CN114467256A - 弹性波装置 - Google Patents

弹性波装置 Download PDF

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Publication number
CN114467256A
CN114467256A CN202080065605.2A CN202080065605A CN114467256A CN 114467256 A CN114467256 A CN 114467256A CN 202080065605 A CN202080065605 A CN 202080065605A CN 114467256 A CN114467256 A CN 114467256A
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CN
China
Prior art keywords
electrodes
electrode
pair
elastic wave
wave device
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Pending
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CN202080065605.2A
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English (en)
Chinese (zh)
Inventor
木村哲也
山根毅
永友翔
丰田祐二
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Publication of CN114467256A publication Critical patent/CN114467256A/zh
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H03H9/02031—Characteristics of piezoelectric layers, e.g. cutting angles consisting of ceramic
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H03H9/02039—Characteristics of piezoelectric layers, e.g. cutting angles consisting of a material from the crystal group 32, e.g. langasite, langatate, langanite
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/14547—Fan shaped; Tilted; Shifted; Slanted; Tapered; Arched; Stepped finger transducers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/14561—Arched, curved or ring shaped transducers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/1457—Transducers having different finger widths
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/174—Membranes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/175—Acoustic mirrors
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/176—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of ceramic material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN202080065605.2A 2019-09-27 2020-09-25 弹性波装置 Pending CN114467256A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019-177324 2019-09-27
JP2019177324 2019-09-27
PCT/JP2020/036414 WO2021060521A1 (ja) 2019-09-27 2020-09-25 弾性波装置

Publications (1)

Publication Number Publication Date
CN114467256A true CN114467256A (zh) 2022-05-10

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Application Number Title Priority Date Filing Date
CN202080065605.2A Pending CN114467256A (zh) 2019-09-27 2020-09-25 弹性波装置

Country Status (5)

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US (1) US12603638B2 (https=)
JP (2) JPWO2021060521A1 (https=)
KR (1) KR102892998B1 (https=)
CN (1) CN114467256A (https=)
WO (1) WO2021060521A1 (https=)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114467254A (zh) * 2019-09-27 2022-05-10 株式会社村田制作所 弹性波装置
WO2023054675A1 (ja) * 2021-09-30 2023-04-06 株式会社村田製作所 弾性波装置および弾性波装置の製造方法
WO2023058715A1 (ja) * 2021-10-07 2023-04-13 株式会社村田製作所 弾性波装置
CN118511432A (zh) * 2022-01-13 2024-08-16 株式会社村田制作所 弹性波装置
CN119072850A (zh) * 2022-03-28 2024-12-03 株式会社村田制作所 弹性波装置
WO2023190654A1 (ja) * 2022-03-29 2023-10-05 株式会社村田製作所 弾性波装置
WO2023190369A1 (ja) * 2022-03-29 2023-10-05 株式会社村田製作所 弾性波装置
WO2023195513A1 (ja) * 2022-04-08 2023-10-12 株式会社村田製作所 弾性波装置及びその製造方法
CN119032511A (zh) * 2022-04-21 2024-11-26 株式会社村田制作所 弹性波装置
CN119174105A (zh) * 2022-05-13 2024-12-20 株式会社村田制作所 弹性波装置以及滤波器装置
WO2023224129A1 (ja) * 2022-05-19 2023-11-23 株式会社村田製作所 弾性波装置
CN119547329A (zh) * 2022-08-04 2025-02-28 株式会社村田制作所 弹性波装置以及滤波器装置
WO2024038831A1 (ja) * 2022-08-13 2024-02-22 株式会社村田製作所 弾性波装置
WO2024043347A1 (ja) * 2022-08-26 2024-02-29 株式会社村田製作所 弾性波装置及びフィルタ装置
WO2024043342A1 (ja) * 2022-08-26 2024-02-29 株式会社村田製作所 弾性波装置
WO2024257841A1 (ja) * 2023-06-13 2024-12-19 株式会社村田製作所 弾性波装置及び弾性波フィルタ装置
CN121336355A (zh) * 2023-06-13 2026-01-13 株式会社村田制作所 弹性波装置以及弹性波滤波器装置
CN121844497A (zh) * 2023-09-21 2026-04-10 京瓷株式会社 弹性波装置以及通信装置
JP2025078470A (ja) * 2023-11-08 2025-05-20 株式会社村田製作所 弾性波素子、弾性波フィルタ装置およびマルチプレクサ
WO2025263229A1 (ja) * 2024-06-20 2025-12-26 株式会社村田製作所 弾性波装置
WO2026004346A1 (ja) * 2024-06-24 2026-01-02 株式会社村田製作所 弾性波装置

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US20100223999A1 (en) * 2009-03-03 2010-09-09 Nihon Dempa Kogyo Co., Ltd. Elastic wave device and electronic component
WO2014060263A1 (fr) * 2012-10-19 2014-04-24 Centre National De La Recherche Scientifique (C.N.R.S) Transducteur a ondes de volume guidees en surface par des structures d'excitation synchrone
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WO2019065666A1 (ja) * 2017-09-27 2019-04-04 株式会社村田製作所 弾性波装置

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JPH09266431A (ja) 1996-01-23 1997-10-07 Seiko Epson Corp 体積超音波トランスジューサ及び弾性表面波装置
KR100904368B1 (ko) 2005-10-19 2009-06-23 가부시키가이샤 무라타 세이사쿠쇼 램파 디바이스
FI123640B (fi) * 2010-04-23 2013-08-30 Teknologian Tutkimuskeskus Vtt Laajakaistainen akustisesti kytketty ohutkalvo-BAW-suodin
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JP6573836B2 (ja) 2016-01-13 2019-09-11 太陽誘電株式会社 弾性波共振器、フィルタ、及びデュプレクサ
SG11201903365SA (en) * 2016-10-20 2019-05-30 Skyworks Solutions Inc Elastic wave device with sub-wavelength thick piezoelectric layer
JP6957306B2 (ja) * 2017-10-17 2021-11-02 太陽誘電株式会社 弾性波デバイスおよびその製造方法
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JP6816834B2 (ja) * 2018-01-12 2021-01-20 株式会社村田製作所 弾性波装置、マルチプレクサ、高周波フロントエンド回路、及び通信装置
JP2019140456A (ja) * 2018-02-07 2019-08-22 株式会社村田製作所 弾性波装置、高周波フロントエンド回路及び通信装置
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US10756696B2 (en) * 2018-09-10 2020-08-25 Vtt Technical Research Centre Of Finland Ltd Lateral bulk acoustic wave filter

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Publication number Priority date Publication date Assignee Title
JPH09298441A (ja) * 1996-05-01 1997-11-18 Mitsubishi Electric Corp 弾性表面波変換器及び弾性表面波装置
US20100223999A1 (en) * 2009-03-03 2010-09-09 Nihon Dempa Kogyo Co., Ltd. Elastic wave device and electronic component
WO2014060263A1 (fr) * 2012-10-19 2014-04-24 Centre National De La Recherche Scientifique (C.N.R.S) Transducteur a ondes de volume guidees en surface par des structures d'excitation synchrone
KR20170068591A (ko) * 2014-11-28 2017-06-19 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치
CN107112975A (zh) * 2014-11-28 2017-08-29 株式会社村田制作所 弹性波装置
WO2019065666A1 (ja) * 2017-09-27 2019-04-04 株式会社村田製作所 弾性波装置

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KR102892998B1 (ko) 2025-11-28
KR20220051245A (ko) 2022-04-26
JPWO2021060521A1 (https=) 2021-04-01
JP7722414B2 (ja) 2025-08-13
JP2023113959A (ja) 2023-08-16
US20220216849A1 (en) 2022-07-07
US12603638B2 (en) 2026-04-14
WO2021060521A1 (ja) 2021-04-01

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