CN214168109U

CN214168109U - Window structure of vacuum evaporation machine

Info

Publication number: CN214168109U
Application number: CN202023095542.1U
Authority: CN
Inventors: 薛蒙晓
Original assignee: Suzhou Youlun Vacuum Equipment Technology Co ltd
Current assignee: Suzhou Youlun Vacuum Equipment Technology Co ltd
Priority date: 2020-12-21
Filing date: 2020-12-21
Publication date: 2021-09-10
Anticipated expiration: 2030-12-21

Abstract

The application provides a window structure of a vacuum evaporator, a rotating shaft is airtight, the service life is long, rotating glass is easy to replace, and discomfort of eyes of a human body is not easy to cause; vacuum evaporation plating machine's window structure sets up on vacuum evaporation plating machine's cavity door, includes in proper order from the outside orientation to inside of cavity door: outer glass, gyration glass and prevent the board, prevent that the board is fixed on the inside wall of cavity door, be equipped with one on the outer glass and run through outer glass and rotatable revolving axle, gyration glass can follow the revolving axle synchronous revolution, prevents being provided with the observation hole on the board, its characterized in that, revolving axle formula magnetic fluid seal revolving axle as an organic whole, the revolving axle includes from the front to the back: the end part of the rotating shaft is fixed with the rotating glass, the outer layer glass is positioned on the flat slide rod body close to the protruding part, and the outer side of the outer layer glass is also provided with an optical filter on the flat slide rod body.

Description

Window structure of vacuum evaporation machine

Technical Field

The utility model relates to a vacuum evaporation machine technical field, more specifically relates to a vacuum evaporation machine's window structure.

Background

The vacuum evaporation plating machine is used for evaporating and gasifying a coating material (or called a coating material) by means of current heating, electron beam bombardment heating, ion source bombardment and the like under a vacuum condition, and then enabling gasified particles to fly to the surface of a substrate to be condensed, and finally forming a thin film. The vacuum evaporation has the advantages of simple film forming method, high film purity and compactness, unique film structure and performance and the like, thereby being widely applied.

In the process of vacuum evaporation, the operation condition in the cavity of the vacuum evaporation machine, in particular the operation condition of an electron beam, the rotation condition of a plating pot, the state of a heating lamp and the like can be observed visually through a window. The window of the current vacuum evaporator is generally directly observed without optical reflection through the window, the structure of the window comprises a handle, a rotating shaft, outer layer glass, rotating glass and a preventing plate from outside to inside, the rotating glass synchronously rotates along with the rotating shaft, and then the condition in a cavity of the vacuum evaporator is observed through an observation hole on the preventing plate. And because the place of the rotary glass facing the observation hole can be coated with a film, the place of the rotary glass which is not coated with the film is facing the observation hole for observation in the next observation, and the rotary glass in the cavity door needs to be replaced if the rotary glass can not be observed after most of the rotary glass is not coated with the film.

However, the rotating shaft in the prior art is mechanically disassembled and separated, and is sealed by a sealing ring, so that the rotating shaft is easy to leak gas and short in service life; on the other hand, the structure of the rotary shaft is complex, the operation is complex when the rotary glass is replaced, the rotary glass is not easy to replace, and the time consumption is long. In addition, in the production process of the cavity of the vacuum evaporation machine, the light is strong, and the discomfort of the eyes of a human body is easily caused when the eye is observed through a window.

In view of this, the utility model provides a window structure of vacuum coating by vaporization machine, the revolving axle is airtight, long service life, changes gyration glass easily to be difficult to arouse the discomfort of human eye.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a vacuum coating by vaporization machine's window structure, the revolving axle is airtight, and long service life changes gyration glass easily to be difficult to arouse the discomfort of human eye.

According to the window structure of the vacuum evaporator, the rotating shaft is integrated with the magnetic fluid seal rotating shaft, the sealing performance of the magnetic fluid seal is good, the air leakage condition cannot occur, and the service life is long. The rotating shaft is integrated and convenient to install, specifically, the rotating shaft penetrates through the outer layer of glass, the rotating shaft can be connected with the outer layer of glass by virtue of the protruding part at the rear end of the rotating shaft, and a Teflon gasket can be arranged between the rotating shaft and the outer layer of glass, so that the rotating shaft has a wear-resistant effect. The fixing of the rotating shaft and the rotating glass can be realized through one screw, and the tail end of the rotating shaft is integrally provided with a threaded hole, so that the rotating glass is easy to replace. In addition, the optical filter is arranged on the outer side of the outer layer glass, so that people can clearly observe the situation in the cavity of the vacuum evaporation machine, but the intensity of light is reduced, and discomfort of eyes of the human body is not easy to cause. The present applicant has completed the present application on this basis.

The utility model provides a window structure of vacuum evaporation machine, sets up on vacuum evaporation machine's cavity door, includes in proper order from the outside orientation to inside of cavity door: outer glass 1, gyration glass 3 and prevent putting on board 4, prevent putting on board 4 and fix on the inside wall of cavity door, be equipped with one on the outer glass 1 and run through outer glass 1 and rotatable revolving axle 2, revolving axle 2 is connected fixedly with gyration glass 3, and gyration glass 3 can follow revolving axle 2 synchronous revolution, prevents to be provided with observation hole 41 on the board 4, its characterized in that, the revolving axle is sealed to 2 formula magnetic fluids as an organic whole of revolving axle, and revolving axle 2 includes from the front to the back: the glass optical filter comprises a head part 21, a threaded rod body part 22, a smooth rod body part 23, a convex part 24 and a tail end part 25, wherein the tail end part 25 of the rotating shaft 2 is fixed with the rotating glass 3 through screws, the outer layer glass 1 is positioned on the flat rod body part 23 close to the convex part 24, and the outer side of the outer layer glass 1 is also provided with an optical filter 5 on the smooth rod body part 23.

In some embodiments, the window structure of the vacuum evaporator further includes a handle 6, a first threaded hole 211 is formed in the head end portion 21 of the rotating shaft 2, the handle 6 is fixed on the head end portion 21 by connecting the first threaded hole 211 with a first screw 7, and the rotating shaft 2 and the rotating glass 3 are driven to rotate synchronously by rotating the handle.

Further, a rubber washer 8 is provided between the handle 6 and the threaded rod body 22.

Further, the shape of the handle includes: one of a hollow circle, a hollow square, a hollow rectangle, a hollow hexagon, or a hollow triangular depression.

Further, the outer surface of the handle is provided with threads for increasing the surface friction, making it easier to rotate the handle.

In some embodiments, a first teflon gasket 9 is disposed between the filter 5 and the outer layer glass 1. The Teflon washer is arranged to enable the rotating shaft 2 to rotate relative to the outer layer glass 1, and meanwhile, the Teflon washer plays a role in sealing and wear resistance.

Further, a nut 10 is provided on the threaded shank 22 outside the optical filter 5, and the optical filter 5 is connected and fixed to the rotary shaft 2 by the nut 10.

Further, the nut 10 is provided with one or more, preferably, the nut 10 is provided with 2.

Further, a second teflon washer 11 is disposed between the filter 5 and the nut 10.

In some embodiments, the window structure of the vacuum evaporator further includes a circular ring member 12, the circular ring member 12 is fixed on the outer sidewall of the chamber door, the circular ring member 12 is composed of a first circular ring member 121 and a second circular ring member 122, and the outer layer glass 1 is fixed by the circular ring member 12.

Further, the first ring member 121 is a separate component or a part of the outer sidewall of the chamber door, and the second ring member 122 is fixed to the first ring member 121 by screws.

Further, the second ring member 122 has a first groove 1221, the edge of the outer glass 1 is placed in the first groove 1221, the first ring member 121 has a second groove 1211, and the first sealing ring 123 is placed in the second groove 1211, thereby fixing the outer glass 1.

Further, the protrusion 24 of the rotation shaft 2 has a third groove 241, and a second seal ring 13 is disposed in the third groove 241, thereby sealing the inner side of the outer glass 1 from the rotation shaft.

In some embodiments, the rear end 25 of the rotating shaft 2 has a second threaded hole 251 therein, and the rotating glass 3 is fixed to the rear end 25 by connecting the second screw 14 to the second threaded hole 251, and the rotating glass 3 rotates in synchronization with the rotating shaft 2.

Further, a spacer 15 is provided between the second screw 14 and the rotary glass 3.

Drawings

Fig. 1 is a perspective view of a window structure and a cavity door of a vacuum evaporator according to the present application.

FIG. 2 is a cross-sectional view taken along plane A-A of FIG. 1 of the present application.

Fig. 3 is an exploded view of the window structure of the vacuum evaporator according to the present invention after the attachment plate is removed.

Fig. 4 is a perspective view of the rotating shaft of the present application.

Description of the main element symbols:

the glass sealing device comprises outer-layer glass 1, a rotating shaft 2, rotating glass 3, an anti-landing plate 4, an observation hole 41, an optical filter 5, a handle 6, a first screw 7, a rubber gasket 8, a first Teflon gasket 9, a nut 10, a second Teflon gasket 11, a ring piece 12, a second sealing ring 13, a second screw 14, a gasket 15, a head end part 21, a threaded rod body part 22, a smooth rod body part 23, a convex part 24, a tail end part 25, a first threaded hole 211, a third groove 241, a second threaded hole 251, a first ring piece 121, a second groove 1211, a second ring piece 122, a first groove 1221 and a first sealing ring 123.

Detailed Description

The following examples are described to aid in the understanding of the present application and are not, and should not be construed to, limit the scope of the present application in any way.

In the following description, those skilled in the art will recognize that components may be described throughout this discussion as separate functional units (which may include sub-units), but those skilled in the art will recognize that various components or portions thereof may be divided into separate components or may be integrated together (including being integrated within a single system or component).

Also, connections between components or systems within the figures are not intended to be limited to direct connections. Rather, data between these components may be modified, reformatted, or otherwise changed by the intermediate components. Additionally, additional or fewer connections may be used. It should also be noted that the terms "coupled," "connected," or "input" and "fixed" are understood to encompass direct connections, indirect connections, or fixed through one or more intermediaries.

In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "side", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings or orientations or positional relationships commonly recognized in the product of the application, and are only used for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance. Furthermore, the terms "horizontal", "vertical" and the like do not imply that the components are required to be absolutely horizontal or pendant, but rather may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.

Example 1:

the utility model provides a window structure of vacuum deposition machine, as shown in fig. 1-4, sets up on vacuum deposition machine's cavity door, includes in proper order from the outside inside direction of cavity door: outer glass 1, gyration glass 3 and prevent putting on board 4, prevent putting on board 4 and fix on the inside wall of cavity door, be equipped with one on the outer glass 1 and run through outer glass 1 and rotatable revolving axle 2, revolving axle 2 is connected fixedly with gyration glass 3, and gyration glass 3 can follow revolving axle 2 synchronous revolution, prevents to be provided with observation hole 41 on the board 4, its characterized in that, the revolving axle is sealed to 2 formula magnetic fluids as an organic whole of revolving axle, and revolving axle 2 includes from the front to the back: the glass optical filter comprises a head part 21, a threaded rod body part 22, a smooth rod body part 23, a convex part 24 and a tail end part 25, wherein the tail end part 25 of the rotating shaft 2 is fixed with the rotating glass 3 through screws, the outer layer glass 1 is positioned on the flat rod body part 23 close to the convex part 24, and the outer side of the outer layer glass 1 is also provided with an optical filter 5 on the smooth rod body part 23.

The window structure of the vacuum evaporation machine further comprises a handle 6, a first threaded hole 211 is formed in the head end portion 21 of the rotating shaft 2, the handle 6 is connected with the first threaded hole 211 through a first screw 7 and fixed on the head end portion 21, and the rotating shaft 2 and the rotating glass 3 are driven to rotate synchronously by rotating the handle. A rubber washer 8 is also provided between the handle 6 and the threaded shank 22. The handle is in a hollow circular shape, and the outer surface of the handle is further provided with threads for increasing surface friction force, so that the handle is easier to rotate.

A first teflon gasket 9 is arranged between the optical filter 5 and the outer layer glass 1. The Teflon washer is arranged to enable the rotating shaft 2 to rotate relative to the outer layer glass 1, and meanwhile, the Teflon washer plays a role in sealing and wear resistance. The threaded shaft portion 22 outside the optical filter 5 is provided with a nut 10, and the optical filter 5 is connected and fixed to the rotation shaft 2 by the nut 10. The nut 10 is provided with one or more, preferably, the nut 10 is provided with 2. A second teflon washer 11 is also disposed between the filter 5 and the nut 10.

The window structure of the vacuum evaporation machine further comprises a circular ring piece 12, the circular ring piece 12 is fixed on the outer side wall of the cavity door, the circular ring piece 12 is composed of a first circular ring piece 121 and a second circular ring piece 122, and the outer layer glass 1 is fixed through the circular ring piece 12. The first ring member 121 is a separate component or a part of the outer sidewall of the chamber door, and the second ring member 122 is fixed to the first ring member 121 by screws. The second ring member 122 has a first groove 1221, the edge of the outer glass 1 is placed in the first groove 1221, the first ring member 121 has a second groove 1211, and the first sealing ring 123 is placed in the second groove 1211, thereby fixing the outer glass 1. The boss 24 of the rotation shaft 2 has a third groove 241, and a second seal ring 13 is disposed in the third groove 241, thereby sealing the inner side of the outer glass 1 from the rotation shaft. The rotation shaft 2 has a second screw hole 251 in the end portion 25, and the rotation glass 3 is fixed to the end portion 25 by connecting the second screw 14 to the second screw hole 251, and the rotation glass 3 rotates in synchronization with the rotation shaft 2. A washer 15 is also provided between the second screw 14 and the rotary glass 3.

While various aspects and embodiments have been disclosed herein, it will be apparent to those skilled in the art that other aspects and embodiments can be made without departing from the spirit of the disclosure, and that several modifications and improvements can be made without departing from the spirit of the disclosure. The various aspects and embodiments disclosed herein are presented by way of example only and are not intended to limit the present disclosure, which is to be controlled in the spirit and scope of the appended claims.

Claims

1. The utility model provides a window structure of vacuum evaporation machine, sets up on vacuum evaporation machine's cavity door, includes in proper order from the outside orientation to inside of cavity door: outer glass (1), gyration glass (3) and prevent wearing board (4), prevent wearing board (4) to fix on the inside wall of cavity door, be equipped with one on outer glass (1) and run through outer glass (1) and rotatable revolving axle (2), revolving axle (2) are connected fixedly with gyration glass (3), and revolving axle (2) synchronous revolution can be followed in gyration glass (3), are provided with on preventing wearing board (4) and observe hole (41), its characterized in that, revolving axle (2) formula magnetic fluid seal revolving axle as an organic whole, and revolving axle (2) includes from the front to the back: the glass-ceramic composite rotary shaft comprises a head end portion (21), a threaded rod body portion (22), a smooth rod body portion (23), a protruding portion (24) and a tail end portion (25), wherein the tail end portion (25) of the rotary shaft (2) is fixed with rotary glass (3) through screws, outer layer glass (1) is located on the flat sliding rod body portion (23) close to the protruding portion (24), and an optical filter (5) is further arranged on the outer side of the outer layer glass (1) and located on the smooth rod body portion (23).

2. The window structure of a vacuum evaporator according to claim 1, further comprising a handle (6), wherein the head end portion (21) of the rotation shaft (2) has a first threaded hole (211), the handle (6) is fixed to the head end portion (21) by connecting the first threaded hole (211) with a first screw (7), and the rotation shaft (2) and the rotation glass (3) are rotated synchronously by rotating the handle (6).

3. The window structure of vacuum evaporator according to claim 2, wherein a rubber gasket (8) is further provided between the handle (6) and the threaded rod body (22).

4. The window structure of vacuum evaporator according to claim 3, wherein the shape of the handle (6) comprises: the handle is one of a hollow round shape, a hollow square shape, a hollow rectangular shape, a hollow hexagonal shape or a hollow triangular depression, and the outer surface of the handle (6) is also provided with threads.

5. The window structure of vacuum evaporator according to claim 1, wherein a first teflon washer (9) is disposed between the filter (5) and the outer glass (1), a nut (10) is disposed on the threaded rod (22) outside the filter (5), and the filter (5) is connected and fixed to the rotating shaft (2) by the nut (10).

6. Window structure for vacuum evaporation machines according to claim 5, characterized in that the nut (10) is provided with one or more nuts.

7. The window structure of vacuum evaporator according to claim 6, wherein a second Teflon washer (11) is further disposed between the filter (5) and the nut (10).

8. The window structure of the vacuum evaporator according to claim 1, further comprising a ring member (12), wherein the ring member (12) is fixed on the outer sidewall of the chamber door, the ring member (12) is composed of a first ring member (121) and a second ring member (122), the outer glass (1) is fixed by the ring member (12), the first ring member (121) is an independent component or a part of the outer sidewall of the chamber door, and the second ring member (122) is fixed with the first ring member (121) by a screw.

9. The window structure of a vacuum evaporator according to claim 8, wherein the second ring member (122) has a first groove (1221), the rim of the outer glass (1) is placed in the first groove (1221), the first ring member (121) has a second groove (1211), the first sealing ring (123) is placed in the second groove (1211) to fix the outer glass (1), the protrusion (24) of the rotation shaft (2) has a third groove (241), and the second sealing ring (13) is placed in the third groove (241) to seal the inner side of the outer glass (1) from the rotation shaft (2).

10. The window structure of vacuum evaporator according to claim 1, wherein the rear end portion (25) of the rotation shaft (2) has a second screw hole (251) therein, the rotation glass (3) is fixed to the rear end portion (25) by connecting the second screw (14) to the second screw hole (251), and the rotation glass (3) rotates synchronously with the rotation shaft (2).