CN116441739A - Infrared ultrafast laser cutting method and system suitable for precise machining of nickel sheet workpiece - Google Patents

Infrared ultrafast laser cutting method and system suitable for precise machining of nickel sheet workpiece Download PDF

Info

Publication number
CN116441739A
CN116441739A CN202210019895.8A CN202210019895A CN116441739A CN 116441739 A CN116441739 A CN 116441739A CN 202210019895 A CN202210019895 A CN 202210019895A CN 116441739 A CN116441739 A CN 116441739A
Authority
CN
China
Prior art keywords
laser
nickel sheet
laser cutting
operation table
sheet workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202210019895.8A
Other languages
Chinese (zh)
Inventor
请求不公布姓名
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Yingke Technology Co ltd
Original Assignee
Beijing Yingke Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Yingke Technology Co ltd filed Critical Beijing Yingke Technology Co ltd
Priority to CN202210019895.8A priority Critical patent/CN116441739A/en
Publication of CN116441739A publication Critical patent/CN116441739A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage using batteries

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention provides an infrared ultrafast laser cutting method and system suitable for precision machining of nickel sheet workpieces, comprising the following steps: 1) Placing a nickel sheet workpiece on an operation table; 2) A laser is arranged on one side of the operation table; 3) Setting laser emitted by a laser device, and focusing on the surface of a nickel sheet workpiece on an operation table after sequentially passing through a shaping light path, a light beam transmission light path and a laser cutting head; 4) The cutting of the nickel sheet workpiece is completed by controlling the movement of the laser beam on the axis of the surface X, Y, Z of the nickel sheet workpiece and the traveling speed of the laser beam. The laser cutting method of the invention realizes the cutting of the nickel sheet workpiece by the ultrafast laser vaporization material with high single pulse energy, has good consistency in the processing process, can control the cutting precision to be 0.1-10 microns, and has higher cutting precision.

Description

Infrared ultrafast laser cutting method and system suitable for precise machining of nickel sheet workpiece
Technical Field
The invention relates to the technical field of laser cutting, in particular to an infrared ultrafast laser cutting method and system suitable for precision machining of nickel sheet workpieces.
Background
The laser beam is highly concentrated in space and time, and the diameter of the light spot can be reduced to the micrometer level by focusing with a lens to obtain 10 5 -10 15 W/cm 2 Is provided. Such high power density lasers can cut almost any material. The high-efficiency laser is matched with a high-precision machine tool and a control system, and the microprocessor is used for program control, so that high-efficiency cutting can be realized.
Nickel is a metallic element with ferromagnetism, which is approximately silvery white, hard and ductile. Nickel has good plasticity and good corrosion resistance. Can be highly polished and corrosion resistant. The processing of nickel sheets requires cutting of the nickel plate.
The traditional nickel sheet cutting process has low processing efficiency, can only cut in one direction, and has limited cutting shape. With the development of technology, the laser is adopted to cut the nickel sheet, so that the laser has the unparalleled advantage, and the cutting efficiency can be greatly improved, so that the laser is more and more favored.
However, the existing laser cutting process has the defects of low photon resolution, poor consistency and large heat affected zone, so that the cutting size is not accurate enough in the precision machining application field of micro-size nickel sheets, and the cutting line width cannot meet the requirements of increasingly developed modern technologies.
Disclosure of Invention
In view of the above, in order to overcome the defects of the prior art, the invention provides an infrared ultrafast laser cutting method and system suitable for precision machining of nickel sheet workpieces, the cutting precision can be controlled to be 0.1-10 microns, the cutting line width is narrower, and the cutting precision is higher.
The invention provides an infrared ultrafast laser cutting method suitable for precision machining of nickel sheet workpieces, which comprises the following steps:
1) Placing a nickel sheet workpiece on an operation table, wherein the operation table can drive the nickel sheet workpiece to move along a preset path;
2) A laser is arranged on one side of the operation table, and the laser is an ultrafast laser capable of emitting frequency-locking uniform energy monopulses; the emission frequency of the laser is a certain value between 100KHz and 200 KHz; the energy of the single pulse emitted by the laser is 50uJ-100uJ, and the energy difference between the single pulses is less than or equal to +/-5%.
3) Setting laser emitted by a laser device, and focusing on the surface of a nickel sheet workpiece on an operation table after sequentially passing through a shaping light path, a light beam transmission light path and a laser cutting head;
4) The cutting of the nickel sheet workpiece is completed by controlling the movement of the laser beam on the axis of the surface X, Y, Z of the nickel sheet workpiece and the traveling speed of the laser beam.
Further, in step 2), the laser is an all-solid-state picosecond laser.
Further, the window light spot of the laser is 1-3mm, and the divergence angle is 0.5-1.5mrad.
Further, in step 2), the single pulse width is 1 to 15ps.
Further, in the step 3), a transmission distance of the beam transmission path is 200-1000mm.
Further, in the step 3), the shaping optical path is an expanded beam optical path with a magnification of 1-8 times.
Further, in step 2), the laser wavelength emitted by the laser is set to 1064±5nm; the travelling speed of the laser spot is 1-500mm/s.
The invention also provides a system for realizing the nickel sheet infrared ultrafast laser cutting method, which comprises an operation table, an optical path system and an electrical control cabinet, wherein the optical path system and the electrical control cabinet are arranged on one side of the operation table;
an XY moving platform is arranged on the operating platform, and nickel sheets are fixedly clamped on the XY moving platform;
the system comprises an electric control cabinet, a laser cutting head, a laser control system and a laser control system, wherein the electric control cabinet is internally provided with an ultrafast laser and a controller, the upper part of the electric control cabinet is communicated with a light path system, the light path system is arranged in a light path box, the other end of the light path box is connected with the laser cutting head, and the laser cutting head is arranged above an XY moving platform;
the laser is connected with a computer controller provided with laser cutting system software through a data line, the computer controller inputs the controlled laser power, scanning speed and repetition frequency signals to the laser, and receives pulse synchronous signals of the laser, and simultaneously controls an optical path and an operation table to complete laser cutting of the nickel sheet workpiece.
And a lifting mechanism is arranged below the light path box.
The frequency-locking uniform energy single-pulse ultrafast laser refers to the mode of ultrafast laser working, namely uniform energy single-pulse periodic output under the locking frequency.
The invention has the beneficial effects that:
1. the ultra-fast laser cutting method based on locking high repetition frequency, single pulse work, high single pulse energy and high single pulse energy consistency cuts the nickel sheet, the photon pulse energy consistency is good, the cutting size is ultra-fine, the cutting precision can be controlled to be 0.1-10 microns, the cutting line width is narrower, and the cutting precision is higher in the precision machining application field of micro-size nickel sheets.
2. According to the laser cutting method, the high-energy single pulse output by the laser is unique in appearance on the time domain, the specific position points acting on the nickel sheet workpiece are very accurate, the drift in space can not occur, and the cutting precision is further improved.
3. The cutting method has the advantages of quick processing time, high photon resolution, almost no leakage point or leakage mark, and accurate time sequence matching.
4. The method of the invention realizes cutting through the ultrafast laser vaporization material processing surface with high single pulse energy instead of the heat-to-melting action, so that the phenomena of almost no heat affected zone, almost no slag hanging, no crack, no edge breakage and the like of the processing surface are avoided.
5. Under the irradiation of the ultrafast laser equipment with high single pulse energy consistency, the surface of the workpiece is clear and bright, the repeated irradiation is avoided, the consistency of the processed surface morphology of the material is high, and the characteristic parameters of the material are hardly changed.
Description of the drawings:
FIG. 1 is a schematic diagram of a nickel plate infrared ultrafast laser cutting system;
FIG. 2 is a schematic diagram of the internal structure of an optical path box of the nickel plate infrared ultrafast laser cutting system;
FIG. 3 is a photograph showing the effect of cutting nickel flakes according to the method of the present invention;
fig. 3A: precisely cutting a photo of a four-way multi-wing nickel sheet with the thickness of 1mm and the width of 0.05 mm;
fig. 3B: a micrograph of the cut sample of fig. 3A;
FIG. 3C is a standard size control photograph of the cut sample of FIG. 3A;
wherein: 1-an electrical control cabinet, 2-an optical path box, 21-a laser, 22-a shaping optical path and 23-a light beam transmission optical path; 231-reflector group, 232-single reflector, 3-laser cutting head, 4-operation panel, 5-horizontal slide rail, 6-moving platform, 7-vertical slide rail, 8-support frame, 9-nickel piece, 10-clamping device, 11-elevating system.
Detailed Description
The invention provides an infrared ultrafast laser cutting method and system suitable for precisely machining nickel sheet workpieces, which are further explained below with reference to the accompanying drawings and specific embodiments, but the invention is not limited to the following embodiments.
The invention discloses an infrared ultrafast laser cutting method suitable for precision machining of nickel sheet workpieces, which comprises the following steps:
1) Placing the nickel sheet workpiece 9 on an operation table 4, wherein the operation table 4 can drive the nickel sheet workpiece 9 to move along a preset path;
2) A laser 21 is arranged on one side of the operation table 4, and the laser is an ultrafast laser capable of emitting frequency-locking uniform energy monopulses; the emission frequency of the laser is a certain value between 100KHz and 200 KHz; the energy of the single pulse emitted by the laser is 50uJ-100uJ, and the energy difference between the single pulses is less than or equal to +/-5%.
3) Setting laser emitted by a laser device, and focusing on the surface of the nickel sheet workpiece 9 on the operating platform 4 after sequentially passing through the shaping light path 22, the light beam transmission light path 23 and the laser cutting head 3;
4) The cutting of the nickel sheet workpiece is completed by controlling the movement of the laser beam on the axis of the surface X, Y, Z of the nickel sheet workpiece 9 and the traveling speed of the laser beam.
As one embodiment of the present invention, the transmission distance of the beam transmission path 2-2 is 200-1000mm; preferably 300-1000mm; more preferably 500-800mm.
As another embodiment of the present invention, the shaping optical path 2-1 is a beam expanding optical path with a magnification of 1-8 times; preferably, the shaping light path is a beam expanding light path with the magnification of 2-6 times; more preferably, the shaping optical path is a beam expanding optical path with a magnification of 5 times.
As a further embodiment of the invention, the rotation speed of the vibrating mirror is 100-10000 revolutions per second; preferably, the rotation speed of the vibrating mirror is 400-5000 rpm; more preferably, the rotational speed of the vibrating mirror is 500-1000 rpm.
As a further embodiment of the invention, the field lens is an F-theta field lens or a telecentric field lens 4, and the focal length is 30-300mm; preferably, the field lens is an F-theta field lens or a telecentric field lens, and the focal length is 100-300mm; more preferably, the field lens is an F-theta field lens or a telecentric field lens, and the focal length is 150-250mm.
The step (4) of the invention is to input the laser parameters and the preset path into a control system; the control system controls the laser to start emitting laser according to laser parameters, the movement of a laser beam X, Y, Z shaft, the advancing speed of the laser beam on the surface of the nickel sheet workpiece 5, and the control console to drive the nickel sheet workpiece to move along a preset path so as to finish the surface cutting of the nickel sheet.
The invention also provides a system of the nickel sheet infrared ultrafast laser cutting method, which comprises an operation table 4, a light path system and an electrical control cabinet 1, wherein the light path system and the electrical control cabinet 2 are arranged on one side of the operation table 4;
an XY moving platform 6 is arranged on the operating platform 4, and nickel sheets are fixedly clamped on the XY moving platform;
the electric control cabinet 1 is internally provided with an ultrafast laser 21 and a controller, the upper part of the electric control cabinet is communicated with an optical path system, the optical path system is arranged in an optical path box 2, the other end of the optical path box 2 is connected with a laser cutting head 3, and the laser cutting head is arranged above an XY moving platform;
the laser is connected with a computer controller provided with laser cutting system software through a data line, the computer controller inputs the controlled laser power, scanning speed and repetition frequency signals to the laser, and receives pulse synchronous signals of the laser, and meanwhile, the optical path system and the operating platform are controlled to complete laser cutting of the nickel sheet workpiece.
Example 1
The cutting method comprises the following steps:
1) A nickel sheet 9 with the thickness of 1mm is fixed on an XY moving platform of the operation table 4 through a clamping device 10;
2) Setting laser parameters of an all-solid-state picosecond laser on one side of an operation table 4, and inputting the action track of a nickel sheet 9 on an XY moving platform into a controller of an electrical control cabinet 1; wherein the wavelength of the all-solid-state picosecond laser 1 is 1064+/-5 nm; the emission frequency is 150KHz; the emitted single pulse energy is 70uJ, the single pulse width is 15ps, and the consistency of the single pulse energy is less than or equal to +/-5%; the window light spot of the all-solid-state picosecond laser is 2mm, the divergence angle is 1.1mrad, and the travelling speed of the laser light spot is 500mm/s.
(3) The controller of the electrical control cabinet 1 starts the all-solid-state picosecond laser to emit laser according to the laser parameters, and controls the XY moving platform to drive the nickel sheet 9 to follow a preset action track, so that the cutting operation is completed.
The system structure for realizing the laser cutting method of the embodiment is as follows:
as shown in fig. 1, the system comprises an electrical control cabinet 1, an operation console 4 and an all-solid-state picosecond laser 21; the electric control cabinet 1 is arranged on the right side of the operation table 4, an XY moving platform is arranged on the upper side of the operation table 4, the electric control cabinet 1 is provided with a lifting mechanism 11, the lifting mechanism 11 is connected with the first end of the horizontally arranged light path box 2, and the lifting mechanism 11 can drive the light path box 2 to move up and down; the XY moving platform is fixedly used for clamping the nickel sheet 9;
the XY moving platform comprises a transverse sliding rail 5 arranged on the operating platform 4 in the X-axis direction, the transverse sliding rail 5 is connected with a moving platform 6 in a sliding manner, and the moving platform 6 moves transversely along the transverse sliding rail 5; the movable platform 6 is provided with a longitudinal slide rail 7 arranged on a Y axis, the longitudinal slide rail 7 is connected with a support frame 8 in a sliding manner, the support frame 8 longitudinally moves along the longitudinal slide rail 7, the support frame 8 is provided with a clamping device 10, and the clamping device 10 is used for clamping and fixing a nickel sheet 9 horizontally arranged on the support frame 8;
the second end of the light path box 2 extends to the upper part of the XY moving platform, and an all-solid-state picosecond laser consisting of a laser 21, a shaping light path 22, a light beam transmission light path 23 and a laser cutting head 3 is arranged in the light path box 2; the laser cutting head 3 is arranged at the lower side of the second end of the light path box 2;
wherein the shaping optical path 22 is a beam expanding optical path with 5 times of magnification; the transmission distance of the beam transmission light path 23 is 600mm, and the beam transmission light path 23 comprises a reflector group 231 which is arranged oppositely and a single reflector 232 which changes the transmission direction of the light path; the laser cutting head 3 with the focusing function is arranged at the lower side of the second end of the light path box 2, and the laser cutting head 3 emits laser on the nickel sheet 9 below after focusing;
the electric control cabinet 1 is internally provided with a controller which is respectively connected with a laser 21 of the all-solid-state picosecond laser and a controller of the XY moving platform and is used for controlling the laser output of the all-solid-state picosecond laser and controlling the XY moving platform to move the nickel sheet 9 according to a preset path;
wherein, the controller in the electrical control cabinet 1 is also connected with the lifting mechanism 11 for controlling the lifting operation of the lifting mechanism 11. The lifting mechanism 11 can adjust the distance between the laser cutting head 3 and the nickel sheet 9, and has the function of focusing.
In the present invention, the elevating mechanism 11 may be a cylinder or a screw structure, or any of structures disclosed in the prior art that can have the same function.
The cutting effect photograph is shown in fig. 3.
The above embodiments are only for illustrating the technical solution of the present invention and not for limiting the same, and although the present invention has been described in detail with reference to the above embodiments, one skilled in the art may make modifications and equivalents to the specific embodiments of the present invention, and any modifications and equivalents thereof without departing from the spirit and scope of the present invention are within the scope of the claims of the present invention.

Claims (8)

1. An infrared ultrafast laser cutting method suitable for precisely machining nickel sheet workpieces is characterized by comprising the following steps:
1) Placing a nickel sheet workpiece on an operation table, wherein the operation table can drive the nickel sheet workpiece to move along a preset path;
2) A laser is arranged on one side of the operation table, and the laser is an ultrafast laser capable of emitting frequency-locking uniform energy monopulses; the emission frequency of the laser is a certain value between 100KHz and 200 KHz; the energy of the single pulse emitted by the laser is 50uJ-100uJ, and the energy difference between the single pulses is less than or equal to +/-5%.
3) Setting laser emitted by a laser device, and focusing on the surface of a nickel sheet workpiece on an operation table after sequentially passing through a shaping light path, a light beam transmission light path and a laser cutting head;
4) The cutting of the nickel sheet workpiece is completed by controlling the movement of the laser beam on the axis of the surface X, Y, Z of the nickel sheet workpiece and the traveling speed of the laser beam.
2. The infrared ultrafast laser cutting method as recited in claim 1, wherein in the step 2), the laser is an all-solid-state picosecond laser.
3. The infrared ultrafast laser cutting method as claimed in claim 1, wherein the window light spot of the laser is 1-3mm, and the divergence angle is 0.5-1.5mrad.
4. The infrared ultrafast laser cutting method as recited in claim 1, wherein in the step 3), the transmission distance of the beam transmission path is 200-1000mm.
5. The infrared ultrafast laser cutting method as recited in claim 1, wherein in the step 3), the shaping optical path is a beam expansion optical path with a magnification of 1-8 times.
6. The infrared ultrafast laser cutting method as recited in claim 1, wherein in the step 4), the single pulse width is 1 to 15ps.
7. The infrared ultrafast laser cutting method as recited in claim 2, wherein in the step 4), a laser wavelength emitted by the laser is set to 1064±5nm; the travelling speed of the laser spot is 1-500mm/s.
8. The system for realizing the infrared ultrafast laser cutting method as recited in claim 1, wherein the system comprises an operation table, an optical path system and an electrical control cabinet, wherein the optical path system and the electrical control cabinet are arranged on one side of the operation table;
an XY moving platform is arranged on the operating platform, and nickel sheets are fixedly clamped on the XY moving platform;
the system comprises an electric control cabinet, a laser cutting head, a laser control system and a laser control system, wherein the electric control cabinet is internally provided with an ultrafast laser and a controller, the upper part of the electric control cabinet is communicated with a light path system, the light path system is arranged in a light path box, the other end of the light path box is connected with the laser cutting head, and the laser cutting head is arranged above an XY moving platform;
the laser is connected with a computer controller provided with laser cutting system software through a data line, the computer controller inputs the controlled laser power, scanning speed and repetition frequency signals to the laser, and receives pulse synchronous signals of the laser, and simultaneously controls an optical path and an operation table to complete laser cutting of the nickel sheet workpiece.
CN202210019895.8A 2022-01-10 2022-01-10 Infrared ultrafast laser cutting method and system suitable for precise machining of nickel sheet workpiece Pending CN116441739A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210019895.8A CN116441739A (en) 2022-01-10 2022-01-10 Infrared ultrafast laser cutting method and system suitable for precise machining of nickel sheet workpiece

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210019895.8A CN116441739A (en) 2022-01-10 2022-01-10 Infrared ultrafast laser cutting method and system suitable for precise machining of nickel sheet workpiece

Publications (1)

Publication Number Publication Date
CN116441739A true CN116441739A (en) 2023-07-18

Family

ID=87120756

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210019895.8A Pending CN116441739A (en) 2022-01-10 2022-01-10 Infrared ultrafast laser cutting method and system suitable for precise machining of nickel sheet workpiece

Country Status (1)

Country Link
CN (1) CN116441739A (en)

Similar Documents

Publication Publication Date Title
CN109926584B (en) Additive manufacturing and surface polishing synchronous processing method and device
CN111318808B (en) Meter-scale large-caliber optical element CO2Laser polishing device and polishing method
CN104972226A (en) Double-head laser machining device and machining method
CN110722272A (en) Ultrafast laser micro-nano cutting drilling equipment and method
CN110625401A (en) Processing device and method under laser-induced material coupling reaction
CN115519185B (en) Machining process for machining two sides of PCD diamond saw teeth by utilizing laser
CN114669882A (en) Method and system for repairing infrared ultrafast laser diamond tool bit
CN116441739A (en) Infrared ultrafast laser cutting method and system suitable for precise machining of nickel sheet workpiece
CN109732198B (en) Double-beam hot cracking processing device and method for hard and brittle materials
CN114273800A (en) Ultrafast laser drilling method and system suitable for stainless steel workpiece
CN114260595A (en) Green light ultrafast laser cutting method and system suitable for precision machining of nickel sheet workpiece
CN115365639A (en) Method for processing C/SiC composite material based on ultrasonic vibration assisted femtosecond laser
CN114273786A (en) Ultrafast laser precision carving method and system for leather
CN116551187A (en) Method and system for repairing green ultra-fast laser diamond tool bit
CN114211136A (en) Infrared ultrafast laser cutting method and system for photovoltaic panel
CN114248019A (en) Ultraviolet ultrafast laser cutting method and system for photovoltaic panel
CN114273791A (en) Infrared ultrafast laser grooving method and system for solar crystalline silicon battery
CN114248018A (en) Ultra-fast laser cutting method and system for green light of photovoltaic panel
CN114211138A (en) Green light ultrafast laser ceramic drilling method and system
CN114211139A (en) Ultraviolet ultrafast laser ceramic punching method and system
CN114211137A (en) Infrared ultrafast laser ceramic punching method and system
CN214815737U (en) Laser engraving equipment
CN117600684B (en) Ultrafast laser processing device for fiber reinforced composite material and application method thereof
CN221269987U (en) Composite double-pulse laser polishing system
CN114083139B (en) Processing device and processing method for laser-induced active ion etching diamond

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication