CN206089796U - A hanger for pvd processing - Google Patents
A hanger for pvd processing Download PDFInfo
- Publication number
- CN206089796U CN206089796U CN201620995648.1U CN201620995648U CN206089796U CN 206089796 U CN206089796 U CN 206089796U CN 201620995648 U CN201620995648 U CN 201620995648U CN 206089796 U CN206089796 U CN 206089796U
- Authority
- CN
- China
- Prior art keywords
- pipe
- hanger
- sleeve pipe
- pvd processing
- peg
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
The utility model discloses a hanger for pvd processing, including peg pipe, fixed screw, sleeve pipe and pendant dish, the pendant dish further includes outer lane, inner circle and a plurality of couple, through even muscle connection between outer lane, the inner circle, outer lane lateral surface circumference evenly distributed is followed to a plurality of couples, the sleeve pipe suit is provided with between the adjacent pendant dish on the peg pipe sleeve pipe, fixed screw are installed at peg pipe both ends. The utility model discloses can the at utmost utilizing coating machine's space, realizing a coating film cycle output multiunit product, reduction in production cost, and hanger revolution of rotation simultaneously in coating machine carry out the coating film from a plurality of directions to the work piece, effectively avoid appearing colour difference, cladding material uneven thickness phenomenon such as even for coating film stabilizing more is even, improves product cladding material performance.
Description
Technical field
This utility model is related to a kind of hanger for pvd processing, is related to mobile phone pvd manufacture fields.
Background technology
At present, coating process is widely used in the numerous areas such as optics, quasiconductor.Existing coating process is generally steamed with physics
Plating method（PhysicsVaporDeposition, PVD）Based on.Its operational approach be usually will workpiece to be coated clean after be placed in one
On supporting mechanism, send into coater and heated and evacuation.After workpiece surrounding to be coated forms high vacuum state, plus
Hot thin-film material, with by thin-film material by solid state transformed as gaseous state or ionic state, and space is passed through by evaporation source, is arrived to be coated
Surface of the work, deposits on the surface and gradually forms thin film.
However, the structure of existing most of supporting mechanisms limits larger to workpiece modes of emplacement, and coater Yin Gaozhen
The restriction of empty and high temperature is difficult to install other power set additional to drive supporting mechanism workpiece movement to be driven in coating process or is turned
It is dynamic so that in coating process, to be typically only capable of carrying out plated film to workpiece from a direction, so that surface of the work occurs color
Difference, the phenomenon such as thickness of coating is uneven, affect plating film quality.
The content of the invention
This utility model purpose is to provide a kind of hanger for pvd processing, and the hanger for being used for pvd processing can be with maximum
Space of the degree using vacuum coating equipment, realizes many set products of plated film cycle output, reduces production cost, and hanger in plating
In film machine can simultaneously rotation-revolution, plated film can be carried out to workpiece from multiple directions, be prevented effectively from that aberration, thickness of coating occur uneven
The phenomenon such as even so that plated film more stable and uniform, improves product coating performance.
To reach above-mentioned purpose, the technical solution adopted in the utility model is：A kind of hanger for pvd processing, including
Peg pipe, fixed screw, sleeve pipe and suspension member disk, this casing pipe sleeve are provided with the set between adjacent suspension member disk loaded on peg pipe
Pipe, fixed screw are arranged on peg pipe two ends；
The suspension member disk further includes outer ring, inner ring and some hooks, by even muscle connection, institute between outer ring, inner ring
State some hooks to be circumferentially uniformly distributed along outer ring lateral surface.
In above-mentioned technical proposal, further improved scheme is as follows：
1., in such scheme, there is spiral thread at the peg pipe two ends.
2., in such scheme, the hook is positioned at even muscle bearing of trend.
3., in such scheme, the hook number is 8 ~ 10.
4., in such scheme, the hook number is 9.
As above-mentioned technical proposal is used, this utility model has following advantages compared with prior art：
1. this utility model is used for the hanger of pvd processing, can realize rotation-revolution simultaneously in the coater, from multiple
Direction carries out plated film to workpiece, is prevented effectively from and the phenomenons such as aberration, thickness of coating be uneven occurs so that plated film is more stable equal
It is even, product coating performance is improved, production cost is reduced.
2. this utility model is used for the hanger of pvd processing, if the suspension member disk further includes outer ring, inner ring and cladding
Hook, by the connection of even muscle between outer ring, inner ring, some hooks are circumferentially uniformly distributed along outer ring lateral surface, and hanging keyboard can be with
Rotation-revolution is realized simultaneously in coater, plated film is carried out to workpiece from multiple directions, is prevented effectively from and aberration, thickness of coating is occurred
The phenomenon such as uneven so that plated film more stable and uniform, improves product coating performance.
3. this utility model is used for the hanger of pvd processing, and described sleeve pipe is set on peg pipe, between adjacent suspension member disk
Described sleeve pipe is provided with, and fixed screw is arranged on peg pipe two ends, can install multiple suspension member disks, one is realized on a peg pipe
The many set products of individual plated film cycle output, at utmost using the space of coater, reduce production cost.
Description of the drawings
Accompanying drawing 1 is the hanging tool structure schematic diagram one that this utility model is used for pvd processing；
Accompanying drawing 2 is the hanging tool structure schematic diagram two that this utility model is used for pvd processing；
Accompanying drawing 3 is the hanging tool structure schematic diagram three that this utility model is used for pvd processing.
In the figures above：1st, peg pipe；2nd, fixed screw；3rd, sleeve pipe；4th, suspension member disk；41st, link up with；42nd, outer ring；43rd, it is interior
Circle；44th, connect muscle.
Specific embodiment
Below in conjunction with the accompanying drawings and embodiment is further described to this utility model：
Embodiment 1：A kind of hanger for pvd processing, including peg pipe 1, fixed screw 2, sleeve pipe 3 and suspension member disk 4；Set
Pipe 3 is set on peg pipe 1, and described sleeve pipe 3 is provided between adjacent suspension member disk 4, and fixed screw 2 is arranged on 1 two ends of peg pipe；
The suspension member disk 4 further includes outer ring 42, inner ring 43 and some hooks 41, passes through between outer ring 42, inner ring 43
Even muscle 44 connects, and some hooks 41 are circumferentially uniformly distributed along 42 lateral surface of outer ring.
There is spiral thread at above-mentioned 1 two ends of peg pipe；41 company's of being located at 44 bearing of trend of muscle of the hook.
41 number of above-mentioned hook is 9；41 numbers of the hook are 9.
Embodiment 2：A kind of hanger for pvd processing, including peg pipe 1, fixed screw 2, sleeve pipe 3 and suspension member disk 4；Set
Pipe 3 is set on peg pipe 1, and described sleeve pipe 3 is provided between adjacent suspension member disk 4, and fixed screw 2 is arranged on 1 two ends of peg pipe；
The suspension member disk 4 further includes outer ring 42, inner ring 43 and some hooks 41, passes through between outer ring 42, inner ring 43
Even muscle 44 connects, and some hooks 41 are circumferentially uniformly distributed along 42 lateral surface of outer ring.
41 number of above-mentioned hook is 8 ~ 10；41 numbers of the hook are 9.
During using the hanger processed for pvd, at utmost using the space of coater a plated film cycle can be realized
The many set products of output, reduce production cost, and hanger can be while rotation-revolution, can enter to workpiece from multiple directions in coater
Row plated film, is prevented effectively from and the phenomenons such as aberration, thickness of coating be uneven occurs so that plated film more stable and uniform, improves product
Coating performance.
Above-described embodiment only to illustrate technology design of the present utility model and feature, its object is to allow and be familiar with technique
Personage will appreciate that content of the present utility model and implement according to this, protection domain of the present utility model can not be limited with this.
All equivalence changes made according to this utility model spirit or modification, should all cover protection domain of the present utility model it
It is interior.
Claims (5)
1. it is a kind of for pvd processing hanger, it is characterised in that：Including peg pipe（1）, fixed screw（2）, sleeve pipe（3）And extension
Part disk（4）, this sleeve pipe（3）It is set in peg pipe（1）On, adjacent suspension member disk（4）Between be provided with described sleeve pipe（3）, fixed spiral shell
Silk（2）Installed in peg pipe（1）Two ends；
The suspension member disk（4）Further include outer ring（42）, inner ring（43）With some hooks（41）, outer ring（42）, inner ring（43）
Between by even muscle（44）Connection, some hooks（41）Along outer ring（42）Lateral surface is circumferentially uniformly distributed.
2. it is according to claim 1 for pvd processing hanger, it is characterised in that：The peg pipe（1）There is spiral at two ends
Shape screw thread.
3. it is according to claim 1 for pvd processing hanger, it is characterised in that：The hook（41）Positioned at even muscle
（44）Bearing of trend.
4. it is according to claim 1 for pvd processing hanger, it is characterised in that：The hook（41）Number is 8 ~ 10
It is individual.
5. it is according to claim 3 for pvd processing hanger, it is characterised in that：The hook（41）Number is 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620995648.1U CN206089796U (en) | 2016-08-30 | 2016-08-30 | A hanger for pvd processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620995648.1U CN206089796U (en) | 2016-08-30 | 2016-08-30 | A hanger for pvd processing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206089796U true CN206089796U (en) | 2017-04-12 |
Family
ID=58477064
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620995648.1U Expired - Fee Related CN206089796U (en) | 2016-08-30 | 2016-08-30 | A hanger for pvd processing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206089796U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109371377A (en) * | 2018-12-15 | 2019-02-22 | 湖南玉丰真空科学技术有限公司 | A kind of adjustable substrate clamping mechanism |
| CN110241395A (en) * | 2019-06-03 | 2019-09-17 | 厦门阿匹斯智能制造系统有限公司 | A kind of vertical 3 D hanger |
| CN111334842A (en) * | 2020-04-09 | 2020-06-26 | 集美大学 | PVD electroplates and hangs frock structure |
| CN114395748A (en) * | 2021-12-22 | 2022-04-26 | 西安石油大学 | Automatic reverse printing hanging device for spring workpiece of vacuum ion coating machine |
| CN115505892A (en) * | 2022-09-21 | 2022-12-23 | 嘉兴晟亚实业有限公司 | Hanging tool for vapor deposition coating |
-
2016
- 2016-08-30 CN CN201620995648.1U patent/CN206089796U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109371377A (en) * | 2018-12-15 | 2019-02-22 | 湖南玉丰真空科学技术有限公司 | A kind of adjustable substrate clamping mechanism |
| CN110241395A (en) * | 2019-06-03 | 2019-09-17 | 厦门阿匹斯智能制造系统有限公司 | A kind of vertical 3 D hanger |
| CN110241395B (en) * | 2019-06-03 | 2023-11-14 | 厦门阿匹斯智能制造系统有限公司 | Vertical three-dimensional hanger |
| CN111334842A (en) * | 2020-04-09 | 2020-06-26 | 集美大学 | PVD electroplates and hangs frock structure |
| CN111334842B (en) * | 2020-04-09 | 2021-06-18 | 厦门科瑞声科技有限公司 | PVD electroplates and hangs frock structure |
| CN114395748A (en) * | 2021-12-22 | 2022-04-26 | 西安石油大学 | Automatic reverse printing hanging device for spring workpiece of vacuum ion coating machine |
| CN115505892A (en) * | 2022-09-21 | 2022-12-23 | 嘉兴晟亚实业有限公司 | Hanging tool for vapor deposition coating |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170412 Termination date: 20190830 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |