CN113490696B - 用于聚苯乙烯-b-聚(甲基丙烯酸甲酯)二嵌段共聚物的接触孔自组装的快速可交联中性底层及其配制剂 - Google Patents

用于聚苯乙烯-b-聚(甲基丙烯酸甲酯)二嵌段共聚物的接触孔自组装的快速可交联中性底层及其配制剂 Download PDF

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CN113490696B
CN113490696B CN201980080346.8A CN201980080346A CN113490696B CN 113490696 B CN113490696 B CN 113490696B CN 201980080346 A CN201980080346 A CN 201980080346A CN 113490696 B CN113490696 B CN 113490696B
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random copolymer
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CN113490696A (zh
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D·巴斯卡兰
M·S·拉赫曼
V·蒙雷亚尔
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Merck Patent GmbH
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    • C09D133/00—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Coating compositions based on derivatives of such polymers
    • C09D133/04—Homopolymers or copolymers of esters
    • C09D133/06—Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, the oxygen atom being present only as part of the carboxyl radical
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    • C08F212/02—Monomers containing only one unsaturated aliphatic radical
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    • C09D125/00—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring; Coating compositions based on derivatives of such polymers
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    • C09D133/00—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Coating compositions based on derivatives of such polymers
    • C09D133/04—Homopolymers or copolymers of esters
    • C09D133/06—Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, the oxygen atom being present only as part of the carboxyl radical
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    • C09D153/00—Coating compositions based on block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Coating compositions based on derivatives of such polymers
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  • Chemical & Material Sciences (AREA)
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  • Polymers & Plastics (AREA)
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  • General Physics & Mathematics (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Formation Of Insulating Films (AREA)
  • Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
  • Graft Or Block Polymers (AREA)
CN201980080346.8A 2018-12-07 2019-12-04 用于聚苯乙烯-b-聚(甲基丙烯酸甲酯)二嵌段共聚物的接触孔自组装的快速可交联中性底层及其配制剂 Active CN113490696B (zh)

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US201862776802P 2018-12-07 2018-12-07
US62/776,802 2018-12-07
PCT/EP2019/083589 WO2020115090A1 (en) 2018-12-07 2019-12-04 Rapid cross-linkable neutral underlayers for contact hole self-assembly of polystyrene-b- poly(methyl methacrylate) diblock copolymers and their formulation thereof

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CN113490696B true CN113490696B (zh) 2022-12-23

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US (1) US12559644B2 (https=)
EP (1) EP3891198B1 (https=)
JP (1) JP7269346B2 (https=)
KR (1) KR102561427B1 (https=)
CN (1) CN113490696B (https=)
SG (1) SG11202103809PA (https=)
TW (1) TWI772720B (https=)
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG11202103809PA (en) 2018-12-07 2021-05-28 Merck Patent Gmbh Rapid cross-linkable neutral underlayers for contact hole self-assembly of polystyrene-b- poly(methyl methacrylate) diblock copolymers and their formulation thereof
WO2022243216A1 (en) * 2021-05-18 2022-11-24 Merck Patent Gmbh Hydrophobic crosslinkable pinning underlayers with improved dry etch capabilities for patterning directed self-assembly of ps-b-pmma type block copolymers
KR20250004089A (ko) * 2022-05-03 2025-01-07 메르크 파텐트 게엠베하 이블록 공중합체의 유도 자기 조립을 위한 SiARC 기판 상용성을 개선하기 위한 히드록실 단량체를 함유하는 신규한 중성 매트의 개발
CN117331279A (zh) * 2022-06-23 2024-01-02 华为技术有限公司 感光树脂组合物、膜材、含苯并环丁烯结构的环氧化合物及其应用

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CN106104754A (zh) * 2014-01-16 2016-11-09 布鲁尔科技公司 用于直接自组装的高chi嵌段共聚物
CN107849202A (zh) * 2015-06-04 2018-03-27 株式会社Lg化学 中性层组合物
CN108137313A (zh) * 2015-10-16 2018-06-08 Az电子材料卢森堡有限公司 用于嵌段共聚物自组装的组合物和方法

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