CN107794506A - Vacuum coating tool for mobile fingerprint ring - Google Patents

Vacuum coating tool for mobile fingerprint ring Download PDF

Info

Publication number
CN107794506A
CN107794506A CN201610770606.2A CN201610770606A CN107794506A CN 107794506 A CN107794506 A CN 107794506A CN 201610770606 A CN201610770606 A CN 201610770606A CN 107794506 A CN107794506 A CN 107794506A
Authority
CN
China
Prior art keywords
bottom plate
ring
cover plate
vacuum coating
coating tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201610770606.2A
Other languages
Chinese (zh)
Inventor
吴惠明
郝立鹏
杜成锐
刘元
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kersen Technology Dongtai Co Ltd
Original Assignee
Kersen Technology Dongtai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kersen Technology Dongtai Co Ltd filed Critical Kersen Technology Dongtai Co Ltd
Priority to CN201610770606.2A priority Critical patent/CN107794506A/en
Publication of CN107794506A publication Critical patent/CN107794506A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50Substrate holders

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The present invention discloses a kind of vacuum coating tool for mobile fingerprint ring, including peg pipe, fixed screw, sleeve pipe, suspension member disk, cover plate, bottom plate, hanging hole and extension spring;The plate upper surface has some lug bosses for locating cellphone fingerprint ring and the lower bayonet slot positioned at bottom plate side end face, the cover plate includes being provided with several resigning through holes for lug boss insertion and the upper neck positioned at upper cover plate side end face, is connected between the upper cover plate and bottom plate by least 2 pairs of positioning through hole and positioning convex point;The suspension member disk further comprises outer ring, inner ring and some hooks, is connected between outer ring, inner ring by even muscle, and some hooks are circumferentially uniformly distributed along outer ring lateral surface.The present invention can at utmost utilize the space of coating machine, reduce production cost so that plated film more stable and uniform, improve product coating performance.

Description

Vacuum coating tool for mobile fingerprint ring
Technical field
The present invention relates to a kind of vacuum coating tool for mobile fingerprint ring, it is related to mobile phone pvd manufacture fields.
Background technology
At present, coating process is widely used in the numerous areas such as optics, semiconductor.Existing coating process is generally steamed with physics Based on plating method (PhysicsVaporDeposition, PVD).Its operating method is usually to be placed in one after workpiece to be coated is cleaned On supporting mechanism, it is sent into coating machine and is heated and vacuumized.After workpiece surrounding environment to be coated forms high vacuum state, add Hot thin-film material, by thin-film material by it is solid state transformed be gaseous state or ionic state, and space is passed through by evaporation source, arrived to be coated Workpiece surface, deposit on the surface and gradually form film.
However, the structure of existing most of supporting mechanisms is larger to the limitation of workpiece modes of emplacement, and coating machine Yin Gaozhen Empty and high temperature limitation is difficult to install other power set additional to drive supporting mechanism to drive workpiece mobile in coating process or turn It is dynamic so that in coating process, to be typically only capable of carrying out plated film to workpiece from a direction, so that color occurs in workpiece surface Difference, phenomena such as thickness of coating is uneven, influence to plate film quality.
The content of the invention
It is an object of the present invention to provide a kind of vacuum coating tool for mobile fingerprint ring, this is used for the true of mobile fingerprint ring Empty film coating jig can at utmost utilize the space of vacuum coating equipment, realize the plated film cycle more set products of output, reduce Production cost, and hanger in coating machine can simultaneously rotation-revolution, can from multiple directions to workpiece carry out plated film, effectively avoid out Existing aberration, phenomena such as thickness of coating is uneven so that plated film more stable and uniform, improve product coating performance.
To reach above-mentioned purpose, the technical solution adopted by the present invention is:A kind of vacuum coating for mobile fingerprint ring is controlled Tool, including peg pipe, fixed screw, sleeve pipe, suspension member disk, cover plate, bottom plate, hanging hole and extension spring, sleeve pipe are set on peg pipe, phase Described sleeve pipe is provided between adjacent suspension member disk, fixed screw is arranged on peg pipe both ends;
The plate upper surface has some lug bosses for locating cellphone fingerprint ring and the lower bayonet slot positioned at bottom plate side end face, institute State cover plate include be provided with several for lug boss insertion resigning through holes and the upper neck positioned at upper cover plate side end face, it is described on Connected between cover plate and bottom plate by least 2 pairs of positioning through hole and positioning convex point;
The hanging hole is fixed on bottom plate lower surface, and the extension spring includes spring and is located at the first buckle of both ends of the spring, the respectively Two buckles;The extension spring is installed on the lower surface of bottom plate, and its first buckle, the second buckle are connected in the upper neck in upper cover plate In the lower bayonet slot of bottom plate, so as to which cover plate and bottom plate are positioned together;
The suspension member disk further comprises outer ring, inner ring and some hooks, is connected between outer ring, inner ring by even muscle, if described Cladding hook is circumferentially uniformly distributed along outer ring lateral surface.
Further improved scheme is as follows in above-mentioned technical proposal:
1. in such scheme, the resigning shape of through holes is circle, and the boss shapes are square, this resigning through hole and convex The number in the portion of rising is equal.
2. in such scheme, the upper neck, lower bayonet slot number are 12, are evenly distributed on upper cover plate and bottom plate both sides.
3. in such scheme, the lug boss number is 21, is arranged in the row of 3 row 7, this lug boss and resigning through hole one One correspondence.
4. in such scheme, the hanging hole is fixed among the bottom plate back side in a welding manner.
5. in such scheme, the hanging hole is located at the middle and upper part of bottom plate.
6. in such scheme, there is 3 pairs of positioning through hole and positioning convex point between the upper cover plate and bottom plate, wherein 2 contrapositions In top, another pair is located at bottom.
7. in such scheme, there is spiral thread at the peg pipe both ends.
8. in such scheme, the hook is positioned at even muscle bearing of trend.
9. in such scheme, the hook number is 8 ~ 10.
10. in such scheme, the hook number is 9.
Because above-mentioned technical proposal is used, the present invention has following advantages compared with prior art:
The present invention is used for the vacuum coating tool of mobile fingerprint ring, rotation-revolution can be realized simultaneously in coating machine, from multiple Direction carries out plated film to workpiece, effectively avoids the occurrence of aberration, phenomena such as thickness of coating is uneven so that plated film is more stable equal It is even, product coating performance is improved, reduces production cost.
1. the present invention is used for the vacuum coating tool of mobile fingerprint ring, the plate upper surface has some for positioning hand The lug boss of machine fingerprint ring, the cover plate include being provided with several resigning through holes for supplying lug boss insertion, and a tool can be same The multiple products of Shi Jiagong, at utmost using the space of vacuum coating equipment, reduce production cost.
2. the suspension member disk further comprises outer ring, inner ring and some hooks, connected between outer ring, inner ring by even muscle, Some hooks are circumferentially uniformly distributed along outer ring lateral surface, and rotation-revolution can be realized simultaneously in coating machine by hanging keyboard, from Multiple directions carry out plated film to workpiece, effectively avoid the occurrence of aberration, phenomena such as thickness of coating is uneven so that plated film is more steady It is fixed uniform, improve product coating performance.
3. the present invention is used for the vacuum coating tool of mobile fingerprint ring, sleeve pipe is set on peg pipe, adjacent suspension member disk it Between be provided with described sleeve pipe, fixed screw is arranged on peg pipe both ends, multiple suspension member disks can be installed on a peg pipe, realize One plated film cycle more set product of output, at utmost using the space of coating machine, reduce production cost.
Brief description of the drawings
Accompanying drawing 1 is used for the vacuum coating jig structure schematic diagram one of mobile fingerprint ring for the present invention;
Accompanying drawing 2 is used for the vacuum coating jig structure schematic diagram two of mobile fingerprint ring for the present invention;
Accompanying drawing 3 is used for the vacuum coating jig structure schematic diagram three of mobile fingerprint ring for the present invention;
Accompanying drawing 4 is used for the vacuum coating jig structure schematic diagram four of mobile fingerprint ring for the present invention;
Accompanying drawing 5 is used for the vacuum coating jig structure schematic diagram five of mobile fingerprint ring for the present invention;
Accompanying drawing 6 is used for the vacuum coating jig structure schematic diagram six of mobile fingerprint ring for the present invention;
Accompanying drawing 7 is used for the vacuum coating jig structure schematic diagram seven of mobile fingerprint ring for the present invention.
In the figures above:1st, peg pipe;2nd, fixed screw;3rd, sleeve pipe;4th, suspension member disk;41st, link up with;42nd, outer ring;43rd, it is interior Circle;44th, muscle is connected;5th, cover plate;6th, bottom plate;7th, hanging hole;8th, spring;105th, resigning through hole;106th, lug boss;107th, positioning through hole; 108th, positioning convex point;109th, upper neck 110, lower bayonet slot;111st, extension spring;112nd, the first buckle;113rd, the second buckle.
Embodiment
Below in conjunction with the accompanying drawings and embodiment the invention will be further described:
Embodiment 1:A kind of vacuum coating tool for mobile fingerprint ring, including peg pipe 1, fixed screw 2, sleeve pipe 3, suspension member Disk 4, cover plate 5, bottom plate 6, hanging hole 7 and extension spring 8, sleeve pipe 3 are set on peg pipe 1, and the set is provided between adjacent suspension member disk 4 Pipe 3, fixed screw 2 are arranged on the both ends of peg pipe 1;
The upper surface of bottom plate 6 has some lug bosses 106 for locating cellphone fingerprint ring and the lower card positioned at the side end face of bottom plate 6 Groove 110, the cover plate 5 include being provided with several for the resigning through hole 105 of the insertion of lug boss 106 and positioned at the side end face of upper cover plate 5 Upper neck 109, connected between the upper cover plate 5 and bottom plate 6 by least 2 pairs of positioning through hole 107 and positioning convex point 108;
The hanging hole 7 is fixed on bottom plate lower surface, and the extension spring 104 includes spring 111 and is located at the of the both ends of spring 111 respectively One buckle 112, the second buckle 113;The extension spring 104 is installed on the lower surface of bottom plate 6, and its first buckle 112, the second buckle 113 are connected in the upper neck 109 of upper cover plate 5 and the lower bayonet slot 110 of bottom plate 6, so as to which cover plate 5 and bottom plate 6 are positioned at into one Rise;
The suspension member disk 4 further comprises outer ring 42, inner ring 43 and some hooks 41, passes through even muscle between outer ring 42, inner ring 43 44 connections, some hooks 41 are circumferentially uniformly distributed along the lateral surface of outer ring 42.
Above-mentioned resigning through hole 105 is shaped as circle, and the lug boss 106 is shaped as square, this resigning through hole 105 and projection The number in portion 106 is equal;Above-mentioned upper neck, the number of lower bayonet slot 109,110 are 12, are evenly distributed on 6 liang of upper cover plate 5 and bottom plate Side;The above-mentioned number of lug boss 106 is 21, is arranged in the row of 3 row 7, this lug boss 106 and resigning through hole 105 correspond.
Embodiment 2:A kind of vacuum coating tool for mobile fingerprint ring, including peg pipe 1, fixed screw 2, sleeve pipe 3, Suspension member disk 4, cover plate 5, bottom plate 6, hanging hole 7 and extension spring 8, sleeve pipe 3 are set on peg pipe 1, are set between adjacent suspension member disk 4 Sleeve pipe 3 is stated, fixed screw 2 is arranged on the both ends of peg pipe 1;
The upper surface of bottom plate 6 has some lug bosses 106 for locating cellphone fingerprint ring and the lower card positioned at the side end face of bottom plate 6 Groove 110, the cover plate 5 include being provided with several for the resigning through hole 105 of the insertion of lug boss 106 and positioned at the side end face of upper cover plate 5 Upper neck 109, connected between the upper cover plate 5 and bottom plate 6 by least 2 pairs of positioning through hole 107 and positioning convex point 108;
The hanging hole 7 is fixed on bottom plate lower surface, and the extension spring 104 includes spring 111 and is located at the of the both ends of spring 111 respectively One buckle 112, the second buckle 113;The extension spring 104 is installed on the lower surface of bottom plate 6, and its first buckle 112, the second buckle 113 are connected in the upper neck 109 of upper cover plate 5 and the lower bayonet slot 110 of bottom plate 6, so as to which cover plate 5 and bottom plate 6 are positioned at into one Rise;
The suspension member disk 4 further comprises outer ring 42, inner ring 43 and some hooks 41, passes through even muscle between outer ring 42, inner ring 43 44 connections, some hooks 41 are circumferentially uniformly distributed along the lateral surface of outer ring 42.
Above-mentioned hanging hole 7 is fixed among the bottom plate back side in a welding manner;Above-mentioned hanging hole 7 is located at the middle and upper part of bottom plate;On Stating has 3 pairs of positioning through hole and positioning convex point between upper cover plate 5 and bottom plate 6, wherein 2 are pointed to top, another pair is located at bottom; There is spiral thread at the above-mentioned both ends of peg pipe 1;Above-mentioned hook 41 is positioned at the even bearing of trend of muscle 44;The above-mentioned number of hook 41 is 8 ~ 10 It is individual;The above-mentioned number of hook 41 is 9.
During using vacuum coating tool for mobile fingerprint ring, the space of coating machine can be at utmost utilized, is realized One plated film cycle more set product of output, reduces production cost, and hanger in coating machine can rotation-revolution simultaneously, can be from multiple Direction carries out plated film to workpiece, effectively avoids the occurrence of aberration, phenomena such as thickness of coating is uneven so that plated film is more stable equal It is even, improve product coating performance.
The above embodiments merely illustrate the technical concept and features of the present invention, and its object is to allow person skilled in the art Scholar can understand present disclosure and implement according to this, and it is not intended to limit the scope of the present invention.It is all according to the present invention The equivalent change or modification that Spirit Essence is made, it should all be included within the scope of the present invention.

Claims (10)

  1. A kind of 1. vacuum coating tool for mobile fingerprint ring, it is characterised in that:Including peg pipe(1), fixed screw(2)、 Sleeve pipe(3), suspension member disk(4), cover plate(5), bottom plate(6), hanging hole(7)And extension spring(8), described sleeve pipe(3)It is set in peg pipe(1) On, adjacent suspension member disk(4)Between be provided with described sleeve pipe(3), fixed screw(2)Installed in peg pipe(1)Both ends;
    The bottom plate(6)Upper surface has some lug bosses for locating cellphone fingerprint ring(106)With positioned at bottom plate(6)Side end face Lower bayonet slot(110), the cover plate(5)Lug boss is supplied including being provided with several(106)Embedded resigning through hole(105)And position In upper cover plate(5)The upper neck of side end face(109), the upper cover plate(5)With bottom plate(6)Between pass through at least 2 pairs of positioning through hole (107)And positioning convex point(108)Connection;
    The hanging hole(7)It is fixed on bottom plate lower surface, the extension spring(104)Including spring(111)It is located at spring respectively(111) First buckle at both ends(112), the second buckle(113);The extension spring(104)It is installed on bottom plate(6)Lower surface, and its first Buckle(112), the second buckle(113)It is connected in upper cover plate(5)Upper neck(109)And bottom plate(6)Lower bayonet slot(110) It is interior, so as to by cover plate(5)And bottom plate(6)It is positioned together;
    The suspension member disk(4)Further comprise outer ring(42), inner ring(43)With some hooks(41), outer ring(42), inner ring(43) Between pass through even muscle(44)Connection, some hooks(41)Along outer ring(42)Lateral surface is circumferentially uniformly distributed.
  2. 2. the vacuum coating tool according to claim 1 for mobile fingerprint ring, it is characterised in that:The resigning through hole (105)It is shaped as circle, the lug boss(106)It is shaped as square, this resigning through hole(105)And lug boss(106)Number It is equal.
  3. 3. the vacuum coating tool according to claim 1 for mobile fingerprint ring, it is characterised in that:The upper neck, Lower bayonet slot(109,110)Number is 12, is evenly distributed on upper cover plate(5)And bottom plate(6)Both sides.
  4. 4. the vacuum coating tool according to claim 1 for mobile fingerprint ring, it is characterised in that:The lug boss (106)Number is 21, is arranged in the row of 3 row 7, this lug boss(106)With resigning through hole(105)Correspond.
  5. 5. the vacuum coating tool according to claim 1 for mobile fingerprint ring, it is characterised in that:The hanging hole(7) It is fixed in a welding manner among the bottom plate back side.
  6. 6. the vacuum coating tool according to claim 1 for mobile fingerprint ring, it is characterised in that:The hanging hole(7) Positioned at the middle and upper part of bottom plate.
  7. 7. the vacuum coating tool according to claim 1 for mobile fingerprint ring, it is characterised in that:The upper cover plate (5)With bottom plate(6)Between there is 3 pairs of positioning through hole and positioning convex point, wherein 2 are pointed to top, another pair is located at bottom.
  8. 8. the vacuum coating tool according to claim 1 for mobile fingerprint ring, it is characterised in that:The peg pipe (1)There is spiral thread at both ends.
  9. 9. the vacuum coating tool according to claim 1 for mobile fingerprint ring, it is characterised in that:The hook(41) Positioned at even muscle(44)Bearing of trend.
  10. 10. the vacuum coating tool according to claim 1 for mobile fingerprint ring, it is characterised in that:The hook (41)Number is 8 ~ 10.
CN201610770606.2A 2016-08-30 2016-08-30 Vacuum coating tool for mobile fingerprint ring Pending CN107794506A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610770606.2A CN107794506A (en) 2016-08-30 2016-08-30 Vacuum coating tool for mobile fingerprint ring

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610770606.2A CN107794506A (en) 2016-08-30 2016-08-30 Vacuum coating tool for mobile fingerprint ring

Publications (1)

Publication Number Publication Date
CN107794506A true CN107794506A (en) 2018-03-13

Family

ID=61528271

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201610770606.2A Pending CN107794506A (en) 2016-08-30 2016-08-30 Vacuum coating tool for mobile fingerprint ring

Country Status (1)

Country Link
CN (1) CN107794506A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110284177A (en) * 2019-07-30 2019-09-27 吴江市东晓表面处理科技有限公司 A kind of zinc-plated jig for electroplated product
CN114395748A (en) * 2021-12-22 2022-04-26 西安石油大学 Automatic reverse printing hanging device for spring workpiece of vacuum ion coating machine
CN115582306A (en) * 2022-10-12 2023-01-10 宁波丞达精机股份有限公司 Optical lens piece dust collecting equipment

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201268728Y (en) * 2008-08-04 2009-07-08 张嘉宏 Electroplating rack
CN102002679A (en) * 2010-12-20 2011-04-06 天津乾谕电子有限公司 Autorotation type work frame mechanism of vacuum evaporation coating
CN102653854A (en) * 2011-03-03 2012-09-05 鸿富锦精密工业(深圳)有限公司 Film coating device
CN202954085U (en) * 2012-11-01 2013-05-29 东莞钜升塑胶电子制品有限公司 Plated piece clamping device used for vacuum coating equipment
CN104264122A (en) * 2014-09-12 2015-01-07 南通星维油泵油嘴有限公司 Clamp for coating tapered surfaces of valve seats
CN104313545A (en) * 2014-09-26 2015-01-28 马瑞利汽车零部件(芜湖)有限公司 Storage rack of aluminizing machine
CN204490987U (en) * 2015-03-16 2015-07-22 广东交通职业技术学院 A kind of modified version vacuum plating hanger
CN105220208A (en) * 2015-09-09 2016-01-06 重庆鹏雷汽车配件有限公司 A kind of multi-layer type hanger
CN205024337U (en) * 2015-09-28 2016-02-10 合肥常菱汽车零部件有限公司 Disk electrophoresis spare hanger
CN205368524U (en) * 2015-12-04 2016-07-06 浙江金泽金属表面处理有限公司 Novel electroplating hanging tool
CN205501417U (en) * 2016-04-26 2016-08-24 成都极星等离子科技有限公司 Anchor clamps of porose blade of ready -package installation

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201268728Y (en) * 2008-08-04 2009-07-08 张嘉宏 Electroplating rack
CN102002679A (en) * 2010-12-20 2011-04-06 天津乾谕电子有限公司 Autorotation type work frame mechanism of vacuum evaporation coating
CN102653854A (en) * 2011-03-03 2012-09-05 鸿富锦精密工业(深圳)有限公司 Film coating device
CN202954085U (en) * 2012-11-01 2013-05-29 东莞钜升塑胶电子制品有限公司 Plated piece clamping device used for vacuum coating equipment
CN104264122A (en) * 2014-09-12 2015-01-07 南通星维油泵油嘴有限公司 Clamp for coating tapered surfaces of valve seats
CN104313545A (en) * 2014-09-26 2015-01-28 马瑞利汽车零部件(芜湖)有限公司 Storage rack of aluminizing machine
CN204490987U (en) * 2015-03-16 2015-07-22 广东交通职业技术学院 A kind of modified version vacuum plating hanger
CN105220208A (en) * 2015-09-09 2016-01-06 重庆鹏雷汽车配件有限公司 A kind of multi-layer type hanger
CN205024337U (en) * 2015-09-28 2016-02-10 合肥常菱汽车零部件有限公司 Disk electrophoresis spare hanger
CN205368524U (en) * 2015-12-04 2016-07-06 浙江金泽金属表面处理有限公司 Novel electroplating hanging tool
CN205501417U (en) * 2016-04-26 2016-08-24 成都极星等离子科技有限公司 Anchor clamps of porose blade of ready -package installation

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110284177A (en) * 2019-07-30 2019-09-27 吴江市东晓表面处理科技有限公司 A kind of zinc-plated jig for electroplated product
CN114395748A (en) * 2021-12-22 2022-04-26 西安石油大学 Automatic reverse printing hanging device for spring workpiece of vacuum ion coating machine
CN114395748B (en) * 2021-12-22 2023-03-10 西安石油大学 Automatic reverse printing hanging device for spring workpiece of vacuum ion coating machine
CN115582306A (en) * 2022-10-12 2023-01-10 宁波丞达精机股份有限公司 Optical lens piece dust collecting equipment

Similar Documents

Publication Publication Date Title
CN107794506A (en) Vacuum coating tool for mobile fingerprint ring
CN206089796U (en) A hanger for pvd processing
WO2015065144A1 (en) Glass substrate forming apparatus
US20150114293A1 (en) Thin-film depositing apparatus
US10428424B2 (en) Tray device, reaction chamber and MOCVD apparatus
JP2009088088A (en) Substrate treating device and method
JP2017117850A (en) Wafer support mechanism, chemical vapor deposition device, and manufacturing method of epitaxial wafer
US20200266093A1 (en) Substrate processing system
CN107958864A (en) Substrate board treatment and substrate processing method using same
CN206467287U (en) Vacuum coating tool for mobile fingerprint ring
CN105274468B (en) Nitridation frame for clamping longaxones parts
US20200208288A1 (en) Apparatus for electro-forming and apparatus for horizontal electro-forming
CN204315534U (en) Tray for eliminating warping of wafer
CN206467284U (en) Carrier for magnetron sputtering
CN207435504U (en) A kind of gear heat treatment frock
CN107794505A (en) Carrier for magnetron sputtering
KR20130043443A (en) Susceptor and chemical vapor deposition apparatus including the same
CN102424957B (en) Multi-layer product support for vapor deposition, and chemical vapor deposition reaction chamber
CN106191817A (en) Solar silicon wafers plated film graphite boat piece and graphite boat
US9279181B2 (en) Fluidized bed pyrocarbon coating
WO2015092527A1 (en) Susceptor with curved and concentric grooves on the substrates support
CN203582955U (en) Carbonitriding tooling for pit-type resistance furnace
CN207418862U (en) Plate electrode structures and plasma deposition apparatus
CN207616017U (en) A kind of positioning carrier
KR102442087B1 (en) Substrate processing system

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20180313