CN114365585A - 电路成型部件以及电子设备 - Google Patents
电路成型部件以及电子设备 Download PDFInfo
- Publication number
- CN114365585A CN114365585A CN202080063728.2A CN202080063728A CN114365585A CN 114365585 A CN114365585 A CN 114365585A CN 202080063728 A CN202080063728 A CN 202080063728A CN 114365585 A CN114365585 A CN 114365585A
- Authority
- CN
- China
- Prior art keywords
- substrate
- metal layer
- circuit
- forming member
- processing region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims abstract description 66
- 229910052751 metal Inorganic materials 0.000 claims abstract description 47
- 239000002184 metal Substances 0.000 claims abstract description 47
- 238000007747 plating Methods 0.000 claims abstract description 23
- 239000003054 catalyst Substances 0.000 claims abstract description 7
- 238000003475 lamination Methods 0.000 claims abstract description 4
- 238000009751 slip forming Methods 0.000 claims abstract description 3
- 239000000463 material Substances 0.000 claims description 23
- 238000003754 machining Methods 0.000 claims description 5
- 239000007769 metal material Substances 0.000 claims description 2
- 238000010030 laminating Methods 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 6
- 239000007788 liquid Substances 0.000 description 24
- 238000011282 treatment Methods 0.000 description 24
- 239000011259 mixed solution Substances 0.000 description 17
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 12
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 10
- 238000000465 moulding Methods 0.000 description 10
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 7
- 239000010949 copper Substances 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 6
- 229920001955 polyphenylene ether Polymers 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000001788 irregular Effects 0.000 description 5
- 229910052759 nickel Inorganic materials 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 229920000106 Liquid crystal polymer Polymers 0.000 description 4
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- -1 or the like Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 230000004913 activation Effects 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 238000007772 electroless plating Methods 0.000 description 3
- 239000000945 filler Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000006386 neutralization reaction Methods 0.000 description 3
- 239000004417 polycarbonate Substances 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- 229920002725 thermoplastic elastomer Polymers 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 229920000089 Cyclic olefin copolymer Polymers 0.000 description 2
- 239000004713 Cyclic olefin copolymer Substances 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- 239000004721 Polyphenylene oxide Substances 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 229920010524 Syndiotactic polystyrene Polymers 0.000 description 2
- XECAHXYUAAWDEL-UHFFFAOYSA-N acrylonitrile butadiene styrene Chemical compound C=CC=C.C=CC#N.C=CC1=CC=CC=C1 XECAHXYUAAWDEL-UHFFFAOYSA-N 0.000 description 2
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 description 2
- 239000004676 acrylonitrile butadiene styrene Substances 0.000 description 2
- QDWJUBJKEHXSMT-UHFFFAOYSA-N boranylidynenickel Chemical compound [Ni]#B QDWJUBJKEHXSMT-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 description 2
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920001707 polybutylene terephthalate Polymers 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229920006324 polyoxymethylene Polymers 0.000 description 2
- 229920006380 polyphenylene oxide Polymers 0.000 description 2
- 229920000379 polypropylene carbonate Polymers 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 229920005992 thermoplastic resin Polymers 0.000 description 2
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 description 1
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 1
- WSQZNZLOZXSBHA-UHFFFAOYSA-N 3,8-dioxabicyclo[8.2.2]tetradeca-1(12),10,13-triene-2,9-dione Chemical compound O=C1OCCCCOC(=O)C2=CC=C1C=C2 WSQZNZLOZXSBHA-UHFFFAOYSA-N 0.000 description 1
- 229930182556 Polyacetal Natural products 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000004873 anchoring Methods 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000011231 conductive filler Substances 0.000 description 1
- YOCUPQPZWBBYIX-UHFFFAOYSA-N copper nickel Chemical compound [Ni].[Cu] YOCUPQPZWBBYIX-UHFFFAOYSA-N 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- 238000013532 laser treatment Methods 0.000 description 1
- 239000010985 leather Substances 0.000 description 1
- 239000001630 malic acid Substances 0.000 description 1
- 235000011090 malic acid Nutrition 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- PIBWKRNGBLPSSY-UHFFFAOYSA-L palladium(II) chloride Chemical compound Cl[Pd]Cl PIBWKRNGBLPSSY-UHFFFAOYSA-L 0.000 description 1
- 239000000123 paper Substances 0.000 description 1
- ACVYVLVWPXVTIT-UHFFFAOYSA-N phosphinic acid Chemical compound O[PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-N 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920006289 polycarbonate film Polymers 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000001488 sodium phosphate Substances 0.000 description 1
- 229910000162 sodium phosphate Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- WOZVHXUHUFLZGK-UHFFFAOYSA-N terephthalic acid dimethyl ester Natural products COC(=O)C1=CC=C(C(=O)OC)C=C1 WOZVHXUHUFLZGK-UHFFFAOYSA-N 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/38—Coating with copper
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0284—Details of three-dimensional rigid printed circuit boards
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1603—Process or apparatus coating on selected surface areas
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1603—Process or apparatus coating on selected surface areas
- C23C18/1607—Process or apparatus coating on selected surface areas by direct patterning
- C23C18/1608—Process or apparatus coating on selected surface areas by direct patterning from pretreatment step, i.e. selective pre-treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1603—Process or apparatus coating on selected surface areas
- C23C18/1607—Process or apparatus coating on selected surface areas by direct patterning
- C23C18/1612—Process or apparatus coating on selected surface areas by direct patterning through irradiation means
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1635—Composition of the substrate
- C23C18/1639—Substrates other than metallic, e.g. inorganic or organic or non-conductive
- C23C18/1641—Organic substrates, e.g. resin, plastic
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/28—Sensitising or activating
- C23C18/285—Sensitising or activating with tin based compound or composition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/28—Sensitising or activating
- C23C18/30—Activating or accelerating or sensitising with palladium or other noble metal
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/36—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
- H01Q1/38—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith formed by a conductive layer on an insulating support
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
- H05K3/381—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1646—Characteristics of the product obtained
- C23C18/165—Multilayered product
- C23C18/1651—Two or more layers only obtained by electroless plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/2006—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30
- C23C18/2026—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30 by radiant energy
- C23C18/204—Radiation, e.g. UV, laser
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/2006—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30
- C23C18/2046—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30 by chemical pretreatment
- C23C18/2073—Multistep pretreatment
- C23C18/2086—Multistep pretreatment with use of organic or inorganic compounds other than metals, first
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/22—Roughening, e.g. by etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
- C23C18/34—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents
- C23C18/36—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents using hypophosphites
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09009—Substrate related
- H05K2201/09036—Recesses or grooves in insulating substrate
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09009—Substrate related
- H05K2201/09118—Moulded substrate
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0014—Shaping of the substrate, e.g. by moulding
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
- H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
Abstract
本发明提供一种在基材100上具有自由度地、以高密合性形成金属层200的电路成型部件300。在基材100的加工区域110中形成有金属层200的电路成型部件300中,在加工区域110中连续地形成有多个凹部120,各个凹部分别具有多个孔130,加工区域110,其宽度与相对于基材100的表面的最深深度的比率为10:1~6:1,加工区域110,宽度在20μm~200μm的范围内,相对于基材100的表面的最深深度在2μm~30μm的范围内,金属层200,能够在加工区域110内通过镀覆法进行层叠而形成,在进行所述层叠时与成为金属层200的金属进行反应的催化剂,附着在孔130以及凹部120中。
Description
技术领域
本发明涉及一种电路成型部件以及电子设备,特别地,涉及一种电气制品、通信终端、存储卡用转接头、光插头、光元件模块、电连接器、车辆等具有电子电路的各种各样的电路成型部件以及电子设备。
背景技术
在专利文献1中,公开了一种具有天线电路的存储卡用转接头。该天线电路,能够在通过导电镀覆而形成的立体电路成型部件(MID)中构成基础电路,并且通过由立体电路成型部件构成转接头本体的一部分或全部,从而能够对应于存储卡的种类适宜地设计转接头本体的形状。
专利文献1:日本特开2006-318217号公报
发明内容
发明要解决的技术问题
但是,在专利文献1中,没有公开任何关于电路成型部件的具体的内容,其是如何构成的,或者,具有什么样的结构等内容,无法通过阅读专利文献1得知。进一步,该电路成型部件,具有何种程度的性能,根据专利文献1也无法把握。
本发明要解决的技术问题是,提供一种在基材上具有自由度地、并且以高密合性形成金属层的电路成型部件。
另外,本发明要解决的技术问题是,提供一种具备这种电路成型部件的电气制品、通信终端、存储卡用转接头、光插头、光元件模块、电连接器、车辆等具有电子电路的各种各样的电子设备。
解决技术问题的方法
为了解决上述技术问题,本发明提供一种在基材的加工区域中形成有金属层的电路成型部件,在所述加工区域中,连续地多个凹部,各个凹部分别具有多个孔。
所述加工区域,其宽度与相对于所述基材的表面的最深深度的比率为10:1~6:1。
所述加工区域可以形成为:宽度在20μm~200μm的范围,相对于所述基材的表面的最深深度在2μm~30μm的范围内。
所述金属层,能够在所述加工区域内通过镀覆法进行层叠从而形成,在这种情况下,在进行层叠时与成为金属层的金属进行反应的催化剂,附着在所述孔以及凹部中。
如权利要求1所述的电路成型部件,所述多个凹部中的相互邻接的凹部的中心间的距离,是0.01mm~0.2mm。
能够使用在所述基材内不含金属材料的基材。
另外,本发明的电子设备,具备上述的电路成型部件。
附图说明
图1是本发明的实施方式的电路成型部件300的外观图。
图2是图1所示的电路成型部件300的制造步骤图。
图3是图1所示的电路成型部件300的制造步骤图。
图4是在图1所示的基材100上以高密合度形成金属层200的说明图。
图5是构成如图3(e)所示的填充线(hatch line)140的凹部120的侧面的SEM照片。
图6是示出图3(g)所示的加工区域110的平面的SEM照片。
图7是示出图1的金属层200的平面的SEM照片。
图8是图1的金属层200的断面的SEM照片。
附图标记说明
100 基材
110 加工区域
120 凹部
130 孔
140 填充线
150 轮廓线
200 金属层
300 电路成型部件
具体实施方式
以下,参照附图,说明本发明的实施方式。需要留意的点是,在各图中,为了容易理解发明,存在按照与实际不同的尺寸等绘制的位置。
图1是本发明的实施方式的电路成型部件300的外观图。在图1中,示出了电路成型部件300,其具备热可塑性树脂或热硬化性树脂等的基材100,和在基材100的加工区域110(图2(c))内形成的金属层200。
这里,示出了将电路成型部件300用作天线的示例,但是电路成型部件300除了天线以外,能够用于实现各种电子电路。另外,金属层200,能够根据电路成型部件300的用途布置其形状,进而,也能够根据具备电路成型部件300的电子设备的用途布置其形状,其材料的选择也能够有较高的自由度。
作为能够用作基材100的树脂的示例,可列举:ABS(Acrylonitrile ButadieneStyrene:丙烯腈丁二烯苯乙烯),PC(Polycarbonate:聚碳酸酯),PPC(PolypropyleneCarbonate:聚丙烯碳酸酯),PPE(Polyphenylene ether:聚苯醚),m-PPE(modified-Polyphenylene etheer:改性聚苯醚),LCP(Liquid crystal polymer:液晶聚合物),PBT(poly-butyleneterephthalate:聚对苯二甲酸丁二醇酯),TPE(ThermoplasticElastomer:热塑性弹性体),PPO(Polyphenylene oxide:聚苯醚),PEEK(Polyetheretherketone:聚醚醚酮),PCT(Polycyclo hexylene dimethyleneeterephthalate:聚环己二甲基对苯二甲酸酯)等。需要说明的是,在5G等的高频率电路的情况下,可以选择LCP、COC(环状烯烃共聚物)、SPS(间规聚苯乙烯)、POM(聚缩醛)、PI(聚酰亚胺)、PTFE(聚四氟乙烯)等的低介电正切的原材料。
另外,基材100,能够将上述各树脂的成分中的若干种进行适当组合。或者,基材100,例如,还能够以相对于总重量为5wt%~50wt%的方式含有玻璃纤维等的非导电填料,或含有5wt%~50wt%的锡粒子、铜粒子、锑粒子等。这种填料等,与使用图4在下文描述的孔130的情况相同,能够帮助提高基材100与金属层200的密合性。
进一步,基材100的材料,除了树脂以外,也能够选用纤维、纸、皮、石英玻璃等的非导电体。也就是说,基材100的材料,只要能够在电子电路中使用即可,能够从现有的用于基材的材料中选择。
金属层200,例如,能够以3μm~100μm的厚度形成。在本实施方式中,能够通过镀覆法,涂覆法、喷涂法形成金属层200。金属层200,能够选用铜、银、金、铂、镍或它们的合金作为材料。虽然在本实施方式中,对采用无电解镀覆的示例进行说明,但是也能够采用电镀覆、熔融镀覆、真空镀覆等。
图2~图3是图1所示的电路成型部件300的制造步骤图。
首先,准备作为加工对象的基材100(图2(a))。这里,基材100,对采用射出成形用聚碳酸酯树脂制成基材的例子进行说明。为了形成金属层200而对基材100进行加工的方法,能够采用:激光照射、冲压模具、模塑成型等,在本实施方式中,对通过激光照射来加工基材100的示例进行说明。
需要说明的是,激光的种类不限,能够使用固体激光、液体激光、气体激光、半导体激光、纤维激光等各种介质的激光。
接着,对基材100连续地进行激光照射以形成轮廓线150,该轮廓线150是想要形成金属层200的区域的外缘(图2(b))。激光照射的条件,能够根据基材100的硬度、电路成型部件300的用途等进行适当选择,作为一个示例,可以选用如下条件:构成轮廓线150的凹部120的底面部的直径大致为10μm~100μm、高度为2μm~30μm。
具体地,激光照射的条件能够是:波长为355nm~2000nm(例如,1064nm),透镜孔径为100mm~420mm(例如,254mm),最大功率为10W~30W(例如,20W),脉冲为4ns~200ns,频率为5khz~500khz。需要说明的是,例如在选用聚酰亚胺薄膜作为基材100的情况下,能够采用532nm的波长,例如在选用透明聚碳酸酯作为基材100的情况下,能够采用355nm的波长。
基材100,当被照射激光时,其被照射的点(及其附近)会因激光热而熔解。因此,在基材100上,在激光点处形成凹部120。形成了第1个凹部120之后,便使基材100与激光照射装置以300mm/sec~2500mm/sec的相对的移动速度沿着线状进行移动,形成与该凹部120相邻的凹部120。
需要说明的是,凹部120的形状,可以是略穹顶状,除此之外,也可以是大致圆锥状或大致棱锥状。另外,基材100与激光照射装置的移动速度越慢,则相互邻接的凹部120的中心间距离越短而越像U字槽,在采用冲压模具、模塑成型等的情况下,也能够形成V字槽。因此,在本说明书中使用的用语“凹部”,也包括U字槽、V字槽这样的槽。
另外,关注构成轮廓线150的凹部120和与之邻接的凹部120,以两者的略圆形的底面的面积例如彼此重叠50%~90%的方式,以相对较细的间距(pitch)照射激光。通常,基材100的耐热温度越高越好,这样就越能增加相互邻接的凹部120的重叠比例,因此可以提高激光的功率等。
图2(c)中,示出了图2(b)所示的区域A的放大图。图2(c)中,标记有箭头以示出凹部120的形成方向。如图2(c)所示,相互邻接的凹部120,以相当高的程度重叠。因此,当关注刚形成的凹部120时,虽然在箭头的前侧(图面右侧)存在画出凹部120的底面的边界线,但是在箭头的后侧(图面左侧)画出凹部120的底面的边界线已经发生熔解因而不存在。
之后,在想要形成轮廓线150的位置连续地照射激光,完成轮廓线150(图2(d))。如已经叙述的,轮廓线150是指想要形成金属层200的区域的外缘,因此被轮廓线150封闭的区域成为加工区域110。
需要说明的是,加工区域110,虽然取决于电路成型部件300的用途·规模,但是对于线状的区域来说,例如形成为,宽度在20μm~200μm的范围内,最深深度在2μm~30μm的范围内。即,加工区域110,宽度与最深深度的比率为10:1~6:1。
以下,为了对加工区域110中的加工状态进行详细说明,暂且关注区域A的放大位置以进行说明。
当轮廓线150的形成结束时,开始对加工区域110全面地进行激光照射。在本实施方式中,在加工区域110中,连续地且线状地进行激光照射。将如此形成的连续的凹部120,称作填充线140。
用于形成填充线140的激光照射条件,可以与形成轮廓线150的情况相同,但是为了提高基材100与金属层200的密合性,在填充线140中相互邻接的凹部120,就底面的面积而言,以不重叠或相互重叠20%以下的方式,使用相对较粗的间距照射激光(图3(e))。
这里,示出了填充线140中相互邻接的凹部120以10%左右重叠的状态。然而,即使在填充线140中按照相互邻接的凹部120的底面不会重叠的条件照射激光,这些凹部120之间的区域也会因激光照射而熔解,在大多数情况下等于进行了加工。
需要说明的是,虽然在图3(e)中示出了,在不与轮廓线150重叠的状态下的、第1行的填充线140,但是填充线140中的凹部120,也能够在与轮廓线150重叠的状态下形成。
若继续在填充线140中进行凹部120的形成,则可最终完成第1行的填充线140。在本实施方式中,当第1行的填充线140完成后,隔着1行填充线140的间隔,形成第3行的填充线140(图3(f))。
即,在本实施方式中,在第2行的填充线140的形成之前,先形成第3行的填充线140。需要说明的是,相互邻接的填充线140的中心间距离,能够设为0.01mm~0.2mm。
在本实施方式中,像这样,形成奇数行的填充线140之后,形成偶数行的填充线140。通过这样,不会在刚熔解且为相对高温的区域中形成凹部120,能够避免后续形成的凹部120的形状变形。特别地,在选用热可塑性树脂作为基材100的材料的情况下,很有效。
然而,在填充线140相对较长的情况下等,已熔解的位置会被外部空气冷却,因此,并不必须在形成奇数行的填充线140之后形成偶数行的填充线140。
若继续在填充线140中形成凹部120,则可形成整行的填充线140(图3(g))。之后,虽然没有图示,但是例如在与各行的填充线140正交的方向上形成第1列的填充线140,接着,例如形成第3列、第5列这样的奇数列的填充线140,之后,形成偶数列的填充线140。
像这样,当整行整列的填充线140的形成结束时,在加工区域110中全面地形成了多个凹部10,加工处理结束(图3(h))。然而,并非必须在行方向和列方向这样的彼此不同的方向上形成填充线140,能够仅仅在一个方向上形成填充线140,即,仅仅在行方向上形成填充线140。
在这种情况下,使在行列方向上相互邻接的凹部120的中心间距离,大致为凹部120的直径,或者,也可以使得在行列方向上相互邻接的凹部120的底面重叠5%~15%左右。
另外,需要注意的是,轮廓线150以及填充线140,均不限于形成为直线状,也包括形成为曲线状。具体地,如图3(h)所示,加工区域110中包括漩涡状部分,因此在该部分形成的轮廓线150以及填充线140是曲线状。
在本实施方式中,在图3(e)以及图3(f)中,示出了相对于轮廓线150平行地形成各行的填充线140的示例,但是各填充线140的形成方向,不一定必须相对于轮廓线150平行。
因此,例如,可以在相对于轮廓线150的延伸方向,例如成30°、45°、60°、90°之类的所需的角度的方向上,形成各行的填充线140,进一步,也可以在相对于各行的填充线,例如成30°、45°、60°、90°之类的所需要的角度的方向上,形成各列的填充线140。
另外,各填充线140,不限于在多个凹部120以行列状的方式彼此直交的状态下形成填充线140,例如,也可以在多个凹部120呈千鸟状或者蜂窝状地进行排列的状态下形成填充线140。
当对基材100的激光处理结束时,熔解时剥落而成为微粒的基材100的一部分,会附着于基材100的表面。因此,例如,使用超声波清洗机清洗基材100,或者使用吹气枪对基材100吹射空气,从基材100上除去微粒。
图4是对在图1所示的基材100上以较高的密合度形成金属层200的情况进行说明的图。如图4所示,凹部120具有呈不规则的形状的多个孔130。各孔130,在为了形成凹部120而照射激光时发生熔解,因而产生。
在本实施方式中,在基材100上形成金属层200之前,进行在下文说明的前处理。在该前处理的一个步骤中,与成为金属层200的镀覆材料相对应的催化剂,不仅附着于凹部120,还附着于各孔130。
因此,镀覆材料与附着在凹部120以及各孔130中的催化剂进行反应且进行层叠,从而形成金属层200,并且即使对所完成的金属层200沿剥离的方向施加应力,由于成为不规则的形状的各孔130可得到锚定效果,因此金属层200难以从基材100剥离。
也就是说,在本实施方式中,在形成不规则的形状的各孔130的条件下形成凹部120,通过该孔130的形状发挥锚定效果,从而得到对基材100具有较高的密合度的金属层200。
因此,在采用通过激光照射形成凹部120的方法的情况下,也就是说,在采用通过冲压模具或模塑成型形成凹部120的方法的情况下,为了能够形成与凹部120以及孔130对应的部分,使用具有与其对应的形状的模具。
接着,对为了在基材100上形成金属层200而进行的前处理进行说明。前处理,因基材100以及金属层200的原材料等而不同,这里,对金属层200的材料选用镍铜的情况下的典型例进行说明。前处理,包括在下文中说明的表面处理、中和处理、附着处理、活性化处理。
在表面处理中,进行碱性蚀刻处理以使基材100的表面粗化。表面处理,在对200mL~400mL的高浓度(例如,98%)氢氧化钠添加1L纯水而形成约1L的混合液的液槽中,将基材100含浸1分钟~20分钟(例如,5分钟)。此时,混合液的温度,例如,能够是50℃~70℃左右。之后,从液槽中取出基材100,清洗干净。
在中和处理中,使用酸对基材100的表面的碱性状态进行中和。中和处理,例如在对50mL~200mL的35%浓度的盐酸添加1L纯水而形成的约1L的混合液的液槽中,将基材100例如含浸1分钟~5分钟。此时,混合液的温度,例如,能够是10℃~25℃左右。之后,从液槽中取出基材100,清洗干净。
在附着处理中,使催化剂附着,该催化剂与想要通过对基材100进行镀覆而层叠的金属相对应。附着处理,例如,在对3mL~10mL的锡、5mL~15mL的盐酸,30mL~150mL的硫酸钯添加1L纯水而形成的约1L的混合液的液槽中,将基材100例如含浸1分钟~10分钟。此时,混合液的温度,例如,能够是10℃~25℃左右。之后,从液槽中取出基材100,清洗干净。
或者,附着处理,例如,在对60mL~200mL的锡、150mL~300mL的盐酸、10mL~450mL的氯化钯添加1L纯水而形成的约1L的混合液的液槽中,将基材100例如含浸1分钟~10分钟。此时,混合液的温度,例如,能够是10℃~25℃左右。之后,将基材100从液槽中取出,清洗干净。
在活性化处理中,使附着于基材100的催化剂活性化。活性化处理,例如在对10mL~50mL的盐酸、10mL~50mL的过氧化氢、30mL~100mL的硫酸添加1L纯水而形成的约1L的混合液的液槽中,将基材100例如含浸数秒钟~10分钟。此时,混合液的温度,例如,能够是10℃~25℃左右。之后,将基材100从液槽中取出,清洗干净。
接着,对于无电解镀覆,以金属层200为铜层的情况为例进行说明。无电解镀覆处理,包括下文中说明的冲击镀覆处理、镀铜处理、镀镍处理、后处理、干燥处理。
在冲击镀覆处理中,在所需要的对300mL~350mL的无电解镍硼冲击镀覆液添加1L纯水而得到的约1L的、且pH调节为6.3~6.8的液体的液槽中,将基材100例如含浸数秒钟~10分钟。此时,混合液的温度,例如,能够是50℃~70℃左右。之后,将基材100从液槽中取出,清洗干净。需要留意的点是,冲击镀覆处理,不是必须进行的处理。
作为无电解镍硼冲击镀覆液,例如,能够使用以6%~10%的单乙醇胺、25%~35%的硫酸镍、1%~10%的氨和10%~20%的次磷酸的含有比例用纯水进行稀释的混合液。
在镀铜处理中,在所需要的对220mL~270mL的无电解铜镀覆液添加1L纯水而得到的约1L的混合液的液槽中,将基材100含浸例如2小时~3小时。此时,混合液的温度,例如,能够是40℃~55℃左右。之后,将基材100从液槽中取出,清洗干净。
作为无电解铜镀覆液,例如,能够使用以40~50%的氢氧化钠和6%~12%的硫酸铜的含有比例用纯水进行稀释的混合液。
在镀镍处理中,在所需要的对120mL~170mL的无电解镍镀覆液添加1L纯水而得到的约1L的、且pH调节为6.0~6.7的混合液的液槽中,将基材100含浸例如数秒~10分钟。此时,混合液的温度,例如,能够是40℃~55℃左右。之后,将基材100从液槽中取出,清洗干净。
作为无电解镍镀覆液,例如,能够使用以10%的乳酸、4%的氢氧化钠、45%的硫酸镍、20%的磷酸钠、4.5%的氢氧化钠和3%的苹果酸的含有比例用纯水进行稀释得到的混合液。
在后处理中,在所需要的对50mL~100mL的后处理液添加1L纯水而得到的约1L的混合液的液槽中,将基材100例如浸渍30秒钟~2分钟。此时,混合液的温度,例如,能够是30℃~70℃左右。之后,将基材100从液槽中取出,清洗干净。
在干燥处理中,将基材100搬入未图示的干燥机中,在50℃~100℃的温度下干燥15分钟~60分钟。
图5,是构成如图3(e)所示的填充线140的凹部120的侧面的SEM照片。图5(a)示出1000倍的放大照片,图5(b)示出2000倍的放大照片,图5(c)示出5000倍的放大照片,图5(d)示出10000倍的放大照片。
如图5(a)~图5(d)所示,可知在凹部120的侧面形成有多个孔130。各孔130,其形状不规则,因此大小也不规则,大致上,存在大量的开口尺寸为10μm~30μm左右的孔。
图6,是示出图3(g)所示的加工区域110的平面的SEM照片。图6(a)示出200倍的放大照片,图6(b)示出1000倍的放大照片。这里示出了,彼此邻接的凹部120以基本上不会重叠的方式形成的状态。
如图6(a)以及图6(b)所示,在加工区域110中以行列状形成凹部120。按照条件实施激光照射,微细地观察可知,难以按照该条件有规则地形成凹部120,可知可形成约400μm的凹部120。
图7(a)以及图7(b),是示出图1的金属层200的平面的SEM照片。图7(a)示出200倍的放大照片,图7(b)示出500倍的放大照片。如图7(a)以及图7(b)所示,可知在基材100的加工区域110的表面上全面地形成了金属层200。
图8(a)以及图8(b),是示出图1的金属层200的断面的SEM照片。图8(a)示出200倍的放大照片,图8(b)示出500倍的放大照片。由图8(a)以及图8(b)可知,以约400μm的间距不隔着间隔而连续地形成了向下略穹顶状的凹部120。需要说明的是,为了得到在本发明书中记载的断面照片,使用RYOBI公司制造的研磨机FG-18切断基材100。
另外,在各凹部120中,目视观察可知,存在相对于其表面沿着放射方向呈棘状的多个孔130。并且可知,由于金属层200位于各孔130中,因此金属层200与基材100的连接变得牢固。
如以上说明,根据本实施方式的电路成型部件300,能够在基材100上,具有自由度地、以较高的密合性形成金属层200。因此,电路成型部件300,能够用于各种各样的电气制品、通信终端、存储卡用转接头、光插头、光元件模块、电连接器、车辆等的电子电路中。
Claims (7)
1.一种电路成型部件,其中,在基材的加工区域中形成有金属层,
在所述加工区域中,连续地形成有多个凹部,各个凹部分别具有多个孔。
2.如权利要求1所述的电路成型部件,其中,所述加工区域,宽度与相对于所述基材的表面的最深深度的比率为10:1~6:1。
3.如权利要求1所述的电路成型部件,其中,所述加工区域,宽度在20μm~200μm的范围内,相对于所述基材的表面的最深深度在2μm~30μm的范围内。
4.如权利要求1所述的电路成型部件,其中,所述金属层,是在所述加工区域内通过镀覆法进行层叠从而形成,
在进行所述层叠时,与成为金属层的金属进行反应的催化剂,附着在所述孔以及凹部中。
5.如权利要求1所述的电路成型部件,其中,所述多个凹部中的相互邻接的凹部的中心间的距离,为0.01mm~0.2mm。
6.如权利要求1所述的电路成型部件,其中,所述基材内不含有金属材料。
7.一种电子设备,具有如权利要求1所述的电路成型部件。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019-166902 | 2019-09-13 | ||
JP2019166902 | 2019-09-13 | ||
PCT/JP2020/034488 WO2021049624A1 (ja) | 2019-09-13 | 2020-09-11 | 回路成型部品及び電子機器 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN114365585A true CN114365585A (zh) | 2022-04-15 |
Family
ID=74867037
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202080063728.2A Pending CN114365585A (zh) | 2019-09-13 | 2020-09-11 | 电路成型部件以及电子设备 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20220316069A1 (zh) |
EP (1) | EP4029970A4 (zh) |
JP (1) | JPWO2021049624A1 (zh) |
KR (1) | KR20220062533A (zh) |
CN (1) | CN114365585A (zh) |
WO (1) | WO2021049624A1 (zh) |
Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10229268A (ja) * | 1998-03-26 | 1998-08-25 | Matsushita Electric Works Ltd | 回路板の製造方法 |
JP2002237663A (ja) * | 2001-02-09 | 2002-08-23 | Mitsui Chemicals Inc | 金属回路付樹脂基板およびその製造方法 |
US20050048770A1 (en) * | 2003-08-25 | 2005-03-03 | Shinko Electric Industries Co., Ltd. | Process for manufacturing a wiring board having a via |
CN1638909A (zh) * | 2001-05-18 | 2005-07-13 | 焊接研究院 | 表面改性 |
WO2008149835A1 (ja) * | 2007-06-04 | 2008-12-11 | Kaneka Corporation | 集積型薄膜太陽電池とその製造方法 |
US20090317729A1 (en) * | 2008-06-18 | 2009-12-24 | Hoya Corporation | Mask blank glass substrate, mask blank glass substrate manufacturing method, mask blank manufacturing method, and mask manufacturing method |
JP2010064251A (ja) * | 2008-09-08 | 2010-03-25 | Nippon Steel Corp | 高温耐火レンガのレーザ加工方法 |
US20100163286A1 (en) * | 2008-12-29 | 2010-07-01 | Au Optronics Corporation | Circuit Board Structure and Manufacturing Method Thereof and Liquid Crystal Display Containing the Same |
US20150034366A1 (en) * | 2009-10-30 | 2015-02-05 | Panasonic Corporation | Circuit board |
JP2016124024A (ja) * | 2015-01-08 | 2016-07-11 | ダイセルポリマー株式会社 | 表層部に多孔構造を有する金属成形体の製造方法 |
JP2016172273A (ja) * | 2015-03-17 | 2016-09-29 | 武二 新井 | レーザ照射による部材または製品の表面処理方法及び表面処理済部材 |
JP2018182356A (ja) * | 2017-04-03 | 2018-11-15 | 矢崎総業株式会社 | 伝送線路及びその製造方法 |
CN109072436A (zh) * | 2016-04-26 | 2018-12-21 | 株式会社村田制作所 | 陶瓷电子部件的制造方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09107168A (ja) * | 1995-08-07 | 1997-04-22 | Mitsubishi Electric Corp | 配線基板のレーザ加工方法、配線基板のレーザ加工装置及び配線基板加工用の炭酸ガスレーザ発振器 |
JP2003188497A (ja) * | 2001-12-18 | 2003-07-04 | Yasunaga Corp | 導体回路の形成方法 |
JP2006135090A (ja) * | 2004-11-05 | 2006-05-25 | Seiko Epson Corp | 基板の製造方法 |
US20070220744A1 (en) * | 2005-03-22 | 2007-09-27 | Cluster Technology Co., Ltd. | Wiring Circuit Board Producing Method and Wiring Circuit Board |
JP2006332615A (ja) * | 2005-04-25 | 2006-12-07 | Brother Ind Ltd | パターン形成方法 |
JP2006318217A (ja) | 2005-05-12 | 2006-11-24 | Matsushita Electric Works Ltd | メモリカード用アダプタ |
JP2007027312A (ja) * | 2005-07-14 | 2007-02-01 | Fujifilm Holdings Corp | 配線基板の製造方法および配線基板 |
US8698003B2 (en) * | 2008-12-02 | 2014-04-15 | Panasonic Corporation | Method of producing circuit board, and circuit board obtained using the manufacturing method |
US10383233B2 (en) * | 2015-09-16 | 2019-08-13 | Jabil Inc. | Method for utilizing surface mount technology on plastic substrates |
-
2020
- 2020-09-11 WO PCT/JP2020/034488 patent/WO2021049624A1/ja unknown
- 2020-09-11 JP JP2020560424A patent/JPWO2021049624A1/ja active Pending
- 2020-09-11 EP EP20862066.6A patent/EP4029970A4/en active Pending
- 2020-09-11 CN CN202080063728.2A patent/CN114365585A/zh active Pending
- 2020-09-11 US US17/641,424 patent/US20220316069A1/en active Pending
- 2020-09-11 KR KR1020227008880A patent/KR20220062533A/ko active Search and Examination
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10229268A (ja) * | 1998-03-26 | 1998-08-25 | Matsushita Electric Works Ltd | 回路板の製造方法 |
JP2002237663A (ja) * | 2001-02-09 | 2002-08-23 | Mitsui Chemicals Inc | 金属回路付樹脂基板およびその製造方法 |
CN1638909A (zh) * | 2001-05-18 | 2005-07-13 | 焊接研究院 | 表面改性 |
US20050048770A1 (en) * | 2003-08-25 | 2005-03-03 | Shinko Electric Industries Co., Ltd. | Process for manufacturing a wiring board having a via |
WO2008149835A1 (ja) * | 2007-06-04 | 2008-12-11 | Kaneka Corporation | 集積型薄膜太陽電池とその製造方法 |
US20090317729A1 (en) * | 2008-06-18 | 2009-12-24 | Hoya Corporation | Mask blank glass substrate, mask blank glass substrate manufacturing method, mask blank manufacturing method, and mask manufacturing method |
JP2010064251A (ja) * | 2008-09-08 | 2010-03-25 | Nippon Steel Corp | 高温耐火レンガのレーザ加工方法 |
US20100163286A1 (en) * | 2008-12-29 | 2010-07-01 | Au Optronics Corporation | Circuit Board Structure and Manufacturing Method Thereof and Liquid Crystal Display Containing the Same |
US20150034366A1 (en) * | 2009-10-30 | 2015-02-05 | Panasonic Corporation | Circuit board |
JP2016124024A (ja) * | 2015-01-08 | 2016-07-11 | ダイセルポリマー株式会社 | 表層部に多孔構造を有する金属成形体の製造方法 |
JP2016172273A (ja) * | 2015-03-17 | 2016-09-29 | 武二 新井 | レーザ照射による部材または製品の表面処理方法及び表面処理済部材 |
CN109072436A (zh) * | 2016-04-26 | 2018-12-21 | 株式会社村田制作所 | 陶瓷电子部件的制造方法 |
JP2018182356A (ja) * | 2017-04-03 | 2018-11-15 | 矢崎総業株式会社 | 伝送線路及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
EP4029970A4 (en) | 2023-10-11 |
US20220316069A1 (en) | 2022-10-06 |
WO2021049624A1 (ja) | 2021-03-18 |
KR20220062533A (ko) | 2022-05-17 |
JPWO2021049624A1 (zh) | 2021-03-18 |
EP4029970A1 (en) | 2022-07-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN106574369B (zh) | 镀覆部件的制造方法 | |
US11503718B2 (en) | Application specific electronics packaging systems, methods and devices | |
JP2641355B2 (ja) | 円錐状接点を有する電気的接続体 | |
US20090120660A1 (en) | Electrical member and method of manufacturing a printed circuit board using the same | |
CN1930928A (zh) | 具有导电特性的部分蚀刻的电介质膜 | |
KR102608521B1 (ko) | 인쇄회로기판 및 이의 제조 방법 | |
CN101102648B (zh) | 贯通孔形成方法和配线电路基板的制造方法 | |
CN111356664B (zh) | 使用保护性材料的贯穿玻璃通孔的制造 | |
US4703559A (en) | Method for producing connecting elements for electrically joining microelectronic components | |
US5863405A (en) | Process for forming conductive circuit on the surface of molded article | |
CN114365585A (zh) | 电路成型部件以及电子设备 | |
JP7474360B2 (ja) | メッキ部品の製造方法及び基材の成形に用いられる金型 | |
KR101448256B1 (ko) | 안테나의 제조 방법 | |
US20090115444A1 (en) | Anisotropic conductive sheet, its production method, connection method and inspection method | |
TW200301673A (en) | Circuit board and method of producing the same | |
US10304762B2 (en) | Molded interconnect device, manufacturing method for molded interconnect device, and circuit module | |
JP3784368B2 (ja) | 回路基板およびその製造方法 | |
CN210182335U (zh) | 五面附金属包封封装结构 | |
JP2013254892A (ja) | 配線基板の製造方法 | |
EP0711102B1 (en) | Method for forming a conductive circuit on the surface of a molded product | |
KR101868827B1 (ko) | 통신단말기용 도금 안테나 캐리어의 레이저 가공 방법 | |
JP2019526168A (ja) | 成形相互接続デバイス及びその作製方法 | |
CN111212934A (zh) | 电镀方法、气泡喷出部件、电镀装置以及设备 | |
CN112582786B (zh) | 一种天线振子模组的制造方法、天线振子模组和基站天线 | |
CN113993681A (zh) | 成形体及其制造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination |