CN113308678A - Wide window of observation angle - Google Patents
Wide window of observation angle Download PDFInfo
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- CN113308678A CN113308678A CN202110797590.5A CN202110797590A CN113308678A CN 113308678 A CN113308678 A CN 113308678A CN 202110797590 A CN202110797590 A CN 202110797590A CN 113308678 A CN113308678 A CN 113308678A
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- Prior art keywords
- extension
- window
- hole
- cavity
- door
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/52—Means for observation of the coating process
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A30/00—Adapting or protecting infrastructure or their operation
- Y02A30/24—Structural elements or technologies for improving thermal insulation
- Y02A30/249—Glazing, e.g. vacuum glazing
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B80/00—Architectural or constructional elements improving the thermal performance of buildings
- Y02B80/22—Glazing, e.g. vaccum glazing
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The application provides a wide window of observation angle, the window sets up on vacuum evaporation machine's cavity door, the structure of window includes from outside to inside: the outer layer glass and the mounting frame are fixed on the cavity door, the extending pieces are located in a main cavity of the vacuum evaporation machine, the number of the extending pieces is two, the two extending pieces are vertically arranged on the upper side and the lower side of the first through hole, and one or two of the extending pieces have a reflection function; the extending piece 3 reflects light and blocks evaporated evaporation materials from passing through the first through hole; the distance between the surface of the evaporation material in the crucible and the bottom plate of the main cavity body is H during film coating, the distance between the center point of the surface of the evaporation material in the crucible and the cavity door is L, a connecting line is formed between the most central point of the surface of the evaporation material in the crucible and the most right point of the upper edge of the crucible, the included angle between the connecting line and the vertical line of the inner wall of the cavity door is b, and the distance between the lowest point of the upper extension piece 31 of the window and the bottom plate of the main cavity body is greater than H + L multiplied by cotb.
Description
Technical Field
The invention relates to the technical field of vacuum evaporation machines, in particular to a window with a wide observation angle.
Background
The vacuum evaporation plating machine is used for evaporating and gasifying a coating material (or called a coating material) by means of current heating, electron beam bombardment heating, ion source bombardment and the like under a vacuum condition, and then enabling gasified particles to fly to the surface of a substrate to be condensed, and finally forming a thin film. The vacuum evaporation has the advantages of simple film forming method, high film purity and compactness, unique film structure and performance and the like, thereby being widely applied. In the processing technique of vacuum evaporation, a crucible is adopted to gasify a coating material under the vacuum condition, and the crucible comprises: the evaporation coating device comprises an evaporation coating cavity and an evaporation coating source arranged in the evaporation coating cavity, wherein the evaporation coating source is heated to evaporate evaporation coating materials evaporated in the evaporation coating source, the evaporation coating materials are upwards evaporated in a fan-shaped structure, a coating pot with an umbrella-shaped structure for bearing a coated workpiece is arranged above a crucible, and the coated workpiece is fixed on the coating pot, so that evaporation coating material molecules are deposited on the coated workpiece to form a coated film.
In the process of coating, the operation state in the main cavity of the vacuum evaporation machine, the condition of evaporation materials in the crucible, the rotation condition of the plating pot, the state of the heating lamp and the like can be observed visually through the window. The window of the existing vacuum evaporator comprises a handle, a rotating shaft, outer layer glass and rotating glass from outside to inside, wherein the rotating glass rotates synchronously with the rotating shaft, and then the condition in a cavity of the vacuum evaporator is observed through an observation hole on a defending plate. And because the place that the gyration glass is facing to the observation hole can be by the coating film, will turn over the place that the glass is not by the coating film and observe to the observation hole next time, turn over the glass and can't observe by all coating films after using several times, just need often to change the gyration glass in the cavity door, and, because of receiving the restriction of observation hole size on the protection board, and the structural design of whole window, can't observe in many places in plating pot and the crucible, the observation angle is smaller.
Accordingly, the present invention provides a wide viewing angle window, which is capable of viewing about 95% of the inside of a crucible, in which a glass is not coated with a deposition material, and a member which needs to be replaced due to coating is not provided.
Disclosure of Invention
The invention aims to provide a wide observation angle window, which is used for observing that glass is not coated by a deposition material, has no part needing to be replaced due to coating, has a wide observation angle and can observe about 95 percent of conditions in a crucible.
In the window with wide observation angle, the extending pieces positioned in the main cavity play double roles of reflecting light rays so as to facilitate the observation of the condition in the main cavity by human eyes and preventing evaporated evaporation materials from passing through the first through hole of the mounting frame, the evaporation materials are completely blocked by the two extending pieces, the evaporated evaporation materials are blocked by the lower surfaces of the upper extending piece and the lower extending piece, no evaporation materials pass through the first through hole of the mounting frame and the cavity door through hole, therefore, the outer glass can not be coated with a film, the outer glass does not need to be replaced, the outer glass can be used for several years without problems, and simultaneously, the position of the window is limited, furthermore, when one or two windows are provided, the inclination angle and the emittance of the two extending pieces are limited, the observation angle of the window is wide, the crucible condition can be completely observed, and about 95% of the crucible condition can be observed. The present applicant has completed the present application on this basis.
The utility model provides a wide window of observation angle, the window sets up on vacuum coating by vaporization machine's cavity door, the structure of window includes from outside to inside: the glass vacuum evaporation coating machine comprises outer-layer glass 1, a mounting frame 2 and extension pieces 3, wherein the outer-layer glass 1 and the mounting frame 2 are fixed on a cavity door, the extension pieces 3 are connected with the mounting frame 2, the extension pieces 3 are located in a main cavity of the vacuum evaporation coating machine, an inclination angle a is formed between the extension pieces 3 and a vertical line of the inner wall of the cavity door, the mounting frame 2 is provided with a first through hole 21, the number of the extension pieces 3 is two, the two extension pieces 3 are vertically arranged on the upper side and the lower side of the first through hole 21, and one or two of the extension pieces 3 have a reflection function; light in a main cavity of the vacuum evaporation machine is reflected by the extension piece 3 and then passes through the first through hole 21 to reach the outer layer glass 1, evaporation materials in a crucible arranged on a bottom plate of the main cavity body are upwards evaporated in a cone shape during film coating, and the extension piece 3 blocks the evaporated evaporation materials to prevent the evaporation materials from passing through the first through hole 21; the distance between the surface of the evaporation material in the crucible and the bottom plate of the main cavity body is H, the distance between the center point of the surface of the evaporation material in the crucible and the cavity door is L, the distance between the center point of the surface of the evaporation material in the crucible and the rightmost point of the upper edge of the crucible is taken as a connecting line, the included angle between the connecting line and the vertical line of the inner wall of the cavity door is b, the distance between the lowest point of the upper extending piece 31 of the window and the bottom plate of the main cavity body is more than H + L multiplied by cotb, the distance between the center point of the surface of the evaporation material in the crucible and the highest point of the lower extending piece 32 is taken as a connecting line, the included angle between the connecting line and the vertical line of the inner wall of the cavity door is d, the length of the lower extending piece 32 is M, and the distance between the upper extending piece 31 and the lower extending piece 32 on the mounting frame 2 is less than or equal to M multiplied by cosa + M multiplied by sina multiplied by cotd.
The distance between the lowest point of the upper extending member 31 of the window and the bottom plate of the main cavity is larger than H + L × cotb, at this time, the evaporation material at the front part in the crucible can be observed through the window, that is, half of the evaporation material in the crucible can be observed, and at this time, the window is in the range where the evaporation material is evaporated upwards in a cone shape during film coating, so it is also necessary to ensure that the extending member 3 can block the evaporated evaporation material to prevent the evaporation material from passing through the first through hole 21, and the extending member 3 satisfies the condition that the distance between the upper extending member 31 and the lower extending member 32 on the mounting frame 2 is smaller than or equal to M × cosa + M × sina × cotd, and if the distance between the upper extending member 31 and the lower extending member 32 on the mounting frame 2 is larger than M × cosa + M × sina × cotd, the evaporated evaporation material passes through the first through hole 21 and the through hole of the cavity door to coat the inner surface of the outer glass 1, after the inner surface of the outer glass 1 is coated with a film, the human eyes cannot observe the situation in the main cavity through the outer glass 1, and the outer glass 1 needs to be replaced regularly.
In some embodiments, the window has one or more windows, one window is disposed in the middle of the chamber door, a plurality of windows are regularly distributed on the chamber door, and the inclination angles a of the two extending members 3 are the same or different.
Furthermore, the window has one, and the two extending members 3 have the same inclination angle a, that is, the two extending members 3 are arranged in parallel, the inclination angle a is 20-80 degrees, and the lower surface of the upper extending member 31 and the upper surface of the lower extending member 32 have a reflecting function.
Further, when observing the evaporation material in the crucible by human eyes, the light is reflected to the upper surface of the lower extension piece 32 through the lower surface of the upper extension piece 31, and the upper surface of the lower extension piece 32 passes through the first through hole 21 to reach the outer layer glass 1 after being reflected; when people observe the plating pot above the main cavity body, light rays directly pass through the first through hole 21 to reach the outer layer glass 1 after being reflected by the upper surface of the lower extension piece 32.
Furthermore, the number of the windows is two, the two windows are vertically arranged on the cavity door, the lower surface of the upper extending piece 31 of the upper window has a reflection function, the lower extending piece 32 does not have a reflection function, the inclination angle a of the upper extending piece 31 is larger than 90 degrees, and the inclination angle a of the lower extending piece 32 is smaller than 90 degrees; the two extensions 3 of the lower viewing window are arranged in parallel, the lower surface of the upper extension 31 and the upper surface of the lower extension 32 have a reflecting function, the two extensions 3 have the same angle of inclination a and the angle of inclination a is 20-80.
Further, when observing the evaporation material in the crucible through a window arranged below, human eyes reflect light to the upper surface of the lower extension piece 32 through the lower surface of the upper extension piece 31, the upper surface of the lower extension piece 32 passes through the first through hole 21 to reach the outer layer glass 1 after reflecting, and when observing the plating pot above the main cavity, the human eyes directly pass through the first through hole 21 to reach the outer layer glass 1 after reflecting through the upper surface of the lower extension piece 32; through setting up the window in the top, when people's eye observes the coating by vaporization material in the crucible, light directly passes first through-hole 21 and reachs outer glass 1 after the lower surface reflection of extension 31, and when people's eye observes the pot that plates of the upper portion in the main cavity, light directly passes first through-hole 21 and reachs outer glass 1.
In some embodiments, the upper extension 31 and/or the lower extension 32 are mirror surfaces, wherein the lower surface of the upper extension 31 is a light reflecting surface and the upper surface is a backlight surface, and the upper surface of the lower extension 32 is a light reflecting surface and the lower surface is a backlight surface.
In some embodiments, the cavity door is provided with a through hole, the outer glass 1 is fixed at a position corresponding to the through hole of the cavity door, and the outer glass 1 is fixed on the outer wall of the cavity door outside the through hole of the cavity door, or fixed on the inner wall of the cavity door inside the through hole of the cavity door, or fixed inside the through hole of the cavity door.
Further preferably, the outer layer glass 1 is fixed on the outer wall of the cavity door outside the through hole of the cavity door or fixed inside the through hole of the cavity door.
Further, the first through holes 21 of the cavity door through hole, the outer layer glass 1 and the mounting rack 2 are one of square, rectangle, circle or ellipse, and the shapes of the cavity door through hole, the outer layer glass 1 and the mounting rack 2 are the same or different.
Further, the window further comprises a hollow fixing piece 4, the hollow fixing piece 4 is used for fixing the outer layer glass 1 and the cavity door, the hollow fixing piece 4 is fixed with the cavity door through a screw, and the shape of the hollow part of the hollow fixing piece 4 is the same as that of the outer layer glass 1.
In some embodiments, the mounting bracket 2 further includes a cavity door fixing portion 22 and an extension fixing portion 23, the first through hole 21 is disposed on the cavity door fixing portion 22, the cavity door fixing portion 22 is fixed to the cavity door, the extension fixing portion 23 is located in the main cavity, and the extension fixing portion 23 is connected to the extension 3.
Further, the extension fixing part 23 and the extension 3 are fixed by screws or bolts, and the inclination angle a of the extension 3 can be adjusted by external force by adjusting the tightness of the screws or bolts.
Drawings
Fig. 1 is a front view of a window and a main cavity door with a wide viewing angle according to embodiment 1 of the present application.
Fig. 2 is a schematic structural diagram of a window with a wide observation angle and a main cavity door in embodiment 1 of the present application.
Fig. 3 is a schematic structural diagram of a cross-sectional view of a window and a main cavity door with a wide observation angle in embodiment 1 of the present application.
Fig. 4 is a schematic view of a wide viewing angle window according to the present application.
Fig. 5 is a schematic diagram of light reflection performed by a wide viewing angle window according to the present application.
Description of the main element symbols:
Detailed Description
The following examples are described to aid in the understanding of the present application and are not, and should not be construed to, limit the scope of the present application in any way.
In the following description, those skilled in the art will recognize that components may be described throughout this discussion as separate functional units (which may include sub-units), but those skilled in the art will recognize that various components or portions thereof may be divided into separate components or may be integrated together (including being integrated within a single system or component).
Also, connections between components or systems within the figures are not intended to be limited to direct connections. Rather, data between these components may be modified, reformatted, or otherwise changed by the intermediate components. Additionally, additional or fewer connections may be used. It should also be noted that the terms "coupled," "connected," or "input" and "fixed" are understood to encompass direct connections, indirect connections, or fixed through one or more intermediaries.
In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "side", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings or orientations or positional relationships commonly recognized in the product of the application, and are only used for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present application.
Example 1:
a wide viewing angle window, as shown in fig. 1-5, the window is disposed on a cavity door of a vacuum evaporation machine, and the structure of the window comprises from outside to inside: the glass vacuum evaporation coating machine comprises outer-layer glass 1, a mounting frame 2 and extension pieces 3, wherein the outer-layer glass 1 and the mounting frame 2 are fixed on a cavity door, the extension pieces 3 are connected with the mounting frame 2, the extension pieces 3 are located in a main cavity of the vacuum evaporation coating machine, an inclination angle a is formed between the extension pieces 3 and a vertical line of the inner wall of the cavity door, the mounting frame 2 is provided with a first through hole 21, the number of the extension pieces 3 is two, the two extension pieces 3 are vertically arranged on the upper side and the lower side of the first through hole 21, and one or two of the extension pieces 3 have a reflection function; light in a main cavity of the vacuum evaporation machine is reflected by the extension piece 3 and then passes through the first through hole 21 to reach the outer layer glass 1, evaporation materials in a crucible arranged on a bottom plate of the main cavity body are upwards evaporated in a cone shape during film coating, and the extension piece 3 blocks the evaporated evaporation materials to prevent the evaporation materials from passing through the first through hole 21; the distance between the surface of the evaporation material in the crucible and the bottom plate of the main cavity body is H, the distance between the center point of the surface of the evaporation material in the crucible and the cavity door is L, the distance between the center point of the surface of the evaporation material in the crucible and the rightmost point of the upper edge of the crucible is taken as a connecting line, the included angle between the connecting line and the vertical line of the inner wall of the cavity door is b, the distance between the lowest point of the upper extending piece 31 of the window and the bottom plate of the main cavity body is more than H + L multiplied by cotb, the distance between the center point of the surface of the evaporation material in the crucible and the highest point of the lower extending piece 32 is taken as a connecting line, the included angle between the connecting line and the vertical line of the inner wall of the cavity door is d, the length of the lower extending piece 32 is M, and the distance between the upper extending piece 31 and the lower extending piece 32 on the mounting frame 2 is less than or equal to M multiplied by cosa + M multiplied by sina multiplied by cotd.
The distance between the lowest point of the upper extension piece 31 of the window and the bottom plate of the main cavity is larger than H + L × cotb, at this time, the evaporation material at the front part in the crucible can be observed through the window, that is, half of the evaporation material in the crucible can be observed, and at this time, the window is in the range where the evaporation material is evaporated upwards in a cone shape during film coating, so it is also required to ensure that the extension piece 3 can block the evaporated evaporation material to prevent the evaporation material from passing through the first through hole 21, and the extension piece 3 satisfies the condition that the distance between the upper extension piece 31 and the lower extension piece 32 on the mounting bracket 2 is smaller than or equal to M × cosa + M × sina × cotd, as shown in fig. 4, if the distance between the upper extension piece 31 and the lower extension piece 32 on the mounting bracket 2 is larger than M × cosa + M × sina × cotd, the evaporated evaporation material passes through the first through hole 21 and the cavity door to be coated to the inner surface of the outer glass 1, after the inner surface of the outer glass 1 is coated with a film, the human eyes cannot observe the situation in the main cavity through the outer glass 1, and the outer glass 1 needs to be replaced regularly.
As shown in fig. 4, the window has one, the two extending members 3 have the same inclination angle a, that is, the two extending members 3 are arranged in parallel, the inclination angle a is 20-80 degrees, and the lower surface of the upper extending member 31 and the upper surface of the lower extending member 32 have a reflecting function. When observing the evaporation material in the crucible by human eyes, light is reflected to the upper surface of the lower extension piece 32 through the lower surface of the upper extension piece 31, and the upper surface of the lower extension piece 32 passes through the first through hole 21 to reach the outer layer glass 1 after being reflected; when people observe the plating pot above the main cavity body, light rays directly pass through the first through hole 21 to reach the outer layer glass 1 after being reflected by the upper surface of the lower extension piece 32.
As shown in fig. 5, there are two windows, the two windows are vertically disposed on the cavity door, the lower surface of the upper extending member 31 of the upper window has a reflection function, the lower extending member 32 does not have a reflection function, the inclination angle a of the upper extending member 31 is greater than 90 °, and the inclination angle a of the lower extending member 32 is smaller than 90 °; the two extensions 3 of the lower viewing window are arranged in parallel, the lower surface of the upper extension 31 and the upper surface of the lower extension 32 have a reflecting function, the two extensions 3 have the same angle of inclination a and the angle of inclination a is 20-80. When observing the evaporation material in the crucible through a window arranged below, human eyes reflect light to the upper surface of the lower extension piece 32 through the lower surface of the upper extension piece 31, the upper surface of the lower extension piece 32 passes through the first through hole 21 to reach the outer layer glass 1 after reflecting, and when observing the plating pot above the main cavity, the human eyes directly pass through the first through hole 21 to reach the outer layer glass 1 after reflecting through the upper surface of the lower extension piece 32; through setting up the window in the top, when people's eye observes the coating by vaporization material in the crucible, light directly passes first through-hole 21 and reachs outer glass 1 after the lower surface reflection of extension 31, and when people's eye observes the pot that plates of the upper portion in the main cavity, light directly passes first through-hole 21 and reachs outer glass 1.
The upper extending piece 31 and/or the lower extending piece 32 are mirror surfaces, wherein the lower surface of the upper extending piece 31 is a reflective surface, the upper surface is a backlight surface, and the upper surface of the lower extending piece 32 is a reflective surface, and the lower surface is a backlight surface. The cavity door is provided with a through hole, and the outer layer glass 1 is fixed on the outer wall of the cavity door outside the through hole of the cavity door. The cavity door through hole is circular, the outer glass 1 is circular and the first through hole 21 of the mounting rack 2 is square. The window further comprises a hollow fixing piece 4, the hollow fixing piece 4 is used for fixing the outer layer glass 1 and the cavity door, the hollow fixing piece 4 is fixed with the cavity door through a screw, and the shape of the hollow part of the hollow fixing piece 4 is the same as that of the outer layer glass 1. The mounting rack 2 further comprises a cavity door fixing portion 22 and an extension piece fixing portion 23, the first through hole 21 is formed in the cavity door fixing portion 22, the cavity door fixing portion 22 is fixed to the cavity door, the extension piece fixing portion 23 is located in the main cavity, and the extension piece fixing portion 23 is connected with the extension piece 3. The extension fixing part 23 is fixed to the extension 3 by a screw or a bolt, and the inclination angle a of the extension 3 can be adjusted by an external force by adjusting the tightness of the screw or the bolt.
While various aspects and embodiments have been disclosed herein, it will be apparent to those skilled in the art that other aspects and embodiments can be made without departing from the spirit of the disclosure, and that several modifications and improvements can be made without departing from the spirit of the disclosure. The various aspects and embodiments disclosed herein are presented by way of example only and are not intended to limit the present disclosure, which is to be controlled in the spirit and scope of the appended claims.
Claims (10)
1. The utility model provides a wide window of observation angle, the window sets up on vacuum coating by vaporization machine's cavity door, its characterized in that, the structure of window includes from outside to inside: the glass vacuum evaporation coating machine comprises outer glass (1), an installation frame (2) and extension pieces (3), wherein the outer glass (1) and the installation frame (2) are fixed on a cavity door, the extension pieces (3) are connected with the installation frame (2), the extension pieces (3) are located in a main cavity of the vacuum evaporation coating machine, an inclination angle a is formed between the extension pieces (3) and a vertical line of the inner wall of the cavity door, the installation frame (2) is provided with a first through hole (21), the number of the extension pieces (3) is two, the two extension pieces (3) are vertically arranged on the upper side and the lower side of the first through hole (21), and one or two of the extension pieces (3) have a reflection function; light in a main cavity of the vacuum evaporation machine is reflected by an extension piece (3) and then passes through a first through hole (21) to reach outer glass (1), evaporation materials in a crucible arranged on a bottom plate of the main cavity body are upwards evaporated in a cone shape during film coating, and the extension piece (3) blocks the evaporated evaporation materials to prevent the evaporation materials from passing through the first through hole (21); the distance between the surface of the evaporation material in the crucible and the bottom plate of the main cavity body is H, the distance between the center point of the surface of the evaporation material in the crucible and the cavity body door is L, the distance between the center point of the surface of the evaporation material in the crucible and the rightmost point of the upper edge of the crucible is taken as a connecting line, the included angle between the connecting line and the vertical line of the inner wall of the cavity body door is b, the distance between the lowest point of the upper extending piece (31) of the window and the bottom plate of the main cavity body is more than H + L multiplied by cotb, the distance between the center point of the surface of the evaporation material in the crucible and the highest point of the lower extending piece (32) is taken as a connecting line, the included angle between the connecting line and the vertical line of the inner wall of the cavity body door is d, the length of the lower extending piece (32) is M, and the distance between the upper extending piece (31) and the lower extending piece (32) on the mounting frame (2) is less than or equal to M multiplied by cosa + M multiplied by sina multiplied by cotd.
2. Viewing window with wide viewing angle according to claim 1, characterized in that the viewing window has one or more, one viewing window is arranged in the middle of the chamber door, a plurality of viewing windows are regularly distributed on the chamber door, and the inclination angles a of the two extending members (3) are the same or different.
3. Viewing window according to claim 2, characterised in that it has one and two extensions (3) with the same inclination angle a, i.e. the two extensions (3) are arranged in parallel, the inclination angle a being 20-80 degrees, the lower surface of the upper extension (31) and the upper surface of the lower extension (32) having a reflective function.
4. The wide viewing angle window of claim 3, wherein when observing the evaporation material in the crucible by human eyes, the light is reflected to the upper surface of the lower extension member (32) through the lower surface of the upper extension member (31), and the upper surface of the lower extension member (32) is reflected to reach the outer layer glass (1) through the first through hole (21); when people observe the plating pot above the main cavity body, light rays directly pass through the first through hole (21) to reach the outer layer glass (1) after being reflected by the upper surface of the lower extension piece (32).
5. The wide viewing angle window of claim 2, wherein there are two of the windows, the two windows are vertically disposed on the cavity door, the lower surface of the upper extension piece (31) of the upper window has a reflection function, the lower extension piece (32) has no reflection function, the inclination angle a of the upper extension piece (31) is greater than 90 °, and the inclination angle a of the lower extension piece (32) is smaller than 90 °; the two extending pieces (3) of the window arranged at the lower part are arranged in parallel, the lower surface of the upper extending piece (31) and the upper surface of the lower extending piece (32) have a reflection function, the inclination angles a of the two extending pieces (3) are the same, and the inclination angle a is 20-80 degrees.
6. The wide viewing angle window of claim 5, wherein when observing the evaporation material in the crucible through the lower window, the light is reflected to the upper surface of the lower extension piece (32) through the lower surface of the upper extension piece (31), the upper surface of the lower extension piece (32) is reflected to reach the outer glass (1) through the first through hole (21), and when observing the plating pot in the main cavity, the light is reflected to the upper surface of the lower extension piece (32) and directly reaches the outer glass (1) through the first through hole (21); through setting up the window in the top, when people's eye observes the coating by vaporization material in the crucible, light directly passes first through-hole (21) and reachs outer glass (1) after the lower surface reflection of top extension piece (31), and when people's eye observes the pot that plates of the upper portion in the main cavity, light directly passes first through-hole (21) and reachs outer glass (1).
7. Viewing window according to claim 1, characterized in that the upper extension (31) and/or the lower extension (32) are mirror surfaces, wherein the lower surface of the upper extension (31) is a light-reflecting surface and the upper surface is a backlight surface, and the upper surface of the lower extension (32) is a light-reflecting surface and the lower surface is a backlight surface.
8. The wide viewing angle window of claim 1, wherein the cavity door is provided with a through hole, the outer glass (1) is fixed at a position corresponding to the through hole of the cavity door, and the outer glass (1) is fixed on the outer wall of the cavity door at the outer side of the through hole of the cavity door, or on the inner wall of the cavity door at the inner side of the through hole of the cavity door, or is fixed inside the through hole of the cavity door.
9. Viewing window with wide viewing angle according to claim 8, characterized in that the viewing window further comprises a hollow fixing member (4), the hollow fixing member (4) is used to fix the outer glass (1) to the cavity door, the hollow fixing member (4) is fixed to the cavity door by a screw, and the shape of the hollow part of the hollow fixing member (4) is the same as the shape of the outer glass (1).
10. The wide viewing angle window of claim 1, wherein the mount (2) further comprises a cavity door fixing portion (22) and an extension fixing portion (23), the first through hole (21) is disposed on the cavity door fixing portion (22), the cavity door fixing portion (22) is fixed to the cavity door, the extension fixing portion (23) is located in the main cavity, and the extension fixing portion (23) is connected to the extension (3).
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110797590.5A CN113308678A (en) | 2021-07-14 | 2021-07-14 | Wide window of observation angle |
| CN202210156828.0A CN114540784B (en) | 2021-07-14 | 2022-02-21 | Window with wide observation angle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110797590.5A CN113308678A (en) | 2021-07-14 | 2021-07-14 | Wide window of observation angle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113308678A true CN113308678A (en) | 2021-08-27 |
Family
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Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110797590.5A Withdrawn CN113308678A (en) | 2021-07-14 | 2021-07-14 | Wide window of observation angle |
| CN202210156828.0A Active CN114540784B (en) | 2021-07-14 | 2022-02-21 | Window with wide observation angle |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210156828.0A Active CN114540784B (en) | 2021-07-14 | 2022-02-21 | Window with wide observation angle |
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| Country | Link |
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| CN (2) | CN113308678A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114592178A (en) * | 2021-07-14 | 2022-06-07 | 苏州佑伦真空设备科技有限公司 | Window without dead angle |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1135331A (en) * | 1966-03-02 | 1968-12-04 | Edward Wilcox And Company Ltd | Improvements in or relating to apparatus for coating articles by vacuum deposition |
| JPS54114483A (en) * | 1978-02-27 | 1979-09-06 | Nec Corp | Bell jar for thin film-forming device |
| US4701592A (en) * | 1980-11-17 | 1987-10-20 | Rockwell International Corporation | Laser assisted deposition and annealing |
| JPS5993874A (en) * | 1982-11-22 | 1984-05-30 | Teijin Ltd | Thin film forming device |
| JPH01162760A (en) * | 1987-12-18 | 1989-06-27 | Hitachi Ltd | Vacuum-deposition vessel |
| JP2005200700A (en) * | 2004-01-15 | 2005-07-28 | Seiko Epson Corp | Vapor deposition apparatus, method for manufacturing electrooptical device and electronic equipment |
| JP2012126938A (en) * | 2010-12-14 | 2012-07-05 | Ulvac Japan Ltd | Vacuum deposition device and method for forming thin film |
| CN103361618A (en) * | 2013-07-15 | 2013-10-23 | 淮安澳洋顺昌光电技术有限公司 | LED (light-emitting diode) chip ITO (indium tin oxide) evaporator explosion-proof visible window |
| CN103361619A (en) * | 2013-07-15 | 2013-10-23 | 淮安澳洋顺昌光电技术有限公司 | LED (light-emitting diode) chip ITO (indium tin oxide) evaporator wide-angle visible window |
| JP2016222974A (en) * | 2015-05-29 | 2016-12-28 | パナソニックＩｐマネジメント株式会社 | Vacuum deposition apparatus |
| CN208266262U (en) * | 2018-03-26 | 2018-12-21 | 成都西沃克真空科技有限公司 | A kind of coating machine observation device |
| CN211689226U (en) * | 2020-02-25 | 2020-10-16 | 苏州泓沵达仪器科技有限公司 | Inclined cutting type observation window of nano vacuum coating instrument |
| CN217265995U (en) * | 2021-12-23 | 2022-08-23 | 武汉锐晶激光芯片技术有限公司 | Observation window of optical coating machine |
-
2021
- 2021-07-14 CN CN202110797590.5A patent/CN113308678A/en not_active Withdrawn
-
2022
- 2022-02-21 CN CN202210156828.0A patent/CN114540784B/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114592178A (en) * | 2021-07-14 | 2022-06-07 | 苏州佑伦真空设备科技有限公司 | Window without dead angle |
| CN114592178B (en) * | 2021-07-14 | 2023-09-15 | 苏州佑伦真空设备科技有限公司 | Window without dead angle |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114540784B (en) | 2023-09-05 |
| CN114540784A (en) | 2022-05-27 |
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Application publication date: 20210827 |
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