JPH0357585A - Method and device for piercing printed circuit board - Google Patents

Method and device for piercing printed circuit board

Info

Publication number
JPH0357585A
JPH0357585A JP1188971A JP18897189A JPH0357585A JP H0357585 A JPH0357585 A JP H0357585A JP 1188971 A JP1188971 A JP 1188971A JP 18897189 A JP18897189 A JP 18897189A JP H0357585 A JPH0357585 A JP H0357585A
Authority
JP
Japan
Prior art keywords
laser
hole
drilling
piercing
condenser lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1188971A
Other languages
Japanese (ja)
Inventor
Hideho Inagawa
秀穂 稲川
Shigenobu Noujiyou
能條 重信
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP1188971A priority Critical patent/JPH0357585A/en
Priority to US07/553,666 priority patent/US5063280A/en
Publication of JPH0357585A publication Critical patent/JPH0357585A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a straight hole shape by moving a focal position of an energy beam of a laser, etc., as piercing advances. CONSTITUTION:A laser oscillating machine 1 uses a pulse oscillation generated by a carbonic acid gas laser, etc. An oscillated beam is curved by a total reflection mirror 2, passes through a condenser lens 4 and executes piercing aligning a focus to a work 6 (glass epoxy material for a printed circuit). The condenser lens 4 is attached to a Z axis stage 3 with a pulse motor, and also, this stage is controlled by a focusing and laser oscillation control unit 5. From this control unit 5, signals for starting the laser oscillation and starting the working of a pulse motor stage are generated. In this state, the condenser lens 4 descends by interlocking with the laser oscillation, by which piercing can be executed by aligning a focus by the condenser lens 4 with a working position. In such a way, a straight hole shape is obtained, and a through-hole shape having high reliability can be obtained.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、レーザー等のエネルギービームを用いたプリ
ント基板の孔明け方法及びその装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method and apparatus for drilling holes in a printed circuit board using an energy beam such as a laser.

〔従来の技術1 従来、プリント基板のスルーホール形成においては、孔
明け加工としてドリルによる機械的な加工法が用いられ
、特に加工すべきスルーホールが小径になるに従い、物
理的強度の高い高価な超硬ドリルを用いて孔明け加工が
行なわれていた。
[Conventional technology 1] Conventionally, in the formation of through-holes in printed circuit boards, a mechanical processing method using a drill has been used as the drilling process.In particular, as the diameter of the through-holes to be processed becomes smaller, an expensive method with high physical strength is used. Hole drilling was performed using a carbide drill.

第3図は、ドリルを用いた従来の孔明け加工を示す図で
ある。
FIG. 3 is a diagram showing conventional hole drilling using a drill.

第3図(a)に両面エボキシ基板6にドリル9により孔
明けしたものの孔断面を示してあり、この方法によると
、図示のように、孔壁面にランダムな凹凸或はドリルの
シューティングによる上下面の開口位置ずれが生じ、第
3図(b)に示すように、このようなスルーホールに導
体を形成すると、導体の形成が均一にできず、導通不良
を生じる原因となる。
FIG. 3(a) shows a cross section of a hole drilled in a double-sided epoxy board 6 with a drill 9. According to this method, as shown in the figure, random irregularities are formed on the hole wall surface or the upper and lower surfaces are formed by shooting with the drill. As shown in FIG. 3(b), if a conductor is formed in such a through hole, the conductor cannot be formed uniformly, resulting in poor conduction.

[発明が解決しようとする課題1 しかして、上記のドリルによる機械的な孔明け加工の問
題点に鑑み、近年、レーザー等のエネルギービームな用
いた微細加工が開発されている。
[Problem to be Solved by the Invention 1] However, in view of the above-mentioned problems with mechanical drilling using a drill, micromachining using an energy beam such as a laser has been developed in recent years.

このエネルギービームによる孔明け加工は、ビームを絞
る程、エネルギー密度が上昇して加工面積も小さくなり
、微細な孔明け加工になるほど精度、コストの面で有利
となる。
In this drilling process using an energy beam, as the beam is narrowed down, the energy density increases and the processing area becomes smaller, and the finer the hole drilling becomes, the more advantageous it becomes in terms of accuracy and cost.

しかしながら、プリント配線板の孔明け加工の場合、基
板の厚みに対して最もエネルギー密度が高く、スポット
径の小さい焦点の位置をどこに設定するかにより、レー
ザー入射側と出射側或は孔内部における孔径が異なって
しまい、いわゆるテーパーを持った形状になり、基板の
たわみによって表裏孔径が一定しない、鋭角なコーナー
ができその部分に応力が集中して信頼性に欠ける等の問
題点がある。
However, in the case of drilling holes in printed wiring boards, depending on where the focal point with the highest energy density and the smallest spot diameter is set relative to the thickness of the board, the diameter of the hole on the laser incidence side, the exit side, or inside the hole is determined. This results in a so-called tapered shape, which causes problems such as the front and back hole diameters not being consistent due to deflection of the substrate, and sharp corners forming where stress is concentrated and resulting in a lack of reliability.

本発明は、上記の問題点を解消するために威されたもの
である。
The present invention has been developed to solve the above problems.

〔課題を解決するための手段〕[Means to solve the problem]

上記の課題は、本発明の、プリント配線板にレーザー等
のエネルギービームを用いて孔明(プするに際し、孔明
けの進行にともない前記ビームの焦点位置を移動させる
ことを特徴とするブリンl・配線板の孔明け方法、及び
、プリント配線板にレーザー等のエネルギービームを用
いて孔明けするに際し、孔明けの進行にともない前記ビ
ームの焦点位置を移動させる手段として、集光光学系を
光軸方向に移動させる機構を備えたことを特徴とするプ
リント配線板の孔明け装置により解決することができる
The above problem is solved by the present invention, which is characterized in that when drilling a printed wiring board using an energy beam such as a laser, the focal position of the beam is moved as the drilling progresses. When drilling a hole in a board and using an energy beam such as a laser to drill a hole in a printed wiring board, a condensing optical system is moved in the optical axis direction as a means of moving the focal point of the beam as the hole progresses. This problem can be solved by a printed wiring board drilling device characterized by having a mechanism for moving the printed wiring board.

〔作用〕[Effect]

上記の本発明により、エネルギー密度が最も高くかつビ
ームスポット径が最小となる焦点の位置を孔明けのため
の物質の除去の進行に合わせて進行方法に移行していく
ことで、前記除去によって現われる新たな面に常に焦点
の位置がくるよう集光光学系を光軸方向に移動させて基
板の孔明け加工を行なうことにより、テーパーのない、
ストレートな孔形状が得られる。そして、この孔を導体
化することにより信頼性の高いスルーホールを有するプ
リント配線板を得ることができる。
According to the present invention, the position of the focal point where the energy density is the highest and the beam spot diameter is the smallest is shifted to the advancement method in accordance with the progress of the removal of the material for drilling, thereby reducing the amount of material that appears due to the removal. By moving the condensing optical system in the optical axis direction so that the focal point is always on the new surface and drilling holes in the substrate, we can create
A straight hole shape can be obtained. By making these holes conductive, it is possible to obtain a printed wiring board having highly reliable through holes.

[実施例] 以下、本発明の実施例について図面を参照しながら説明
する。
[Example] Hereinafter, an example of the present invention will be described with reference to the drawings.

第1図(a)は、本発明による実施例のプリント基板の
孔明け手段の基本構成を示す図である。
FIG. 1(a) is a diagram showing the basic configuration of a hole punching means for a printed circuit board according to an embodiment of the present invention.

図中、1はレーザー発振機を示し、本実施例では炭酸ガ
スレーザー(ん=10.6μm)又は、エキシマレーザ
ー( K. r F . 元= 2 4 8 nm)に
よるパルス発振を用いてある。このレーザー発振機1よ
り発振されたビームは全反射ミラー2によって曲げられ
、集光用レンズ4を通過してワーク6(プリント配綿板
用ガラスーエボキシ材、TLC−W−551;東芝ケミ
カルズ社製)に焦点を合わせて該ワークを孔明けする。
In the figure, numeral 1 indicates a laser oscillator, and in this embodiment, pulse oscillation by a carbon dioxide laser (n=10.6 μm) or an excimer laser (K. rF. original=248 nm) is used. The beam emitted from this laser oscillator 1 is bent by a total reflection mirror 2, passes through a condensing lens 4, and passes through a workpiece 6 (glass-epoxy material for printed cotton boards, TLC-W-551; manufactured by Toshiba Chemicals). Drill a hole in the workpiece by focusing on .

なお、図中、7は基板ホールド用のステージである。In addition, in the figure, 7 is a stage for holding the substrate.

本実施例においては、集光レンズ4はバルスモー夕付き
Z軸ステージ3に取り付けられており、このステージは
さらにフォーカシング及びレーザー発振制御ユニット5
により制御される。
In this embodiment, the condenser lens 4 is attached to a Z-axis stage 3 with a pulse moder, and this stage further includes a focusing and laser oscillation control unit 5.
controlled by

ここでは、制御ユニット5よりレーザー発振開始とパル
スモーターステージ下降開始の信号が発せられ、レーザ
ー発振と連動して集光レンズ4が下降することにより、
集光レンズ4による焦点を加工位置に合わせて孔明けす
ることができる。
Here, the control unit 5 issues signals to start laser oscillation and start lowering the pulse motor stage, and the condensing lens 4 moves down in conjunction with the laser oscillation.
Holes can be drilled by aligning the focal point of the condenser lens 4 with the processing position.

第l図(c)は、そのときの様子を模式的に示したもの
である。初め、4−1位置に集光レンズ4があり、焦点
は基板6の表面上に位置している。そして、加工が進む
につれて制御ユニット5により、集光レンズ4が4−2
位置(焦点は基板6の厚さ方向の中央付近)から4−3
位置(焦点は基板6の裏面上に位置している)へと移動
する。これにより加工面には常にビームスポットの中心
が位置することとなり、この結果、均一でストレートな
スルーホール8が得られる。
FIG. 1(c) schematically shows the situation at that time. Initially, the condenser lens 4 is located at the 4-1 position, and its focal point is located on the surface of the substrate 6. As the processing progresses, the control unit 5 controls the condenser lens 4 to 4-2.
4-3 from the position (the focal point is near the center of the substrate 6 in the thickness direction)
position (the focal point is located on the back surface of the substrate 6). As a result, the center of the beam spot is always located on the processed surface, and as a result, a uniform and straight through hole 8 can be obtained.

なお、上記実施例においては加工に用いられるエネルギ
ー源として炭酸ガスレーザー、エキシマレーザー等のレ
ーザービームを用いてあるが、電子ビーム、イオンビー
ム等他のエネルギービームを用いてもよい。又、上記実
施例においては光学系(主に、焦点レンズ)を光軸方向
に移動することにより焦点位置の移動を行なうようにし
てあるが、レンズの厚み調整により焦点距離を変動させ
ることも可能である。さらに、本実施例による加工は孔
明け加工に限定してあるが、その他、切断、溶接等の加
工にも適用できる。
In the above embodiments, a laser beam such as a carbon dioxide laser or an excimer laser is used as an energy source for processing, but other energy beams such as an electron beam or an ion beam may also be used. Furthermore, in the above embodiment, the focal position is moved by moving the optical system (mainly the focusing lens) in the optical axis direction, but it is also possible to change the focal length by adjusting the thickness of the lens. It is. Furthermore, although the processing according to this embodiment is limited to drilling, it can also be applied to other processing such as cutting and welding.

比較例: 第2図は、上記実施例の比較例として従来通りレンズを
固定して焦点位置を固定した場合の加工であり、この加
工によってはテーパー形状の孔8 ができやすいことを
示している。
Comparative Example: Fig. 2 shows processing in a case where the lens is fixed and the focal position is fixed as usual, as a comparative example of the above embodiment, and it shows that a tapered hole 8 is likely to be formed depending on this processing. .

[発明の効果] 以上説明したように、エネルギー密度が最も高く、かつ
ビームスポットが最小となる焦点の位置を孔明け加工面
の深さ方向の進行に伴って移動させていくことにより、
ストレートな孔形状が得られ、信頼性の高いスルーホー
ル形状を得ることができる。
[Effects of the Invention] As explained above, by moving the focal point where the energy density is the highest and the beam spot is the smallest as the drilling surface progresses in the depth direction,
A straight hole shape and a highly reliable through hole shape can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図(a)は本発明による実施例のプリント基板の孔
明け手段の基本構成を示す図であり、第1図(b)は第
1図( a. )に示す装置に関する制御のブロック図
であり、第1図(c)は第1図(a)に示す加工法によ
り孔明けされる状態を模式的に示した図であり、第2図
は本発明による実施例の比較例を示す模式的断面図であ
り、第3図は従来のドリルを用いた孔開け加工を示す図
である。 1・・・レーザー発振機 2・・・全反射ミラー 3・・・バルスモータステージ 4・・・集光レンズ 5・・・制御系ユニット 6・・・基板 7・・・加工用テーブル 8・・・加工された孔 9・・・ドリル
FIG. 1(a) is a diagram showing the basic configuration of a means for punching holes in a printed circuit board according to an embodiment of the present invention, and FIG. 1(b) is a block diagram of control regarding the device shown in FIG. 1(a). FIG. 1(c) is a diagram schematically showing a state in which a hole is drilled by the processing method shown in FIG. 1(a), and FIG. 2 shows a comparative example of the embodiment according to the present invention. FIG. 3 is a schematic cross-sectional view showing a hole drilling process using a conventional drill. 1... Laser oscillator 2... Total reflection mirror 3... Pulse motor stage 4... Condensing lens 5... Control system unit 6... Substrate 7... Processing table 8...・Processed hole 9...drill

Claims (3)

【特許請求の範囲】[Claims] (1)プリント配線板にレーザー等のエネルギービーム
を用いて孔明けするに際し、孔明けの進行にともない前
記ビームの焦点位置を移動させることを特徴とするプリ
ント配線板の孔明け方法。
(1) A method for making holes in a printed wiring board, characterized in that when making holes in a printed wiring board using an energy beam such as a laser, the focal position of the beam is moved as the drilling progresses.
(2)前記加工法において、孔明けの際、孔明けにとも
ない該孔明けの進行方法に前記ビームの焦点位置を移動
して行くことにより、孔形状としてテーパーの付かない
ストレートな形状を得ることを特徴とする請求項1記載
のプリント配線板の孔明け方法。
(2) In the above-mentioned processing method, when drilling a hole, the focal position of the beam is moved in accordance with the drilling progress method as the hole is drilled, thereby obtaining a straight hole shape without tapering. The method of making holes in a printed wiring board according to claim 1, characterized in that:
(3)プリント配線板にレーザー等のエネルギービーム
を用いて孔明けするに際し、孔明けの進行にともない前
記ビームの焦点位置を移動させる手段として、集光光学
系を光軸方向に移動させる機構を備えたことを特徴とす
るプリント配線板の孔明け装置。
(3) When drilling a hole in a printed wiring board using an energy beam such as a laser, a mechanism for moving the condensing optical system in the optical axis direction is used as a means to move the focal point of the beam as the hole progresses. A device for drilling holes in a printed wiring board, characterized by comprising:
JP1188971A 1989-07-24 1989-07-24 Method and device for piercing printed circuit board Pending JPH0357585A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1188971A JPH0357585A (en) 1989-07-24 1989-07-24 Method and device for piercing printed circuit board
US07/553,666 US5063280A (en) 1989-07-24 1990-07-18 Method and apparatus for forming holes into printed circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1188971A JPH0357585A (en) 1989-07-24 1989-07-24 Method and device for piercing printed circuit board

Publications (1)

Publication Number Publication Date
JPH0357585A true JPH0357585A (en) 1991-03-12

Family

ID=16233132

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1188971A Pending JPH0357585A (en) 1989-07-24 1989-07-24 Method and device for piercing printed circuit board

Country Status (1)

Country Link
JP (1) JPH0357585A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000071086A (en) * 1998-08-31 2000-03-07 Yasuoka:Kk Method and device for shape processing by laser light
JP2003311459A (en) * 2002-04-19 2003-11-05 Nippon Steel Corp Laser beam surface machining device
JP2010527796A (en) * 2007-05-21 2010-08-19 エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド Laser lens fluid balance device used to scribe electronic component substrates
CN103212858A (en) * 2012-01-19 2013-07-24 昆山思拓机器有限公司 Method for processing FPC (flexible printed circuit) blind hole
WO2020245957A1 (en) * 2019-06-05 2020-12-10 三菱重工業株式会社 Laser machining method and laser machining device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000071086A (en) * 1998-08-31 2000-03-07 Yasuoka:Kk Method and device for shape processing by laser light
JP2003311459A (en) * 2002-04-19 2003-11-05 Nippon Steel Corp Laser beam surface machining device
JP2010527796A (en) * 2007-05-21 2010-08-19 エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド Laser lens fluid balance device used to scribe electronic component substrates
CN103212858A (en) * 2012-01-19 2013-07-24 昆山思拓机器有限公司 Method for processing FPC (flexible printed circuit) blind hole
WO2020245957A1 (en) * 2019-06-05 2020-12-10 三菱重工業株式会社 Laser machining method and laser machining device

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