JPWO2021060521A1 - - Google Patents

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Publication number
JPWO2021060521A1
JPWO2021060521A1 JP2021548454A JP2021548454A JPWO2021060521A1 JP WO2021060521 A1 JPWO2021060521 A1 JP WO2021060521A1 JP 2021548454 A JP2021548454 A JP 2021548454A JP 2021548454 A JP2021548454 A JP 2021548454A JP WO2021060521 A1 JPWO2021060521 A1 JP WO2021060521A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021548454A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021060521A1 publication Critical patent/JPWO2021060521A1/ja
Priority to JP2023099130A priority Critical patent/JP7722414B2/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H03H9/02031—Characteristics of piezoelectric layers, e.g. cutting angles consisting of ceramic
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H03H9/02039—Characteristics of piezoelectric layers, e.g. cutting angles consisting of a material from the crystal group 32, e.g. langasite, langatate, langanite
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/14547—Fan shaped; Tilted; Shifted; Slanted; Tapered; Arched; Stepped finger transducers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/14561—Arched, curved or ring shaped transducers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/1457—Transducers having different finger widths
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/174—Membranes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/175—Acoustic mirrors
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/176—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of ceramic material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2021548454A 2019-09-27 2020-09-25 Pending JPWO2021060521A1 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2023099130A JP7722414B2 (ja) 2019-09-27 2023-06-16 弾性波装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019177324 2019-09-27
PCT/JP2020/036414 WO2021060521A1 (ja) 2019-09-27 2020-09-25 弾性波装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2023099130A Division JP7722414B2 (ja) 2019-09-27 2023-06-16 弾性波装置

Publications (1)

Publication Number Publication Date
JPWO2021060521A1 true JPWO2021060521A1 (https=) 2021-04-01

Family

ID=75164993

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2021548454A Pending JPWO2021060521A1 (https=) 2019-09-27 2020-09-25
JP2023099130A Active JP7722414B2 (ja) 2019-09-27 2023-06-16 弾性波装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2023099130A Active JP7722414B2 (ja) 2019-09-27 2023-06-16 弾性波装置

Country Status (5)

Country Link
US (1) US12603638B2 (https=)
JP (2) JPWO2021060521A1 (https=)
KR (1) KR102892998B1 (https=)
CN (1) CN114467256A (https=)
WO (1) WO2021060521A1 (https=)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114467254A (zh) * 2019-09-27 2022-05-10 株式会社村田制作所 弹性波装置
WO2023054675A1 (ja) * 2021-09-30 2023-04-06 株式会社村田製作所 弾性波装置および弾性波装置の製造方法
WO2023058715A1 (ja) * 2021-10-07 2023-04-13 株式会社村田製作所 弾性波装置
CN118511432A (zh) * 2022-01-13 2024-08-16 株式会社村田制作所 弹性波装置
CN119072850A (zh) * 2022-03-28 2024-12-03 株式会社村田制作所 弹性波装置
WO2023190654A1 (ja) * 2022-03-29 2023-10-05 株式会社村田製作所 弾性波装置
WO2023190369A1 (ja) * 2022-03-29 2023-10-05 株式会社村田製作所 弾性波装置
WO2023195513A1 (ja) * 2022-04-08 2023-10-12 株式会社村田製作所 弾性波装置及びその製造方法
CN119032511A (zh) * 2022-04-21 2024-11-26 株式会社村田制作所 弹性波装置
CN119174105A (zh) * 2022-05-13 2024-12-20 株式会社村田制作所 弹性波装置以及滤波器装置
WO2023224129A1 (ja) * 2022-05-19 2023-11-23 株式会社村田製作所 弾性波装置
CN119547329A (zh) * 2022-08-04 2025-02-28 株式会社村田制作所 弹性波装置以及滤波器装置
WO2024038831A1 (ja) * 2022-08-13 2024-02-22 株式会社村田製作所 弾性波装置
WO2024043347A1 (ja) * 2022-08-26 2024-02-29 株式会社村田製作所 弾性波装置及びフィルタ装置
WO2024043342A1 (ja) * 2022-08-26 2024-02-29 株式会社村田製作所 弾性波装置
WO2024257841A1 (ja) * 2023-06-13 2024-12-19 株式会社村田製作所 弾性波装置及び弾性波フィルタ装置
CN121336355A (zh) * 2023-06-13 2026-01-13 株式会社村田制作所 弹性波装置以及弹性波滤波器装置
CN121844497A (zh) * 2023-09-21 2026-04-10 京瓷株式会社 弹性波装置以及通信装置
JP2025078470A (ja) * 2023-11-08 2025-05-20 株式会社村田製作所 弾性波素子、弾性波フィルタ装置およびマルチプレクサ
WO2025263229A1 (ja) * 2024-06-20 2025-12-26 株式会社村田製作所 弾性波装置
WO2026004346A1 (ja) * 2024-06-24 2026-01-02 株式会社村田製作所 弾性波装置

Citations (9)

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JPH09298441A (ja) * 1996-05-01 1997-11-18 Mitsubishi Electric Corp 弾性表面波変換器及び弾性表面波装置
JP2010233210A (ja) * 2009-03-03 2010-10-14 Nippon Dempa Kogyo Co Ltd 弾性波デバイス及び電子部品
JP2013115496A (ja) * 2011-11-25 2013-06-10 Nippon Dempa Kogyo Co Ltd 発振器及び発振器用の弾性表面波素子
JP2013528996A (ja) * 2010-04-23 2013-07-11 テクノロジアン テュトキムスケスクス ヴェーテーテー 広帯域音響結合薄膜ｂａｗフィルタ
JP2018074575A (ja) * 2016-10-20 2018-05-10 スカイワークス ソリューションズ, インコーポレイテッドSkyworks Solutions, Inc. サブ波長厚さの圧電層を備えた弾性波デバイス
JP2019075704A (ja) * 2017-10-17 2019-05-16 太陽誘電株式会社 弾性波デバイスおよびその製造方法
WO2019111664A1 (ja) * 2017-12-08 2019-06-13 株式会社村田製作所 弾性波装置
JP2019140456A (ja) * 2018-02-07 2019-08-22 株式会社村田製作所 弾性波装置、高周波フロントエンド回路及び通信装置
US20190386636A1 (en) * 2018-06-15 2019-12-19 Resonant Inc. Transversely-excited film bulk acoustic resonator

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JPH07240657A (ja) 1994-03-01 1995-09-12 Asahi Chem Ind Co Ltd 一方向性弾性表面波変換器
JPH09266431A (ja) 1996-01-23 1997-10-07 Seiko Epson Corp 体積超音波トランスジューサ及び弾性表面波装置
KR100904368B1 (ko) 2005-10-19 2009-06-23 가부시키가이샤 무라타 세이사쿠쇼 램파 디바이스
WO2012073871A1 (ja) 2010-11-30 2012-06-07 株式会社村田製作所 弾性波装置及びその製造方法
CN103283147B (zh) * 2010-12-24 2016-09-21 株式会社村田制作所 弹性波装置及其制造方法
JP5772256B2 (ja) 2011-06-08 2015-09-02 株式会社村田製作所 弾性波装置
FR2997027B1 (fr) * 2012-10-19 2015-01-02 Centre Nat Rech Scient Transducteur a ondes de volume guidees en suface par des structures d'excitation synchrone
WO2016084526A1 (ja) * 2014-11-28 2016-06-02 株式会社村田製作所 弾性波装置
JP6573836B2 (ja) 2016-01-13 2019-09-11 太陽誘電株式会社 弾性波共振器、フィルタ、及びデュプレクサ
WO2019065666A1 (ja) * 2017-09-27 2019-04-04 株式会社村田製作所 弾性波装置
JP6816834B2 (ja) * 2018-01-12 2021-01-20 株式会社村田製作所 弾性波装置、マルチプレクサ、高周波フロントエンド回路、及び通信装置
US10756696B2 (en) * 2018-09-10 2020-08-25 Vtt Technical Research Centre Of Finland Ltd Lateral bulk acoustic wave filter

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09298441A (ja) * 1996-05-01 1997-11-18 Mitsubishi Electric Corp 弾性表面波変換器及び弾性表面波装置
JP2010233210A (ja) * 2009-03-03 2010-10-14 Nippon Dempa Kogyo Co Ltd 弾性波デバイス及び電子部品
JP2013528996A (ja) * 2010-04-23 2013-07-11 テクノロジアン テュトキムスケスクス ヴェーテーテー 広帯域音響結合薄膜ｂａｗフィルタ
JP2013115496A (ja) * 2011-11-25 2013-06-10 Nippon Dempa Kogyo Co Ltd 発振器及び発振器用の弾性表面波素子
JP2018074575A (ja) * 2016-10-20 2018-05-10 スカイワークス ソリューションズ, インコーポレイテッドSkyworks Solutions, Inc. サブ波長厚さの圧電層を備えた弾性波デバイス
JP2019075704A (ja) * 2017-10-17 2019-05-16 太陽誘電株式会社 弾性波デバイスおよびその製造方法
WO2019111664A1 (ja) * 2017-12-08 2019-06-13 株式会社村田製作所 弾性波装置
JP2019140456A (ja) * 2018-02-07 2019-08-22 株式会社村田製作所 弾性波装置、高周波フロントエンド回路及び通信装置
US20190386636A1 (en) * 2018-06-15 2019-12-19 Resonant Inc. Transversely-excited film bulk acoustic resonator

Also Published As

Publication number Publication date
KR102892998B1 (ko) 2025-11-28
KR20220051245A (ko) 2022-04-26
JP7722414B2 (ja) 2025-08-13
CN114467256A (zh) 2022-05-10
JP2023113959A (ja) 2023-08-16
US20220216849A1 (en) 2022-07-07
US12603638B2 (en) 2026-04-14
WO2021060521A1 (ja) 2021-04-01

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