1402870B1 (it) 2013-09-27

Family

ID=43742705

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI2010A002090A IT1402870B1 (it) 2009-11-18 2010-11-11 Procedimento atto a definire la sensibilita' di un sensore di accelerazione oppure di campo magnetico

Country Status (5)

Country Link
US (1) US8461833B2 (it)
CN (1) CN102095893B (it)
DE (1) DE102009046807B4 (it)
IT (1) IT1402870B1 (it)
TW (1) TWI531793B (it)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010029645B4 (de) * 2010-06-02 2018-03-29 Robert Bosch Gmbh Mikromechanisches Bauelement mit einer Teststruktur zur Bestimmung der Schichtdicke einer Abstandsschicht und Verfahren zum Herstellen einer solchen Teststruktur
US20120235670A1 (en) * 2011-03-17 2012-09-20 Invensense, Inc. Drive system for micromachined magnetic field sensors
DE102011075541A1 (de) * 2011-05-10 2012-11-15 Robert Bosch Gmbh Auswerteschaltung für Feldeffekttransistor mit beweglicher Gatestruktur
DE102012200929B4 (de) * 2012-01-23 2020-10-01 Robert Bosch Gmbh Mikromechanische Struktur und Verfahren zur Herstellung einer mikromechanischen Struktur
CA3118864C (en) 2012-03-08 2022-11-29 Shell Internationale Research Maatschappij B.V. Integrated seismic monitoring system and method
CA2865171C (en) 2012-03-08 2020-06-30 Shell Internationale Research Maatschappij B.V. Seismic cable handling system and method
KR101299729B1 (ko) * 2012-05-29 2013-08-22 삼성전기주식회사 센서
EP2861524A4 (en) * 2012-06-13 2016-07-06 Purdue Research Foundation MICROELECTROMECHANICAL SYSTEM (MEMS) AND METHODS OF USE
FR2992066B1 (fr) * 2012-06-15 2014-07-11 Commissariat Energie Atomique Capteur de champ magnetique a force de laplace
US10197590B2 (en) * 2014-11-17 2019-02-05 The Royal Institution For The Advancement Of Learning/Mcgill University Combined magnetometer accelerometer MEMS devices and methods
DE102015001128B4 (de) * 2015-01-29 2021-09-30 Northrop Grumman Litef Gmbh Beschleunigungssensor mit Federkraftkompensation
CN105467440B (zh) 2015-10-28 2018-02-02 中国石油天然气股份有限公司 一种全向矢量地震数据处理方法及装置
CN105259566B (zh) 2015-10-28 2018-02-02 中国石油天然气股份有限公司 一种地震全向矢量检波器
CN105388514B (zh) 2015-10-28 2017-12-05 中国石油天然气股份有限公司 一种地震全向矢量静电悬浮检波器
US10393768B2 (en) * 2015-12-28 2019-08-27 Invensense, Inc. MEMS device to selectively measure excitation in different directions
DE102017204669A1 (de) * 2017-03-21 2018-09-27 Robert Bosch Gmbh Sensoreinrichtung
US10384928B1 (en) * 2018-02-08 2019-08-20 Pixart Imaging Inc. Manufacturing method of sensor package
DE102018207573A1 (de) 2018-05-16 2019-11-21 Robert Bosch Gmbh Verfahren zum Re-Kalibrieren eines mikromechanischen Sensors und re-kalibrierbarer Sensor
CN109613302B (zh) * 2018-12-25 2020-12-08 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） 电容式mems加速度计机械梁刚度测量方法、装置和系统
CN110118695B (zh) * 2019-05-23 2021-11-30 南京工程学院 一种恒应力加载氢渗透实验装置及试验方法
CN113671214B (zh) * 2021-09-03 2022-11-15 东南大学 一种基于静电反馈结构的隧道磁阻加速度计装置
CN114296014B (zh) * 2021-12-29 2023-11-14 东南大学 基于洛伦兹力的三维mems磁场传感器及其制备方法

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Publication number Priority date Publication date Assignee Title
DE4432837B4 (de) 1994-09-15 2004-05-13 Robert Bosch Gmbh Beschleunigungssensor und Meßverfahren
US5528520A (en) * 1994-12-08 1996-06-18 Ford Motor Company Calibration circuit for capacitive sensors
US5914553A (en) * 1997-06-16 1999-06-22 Cornell Research Foundation, Inc. Multistable tunable micromechanical resonators
DE19827056A1 (de) 1998-06-18 1999-12-23 Bosch Gmbh Robert Mikromechanischer Magnetfeldsensor
DE10148585A1 (de) 2001-10-01 2003-04-10 Inst Luft Kaeltetech Gem Gmbh Einzelraum-Heizsystem
DE10148858A1 (de) 2001-10-04 2003-04-10 Bosch Gmbh Robert Mikromechanischer Sensor mit Selbsttestfunktion und Optimierungsverfahren
US6840106B1 (en) 2003-08-14 2005-01-11 Freescale Semiconductor, Inc. Sensor using an actuator for self-test and method therefor
US7093478B2 (en) * 2004-07-08 2006-08-22 Analog Devices, Inc. Method for calibrating accelerometer sensitivity
CN100363752C (zh) * 2004-09-03 2008-01-23 清华大学 水平式隧穿磁强计
JP4534741B2 (ja) * 2004-12-10 2010-09-01 株式会社デンソー ジャイロセンサ
CN101038299A (zh) * 2007-04-21 2007-09-19 中北大学 基于单质量块的单轴集成惯性测量器件
DE102007050116B4 (de) * 2007-10-19 2023-08-03 Robert Bosch Gmbh Beschleunigungssensor
US8220330B2 (en) * 2009-03-24 2012-07-17 Freescale Semiconductor, Inc. Vertically integrated MEMS sensor device with multi-stimulus sensing

Also Published As

Publication number Publication date
US20110140692A1 (en) 2011-06-16
ITMI20102090A1 (it) 2011-05-19
US8461833B2 (en) 2013-06-11
TWI531793B (zh) 2016-05-01
TW201140061A (en) 2011-11-16
CN102095893A (zh) 2011-06-15
DE102009046807A1 (de) 2011-05-19
CN102095893B (zh) 2015-08-19
DE102009046807B4 (de) 2023-01-05

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