CN114273800A - Ultrafast laser drilling method and system suitable for stainless steel workpiece - Google Patents

Ultrafast laser drilling method and system suitable for stainless steel workpiece Download PDF

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Publication number
CN114273800A
CN114273800A CN202111552022.5A CN202111552022A CN114273800A CN 114273800 A CN114273800 A CN 114273800A CN 202111552022 A CN202111552022 A CN 202111552022A CN 114273800 A CN114273800 A CN 114273800A
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laser
stainless steel
steel workpiece
ultrafast
light path
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不公告发明人
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Beijing Yingke Technology Co ltd
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Beijing Yingke Technology Co ltd
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Abstract

The invention provides an ultrafast laser drilling method and system suitable for stainless steel workpieces, wherein the method comprises the following steps: 1) placing a stainless steel workpiece on an operation table; 2) the emitting frequency of the laser is a certain value between 1KHz and 500 KHz; the energy of single pulse emitted by the laser is 20-10000uJ, and the energy difference between the single pulses is less than or equal to +/-5%. 3) Laser emitted by a laser device sequentially passes through a shaping light path, a light beam transmission light path and a laser cutting head and is focused on the surface of a stainless steel workpiece on an operation table; 4) the punching of the stainless steel workpiece is completed by controlling the movement of the axis of the laser beam X, Y, Z and the traveling speed of the laser beam on the surface of the stainless steel workpiece. The laser drilling method realizes the drilling of the stainless steel workpiece by the ultrafast laser vaporization material with high single pulse energy, has good consistency in the processing process, has the drilling precision greatly higher than that of the existing laser drilling method, and can meet the requirement of the workpiece without processing in the later period.

Description

Ultrafast laser drilling method and system suitable for stainless steel workpiece
Technical Field
The invention relates to the technical field of laser drilling, in particular to an ultrafast laser drilling method and system suitable for a stainless steel workpiece.
Background
Laser drilling is the earliest practical laser processing technique and is one of the main application fields of laser processing. With the rapid development of modern industrial and scientific technology, more and more materials with high hardness and high melting point are used, and the traditional punching method cannot meet the process requirements of the materials.
The laser beam is highly concentrated in space and time, and the spot diameter can be reduced to the micron order by focusing with a lens to obtain 105-1015W/cm2Laser power density of (2). Such high power densities allow laser drilling to be carried out on virtually any material. Because the laser drilling is carried out by using the power density of l07-109W/cm2The high-energy laser beam has an instantaneous action on the material, and the action time is only 10-3-10-5s, and thus the laser drilling speed is very fast. The high-efficiency laser is matched with a high-precision machine tool and a control system, and program control is carried out through a microprocessor, so that high-efficiency punching can be realized.
The laser drilling process is an extremely complex thermophysical process of laser and matter interaction, and parameters influencing the laser drilling quality are many, such as the energy of laser pulse, pulse width, defocusing amount, repetition frequency of pulse laser and the like. Different processing materials are required to be matched, and different laser drilling parameters are selected.
At present, only pores are obtained by directly punching stainless steel workpieces by a laser, and the required precision can be achieved after the pores are processed by other methods, so that the punching process flow is complex. The pore is usually processed by machining with carborundum or by finishing the pore diameter with a punch, a wire, a chemical etching method, or the like.
Under the condition that the diameter of the punched hole is in a micron level and the shape distortion of the material and the processed surface is not caused, the diameter-depth ratio is difficult to reach a sufficient magnitude level. Can realize the diameter of 80 microns, the depth of 1.5mm, the diameter-depth ratio 80um/1.5mm, and the existing laser drilling technology has been difficult.
In addition, when the ultra-thin stainless steel 10um diameter micropore array within 0.2mm thickness is punched, the combination of the processing method, the processing system and the processing technological parameters determines the quality and the yield of punching. The existing laser drilling technology is difficult to achieve the requirements of not only not causing the deformation of stainless steel materials, but also perfectly realizing the drilling.
Disclosure of Invention
In view of the above, in order to overcome the defects of the prior art, the invention provides an ultrafast laser drilling method and system suitable for stainless steel workpieces, which overcome the problem that the current stainless steel laser drilling aperture depth ratio with the thickness of 0.2-3mm cannot meet the requirement, and can meet the quality requirement of drilling of a micropore array with the diameter of ultrathin stainless steel 10um within the thickness of 0.2 mm.
The invention provides an ultrafast laser drilling method suitable for a stainless steel workpiece, which comprises the following steps:
1) placing a stainless steel workpiece on an operation table; the operating platform can drive the stainless steel workpiece to move along a preset path;
2) arranging an ultrafast laser capable of emitting single pulses with frequency locking and uniform energy; the emission frequency of the laser is a certain value between 1KHz and 500 KHz; the energy of single pulses emitted by the laser is 20-10000uJ, and the energy difference between the single pulses is less than or equal to +/-5%;
3) laser emitted by a laser device sequentially passes through a shaping light path, a light beam transmission light path and a laser cutting head and is focused on the surface of a stainless steel workpiece on an operation table;
4) the punching of the stainless steel workpiece is completed by controlling the movement of the axis of the laser beam X, Y, Z and the traveling speed of the laser beam on the surface of the stainless steel workpiece.
Further, in the step 2), the laser is an all-solid-state picosecond laser.
Furthermore, the laser has a window light spot of 1-3mm and a divergence angle of 0.5-1.5 mrad.
Further, in the step 3), the transmission distance of the light beam transmission optical path is 10-1000 mm.
Further, in the step 3), the shaping optical path is a beam expanding optical path with a magnification of 1 to 8 times.
Further, in step 4), the single pulse width is 1-10 ps.
Further, in the step 4), the laser wavelength emitted by the laser is set to be 1064 +/-5 nm or 532 +/-5 nm; the advancing speed of the laser facula is 1-500 mm/s.
To within 0.2mm thickness, the stainless steel about micropore array diameter 10um can adopt the mirror that shakes to punch the module and replace the laser cutting head and carry out laser beam drilling. Ultrafast laser emitted by the laser device is amplified in beam size through a shaping light path, is input into the galvanometer punching module through a beam transmission light path and then is focused on the surface of a stainless steel workpiece to complete laser punching; a dynamic focusing lens (moving along the direction of an optical axis by +/-20 mm) is arranged in the galvanometer punching module and comprises a scanning galvanometer for controlling the deflection of a laser beam and a field lens for focusing the laser beam; the laser passes through the vibrating mirror and the field lens and then is focused on the surface of the workpiece.
The rotating speed of the vibrating mirror is 100-10000 turns.
The field lens is an F-theta field lens or a telecentric field lens, and the focal length is 30-300 mm.
The method can realize the finer effect of various patterns with the diameter of 1-10um in the single hole in the punching of the ultrathin stainless steel micropore array with the thickness of 0.01-0.2 mm.
The invention also provides a system for realizing the ultrafast laser drilling method suitable for the stainless steel workpiece, wherein the system comprises an operation table and an electric control cabinet;
the device comprises an operating platform, a laser cutting head, an XY moving platform, a laser positioning device and a laser positioning device, wherein a supporting arm is arranged on the operating platform, a laser and a light path are arranged in the supporting arm, the laser cutting head is also arranged at the bottom end of the longitudinal section of the supporting arm, the XY moving platform is arranged below the laser cutting head, and a stainless steel workpiece is fixedly clamped on the XY moving platform; the light path focuses laser emitted by the laser on a stainless steel workpiece through a shaping light path, a light beam transmission light path and a laser cutting head;
the electric control cabinet is internally provided with a controller, the laser is connected with a computer controller provided with laser drilling system software through a data line, the computer controller inputs controlled laser power, scanning speed and repetition frequency signals to the laser, receives pulse synchronous signals of the laser, and controls a light path and an operation table to complete laser drilling of a stainless steel workpiece.
The laser cutting head punching system can solve the problem of nondestructive punching with the diameter of 60 microns, the depth of 0.2-3mm and the diameter-depth ratio of 60um/3 mm.
The frequency-locked uniform energy single-pulse ultrafast laser provided by the invention has the working mode of the ultrafast laser that the uniform energy single-pulse is periodically output under the locking frequency.
As a more optimized substitute system for punching stainless steel with the thickness of 0.2mm and the diameter of the micropore array of about 10 microns, the invention also provides a system for performing laser punching by adopting the vibrating mirror punching module to substitute a laser cutting head. The system is different from the system in that the bottom end of the longitudinal section of the supporting arm is also provided with a galvanometer punching module, an XY moving platform is arranged below the galvanometer punching module, and a stainless steel workpiece is fixedly clamped on the XY moving platform; the light path focuses laser emitted by the laser on a stainless steel workpiece after passing through a shaping light path, a light beam transmission light path and a galvanometer punching module;
a dynamic focusing lens (moving along the direction of an optical axis by +/-20 mm) is arranged in the galvanometer punching module and comprises a scanning galvanometer for controlling the deflection of a laser beam and a field lens for focusing the laser beam; the laser passes through the vibrating mirror and the field lens and then is focused on the surface of the workpiece.
The system can realize the more fine effect of various patterns with the single hole diameter of 1-10um in the punching of the ultrathin stainless steel micropore array with the thickness of 0.01-0.2 mm.
The invention has the beneficial effects that:
1. the laser cutting head punching system can solve the problem of nondestructive punching with the diameter of 60 microns, the depth of 0.2-3mm and the diameter-depth ratio of 60um/3 mm.
2. As a more optimized substitute, the vibrating mirror punching module punching system can achieve the effects of various patterns with the thickness of 0.01-0.2mm, ultra-thin stainless steel and the diameter of a single hole of 1-10 mu m in a micropore array.
3. The invention is based on the locking ultrafast laser drilling method with high repetition frequency, single pulse work, high single pulse energy and high single pulse energy consistency, and is used for drilling stainless steel workpieces, the consistency of the processing process is good, the drilling precision is greatly higher than that of the existing laser drilling method, and the requirements of the workpieces can be met without processing in the later period.
4. According to the laser drilling method, the high-energy single pulse output by the laser device is unique in time domain, the specific position point of the stainless steel workpiece is very accurate and cannot drift in space, and the drilling precision is further improved.
5. The punching method has the advantages of short processing time, almost no missing points or marks and accurate time sequence matching.
6. The method realizes the punching by the ultrafast laser vaporization material processing surface with high single pulse energy, but not by the melting effect of heat, so that the method hardly has the phenomena of a heat affected zone, and the processing surface hardly has slag adhering, cracks, edge breakage and the like.
7. Under the irradiation of the ultrafast laser equipment with high single pulse energy consistency, the surface of a workpiece is clear and bright, repeated irradiation is avoided, the material is hardly darkened, and the characteristic parameters of the material are hardly changed.
Description of the drawings:
FIG. 1 is a schematic diagram of the working principle of the laser cutting head punching system suitable for stainless steel workpieces according to the invention;
FIG. 2 is a schematic diagram of the working principle of the vibrating mirror punching module punching system applicable to stainless steel workpieces according to the present invention;
FIG. 3 is a schematic structural diagram of a galvanometer punching module punching system suitable for stainless steel workpieces according to the present invention;
FIG. 4 is a schematic view of a galvanometer drilling module inside the support arm of FIG. 3;
FIG. 5 is a schematic structural view of a laser cutting head perforating system for stainless steel workpieces according to the present invention;
FIG. 6 is a schematic view of the internal laser cutting head of the support arm of FIG. 5;
FIG. 7: the method is used for making a picture of the punching effect on stainless steel with the thickness of 2 mm;
wherein: FIG. 7A is a photograph of the front of a stainless steel panel after punching; FIG. 7B stainless steel thickness measurements; FIG. 7C stainless steel pore size measurements;
FIG. 8: a picture of the punching effect of a stainless steel sheet with the thickness less than 0.2 mm;
wherein: FIG. 8A is a microscopic view of the array of microwells of FIG. 8B; FIG. 8B is a photograph showing the punching effect of a 0.2mm thick stainless steel 10um diameter micro-hole array;
in the figure: 1. an ultrafast laser; 2. an optical path; 2-1, shaping the light path; 2-2. light beam transmission optical path; 3. a galvanometer; 4, a field lens; 5. a stainless steel workpiece; 6, an XY moving platform, 7, a controller, 8, a reflector and 9, a galvanometer punching module; 10. the laser cutting machine comprises a high-pressure air nozzle, 11 a focusing lens group, 12 a laser cutting head, 13 an electrical control cabinet, 14 an operation interface, 15 a supporting arm, 16 a longitudinal section of the supporting arm and 17 an operation table.
Detailed Description
The laser drilling method and system for stainless steel workpieces according to the present invention will be further explained with reference to the drawings and the embodiments, but the present invention is not limited to the following embodiments.
The invention provides an ultrafast laser drilling method suitable for a stainless steel workpiece, which comprises the following steps:
1) placing a stainless steel workpiece on an operating table 17; the operating platform 17 can drive the stainless steel workpiece to move along a preset path;
2) an ultrafast laser 1 capable of emitting single pulse with frequency locking and uniform energy is arranged; the emission frequency of the laser is a certain value between 1KHz and 500 KHz; the energy of single pulse emitted by the laser is 20-10000uJ, and the energy difference between the single pulses is less than or equal to +/-5%.
3) Laser emitted by a laser device sequentially passes through a shaping light path 2-1, a light beam transmission light path 2-2 and a laser cutting head 12 and is focused on the surface of a stainless steel workpiece 5 on an operation table 17;
4) the punching of the stainless steel workpiece is accomplished by controlling the movement of the axis of the laser beam X, Y, Z and the speed of travel of the laser beam over the surface of the stainless steel workpiece 5.
The method comprises the step (1) of placing a stainless steel workpiece on an operation table. Among them, the stage is preferably an XY-moving stage. The preset path of the stainless steel workpiece is input into a control system of the XY moving operation table, and the moving path of the stainless steel workpiece in the punching process is accurately controlled through the intelligent operation table, so that the punching precision can be improved.
Step (2) of the present invention is preferably that the emission frequency of the laser is a certain value between 120KHz and 200 KHz; the single pulse energy emitted by the laser is 200-1000uJ, and the consistency of the single pulse energy is less than or equal to +/-5%. (ii) a More preferably, the emission frequency of the laser is a certain value between 180KHz and 200 KHz; the single pulse energy emitted by the laser is 500-800uJ, and the consistency of the single pulse energy is less than or equal to +/-5%.
For stainless steel with the thickness not greater than 0.2mm, the galvanometer punching module 9 can be adopted to replace the laser cutting head 12 for laser punching. Ultrafast laser emitted by the laser 1 is amplified in beam size through the shaping optical path 2-1, is input into the galvanometer punching module 9 through the beam transmission optical path 2-2 and then is focused on the surface of the stainless steel workpiece 5 to complete laser punching; a dynamic focusing lens is arranged in the galvanometer punching module and comprises a scanning galvanometer 3 for controlling the deflection of the laser beam and a field lens 4 for focusing the laser beam; the laser passes through the vibrating mirror 3 and the field lens 4 and then is focused on the surface of the workpiece.
As an embodiment of the invention, the transmission distance of the light beam transmission optical path 2-2 is 10-1000 mm; preferably 100-; more preferably 500 and 800 mm.
As another embodiment of the present invention, the shaping optical path 2-1 is a beam expanding optical path with a magnification of 1-8 times; preferably, the shaping optical path is a beam expanding optical path with the magnification of 2-6 times; more preferably, the shaped optical path is a beam-expanding optical path with a magnification of 5 times.
As a further embodiment of the invention, the rotating speed of the galvanometer is 100-10000 rpm/s; preferably, the rotating speed of the galvanometer is 400-; more preferably, the rotation speed of the galvanometer is 500-.
As a further embodiment of the invention, the field lens is an F-theta field lens or a telecentric field lens 4, having a focal length of 30 to 300 mm; preferably, the field lens is an F-theta field lens or a telecentric field lens, and the focal length is 100-300 mm; more preferably, the field lens is an F-theta field lens or a telecentric field lens, and the focal length is 150-250 mm.
Step (4) of the invention is to input the laser parameter and the preset path into the control system; the control system controls the laser to start emitting laser according to laser parameters, the movement of the laser beam X, Y, Z shaft and the advancing speed of the laser beam on the surface of the stainless steel workpiece 5, and controls the operating platform to drive the stainless steel workpiece to move along a preset path, so that the stainless steel surface punching is completed.
The invention also provides a system for realizing the laser drilling method of the stainless steel workpiece, and the system comprises an operation table 17 and an electric control cabinet 13.
In the invention, a supporting arm 15 is arranged on the operating platform, a laser 1 and a light path 2 are arranged in the supporting arm, a laser cutting head is also arranged at the longitudinal end of the supporting arm, an XY moving platform 6 is arranged below the laser cutting head, and a stainless steel workpiece 5 is fixedly clamped on the XY moving platform 6; the light path is used for focusing laser emitted by the laser on the stainless steel workpiece through the shaping light path, the light beam transmission light path and the focusing lens.
In the present invention, the electrical control cabinet 13 is used to control the laser output of the laser and control the XY moving platform to move the stainless steel workpiece according to a preset path. The electric control cabinet is used as a control system, an operator inputs laser parameters and a workpiece moving path into a controller of the electric control cabinet in advance, and when punching is performed, the laser and the moving platform are started to perform punching operation.
The laser cutting head punching system can solve the problem of nondestructive punching with the diameter of 60 microns, the depth of 0.2-3mm and the diameter-depth ratio of 60um/3 mm.
As a more optimized substitute system for punching stainless steel with the thickness of 0.2mm and the diameter of the micropore array of about 10um, the invention also provides a system for performing laser punching by adopting the vibrating mirror punching module 9 to substitute the laser cutting head 12. The system is different from the system in that the bottom end of the longitudinal section 16 of the supporting arm is also provided with a galvanometer punching module 9, an XY moving platform 6 is arranged below the galvanometer punching module 9, and a stainless steel workpiece 5 is fixedly clamped on the XY moving platform 6; the light path 2 focuses laser emitted by a laser on a stainless steel workpiece after passing through a shaping light path 2-1, a light beam transmission light path 2-2 and a galvanometer punching module 9;
the galvanometer punching module 9 is internally provided with a dynamic focusing lens (moving along the direction of an optical axis by +/-20 mm), and comprises a scanning galvanometer 3 for controlling the deflection of a laser beam and a field lens 4 for focusing the laser beam; the laser passes through the vibrating mirror 3 and the field lens 4 and then is focused on the surface of the workpiece.
The system can realize the more fine effect of various patterns with the single hole diameter of 1-10um in the punching of the ultrathin stainless steel micropore array with the thickness of 0.01-0.2 mm.
Example 1
The laser drilling system adopting the stainless steel galvanometer drilling module of the invention has the following structure:
as shown in fig. 3 and 4, comprises an electric control cabinet 13, an operation table 17 and an ultrafast laser 1; wherein the content of the first and second substances,
the electrical control cabinet 13 is arranged on the right side of the operating platform 17, the XY moving platform 6 is arranged on the upper side of the operating platform 17, the supporting arms 15 and 16 are arranged on the electrical control cabinet 13 and extend to the upper side of the XY moving platform 6, and the stainless steel workpiece 5 is fixedly clamped on the XY moving platform 6;
the laser of this example uses an all-solid-state picosecond laser with a wavelength of 532 nm.
An ultrafast laser 1 and a light path 2 are arranged in the supporting arm 15, wherein the light path 2 focuses laser emitted from the ultrafast laser 1 onto a stainless steel workpiece 5; the support arm 15 comprises a transverse section and a longitudinal section 16; the bottom end of the longitudinal section 16 is provided with a galvanometer punching module 9. The light path 2 comprises a beam expanding light path 21 with the magnification of 5 times, a light beam transmission light path with the transmission distance of 600mm and a reflecting mirror 8; the galvanometer punching module 9 also comprises a galvanometer 3 with the rotating speed of 1000 r/s and an F-theta field lens 4 with the focal length of 250 mm.
Laser emitted by a laser device sequentially passes through a shaping light path 2-1, a light beam transmission light path 2-2 and a galvanometer punching module 9 and then is focused on the surface of a stainless steel workpiece 5 on an operation table 17;
the electric control cabinet 13 is provided with a controller 7, and the controller 7 is respectively connected with the ultrafast laser 1 and the XY moving platform 6 and is used for controlling the laser output of the ultrafast laser 1 and controlling the XY moving platform 6 to move the stainless steel workpiece 5 according to a preset path.
The working principle diagram of the laser drilling system of the embodiment is shown in FIG. 2.
The locking transmitting frequency is 100 KHz; the single pulse energy was 100 uJ. The single pulse width is 10 ps.
The laser window spot was 2mm and the divergence angle was 1.0 mrad.
The shaping optical path is a beam expanding optical path with 5 times of magnification.
The light beam transmission light path is composed of transmission light paths with transmission distance of 600 mm.
The galvanometer rotating speed is 1000 revolutions per second.
The field lens is an F-theta field lens, and the focal length is 250 mm.
The punching method using the laser punching system of the embodiment comprises the following steps:
1) fixing a stainless steel workpiece 5 on an XY moving platform 6 of an operation table through a clamping device;
2) inputting laser parameters and a preset path into a controller 7 of the electrical control cabinet 13 through an operation interface 14 of the electrical control cabinet 13;
(3) the controller 7 of the electric control cabinet 13 starts the ultrafast laser 1 to emit laser according to laser parameters, and controls the XY moving platform 6 to drive the stainless steel workpiece 5 to move along a preset path, so as to complete surface drilling of the stainless steel workpiece 5.
The perforation effect is shown in fig. 7. The method and the system can realize the finer effect of various patterns with the single hole diameter of 1-10um in the punching of the ultrathin stainless steel micropore array with the thickness of 0.01-0.2 mm.
Example 2
Substantially the same as in example 1, except that: and punching holes on a stainless steel plate with the thickness of 2 mm.
The present embodiment adopts the stainless steel laser cutting head perforating system of the present invention, and the structure is shown in fig. 5 and 6.
The working principle diagram of the laser drilling system of the embodiment is shown in fig. 1.
The laser 1 of this embodiment emits laser light of 1064nm wavelength.
Laser emitted by the laser 1 sequentially passes through the shaping light path 2-1, the light beam transmission light path 2-2 and the laser cutting head 12 and is focused on the surface of the stainless steel workpiece 5 on the operating platform 17;
the locking transmitting frequency is 500 KHz; the single pulse energy was 20 uJ. The single pulse width is 10 ps.
The laser window spot was 2mm and the divergence angle was 1.0 mrad.
The shaping optical path is a beam expanding optical path with 5 times of magnification.
The light beam transmission light path is composed of transmission light paths with the transmission distance of 500 mm.
The cutting head focus light spot is 50um, and the diameter of punching is 72um, thickness 2mm, the Z axle step length is 1um, 1um of repeated positioning accuracy.
The perforation effect is shown in fig. 6.
Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art can make modifications and equivalents to the embodiments of the present invention without departing from the spirit and scope of the present invention, which is set forth in the claims of the present application.

Claims (8)

1. An ultrafast laser drilling method suitable for stainless steel workpieces is characterized by comprising the following steps:
1) placing a stainless steel workpiece on an operation table; the operating platform can drive the stainless steel workpiece to move along a preset path;
2) arranging an ultrafast laser capable of emitting single pulses with frequency locking and uniform energy; the emission frequency of the laser is a certain value between 1KHz and 500 KHz; the energy of single pulse emitted by the laser is 20-10000uJ, and the energy difference between the single pulses is less than or equal to +/-5%.
3) Laser emitted by a laser device sequentially passes through a shaping light path, a light beam transmission light path and a laser cutting head and is focused on the surface of a stainless steel workpiece on an operation table;
4) the punching of the stainless steel workpiece is completed by controlling the movement of the axis of the laser beam X, Y, Z and the traveling speed of the laser beam on the surface of the stainless steel workpiece.
2. The ultrafast laser drilling method for stainless steel workpiece according to claim 1, wherein in step 2), the laser is an all solid state picosecond laser.
3. The ultrafast laser drilling method for stainless steel workpiece as claimed in claim 1, wherein the laser has a window spot of 1-3mm and a divergence angle of 0.5-1.5 mrad.
4. The ultrafast laser drilling method for stainless steel workpiece as claimed in claim 1, wherein the transmission distance of the light beam transmission path in step 3) is 10-1000 mm.
5. The ultrafast laser drilling method for stainless steel workpieces according to claim 1, wherein in the step 3), the shaping optical path is a beam expanding optical path with a magnification of 1-8 times.
6. The ultrafast laser drilling method for stainless steel workpiece as set forth in claim 1, wherein the single pulse width is 1-10ps in step 4).
7. The ultrafast laser drilling method for stainless steel workpiece as claimed in claim 2, wherein in step 4), the laser wavelength emitted by said laser is set to 1064 ± 5nm or 532 ± 5 nm; the advancing speed of the laser facula is 1-500 mm/s.
8. The system for implementing the ultrafast laser drilling method for stainless steel workpieces of claim 1, wherein the system comprises an operation table and an electric control cabinet;
the device comprises an operating platform, a laser cutting head, an XY moving platform, a laser positioning device and a laser positioning device, wherein a supporting arm is arranged on the operating platform, a laser and a light path are arranged in the supporting arm, the laser cutting head is also arranged at the bottom of the longitudinal section of the supporting arm, the XY moving platform is arranged below the laser cutting head, and a stainless steel workpiece is fixedly clamped on the XY moving platform; the light path focuses laser emitted by the laser on a stainless steel workpiece through a shaping light path, a light beam transmission light path and a laser cutting head;
the electric control cabinet is internally provided with a controller, the laser is connected with a computer controller provided with laser drilling system software through a data line, the computer controller inputs controlled laser power, scanning speed and repetition frequency signals to the laser, receives pulse synchronous signals of the laser, and controls a light path and an operation table to complete laser drilling of a stainless steel workpiece.
CN202111552022.5A 2021-12-17 2021-12-17 Ultrafast laser drilling method and system suitable for stainless steel workpiece Pending CN114273800A (en)

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CN202111552022.5A CN114273800A (en) 2021-12-17 2021-12-17 Ultrafast laser drilling method and system suitable for stainless steel workpiece

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Application Number Priority Date Filing Date Title
CN202111552022.5A CN114273800A (en) 2021-12-17 2021-12-17 Ultrafast laser drilling method and system suitable for stainless steel workpiece

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115275536A (en) * 2022-07-20 2022-11-01 坦博电材(南通)有限公司 Cover plate for isolating thermal runaway battery injection and manufacturing method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115275536A (en) * 2022-07-20 2022-11-01 坦博电材(南通)有限公司 Cover plate for isolating thermal runaway battery injection and manufacturing method thereof

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