CN114592178B

CN114592178B - Window without dead angle

Info

Publication number: CN114592178B
Application number: CN202210156833.1A
Authority: CN
Inventors: 薛蒙晓
Original assignee: Suzhou Youlun Vacuum Equipment Technology Co ltd
Current assignee: Suzhou Youlun Vacuum Equipment Technology Co ltd
Priority date: 2021-07-14
Filing date: 2022-02-21
Publication date: 2023-09-15
Anticipated expiration: 2042-02-21
Also published as: CN113337802A; CN114592178A

Abstract

The application provides a window without dead angle, which comprises an observation window arranged on a cavity door of a vacuum evaporator and a reflecting piece arranged in a main cavity and fixed with a rear panel of the main cavity, wherein the structure of the observation window comprises the following parts from outside to inside: the outer glass is fixed on the cavity door, the extension piece is arranged in the main cavity and connected with the installation frame, an inclined angle a is formed between the extension piece and a vertical line of the inner wall of the cavity door, the installation frame is provided with first through holes, the positions of the first through holes correspond to those of the outer glass, two extension pieces are arranged on the upper side and the lower side of the first through holes, one or two of the extension pieces has a reflection function, and one surface of the reflection piece, which corresponds to the cavity door, has a reflection function; light rays in the main cavity pass through the first through hole after being reflected by the extension piece and/or the reflection piece and reach the outer glass to enter human eyes, and the extension piece blocks the evaporated evaporation coating material to prevent the evaporation coating material from passing through the first through hole.

Description

Window without dead angle

Technical Field

The application relates to the technical field of vacuum evaporation coating machines, in particular to a window without dead angle.

Background

The vacuum evaporator evaporates and gasifies the film coating material (or film material) under the vacuum condition by means of electric current heating, electron beam bombardment heating, ion source bombardment and the like, and then flies the gasified particles to the surface of the substrate to condense, and finally forms a film. The vacuum evaporation has the advantages of simple film forming method, high purity and compactness of the film, unique film structure and performance and the like, so the vacuum evaporation is widely applied. In the processing technology of vacuum evaporation, a crucible is adopted to gasify coating materials under vacuum conditions, and the crucible comprises: the evaporation source is heated to enable evaporation materials in the evaporation source to evaporate upwards in a fan-shaped structure, a plating pot with an umbrella-shaped structure for bearing a plated workpiece is arranged above the crucible, and the plated workpiece is fixed on the plating pot, so that molecules of the evaporation materials are deposited on the plated workpiece to form a plated film.

In the process of coating, the operation condition in the main cavity of the vacuum evaporator can be visually observed through a window, and the conditions of evaporating materials in a crucible, the rotation condition of a plating pot, the state of a heating lamp and the like are observed. The window of the current vacuum evaporator comprises a handle, a rotating shaft, outer glass and rotating glass from outside to inside, wherein the rotating glass synchronously rotates along with the rotating shaft, and then the condition in the cavity of the vacuum evaporator is observed through an observation hole on the anti-sticking plate. Because the part of the rotary glass facing the observation hole is coated with a film, the part of the rotary glass, which is not coated with a film, is observed facing the observation hole in the next observation, and after the rotary glass is applied for several times, all the films of the rotary glass are coated with the film and cannot be observed again, so that the rotary glass in the cavity door needs to be replaced frequently. The window in the prior art is that the rear half part in the crucible is influenced by the right side wall of the crucible and cannot be observed, and is an observation dead angle.

In view of the above, the present application provides a window without a dead angle, which can observe the situation in the main chamber of a vacuum evaporator without a dead angle, and which has no parts that need to be replaced due to plating.

Disclosure of Invention

The application aims to provide a window without dead angle, which can observe the condition in a main cavity of a vacuum evaporator without dead angle and has no parts which need to be replaced due to film plating.

According to the window without dead angle, after being reflected by the reflecting mirror 22, the light in the crucible is reflected by the lower surface of the upper extension piece 131 and then passes through the first through hole 121 to reach the outer layer glass 11 or directly passes through the first through hole 121 to reach the outer layer glass 11, so that the conditions of the rear half part and the right side wall in the crucible can be observed, and the observation dead angle is eliminated; meanwhile, the extension piece plays the dual roles of reflecting light so as to facilitate human eyes to observe the conditions in the main cavity and blocking evaporated evaporation materials from passing through the first through hole of the mounting frame, no evaporation materials pass through the first through hole of the mounting frame and the through hole of the cavity door, the outer layer glass cannot be coated with a film, the outer layer glass does not need to be replaced, and the extension piece can be used for several years without problems, wherein the lower surface of the upper extension piece is coated with a film and then is plated more and brighter, the reflection effect is not affected, and therefore, no part needs to be replaced due to the film coating. The present inventors have completed the present application on the basis of this.

The utility model provides a window at no dead angle, includes the observation window 1 that sets up on the cavity door of vacuum evaporation machine and sets up in the main cavity and with the fixed reflector 2 of main cavity rear panel, the structure of observation window 1 includes from outside to inside: the outer layer glass 11, the mounting frame 12 and the extension piece 13, wherein the outer layer glass 11 and the mounting frame 12 are fixed on the cavity door, the extension piece 13 is arranged in the main cavity and is connected with the mounting frame 12, an inclination angle a is formed between the extension piece 13 and a vertical line of the inner wall of the cavity door, the mounting frame 12 is provided with a first through hole 121, the first through hole 121 corresponds to the outer layer glass 11 in position, two extension pieces 13 are arranged on the upper side and the lower side of the first through hole 121, one or two of the extension pieces 13 has a reflection function, and one surface of the reflection piece 2 opposite to the cavity door has a reflection function; light rays in the main cavity pass through the first through hole 121 after being reflected by the extension piece 13 and/or the reflection piece 2 to reach the outer glass 11 and enter human eyes, and evaporation materials in a crucible arranged on the bottom plate of the main cavity are evaporated upwards in a cone shape at a scattering angle b during film coating, and the extension piece 13 blocks the evaporated evaporation materials to prevent the evaporation materials from passing through the first through hole 121.

In some embodiments, when the distance between the surface of the vapor deposition material in the crucible and the bottom plate of the main cavity is H, the distance between the center point of the surface of the vapor deposition material in the crucible and the cavity door is L, the extension piece 13 arranged above is the upper extension piece 131, the extension piece 13 arranged below is the lower extension piece 132, and when the distance between the lowest point of the upper extension piece 131 of the observation window 1 and the bottom plate of the main cavity is greater than h+l×cotb, the extension piece 13 plays the dual roles of reflecting light and blocking the evaporated vapor deposition material from passing through the first through hole 121; when the distance between the lowest point of the upper extension 131 of the viewing window 1 and the bottom plate of the main cavity is equal to or less than h+l×cotb, the extension 13 functions to reflect light.

Further, when the distance between the lowest point of the upper extension member 131 of the observation window 1 and the bottom plate of the main cavity is smaller than or equal to h+l×cotb, the distance between the highest point of the upper extension member 131 of the observation window 1 and the bottom plate of the main cavity is larger than h+l1×cotc.

When the distance between the lowest point of the upper extension 131 of the observation window 1 and the bottom plate of the main cavity is equal to or less than h+l×cotb, the vapor deposition material which does not need to be blocked by the extension 13 passes through the first through hole 121, a small amount of vapor deposition material except the scattering angle b is negligible, the outer glass 11 is not replaced for several years, but the surface of the vapor deposition material in the crucible is lower than the upper surface of the crucible, the crucible is bowl-shaped, the side wall of the crucible can cause visual influence when the vapor deposition material in the crucible is observed, when the distance between the highest point of the upper extension 131 of the observation window 1 and the bottom plate of the main cavity is equal to or less than h+l1×cotc, the vapor deposition material in any crucible cannot be observed by human eyes through the observation window 1, and the sight line is completely blocked by the right side wall of the crucible, so that in order to be able to observe the state of the vapor deposition material in the crucible, the height of the observation window 1 on the cavity door is minimum to be satisfied, and the distance between the highest point of the upper extension 131 of the observation window 1 and the bottom plate of the main cavity is greater than h+l1×cotc.

Further, when the distance between the lowest point of the upper extension member 131 of the observation window 1 and the bottom plate of the main cavity is greater than h+l×cotb, it is required to use the connection line between the center point of the surface of the vapor deposition material in the crucible and the highest point of the lower extension member 132, the included angle between the connection line and the vertical line of the inner wall of the cavity door is d, the length of the lower extension member 132 is M, and the distance between the upper extension member 131 and the lower extension member 132 on the mounting frame 12 is less than or equal to m×cosa+m×sina×cotd.

When the distance between the lowest point of the upper extension member 131 of the observation window 1 and the bottom plate of the main cavity is greater than h+l×cotb, the evaporation material of the extension member 13 is required to be blocked in the range of the scattering angle b, and the conditions of the evaporation material of the extension member 13 are as follows: if the distance between the upper extension member 131 and the lower extension member 132 on the mounting frame 12 is less than or equal to m×cosa+m×sina×cotd, and if the distance between the upper extension member 131 and the lower extension member 132 on the mounting frame 12 is greater than m×cosa+m×sina×cotd, the evaporated evaporation material passes through the first through hole 121 and the cavity door through hole to be coated on the inner surface of the outer glass 11, and after the inner surface of the outer glass 11 is coated, the human eye cannot observe the situation in the main cavity through the outer glass 11, and the outer glass 11 needs to be replaced periodically.

In some embodiments, the reflecting member 2 includes a reflecting fixing portion 21 and a reflecting mirror 22, the reflecting fixing portion 21 is fixed to the rear panel of the main cavity, the reflecting mirror 22 is connected to the reflecting fixing portion 21, the reflecting mirror 22 has an inclination angle with the rear panel of the main cavity, the inclination angle is 10 ° to 80 °, after the light in the crucible is reflected by the reflecting mirror 22, the light passes through the first through hole 121 to reach the outer glass 11 after being reflected by the lower surface of the upper extending member 131, or passes through the first through hole 121 directly to reach the outer glass 11, so that the condition of the rear half and the right side wall in the crucible can be observed.

The window in the prior art can observe the condition of the front half part in the crucible, but the rear half part in the crucible, especially the part in the crucible close to the right side wall of the crucible and the right side wall of the crucible can not be observed, and the prior art is called an observation dead angle, because the surface of the evaporation material in the crucible is lower than the upper surface of the crucible, the crucible is bowl-shaped, and the right side wall of the crucible can cause visual influence when the evaporation material in the crucible is observed, so the prior art always has the observation dead angle. However, the viewing window of the present application is completely different from the prior art in that the viewing window 1 is not required to be replaced by a plating film, the viewing angle is increased in both of the viewing angle and the viewing comfort, and the reflective member 2 is provided to eliminate the viewing dead angle.

Further, the reflecting member 2 is located at a middle lower portion of the rear panel of the main cavity.

Further, the light is reflected to the upper surface of the lower extension member 132 through the lower surface of the upper extension member 131, and then passes through the first through hole 121 to reach the outer glass 11 after being reflected by the upper surface of the lower extension member 132, and the lower surface of the upper extension member 131 and the upper surface of the lower extension member 132 have a reflection function, or the light passes through the first through hole 121 directly to reach the outer glass 11 after being reflected by the lower surface of the upper extension member 131, and the lower surface of the upper extension member 131 has a reflection function to observe the condition of the front half part in the crucible; when observing the plating pot above the inside of the main cavity, the light rays directly pass through the first through hole 121 to reach the outer layer glass 11 after being reflected by the upper surface of the lower extension piece 132, or/and the light rays directly pass through the first through hole 121 to reach the outer layer glass 11, and the upper surface of the lower extension piece 132 has a reflection function.

In some embodiments, the number of the observation windows 1 is one or more, one observation window 1 is provided, the observation window 1 is arranged in the middle of the cavity door, and a plurality of observation windows 1 are provided, the plurality of observation windows 1 are regularly distributed on the cavity door, and the positions of the observation windows 1, the lengths of the extension pieces 13, the inclination angles a of the extension pieces 13, the reflection function of the extension pieces 13 and the distances between the upper extension piece 131 and the lower extension piece 132 on the mounting frame 12 are adjusted according to actual needs.

In some embodiments, the cavity door is provided with a through hole, and the outer glass 11 is fixed at a position corresponding to the cavity door through hole, and the outer glass 11 is fixed on the outer wall of the cavity door outside the cavity door through hole, or on the inner wall of the cavity door inside the cavity door through hole, or inside the cavity door through hole.

Further, the cavity door through hole, the outer glass 11 and the first through hole 121 of the mounting frame 12 are one of square, rectangle, round or oval, and the shapes of the cavity door through hole, the outer glass 11 and the mounting frame 12 are the same or different.

Further, the observation window 1 further includes a hollow fixing member 14, the hollow fixing member 14 is used for fixing the outer glass 11 and the cavity door, the hollow fixing member 14 is fixed with the cavity door through a screw, and a shape of a hollow portion of the hollow fixing member 14 is the same as a shape of the outer glass 11.

In some embodiments, the mounting frame 12 further includes a cavity door fixing portion 122 and an extension piece fixing portion 123, the first through hole 121 is disposed on the cavity door fixing portion 122, the cavity door fixing portion 122 is fixed to the cavity door, the extension piece fixing portion 123 is located in the main cavity, and the extension piece fixing portion 123 is connected to the extension piece 13.

Further, the extension member fixing portion 123 is connected and fixed to the extension member 13 by a screw or a bolt, and the inclination angle a of the extension member 13 can be adjusted by an external force by adjusting the tightness of the screw or the bolt.

Drawings

Fig. 1 is a schematic structural diagram of a window without dead angle and a main cavity in embodiment 1 of the present application.

Fig. 2 is a schematic structural diagram of a viewing window and a main cavity door of a window without dead angle in embodiment 1 of the present application.

Fig. 3 is a schematic view of a blind-free window according to the application.

FIG. 4 is a light path diagram of the window without dead angle for reflecting light rays.

Description of main reference numerals:

the viewing window 1, the reflecting member 2, the outer glass 11, the mounting frame 12, the extending member 13, the hollow fixing member 14, the first through hole 121, the cavity door fixing portion 122, the extending member fixing portion 123, the upper extending member 131, the lower extending member 132, the reflecting fixing portion 21, and the reflecting mirror 22.

Detailed Description

The following examples are described to aid in the understanding of the application and are not, nor should they be construed in any way to limit the scope of the application.

In the following description, those skilled in the art will recognize that components may be described as separate functional units (which may include sub-units) throughout this discussion, but those skilled in the art will recognize that various components or portions thereof may be divided into separate components or may be integrated together (including integration within a single system or component).

Meanwhile, the connection between components or systems within the drawings is not intended to be limited to a direct connection. Rather, data between these components may be modified, reformatted, or otherwise changed by intermediate components. In addition, additional or fewer connections may be used. It should also be noted that the terms "coupled," "connected," or "input" are to be construed as including direct connection, indirect connection or fixation through one or more intermediaries.

In the description of the present application, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "side", "vertical", "horizontal", "inner", "outer", etc., are directions or positional relationships based on those shown in the drawings, or directions or positional relationships as used or conventionally recognized in the application product are merely for convenience of describing the present application and simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific direction, be constructed and operated in a specific direction, and thus should not be construed as limiting the present application.

Example 1:

the utility model provides a window at no dead angle, as shown in fig. 1-4, including setting up the observation window 1 on the cavity door of vacuum evaporation machine and setting up in the main cavity and with the fixed reflector 2 of main cavity rear panel, the structure of observation window 1 includes from outside to inside: the outer layer glass 11, the mounting frame 12 and the extension piece 13, wherein the outer layer glass 11 and the mounting frame 12 are fixed on the cavity door, the extension piece 13 is arranged in the main cavity and is connected with the mounting frame 12, an inclination angle a is formed between the extension piece 13 and a vertical line of the inner wall of the cavity door, the mounting frame 12 is provided with a first through hole 121, the first through hole 121 corresponds to the outer layer glass 11 in position, two extension pieces 13 are arranged on the upper side and the lower side of the first through hole 121, one or two of the extension pieces 13 has a reflection function, and one surface of the reflection piece 2 opposite to the cavity door has a reflection function; light rays in the main cavity pass through the first through hole 121 after being reflected by the extension piece 13 and/or the reflection piece 2 to reach the outer glass 11 and enter human eyes, and evaporation materials in a crucible arranged on the bottom plate of the main cavity are evaporated upwards in a cone shape at a scattering angle b during film coating, and the extension piece 13 blocks the evaporated evaporation materials to prevent the evaporation materials from passing through the first through hole 121.

The distance between the surface of the vapor deposition material in the crucible and the bottom plate of the main cavity is H, the distance between the center point of the surface of the vapor deposition material in the crucible and the cavity door is L, the upper extension piece 13 is the upper extension piece 131, the lower extension piece 13 is the lower extension piece 132, and when the distance between the lowest point of the upper extension piece 131 of the observation window 1 and the bottom plate of the main cavity is more than H+L×cotb, the extension piece 13 plays the dual roles of reflecting light and blocking the evaporated vapor deposition material from passing through the first through hole 121; when the distance between the lowest point of the upper extension 131 of the viewing window 1 and the bottom plate of the main cavity is equal to or less than h+l×cotb, the extension 13 functions to reflect light. When the distance between the lowest point of the upper extension member 131 of the observation window 1 and the bottom plate of the main cavity is less than or equal to h+l×cotb, the distance between the highest point of the upper extension member 131 of the observation window 1 and the bottom plate of the main cavity is greater than h+l1×cotc, and the included angle between the connecting line and the vertical line of the inner wall of the cavity door is c. As shown in the middle observation window in fig. 3, the position of the observation window 1 is the situation that when the vapor deposition material in the crucible is evaporated upwards in a cone shape with a scattering angle b in the film plating process, the boundary line of the cone is not replaced, at this time, the distance between the lowest point of the upper extension piece 131 of the observation window 1 and the bottom plate of the main cavity is equal to or less than h+l×cotb, when the distance between the lowest point of the upper extension piece 131 of the observation window 1 and the bottom plate of the main cavity is less than or equal to h+l×cotb, the vapor deposition material which does not need to be evaporated in this time, the small amount of vapor deposition material except the scattering angle b can be ignored, the outer layer glass 11 is not replaced for a few years, but the surface of the vapor deposition material in the crucible is lower than the upper surface of the crucible, the crucible is in a bowl shape, when the vapor deposition material in the crucible is observed, the crucible can cause visual influence, as shown in the lower observation window in fig. 3, the position of the observation window 1 is the distance between the highest point of the upper extension piece 131 of the observation window 1 and the bottom plate of the main cavity is equal to or less than h+l×cotb, at this moment, the point of the highest point of the observation window 1 x 1, i.e. when the distance between the highest point of the upper extension piece 131 of the crucible and the bottom plate of the observation window 1 and the bottom plate of the crucible is equal to or less than h+l+l×cotb, the highest point of the observation window 1, i.e. when the distance between the highest point of the upper extension piece 131 of the crucible and the upper extension piece of the crucible and the bottom plate of the crucible is equal to the bottom plate of the observation window is equal to or equal to the threshold point. When the distance between the lowest point of the upper extension member 131 of the observation window 1 and the bottom plate of the main cavity is greater than h+l×cotb, it is required to simultaneously satisfy that the included angle between the center point of the surface of the evaporation material in the crucible and the highest point of the lower extension member 132 is d, the length of the lower extension member 132 is M, and the distance between the upper extension member 131 and the lower extension member 132 on the mounting frame 12 is less than or equal to mxcosa+mxsina×cotd. When the distance between the lowest point of the upper extension member 131 of the observation window 1 and the bottom plate of the main cavity is greater than h+l×cotb, the evaporation material of the extension member 13 is required to be blocked in the range of the scattering angle b, and the conditions of the evaporation material of the extension member 13 are as follows: as described in the upper observation window 1 of fig. 3, the distance between the upper extension member 131 and the lower extension member 132 on the mounting frame 12 is less than or equal to m×cosa+m×sina×cotd, and as the distance between the upper extension member 131 and the lower extension member 132 on the mounting frame 12 is greater than m×cosa+m×sina×cotd, the evaporated evaporation material is not blocked by the upper extension member 131 and the lower extension member 132, and the evaporation material passes through the first through hole 121 and the cavity door through hole to be coated on the inner surface of the outer glass 11, and after the inner surface of the outer glass 11 is coated, the human eye cannot observe the inside of the main cavity through the outer glass 11, and the outer glass 11 needs to be replaced periodically.

The reflecting member 2 includes a reflecting fixing portion 21 and a reflecting mirror 22, the reflecting fixing portion 21 is fixed to the rear panel of the main cavity, the reflecting mirror 22 is connected to the reflecting fixing portion 21, the reflecting mirror 22 has an inclination angle with the rear panel of the main cavity, the inclination angle is 10 ° -80 °, as shown in fig. 4, after being reflected by the reflecting mirror 22, the light in the crucible passes through the lower surface of the upper extending member 131, and then passes through the first through hole 121 to reach the outer glass 11, or passes through the first through hole 121 directly to reach the outer glass 11, so that the condition of the rear half and the right side wall in the crucible can be observed. The window in the prior art can observe the condition of the front half part in the crucible, but the rear half part in the crucible, especially the part in the crucible close to the right side wall of the crucible and the right side wall of the crucible can not be observed, and the prior art is called an observation dead angle, because the surface of the evaporation material in the crucible is lower than the upper surface of the crucible, the crucible is bowl-shaped, and the right side wall of the crucible can cause visual influence when the evaporation material in the crucible is observed, so the prior art always has the observation dead angle. However, the viewing window of the present application is completely different from the prior art in that the viewing window 1 is not required to be replaced by a plating film, the viewing angle is increased in both of the viewing angle and the viewing comfort, and the reflective member 2 is provided to eliminate the viewing dead angle. The reflector 2 is located in the lower middle of the rear panel of the main cavity. As shown in fig. 4, the light is reflected to the upper surface of the lower extension member 132 through the lower surface of the upper extension member 131, and then passes through the first through hole 121 to reach the outer glass 11 after being reflected by the upper surface of the lower extension member 132, and both the lower surface of the upper extension member 131 and the upper surface of the lower extension member 132 have a reflection function, or the light passes through the first through hole 121 directly to reach the outer glass 11 after being reflected by the lower surface of the upper extension member 131, and the lower surface of the upper extension member 131 has a reflection function to observe the condition of the front half inside the crucible; when observing the plating pot above the inside of the main cavity, the light rays directly pass through the first through hole 121 to reach the outer layer glass 11 after being reflected by the upper surface of the lower extension piece 132, or/and the light rays directly pass through the first through hole 121 to reach the outer layer glass 11, and the upper surface of the lower extension piece 132 has a reflection function.

The number of the observation windows 1 is 2, and two observation windows 1 are arranged up and down. The cavity door is provided with a through hole, the outer layer glass 11 is fixed at a position corresponding to the cavity door through hole, and the outer layer glass 11 is fixed on the outer wall of the cavity door outside the cavity door through hole, or on the inner wall of the cavity door inside the cavity door through hole, or inside the cavity door through hole. The cavity door through hole and the outer layer glass 11 are round, and the first through hole 121 of the mounting frame 12 is square. The observation window 1 further comprises a hollow fixing piece 14, the hollow fixing piece 14 is used for fixing the outer layer glass 11 and the cavity door, the hollow fixing piece 14 is fixed with the cavity door through screws, and the shape of the hollow part of the hollow fixing piece 14 is the same as that of the outer layer glass 11. The mounting frame 12 further comprises a cavity door fixing portion 122 and an extension piece fixing portion 123, the first through hole 121 is formed in the cavity door fixing portion 122, the cavity door fixing portion 122 is fixed to the cavity door, the extension piece fixing portion 123 is located in the main cavity, and the extension piece fixing portion 123 is connected with the extension piece 13. The extension fixing portion 123 is fixed to the extension 13 by a screw or a screw connection, and the inclination angle a of the extension 13 can be adjusted by an external force by adjusting the tightness of the screw or the screw.

While the application has been disclosed in terms of various aspects and embodiments, other aspects and embodiments will be apparent to those skilled in the art in view of this disclosure, and many changes and modifications can be made without departing from the spirit of the application. The various aspects and embodiments of the present application are disclosed for illustrative purposes only and are not intended to limit the application, the true scope of which is set forth in the following claims.

Claims

1. The utility model provides a window at no dead angle, its characterized in that, including setting up observation window (1) on the cavity door of vacuum evaporation machine and setting up in the main cavity and with the fixed reflector (2) of main cavity rear panel, the structure of observation window (1) includes from outside to inside: the outer layer glass (11), mounting bracket (12) and extension piece (13), outer layer glass (11) and mounting bracket (12) are fixed on the cavity door, extension piece (13) set up in the main cavity and be connected with mounting bracket (12), have inclination angle a between the perpendicular line of extension piece (13) and cavity door inner wall, mounting bracket (12) have first through-hole (121), first through-hole (121) are corresponding with the position of outer layer glass (11), extension piece (13) have two, two extension pieces (13) set up from top to bottom in the upper and lower both sides of first through-hole (121), one or two in extension piece (13) have reflection function, reflection piece (2) have reflection function for the one side of cavity door; light rays in the main cavity pass through the first through hole (121) to reach the outer glass (11) and enter human eyes after being reflected by the extension piece (13) and/or the reflecting piece (2), vapor deposition materials in a crucible arranged on the bottom plate of the main cavity are evaporated upwards in a cone shape at a scattering angle b during film coating, the crucible is bowl-shaped, the surface of the vapor deposition materials in the crucible is lower than the upper surface of the crucible, and the extension piece (13) blocks the evaporated vapor deposition materials to prevent the vapor deposition materials from passing through the first through hole (121); the distance between the surface of the vapor deposition material in the crucible and the bottom plate of the main cavity is H, the distance between the center point of the surface of the vapor deposition material in the crucible and the bottom plate of the main cavity is L, the upper extension piece (13) is an upper extension piece (131), the lower extension piece (13) is a lower extension piece (132), when the distance between the lowest point of the upper extension piece (131) of the observation window (1) and the bottom plate of the main cavity is more than H+L×cotb, the two functions of reflecting light and blocking the vaporized vapor deposition material from passing through the first through hole (121) are simultaneously satisfied, the included angle between the center point of the surface of the vapor deposition material in the crucible and the highest point of the lower extension piece (132) is d, the length of the lower extension piece (132) is M, the distance between the upper extension piece (131) and the lower extension piece (132) on the installation frame (12) is less than or equal to M×cota+M×sina×cotd, and the extension piece (13) plays a dual role of reflecting light and blocking the vaporized vapor deposition material from passing through the first through hole (121); when the distance between the lowest point of the upper extension piece (131) of the observation window (1) and the bottom plate of the main cavity is smaller than or equal to H+Lxcotb, the condition that the distance between the highest point of the upper extension piece (131) of the observation window (1) and the bottom plate of the main cavity is larger than H+L1xcotc is satisfied, and the extension piece (13) plays a role in reflecting light rays by connecting a leftmost point of the surface of the evaporation material in the crucible with a rightmost point of the upper surface of the crucible and a vertical line of the inner wall of the cavity door, wherein an included angle between the connecting line and the vertical line of the inner wall of the cavity door is c; the reflecting piece (2) comprises a reflecting fixing part (21) and a reflecting mirror (22), the reflecting fixing part (21) is fixed with the rear panel of the main cavity, the reflecting mirror (22) is connected with the reflecting fixing part (21), the reflecting mirror (22) and the rear panel of the main cavity are inclined at an angle of 10-80 degrees, after being reflected by the reflecting mirror (22), light rays in the crucible pass through the lower surface of the upper extending piece (131) to reach the outer glass (11) through the first through hole (121) or pass through the first through hole (121) directly to reach the outer glass (11), and the conditions of the rear half part and the right side wall in the crucible can be observed; the reflecting piece (2) is positioned at the middle lower part of the rear panel of the main cavity; the light is reflected to the upper surface of the lower extending piece (132) through the lower surface of the upper extending piece (131), the upper surface of the lower extending piece (132) passes through the first through hole (121) to reach the outer layer glass (11) after being reflected, the lower surface of the upper extending piece (131) and the upper surface of the lower extending piece (132) both have reflection functions, or the light directly passes through the first through hole (121) to reach the outer layer glass (11) after being reflected through the lower surface of the upper extending piece (131), the lower surface of the upper extending piece (131) has reflection functions, and the condition of the front half part in the crucible is observed; when observing the plating pot above the inside of the main cavity, the light rays directly pass through the first through hole (121) to reach the outer layer glass (11) after being reflected by the upper surface of the lower extension piece (132), or/and the light rays directly pass through the first through hole (121) to reach the outer layer glass (11), and the upper surface of the lower extension piece (132) has a reflection function; the observation window (1) is provided with a plurality of observation windows (1), the observation windows (1) are regularly distributed on the cavity door, and the positions of the observation windows (1), the length of the extension piece (13), the inclined angle a of the extension piece (13), the reflection function of the extension piece (13) and the distance between the upper extension piece (131) and the lower extension piece (132) on the installation frame (12) are adjusted according to actual needs.

2. The window without dead angle according to claim 1, wherein the cavity door is provided with a through hole, the outer glass (11) is fixed at a position corresponding to the through hole of the cavity door, and the outer glass (11) is fixed on the outer wall of the cavity door outside the through hole of the cavity door, or on the inner wall of the cavity door inside the through hole of the cavity door, or inside the through hole of the cavity door.

3. The window without dead angle according to claim 1, wherein the viewing window (1) further comprises a hollow fixing member (14), the hollow fixing member (14) is used for fixing the outer glass (11) to the cavity door, the hollow fixing member (14) is fixed to the cavity door by a screw, and the hollow portion of the hollow fixing member (14) has the same shape as the outer glass (11).

4. The blind-free window according to claim 1, wherein the mounting frame (12) further comprises a cavity door fixing portion (122) and an extension piece fixing portion (123), the first through hole (121) is formed in the cavity door fixing portion (122), the cavity door fixing portion (122) is fixed to the cavity door, the extension piece fixing portion (123) is located in the main cavity, and the extension piece fixing portion (123) is connected to the extension piece (13).