CN1140768C - 用来测量位移的系统 - Google Patents
用来测量位移的系统 Download PDFInfo
- Publication number
- CN1140768C CN1140768C CNB991104943A CN99110494A CN1140768C CN 1140768 C CN1140768 C CN 1140768C CN B991104943 A CNB991104943 A CN B991104943A CN 99110494 A CN99110494 A CN 99110494A CN 1140768 C CN1140768 C CN 1140768C
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- CN
- China
- Prior art keywords
- pattern
- sensor array
- light sensor
- light
- array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 30
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Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Abstract
Description
Claims (8)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/154,931 US6188058B1 (en) | 1998-09-17 | 1998-09-17 | System for taking displacement measurements having photosensors with imaged pattern arrangement |
US09/154931 | 1998-09-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1247972A CN1247972A (zh) | 2000-03-22 |
CN1140768C true CN1140768C (zh) | 2004-03-03 |
Family
ID=22553430
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB991104943A Expired - Fee Related CN1140768C (zh) | 1998-09-17 | 1999-07-16 | 用来测量位移的系统 |
Country Status (4)
Country | Link |
---|---|
US (3) | US6188058B1 (zh) |
JP (1) | JP2000097639A (zh) |
CN (1) | CN1140768C (zh) |
TW (1) | TW389831B (zh) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100399291B1 (ko) * | 1997-01-27 | 2004-01-24 | 가부시키가이샤 아드반스트 디스프레이 | 반도체 박막트랜지스터, 그 제조방법, 반도체 박막트랜지스터어레이 기판 및 해당 반도체 박막트랜지스터어레이 기판을 사용한 액정표시장치 |
US6517180B2 (en) | 2001-03-27 | 2003-02-11 | Hewlett-Packard Company | Dot sensing, color sensing and media sensing by a printer for quality control |
US6660997B2 (en) * | 2001-04-26 | 2003-12-09 | Creo Srl | Absolute position Moiré type encoder for use in a control system |
US6703633B2 (en) | 2001-08-16 | 2004-03-09 | Hewlett-Packard Development Company, L.P. | Method and apparatus for authenticating a signature |
EP1447648B1 (en) * | 2003-02-12 | 2015-07-01 | Mitutoyo Corporation | Optical Encoder |
WO2004111590A1 (en) * | 2003-06-12 | 2004-12-23 | Matzoll Robert J | Optical displacement torque sensor |
US7559258B2 (en) * | 2003-06-12 | 2009-07-14 | Matzoll Robert J | Torque sensor using signal amplitude analysis |
JP2005018529A (ja) * | 2003-06-27 | 2005-01-20 | Ricoh Co Ltd | 画像処理装置 |
WO2005009239A1 (en) * | 2003-07-23 | 2005-02-03 | Go Sensors, Llc. | Apparatus and method for determining location of a source of radiation |
US7355561B1 (en) * | 2003-09-15 | 2008-04-08 | United States Of America As Represented By The Secretary Of The Army | Systems and methods for providing images |
US7586075B1 (en) * | 2004-03-01 | 2009-09-08 | Raytheon Company | Method for analyzing output data of array subelements of an imaging segmented array |
CN101287960A (zh) * | 2004-10-13 | 2008-10-15 | 阿克罗米特里克斯有限责任公司 | 测量连续移动样品的样品表面平整度的系统与方法 |
US20060139670A1 (en) * | 2004-12-27 | 2006-06-29 | Hoblit Robert S | Method and system for correcting output of printer devices |
US7100508B1 (en) * | 2005-02-25 | 2006-09-05 | Eastman Kodak Company | Color registration test pattern |
JP2007058452A (ja) * | 2005-08-23 | 2007-03-08 | Fuji Xerox Co Ltd | 位置計測システム |
US7612882B2 (en) * | 2006-10-20 | 2009-11-03 | Hewlett-Packard Development Company, L.P. | Optical gratings, lithography tools including such optical gratings and methods for using same for alignment |
DE102007008002B4 (de) * | 2007-02-15 | 2009-11-12 | Corrsys-Datron Sensorsysteme Gmbh | Verfahren und Vorrichtung zum berührungslosen Bestimmen des seitlichen Versatzes gegenüber einer Geradeausrichtung |
EP2060173B1 (en) * | 2007-11-16 | 2014-09-24 | DeLaval Holding AB | A milking parlour and method for operating the same |
US7784364B2 (en) * | 2008-04-28 | 2010-08-31 | Matzoll Robert J | Optical sensor for measurement of static and dynamic torque |
CN101995207B (zh) * | 2009-08-17 | 2015-04-29 | 宝钢集团新疆八一钢铁有限公司 | 等位移机械传动式检测设备运动位移的装置 |
EP2688282B1 (en) * | 2011-07-06 | 2016-11-30 | Morpho, Inc. | Image processing device, image processing method, and image processing program |
EP2546612B1 (en) * | 2011-07-13 | 2018-11-14 | CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement | Method for working out the angular position of a rotating element and device for carrying out such a method |
US9110038B2 (en) * | 2011-07-18 | 2015-08-18 | Asm Technology Singapore Pte Ltd | Asymmetric pattern projection apparatus |
US9018578B2 (en) | 2011-12-23 | 2015-04-28 | Mitutoyo Corporation | Adaptable resolution optical encoder having structured illumination and spatial filtering |
US8941052B2 (en) | 2011-12-23 | 2015-01-27 | Mitutoyo Corporation | Illumination portion for an adaptable resolution optical encoder |
US9029757B2 (en) | 2011-12-23 | 2015-05-12 | Mitutoyo Corporation | Illumination portion for an adaptable resolution optical encoder |
US9080899B2 (en) | 2011-12-23 | 2015-07-14 | Mitutoyo Corporation | Optical displacement encoder having plural scale grating portions with spatial phase offset of scale pitch |
EP2679778B1 (en) * | 2012-06-27 | 2019-08-21 | Ansaldo Energia IP UK Limited | A method for measuring geometry deformations of a turbine component |
US9307230B2 (en) | 2012-06-29 | 2016-04-05 | Apple Inc. | Line pair based full field sharpness test |
US11885738B1 (en) | 2013-01-22 | 2024-01-30 | J.A. Woollam Co., Inc. | Reflectometer, spectrophotometer, ellipsometer or polarimeter system including sample imaging system that simultaneously meet the scheimpflug condition and overcomes keystone error |
US9207154B2 (en) * | 2013-10-22 | 2015-12-08 | General Electric Company | Method and system for creep measurement |
US10724947B2 (en) | 2015-04-14 | 2020-07-28 | Cognex Corporation | System and method for acquiring images of surface texture |
EP3428751A1 (en) * | 2017-07-12 | 2019-01-16 | Koninklijke Philips N.V. | Measuring position of motion stage |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51131654A (en) * | 1975-05-13 | 1976-11-16 | Toshiba Corp | Moire device |
US4274783A (en) | 1977-05-26 | 1981-06-23 | Fmc Corporation | Chain measuring and conveyor control system |
US4198758A (en) | 1977-05-26 | 1980-04-22 | Fmc Corporation | Chain measuring and conveyor control system |
JPS57184918A (en) * | 1981-05-08 | 1982-11-13 | Natl Aerospace Lab | Measurement of fine displacement |
US4766302A (en) * | 1984-05-17 | 1988-08-23 | Minolta Camera Kabushiki Kaisha | Focus detecting device including means for determining a priority of correlation calculations |
JPS60263905A (ja) * | 1984-06-13 | 1985-12-27 | Sumitomo Electric Ind Ltd | 周期構造をもったマルチコアファイバを用いた微少変位計 |
US5089712A (en) | 1989-06-08 | 1992-02-18 | Hewlett-Packard Company | Sheet advancement control system detecting fiber pattern of sheet |
US5124548A (en) * | 1990-05-03 | 1992-06-23 | Canon Kabushiki Kaisha | Encoder for detecting relative displacement having first and second scales and a light receiving device |
US5075560A (en) * | 1990-09-20 | 1991-12-24 | Eastman Kodak Company | Moire distance measurements using a grating printed on or attached to a surface |
AT395914B (de) * | 1991-04-18 | 1993-04-26 | Rsf Elektronik Gmbh | Photoelektrische positionsmesseinrichtung |
JP3066923B2 (ja) * | 1991-07-29 | 2000-07-17 | キヤノン株式会社 | エンコーダ及びこれを有するシステム |
US5149980A (en) | 1991-11-01 | 1992-09-22 | Hewlett-Packard Company | Substrate advance measurement system using cross-correlation of light sensor array signals |
JPH05248818A (ja) * | 1992-03-04 | 1993-09-28 | Yokogawa Electric Corp | 光学式エンコーダ |
JPH082565Y2 (ja) | 1992-03-31 | 1996-01-29 | 株式会社椿本チエイン | 無端移動体の伸び測定装置 |
JPH05332750A (ja) * | 1992-05-27 | 1993-12-14 | Yaskawa Electric Corp | 照準方法 |
JP3198789B2 (ja) * | 1994-04-12 | 2001-08-13 | 松下電器産業株式会社 | 光学式エンコーダ |
JPH08145647A (ja) * | 1994-11-22 | 1996-06-07 | Olympus Optical Co Ltd | 形状測定器 |
US5578813A (en) | 1995-03-02 | 1996-11-26 | Allen; Ross R. | Freehand image scanning device which compensates for non-linear movement |
US5686720A (en) | 1995-03-02 | 1997-11-11 | Hewlett Packard Company | Method and device for achieving high contrast surface illumination |
US5567976A (en) | 1995-05-03 | 1996-10-22 | Texas Instruments Incorporated | Position sensing photosensor device |
JPH0933284A (ja) * | 1995-07-21 | 1997-02-07 | Mitsutoyo Corp | 光学式エンコーダ |
US5699161A (en) | 1995-07-26 | 1997-12-16 | Psc, Inc. | Method and apparatus for measuring dimensions of objects on a conveyor |
US5729008A (en) | 1996-01-25 | 1998-03-17 | Hewlett-Packard Company | Method and device for tracking relative movement by correlating signals from an array of photoelements |
US5703353A (en) | 1996-01-25 | 1997-12-30 | Hewlett-Packard Company | Offset removal and spatial frequency band filtering circuitry for photoreceiver signals |
US5753908A (en) | 1997-01-09 | 1998-05-19 | Hewlett-Packard Company | Photoelectric imaging device photosensor array alignment apparatus and method |
US6198102B1 (en) * | 1998-06-17 | 2001-03-06 | Owens-Brockway Glass Container Inc. | Inspection of container mouth using infrared energy emitted by the container bottom |
-
1998
- 1998-09-17 US US09/154,931 patent/US6188058B1/en not_active Expired - Fee Related
-
1999
- 1999-04-08 TW TW088105601A patent/TW389831B/zh not_active IP Right Cessation
- 1999-07-16 CN CNB991104943A patent/CN1140768C/zh not_active Expired - Fee Related
- 1999-09-13 JP JP11258252A patent/JP2000097639A/ja active Pending
-
2000
- 2000-07-20 US US09/619,994 patent/US6246067B1/en not_active Expired - Fee Related
- 2000-07-20 US US09/619,871 patent/US6259111B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
TW389831B (en) | 2000-05-11 |
US6188058B1 (en) | 2001-02-13 |
US6246067B1 (en) | 2001-06-12 |
CN1247972A (zh) | 2000-03-22 |
JP2000097639A (ja) | 2000-04-07 |
US6259111B1 (en) | 2001-07-10 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C53 | Correction of patent of invention or patent application | ||
CB02 | Change of applicant information |
Applicant after: Agilent Technologies, Inc. Applicant before: Hewlett-Packard Co. |
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COR | Change of bibliographic data |
Free format text: CORRECT: APPLICANT; FROM: HEWLETT-PACKARD DEVELOPMENT COMPANY TO: AGARLENT TECHNOLOGIES INC. |
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Owner name: AGARLENT TECHNOLOGIES INC.; HEWLETT-PACKARD DEVEL Free format text: FORMER OWNER: AGARLENT TECHNOLOGIES INC. Effective date: 20011204 |
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C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20011204 Applicant after: Agilent Technologies, Inc. Applicant after: HEWLETT-PACKARD Co. Applicant before: Agilent Technologies, Inc. |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee |
Owner name: ANJELEN SCI. & TECH. INC. Free format text: FORMER NAME OR ADDRESS: AGARLENT TECHNOLOGIES INC. |
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CP01 | Change in the name or title of a patent holder |
Address after: Hewlett-Packard Co, California, USA Patentee after: AGILENT TECHNOLOGIES, Inc. Address before: Hewlett-Packard Co, California, USA Patentee before: Agilent Technologies, Inc. |
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ASS | Succession or assignment of patent right |
Owner name: HEWLETT-PACKARD DEVELOPMENT COMPANY Free format text: FORMER OWNER: ANJELEN SCI. + TECH. INC.; HEWLETT-PACKARD DEVELOPMENT COMPANY Effective date: 20060512 Owner name: HEWLETT-PACKARAD DEVELOPMENT INC. Free format text: FORMER OWNER: HEWLETT-PACKARD DEVELOPMENT COMPANY Effective date: 20060512 |
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Effective date of registration: 20060512 Address after: California, USA Patentee after: Hewlett-Packard Co. Address before: California, USA Co-patentee before: Hewlett-Packard Co. Patentee before: Agilent Technologies, Inc. Effective date of registration: 20060512 Address after: Texas, USA Patentee after: Hewlett-Packard Development Co.,L.P. Address before: California, USA Patentee before: Hewlett-Packard Co. |
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