CN114395748A - Automatic reverse printing hanging device for spring workpiece of vacuum ion coating machine - Google Patents

Automatic reverse printing hanging device for spring workpiece of vacuum ion coating machine Download PDF

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Publication number
CN114395748A
CN114395748A CN202111576557.6A CN202111576557A CN114395748A CN 114395748 A CN114395748 A CN 114395748A CN 202111576557 A CN202111576557 A CN 202111576557A CN 114395748 A CN114395748 A CN 114395748A
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tray
spring
pendant
vacuum ion
planet wheel
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CN114395748B (en
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刘佳伦
宁亮
林金鹏
唐凌虹
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Xian Shiyou University
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The utility model provides an automatic dress of falling seal of spring work piece hangs device for vacuum ion coating machine, including the planet wheel that is located the indoor rotation mechanism of vacuum ion coating, the planet wheel middle part is provided with the installation axle, install the epaxial end and be located the first locating sleeve on the top cap of rotation mechanism, be provided with the bearing between planet wheel and the installation axle, installation axle upper portion rotates and is connected with the pendant dish, be provided with evenly distributed's couple along the circumferencial direction on the pendant dish border, installation axle lower part threaded connection has the tray, the tray border is provided with the ram that corresponds with the couple along the circumferencial direction, the ram slope sets up on the tray border, the tray diameter is less than pendant dish diameter, be provided with the guide arm on the planet wheel, the guide arm other end passes tray and the pendant dish in proper order and installs in the second locating sleeve that is located the top cap. The invention has the advantages of simple structure, low cost, reduction of manual operation cost and remarkable improvement of the whole plating efficiency.

Description

Automatic reverse printing hanging device for spring workpiece of vacuum ion coating machine
Technical Field
The invention belongs to the technical field of coating equipment, and particularly relates to a part of a vacuum ion coating machine.
Background
Ion plating is a new plating technique developed in recent decades, and is one of the latest and most advanced surface engineering techniques in the vacuum plating technique. The vacuum ion plating system applied in the aviation and aerospace fields is characterized in that a workpiece mounting and hanging system is arranged in a vacuum furnace, workpieces to be plated are positioned on the mounting and hanging system, a plurality of evaporation sources or target sources are arranged on the wall surfaces around the furnace, and an industrial personal computer is arranged outside the furnace and used for controlling the coordination work of various devices. In the working process, a workpiece is placed on the mounting system, then the furnace door is closed, the vacuum pump is started to vacuumize the furnace, and the heating device in the furnace is started to heat the furnace; and opening the air inlet hole on the inner wall surface of the furnace to introduce inert argon into the vacuum furnace when the temperature and the vacuum degree in the furnace both meet the given requirements. Then, high-voltage direct current is started to generate glow discharge between the evaporation source (anode) and the workpiece (cathode). Argon is ionized under the action of an electric field, a plasma dark space is formed around the cathode workpiece, the plasma dark space is attracted by negative high voltage of the cathode, and argon ions with positive charges violently bombard the surface of the workpiece to carry out ion cleaning on the workpiece. Meanwhile, the evaporated material particles enter a glow discharge area after being melted and evaporated, are ionized, and are flushed to the workpiece along with argon ions, and are gradually accumulated to form a coating layer firmly adhered to the surface of the workpiece.
The workpiece mounting and hanging device is a key component in vacuum ion plating equipment, and consists of a mounting and hanging mechanism and a gear transmission mechanism. The gear transmission mechanism is arranged in the bottommost cylindrical large chassis and comprises 1 sun gear, a plurality of planet gears, a mounting shaft fixedly connected with the planet gears and the like. The mounting mechanism is characterized in that a mounting shaft is fixedly provided with a supporting part for hanging a plating part, and for spring workpieces, the spring workpieces are hung on the supporting part. In the working process, the sun wheel drives the planet wheels to rotate, and each planet wheel drives the mounting shaft fixedly connected with the planet wheel to rotate, so that the supporting parts for suspending the plating part synchronously rotate along with the rotation of the mounting shaft. The industrial personal computer can control the starting, stopping, rotating speed and steering of the whole hanging device, so that the surface of the workpiece can receive the 'spraying' of the evaporation source in all directions, and the coating is ensured to be uniform.
However, during the operation of the existing vacuum ion plating equipment, there is a problem that it is inevitable that the evaporation source particles in the furnace are not deposited to these contact portions to form a coating due to the contact of the workpiece with the relevant hanging or supporting members on the tool system, resulting in a significant difference in the surface of the entire workpiece at the contact position from the surroundings, which is called "hanging mark". In order to eliminate the hanging print, field workers often interrupt the operation of equipment during the coating process, reduce the temperature in the furnace to a manually operable temperature, open a vacuum furnace door and adjust the contact positions of the workpieces and the supporting parts one by one, take a spring as an example, often turn over the workpieces and then hang the workpieces again, then close the furnace door and repeat the opening operation of the previous equipment, including vacuumizing again in the furnace, raising the temperature in the furnace again, introducing argon gas, starting an evaporation source, starting a workpiece hanging device and the like, and continue coating until the surfaces of the workpieces are completely covered by the coating to meet the technological requirements, wherein the process is commonly called "manual reverse printing". The manual reverse printing processing method has the following defects: on one hand, the workpieces in the furnace are directly exposed to the external environment within a period of time due to the fact that the furnace door is opened halfway, and the external environment cannot meet the environmental requirements in the vacuum furnace, so that the coating quality is possibly influenced due to the fact that the workpieces are greatly different before and after the coating environment, meanwhile, uncertain factors often exist in the process of manually moving the workpieces, manual accidents such as collision and the like are possible to happen, and the coating effect is also influenced; on the other hand, the manual reverse printing method consumes labor, electricity, material resources and time cost, on one hand, the positions of the workpieces need to be moved one by one manually, meanwhile, the interruption and restart processes of the whole equipment need to be finished additionally, and the output efficiency of the whole process flow is reduced seriously. Taking the vacuum ion aluminizing process of a spring workpiece as an example, the manual reverse printing process takes 1/3 or even more time, which often accounts for the time required for the entire plating process. In addition, in the manual reverse printing process, because the equipment needs to be vacuumized, cooled, heated and started again, a large amount of power resources and material resources such as argon are additionally consumed; meanwhile, manual reverse printing needs to be interrupted and related equipment is started, so that the running stability of the equipment is affected and the service life of the equipment is shortened.
Disclosure of Invention
The invention aims to overcome the defects of manual reverse printing in the prior art and provides the automatic reverse printing hanging device for the spring workpiece, which has the advantages of reasonable design, simple structure and low cost and is used for the vacuum ion plating machine.
The technical scheme for solving the technical problems is as follows: the utility model provides an automatic dress of falling seal of spring work piece hangs device for vacuum ion coating machine, including the planet wheel that is located the indoor rotation mechanism of vacuum ion coating, the planet wheel middle part is provided with the installation axle, install the epaxial end and be located the first locating sleeve on the top cap of rotation mechanism, be provided with the bearing between planet wheel and the installation axle, installation axle upper portion rotates and is connected with the pendant dish, be provided with evenly distributed's couple along the circumferencial direction on the pendant dish border, installation axle lower part threaded connection has the tray, the tray border is provided with the ram that corresponds with the couple along the circumferencial direction, the ram slope sets up on the tray border, the tray diameter is less than pendant dish diameter, be provided with the guide arm on the planet wheel, the guide arm other end passes tray and the pendant dish in proper order and installs in the second locating sleeve that is located the top cap.
As a preferred technical scheme, a stop lever is vertically arranged on one side, close to the mounting shaft, of the ram on the tray, and the height of the stop lever is smaller than the vertical height of the top end of the ram.
As a preferable technical scheme, the length of the cantilever is 1/3-1 times of the free height of the spring workpiece, the inclination angle beta of the cantilever is more than or equal to 90-1.05 arctan (D/L) and less than 90-arctan (D/L), D is the outer diameter of the spring workpiece, and L is the free height of the spring workpiece.
As a preferable technical scheme, the height of the stop lever is more than or equal to the thread pitch of the spring workpiece.
As a preferred technical scheme, the radius R of the hanging part disc1Comprises the following steps:
Figure BDA0003425338280000041
in the formula, N is the number of the hooks arranged on the tray.
As a preferred techniqueThe technical scheme is that the radius R of the tray is2Radius of the pendant disk R1The relationship of (1) is:
Figure BDA0003425338280000042
in the formula, d is the diameter of the spring wire of the spring workpiece.
As a preferred technical scheme, a bearing is arranged between the mounting shaft and the hanging piece disc.
The invention has the following beneficial effects:
according to the automatic reverse printing device, the tray is in threaded connection with the mounting shaft, the cantilever and the stop lever are arranged on the tray, the tray is connected with the planet wheel into a whole through the guide rod, the planet wheel rotates to drive the tray to ascend or descend, the cantilever and the stop lever provide supporting force for the spring workpiece in the ascending process of the tray, so that the spring workpiece is completely separated from the hook, automatic reverse printing is realized, a furnace door does not need to be opened, the possibility that the spring workpiece is polluted by the external environment due to the opening of the furnace door in the manual reverse printing process is effectively solved, the quality of a coating is ensured, and the required performance is achieved; need not to interrupt, open and stop, save a large amount of time and corresponding electric power, equipment, material loss (open and stop at every turn and all need cooling, evacuation, let in argon gas and wash, intensification etc.), reduce manual operation cost simultaneously, show and improve whole plating efficiency.
The invention can realize automatic reverse printing by changing in a very small range on the basis of the original vacuum ion film plating machine system, does not additionally increase power and a control mechanism, has extremely low cost and is easy to realize.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a schematic view of the structure of the tray 11 in fig. 1.
Detailed Description
The present invention will be described in further detail below with reference to the drawings and examples, but the present invention is not limited to the embodiments described below.
The outer diameter D of the spring-plated workpiece 16 of this embodiment is 27mm, the free height L is 75mm, the pitch is 8mm, and the wire diameter D of the spring workpiece 16 is 4 mm.
In fig. 1 and 2, the automatic reverse printing hanging device for spring workpieces of a vacuum ion plating machine of the present embodiment is formed by connecting a hanging plate 1, a top cover 2, a second positioning sleeve 3, a first positioning sleeve 4, a guide rod 5, a second bearing blank cap 6, a second bearing 7, a hook 8, a ram 9, a stop lever 10, a tray 11, a mounting shaft 12, a first bearing 13, a planet wheel 14, and a first bearing end cap 15, and is located in a vacuum ion plating chamber, a mounting shaft 12 is arranged in the middle of a planet wheel 14 of a rotation mechanism, the first bearing 13 and the first bearing end cap 15 are installed between the mounting shaft 12 and the planet wheel 14, the first bearing end cap 15 is used for fixing the first bearing 13, the planet wheel 14 can rotate around the mounting shaft 12 by the first bearing 13, the upper end of the mounting shaft 12 is located in the first positioning sleeve 4 on the top cover 2 of the rotation mechanism, a circular table is machined in the middle of the mounting shaft 12, the mounting circular truncated cone is provided with a pendant disk 1, and the radius R of the pendant disk 11Comprises the following steps:
Figure BDA0003425338280000051
wherein, N is the number of the hooks 8 on the hanging plate 1, N is 8, D is the outer diameter of the plated spring workpiece 16, D is 27mm, L is the free height of the plated spring workpiece 16, L is 75mm, R1The value is 80mm, install second bearing 7 and second bearing blank cap 6 between pendant dish 1 and the installation axle 12, second bearing blank cap 6 is used for fixed second bearing 7, 1 border of pendant dish is gone up along the circumferencial direction processing has 8 evenly distributed's couple 8, couple 8 are used for hanging spring work piece 16, installation axle 12 lower part is the screw thread section, threaded connection has tray 11 in the installation axle 12 screw thread section, the radius R of tray 112Comprises the following steps:
Figure BDA0003425338280000061
where d is the diameter of the wire of the spring workpiece, d is 4mm, and the radius R of the tray 11 of this embodiment is260mm, the edge of the tray 11 is provided with a ram 9 corresponding to the hook 8 along the circumferential direction, and the ram 9 is obliquely arranged at the edge of the tray 11Along the upper edge, the inclination angle beta of the ram 9 is more than or equal to 90-1.05 arctan (D/L) and less than or equal to 90-arctan (D/L), in the embodiment, the beta is 70 degrees, the length of the ram 9 is 2/3 times of the free height of the spring workpiece 16, namely the length of the ram 9 is 30mm, a stop lever 10 is vertically processed on one side, close to the mounting shaft 12, of the ram 9 on the tray 11, the height of the stop lever 10 is more than or equal to the screw pitch of the spring workpiece 16, the height of the stop lever 10 is 10mm in the embodiment, the stop lever 10 is used for preventing the spring from clockwise tilting and rotating around the top point of the ram 9, 2 guide rods 5 are fixedly installed on the planet wheel 14 through threaded fasteners, the other end of each guide rod 5 sequentially penetrates through the tray 11 and the hanging piece disc 1 to be installed in the second positioning sleeve 3 on the top cover 2, and the guide rods 5 are used for ensuring the tray 11 and the hanging piece disc 1 to synchronously rotate.
The planet wheel 14 rotates anticlockwise around the mounting shaft 12, the guide rod 5 drives the tray 11 and the hanging disc 1 to synchronously rotate anticlockwise around the mounting shaft 12, the tray 11 is in threaded connection with the mounting shaft 12 and rises simultaneously when rotating, the spring workpiece 16 is hung on the hook 8 on the hanging disc 1, when the tray 11 rises to a certain height, the picking rod 9 on the tray 11 extends into the spring workpiece 16 from the lower end of the spring workpiece 16, the upper portion of the spring workpiece 16 is gradually separated from the hook 8 along with the continuous upward movement of the tray 11, the lower end of the spring workpiece 16 is clamped between the picking rod 9 and the stop lever 10 of the tray 11, and when the spring workpiece 16 is completely separated from the hook 8, the picking rod 9 and the stop lever 10 provide supporting force for the spring workpiece 16, so that the spring workpiece 16 is exposed out of a hanging print, and ion plating is conveniently performed on the hanging print.
Example 2
In the present embodiment, the plated spring workpiece 16 has an outer diameter D of 10mm, a free height L of 32mm, a pitch of 4mm, and a wire diameter D of 2 mm.
The planet wheel 14 middle part sets up installation axle 12, install first bearing 13 and first bearing end cover 15 between installation axle 12 and the planet wheel 14, first bearing end cover 15 is used for fixed first bearing 13, first bearing 13 makes planet wheel 14 can rotate round installation axle 12, installation axle 12 upper end is located in first position sleeve 4 on the top cap 2 of rotation mechanism, the middle part processing has the installation round platform on the installation axle 12, install pendant dish 1 on the installation round platform, the radius R of pendant dish 11Is 30mm, a first hanging part disc 1 is arranged between the mounting shaft 12Two bearings 7 and second bearing stifle 6, second bearing stifle 6 are used for fixed second bearing 7, and 1 border of pendant dish is gone up and is processed 8 evenly distributed's couple 8 along the circumferencial direction, and couple 8 is used for hanging spring work piece 16, and installation axle 12 lower part is the screw thread section, and threaded connection has tray 11 in the installation axle 12 screw thread section, tray 11's radius R2The height of the lifting device is 23mm, a lifting rod 9 corresponding to a hook 8 is machined on the edge of a tray 11 in the circumferential direction, the lifting rod 9 is obliquely arranged on the edge of the tray 11, the inclination angle beta of the lifting rod 9 is 72 degrees, the length of the lifting rod 9 is 12mm, a stop rod 10 is vertically machined on one side, close to an installation shaft 12, of the lifting rod 9 on the tray 11, the height of the stop rod 10 is 5mm, the stop rod 10 is used for preventing a spring from clockwise oblique rotation around the top point of the lifting rod 9 in the supporting process, 2 guide rods 5 are fixedly installed on a planet wheel 14 through threaded fasteners, the other ends of the guide rods 5 sequentially penetrate through the tray 11 and a pendant disc 1 and are installed in a second positioning sleeve 3 located on a top cover 2, and the guide rods 5 are used for ensuring that the tray 11 and the pendant disc 1 rotate synchronously.

Claims (7)

1. The utility model provides an automatic dress hanging device that reverses printing of spring work piece for vacuum ion plating machine, is provided with installation axle (12) including planet wheel (14) that are located the indoor rotation mechanism of vacuum ion plating, planet wheel (14) middle part, and installation axle (12) upper end is located in first position sleeve (4) on rotation mechanism's top cap (2), its characterized in that: a bearing is arranged between the planet wheel (14) and the mounting shaft (12), the upper part of the mounting shaft (12) is rotatably connected with a pendant disc (1), hooks (8) which are uniformly distributed are arranged on the edge of the pendant disc (1) along the circumferential direction, the lower part of the mounting shaft (12) is in threaded connection with a tray (11), a ram (9) corresponding to the hooks (8) is arranged on the edge of the tray (11) along the circumferential direction, the ram (9) is obliquely arranged on the edge of the tray (11), the diameter of the tray (11) is smaller than that of the pendant disc (1), a guide rod (5) is arranged on the planet wheel (14), and the other end of the guide rod (5) sequentially penetrates through the tray (11) and the pendant disc (1) and is installed in a second positioning sleeve (3) positioned on the top cover (2).
2. The automatic back-printing hanging device for the spring workpiece of the vacuum ion plating machine as claimed in claim 1, wherein: and a stop lever (10) is vertically arranged on one side, close to the mounting shaft (12), of the ram (9) on the tray (11), and the height of the stop lever (10) is smaller than the vertical height of the top end of the ram (9).
3. The automatic back-printing hanging device for the spring workpiece of the vacuum ion plating machine as claimed in claim 1, wherein: the length of the cantilever rod (9) is 1/3-1 times of the free height of the spring workpiece (16), the inclination angle beta of the cantilever rod (9) is more than or equal to 90-1.05 arctan (D/L) and less than 90-arctan (D/L), D is the outer diameter of the spring workpiece 16, and L is the free height of the spring workpiece 16.
4. The automatic reverse printing hanging device for the spring workpiece of the vacuum ion plating machine as claimed in claim 2, wherein: the height of the stop lever (10) is more than or equal to the screw pitch of the spring workpiece (16).
5. The automatic reverse printing hanging device for spring workpieces of vacuum ion plating machine as claimed in claim 1, wherein said hanging plate (1) has a radius R1Comprises the following steps:
Figure FDA0003425338270000021
in the formula, N is the number of the hooks arranged on the tray (11).
6. The automatic reverse printing hanging device for spring workpiece of vacuum ion plating machine as claimed in claim 1, wherein said tray (11) radius R2Radius R of the pendant plate (1)1The relationship of (1) is:
Figure FDA0003425338270000022
in the formula, d is the diameter of the spring wire of the spring workpiece.
7. The automatic back-printing hanging device for the spring workpiece of the vacuum ion plating machine as claimed in claim 1, wherein: and a bearing is arranged between the mounting shaft (12) and the hanging plate (1).
CN202111576557.6A 2021-12-22 2021-12-22 Automatic reverse printing hanging device for spring workpiece of vacuum ion coating machine Active CN114395748B (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0428860A (en) * 1990-05-24 1992-01-31 Nano Tec Kk Turntable for ion plating device
JP2003268544A (en) * 2002-03-11 2003-09-25 Mitsubishi Materials Kobe Tools Corp Film deposition apparatus and method for tool
CN206089796U (en) * 2016-08-30 2017-04-12 科森科技东台有限公司 A hanger for pvd processing
CN107794506A (en) * 2016-08-30 2018-03-13 科森科技东台有限公司 Vacuum coating tool for mobile fingerprint ring
CN211471542U (en) * 2019-12-31 2020-09-11 中山市博顿光电科技有限公司 Rotary clamp and vacuum coating equipment
CN213172556U (en) * 2020-09-08 2021-05-11 深圳市长兴荣五金制品有限公司 Flat hanging type hanging rack device for vacuum coating circular workpiece

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0428860A (en) * 1990-05-24 1992-01-31 Nano Tec Kk Turntable for ion plating device
JP2003268544A (en) * 2002-03-11 2003-09-25 Mitsubishi Materials Kobe Tools Corp Film deposition apparatus and method for tool
CN206089796U (en) * 2016-08-30 2017-04-12 科森科技东台有限公司 A hanger for pvd processing
CN107794506A (en) * 2016-08-30 2018-03-13 科森科技东台有限公司 Vacuum coating tool for mobile fingerprint ring
CN211471542U (en) * 2019-12-31 2020-09-11 中山市博顿光电科技有限公司 Rotary clamp and vacuum coating equipment
CN213172556U (en) * 2020-09-08 2021-05-11 深圳市长兴荣五金制品有限公司 Flat hanging type hanging rack device for vacuum coating circular workpiece

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