CN201538813U - Processing mechanism for coating film on substrate - Google Patents
Processing mechanism for coating film on substrate Download PDFInfo
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- CN201538813U CN201538813U CN2009202368402U CN200920236840U CN201538813U CN 201538813 U CN201538813 U CN 201538813U CN 2009202368402 U CN2009202368402 U CN 2009202368402U CN 200920236840 U CN200920236840 U CN 200920236840U CN 201538813 U CN201538813 U CN 201538813U
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Abstract
The utility model provides a processing mechanism for coating a film on a substrate, comprising a cabinet body, a processing plate and an evaporating source, wherein the cabinet body has a hollow structure which forms a seal cavity; the evaporating source and the processing plate are arranged inside the seal cavity, and the processing plate is positioned above the evaporating source; the processing mechanism further comprises a baffle mechanism which comprises a baffle, magnetic fluid, a cooling shaft and a baffle driving mechanism, wherein the magnetic fluid is installed on the cabinet body; the baffle driving mechanism is positioned outside the cabinet body and connected with one end of the cooling shaft, and the other end of the cooling shaft passes through the magnetic fluid and extends into the seal cavity in a pivoting way; the baffle is fixedly connected with the cooling shaft; the baffle is contained inside the seal cavity and positioned between the evaporating source and the processing plate; the baffle is separated from or communicated with the evaporating source and connected with the space of the processing plate; and the baffle driving mechanism is used for driving the cooling shaft which drives the baffle to rotate. Therefore, the processing mechanism improves the quality of a substrate coating film layer to the utmost extent on the one hand, and prolongs the normal service life of the processing mechanism to the utmost extent on the other hand.
Description
Technical field
The utility model relates to a kind of plated film processing mechanism, relates in particular to a kind of substrate coating processing mechanism of the substrate coating treatment process in the Organic Light Emitting Diode being removed impurity that is applicable to.
Background technology
OLED, i.e. Organic Light Emitting Diode (Organic Light-Emitting Diode), be called again organic electric laser show (Organic Electroluminesence Display, OELD).Because possess characteristics such as frivolous, power saving, therefore on the display screen of digital product, obtained widespread use, and has bigger market potential, at present all focus on the flat-panel monitor to the application of OLED in the world, because OLED be unique on using can and the TFT-LCD technology of mentioning in the same breath, OLED is that unique technique of display of making large size, high brightness, the soft screen of high resolving power can be made the thickness the same with paper in present all technique of display.Wherein, in the making flow process of OLED, substrate coating technology is that OLED makes very important technology in the flow process in the vacuum, because it is to be related to one of the quality of OLED and the greatest factor in life-span, so be applied to the accuracy requirement that the technologic various device of substrate coating in the vacuum must satisfy substrate coating technology in the vacuum, made in this equipment that by plated film the coatings of product is even, and its composition is pure, stable performance and unstressed, and this coatings can be attached in the product securely in case anti-avulsion falls, and then promoted the quality of product and prolonged life-span of product.Wherein, plated film is applied in the vacuum a kind of of many equipment on the substrate coating technology exactly with processing mechanism.
Plated film is exactly by behind its inner evaporation source heating evaporation with processing mechanism, makes that the Coating Materials after the evaporation deposits to the substrate surface of OLED and forms the single or multiple lift film, thereby finishes the plated film processing of the substrate of OLED.But, the existing plated film following deficiency of processing mechanism ubiquity:
At present, be applied on the market that the plated film in the substrate coating mainly comprises cabinet, evaporation source and disposable plates with processing mechanism in the vacuum of Organic Light Emitting Diode, described cabinet is hollow structure, this hollow structure forms annular seal space, described evaporation source and disposable plates are arranged in the annular seal space, and described disposable plates is positioned at the top of above-mentioned evaporation source.During use, before the OLED substrate coating in the heat-processed, because just having evaporation source when not reaching the vaporization temperature of evaporant falls impurity evaporation, make vaporized impurity at first be deposited on the surface of substrate, cause the component of substrate coating layer impure, and then have influence on the stable of substrate performance, and the stability that is connected with substrate surface of coatings.Simultaneously, because some evaporants can discharge gas in the heating evaporation process, make the interior pressure of annular seal space rise, make existing plated film be subjected to different pressure everywhere with the annular seal space of processing mechanism, thereby cause the substrate coating layer extremely inhomogeneous, finally have influence on the quality and the normal life-span of substrate.
Therefore, be badly in need of to want a kind of substrate coating processing mechanism that can improve the homogeneity of Organic Light Emitting Diode substrate coating layer in the vacuum to greatest extent and can farthest guarantee the pure property of composition of substrate coating layer.
The utility model content
The purpose of this utility model is to provide a kind of substrate coating processing mechanism that can improve the homogeneity of Organic Light Emitting Diode substrate coating layer in the vacuum to greatest extent and can farthest guarantee the pure property of composition of substrate coating layer.
For achieving the above object, the technical solution of the utility model is: a kind of substrate coating processing mechanism is provided, described substrate coating comprises cabinet with processing mechanism, disposable plates and evaporation source, described cabinet is hollow structure, described hollow structure forms annular seal space, described evaporation source and described disposable plates are arranged in the described annular seal space, and described disposable plates is positioned at described evaporation source top, wherein, described substrate coating also comprises baffle mechanism with processing mechanism, described baffle mechanism comprises baffle plate, magnetic fluid, cooling axle and barrier driving mechanism, described magnetic fluid is installed on the described cabinet, it is outer and be connected with an end of described cooling axle that described barrier driving mechanism is positioned at described cabinet, the other end of described cooling axle passes described magnetic fluid with articulating and stretches in the described annular seal space, described baffle plate is fixedlyed connected with described cooling axle, described baffle plate is placed in the described annular seal space and between described evaporation source and described disposable plates, described baffle plate is isolated or is opened described evaporation source and is connected with the space of described disposable plates, the described cooling axle of described barrier driving mechanism's driving, described cooling axle drives a described baffle plate and rotates.
Preferably, the edge is perpendicular to the rectangular trapezoidal or rectangle in the cross section of the axial described baffle plate of described cooling, the described baffle plate rectangular in the cross section is provided with stiffening web, can reduce baffle plate flexible deformation's degree to greatest extent, thereby makes the baffle plate can more reliable work.
Preferably, described baffle plate comprises first baffle plate and second baffle, described cooling axle comprises the first cooling axle and the second cooling axle, one side of described first baffle plate is installed on the described first cooling axle, the opposite side of described first baffle plate extends to form first Access Division to described second baffle, one side of described second baffle is installed on the described second cooling axle, and the opposite side of described second baffle extends to form second Access Division that fastens and dock with described first Access Division to described first baffle plate, isolates described evaporation source and be connected with the space of described disposable plates when described first Access Division and the engaging butt joint of described second Access Division.By the baffle plate of forming by first baffle plate and second baffle, make baffle plate to work neatly, and can go up the distortion that reduces baffle plate to greatest extent, make baffle plate to work more reliably; By of the engage butt joint of first Access Division with second Access Division, make the baffle plate of winning engage joint with second baffle and have excellent sealing property, thereby the impurity that intercepts to greatest extent in the plated film passes through to pollute substrate with the joint that engages of second baffle from first baffle plate, and then has improved the quality of substrate coating layer; By the cooling axle of forming by the first cooling axle and the second cooling axle, feasible first, second baffle plate that is individually fixed on first and second cooling axle can be under the preferable temperature works, the impurity everywhere that prevents to be deposited on first and second baffle plate peels off under the inconsistent thermal stresses effect because of being subjected to, thereby the annular seal space of the utility model substrate coating that made contaminating impurity after peeling off, and then influence the quality of substrate coating layer with processing mechanism.Particularly, area sum when described first baffle plate engages butt joint with second baffle is greater than the area of described disposable plates, and the distance of the lateral margin of described first baffle plate and the corresponding inwall of described cabinet is less than 10 millimeters, the distance of the lateral margin of described second baffle and the corresponding inwall of described cabinet is less than 10 millimeters, the feasible on the one hand baffle plate of being made up of first baffle plate and second baffle can intercept the impurity in the plated film to greatest extent, guarantees the quality of the substrate coating layer on the disposable plates; Guarantee on the other hand can work more reliably between first and second baffle plate and the cabinet.
Preferably, described baffle mechanism also comprises transmission shaft and vacuum operating bearing, described transmission shaft has groove, described cooling axle has the projection that fastens and dock with described groove, described transmission shaft articulates with described vacuum operating bearing respectively across described annular seal space and two ends, and described vacuum operating bearing is fixedlyed connected with described cabinet.By cooperating of projection and groove, it is simple and reliable to make that the cooling axle is connected with transmission shaft, and makes and cool off spool processing with transmission shaft simply to reduce its cost.Particularly, described groove engages joint with described projection and is positioned at described vacuum operating bearing, is convenient to cool off the mounting or dismounting and the maintenance of axle and transmission shaft.
Preferably, described barrier driving mechanism comprises motor, driving toothed gear and follower gear, described motor is installed on the outer wall of described cabinet and with described driving toothed gear and is connected, described follower gear is installed on described cooling axle and goes up and be meshed with described driving toothed gear, make that the barrier driving mechanism structure is simple, transmission precisely and can work more reliably.Particularly, described motor is oscillating cylinder or servomotor, can control accurately the motion of baffle plate.
Preferably, described cooling axle comprises: axis body, and described axis body in axial direction has the cooling chamber of hollow; The refrigeration cycle chamber, fixedly connected with described axis body in described refrigeration cycle chamber, and described refrigeration cycle chamber has import and outlet, and described import is communicated with described cooling chamber; Input tube, described input tube is fixedlyed connected with described refrigeration cycle chamber; Circulation tube, described circulation tube is fixedlyed connected with described input tube and is suspended from the described cooling chamber, and an end of described circulation tube is communicated with described input tube, and the other end is communicated with described cooling chamber; And output tube, described output tube is fixedly connected with described refrigeration cycle chamber and be communicated with the outlet of described refrigeration cycle chamber.By the cooling axle of forming by axis body, refrigeration cycle chamber, input tube, circulation tube and output tube, on the one hand can be discharged to the utility model substrate coating to the heat of fixed thereon baffle plate with outside the annular seal space of processing mechanism, baffle plate is in work under the preferable temperature to guarantee the homogeneity of substrate coating layer; Guaranteeing on the other hand that the cooling axle can be in works under the preferable temperature prolonging the life-span and the transmission accuracy of cooling axle, in case the baffle plate driving mechanism produces vibrations and noise and then influences the quality of substrate coating layer in transmission process.
Compared with prior art, cool off axle and be connected in the baffle plate that cools off on the axle owing to of the present utility model, making baffle plate and cooling axle can be under the preferable temperature works, the impurity everywhere that on the one hand can prevent to be deposited on the baffle plate peels off the annular seal space that has polluted the utility model substrate coating usefulness processing mechanism when being subjected to different thermal stresses, thereby provides the extremely vacuum environment of excellence for the plated film of substrate; Can promote and cool off the transmission accuracy of the barrier driving mechanism that is connected of axle on the other hand, make the baffle plate that is connected on the cooling axle to work more accurately, thereby reduce when substrate coating begins the influence of the impurity of evaporation and unstable gas to greatest extent to the substrate coating layer, and then make the substrate coating layer more even, its composition is purer, its performance is more stable, and the substrate coating layer is more firm with being connected of substrate surface and reliable, has therefore improved the quality and the ordinary life of substrate coating layer.Simultaneously, because magnetic fluid of the present utility model makes the utility model substrate coating have extremely excellent vacuum environment with processing mechanism, thereby satisfy the requirement of substrate coating in the vacuum.
Description of drawings
Fig. 1 is the structural representation of the utility model substrate coating with processing mechanism.
Fig. 2 is the structural representation of the utility model substrate coating with the baffle mechanism of processing mechanism.
Fig. 3 is the structural representation of the utility model substrate coating with the cooling axle of processing mechanism.
Fig. 4 is the utility model substrate coating another structural representation with the cooling axle that cooperates transmission with transmission shaft of processing mechanism.
Fig. 5 is the structural representation that with cooling axle cooperate the transmission shaft of transmission of the utility model substrate coating with processing mechanism.
Fig. 6 is the utility model substrate coating cooling axle of processing mechanism and structural representation of drive shaft cartridge timing.
Fig. 7 is the structural representation of the utility model substrate coating with the baffle plate of processing mechanism.
Fig. 8 is the utility model substrate coating another structural representation with the baffle plate of processing mechanism.
Embodiment
In order to describe technology contents, the structural attitude of the utility model substrate coating in detail, be described further below in conjunction with embodiment and conjunction with figs. with processing mechanism.
At first, see also Fig. 1 and Fig. 2.In Fig. 1 and Fig. 2, the utility model substrate coating is used in the vacuum substrate coating treatment process of Organic Light Emitting Diode with processing mechanism 100, and it comprises cabinet 1, disposable plates and evaporation source (not shown).This cabinet 1 is tightly connected by left plate 13, right side plate 11, front door (not shown), back plate 12, base plate 14 and top board (not shown) and forms, and above-mentioned left plate 13, right side plate 11, front door, back plate 12, base plate 14 and top board form the annular seal space 10 of above-mentioned cabinet 1.Above-mentioned evaporation source and above-mentioned disposable plates all are arranged in the above-mentioned annular seal space 10, and above-mentioned disposable plates is positioned at above-mentioned evaporation source top.Wherein, above-mentioned substrate coating also comprises baffle mechanism with processing mechanism 100, and above-mentioned baffle mechanism comprises baffle plate 21, magnetic fluid, cooling axle 24 and barrier driving mechanism 25.Above-mentioned magnetic fluid is installed on the left plate 13 of above-mentioned cabinet 1, above-mentioned barrier driving mechanism 25 be installed in above-mentioned cabinet 1 left plate 13 the outside and be connected with an end of above-mentioned cooling axle 24, the other end of above-mentioned cooling axle 24 passes above-mentioned magnetic fluid with articulating and stretches in the above-mentioned annular seal space 10; Particularly, above-mentioned baffle mechanism also comprises vacuum operating bearing, above-mentioned cooling axle 24 passes above-mentioned magnetic fluid successively with articulating, vacuum operating bearing is also fixedlyed connected with above-mentioned baffle plate 21, above-mentioned vacuum operating bearing is fixed in the left side of cabinet 1, right side plate 13, on 11, above-mentioned baffle plate 21 is placed in the above-mentioned annular seal space 10 and between above-mentioned evaporation source and above-mentioned disposable plates, above-mentioned baffle plate 21 is isolated or is opened above-mentioned evaporation source and is connected with the space of above-mentioned disposable plates, above-mentioned annular seal space 10 is isolated into annular seal space 10a and lower seal chamber 10b, the above-mentioned cooling axle 24 of above-mentioned barrier driving mechanism's 25 drivings, above-mentioned cooling axle 24 drives above-mentioned baffle plate 21 and rotates.
Selectively, in the present embodiment, above-mentioned baffle plate 21 comprises the first baffle plate 21a and second baffle 21b, the feasible baffle plate of being made up of the first baffle plate 21a and second baffle 21b 21 can be worked neatly, and can go up to greatest extent and reduce baffle plate 21, make baffle plate 21 to work more reliably because of the distortion that deadweight produces; Above-mentioned cooling axle 24 comprises the first cooling axle 24a and the second cooling axle 24b, feasible first, second baffle plate 21a, the 21b that is individually fixed on first and second cooling axle 24a, the 24b can be under the preferable temperature and work, the impurity everywhere that prevents to be deposited on first and second baffle plate 21a, the 21b peels off under the inconsistent thermal stresses effect because of being subjected to, the annular seal space 10 of the utility model substrate coating that made contaminating impurity after peeling off with processing mechanism 100, thus the quality of substrate coating layer influenced; Above-mentioned magnetic fluid comprises the first magnetic fluid 22a and the second magnetic fluid 22b, makes the junction of first, second cooling axle 24a, 24b and cabinet 1 have excellent sealing property; Above-mentioned vacuum operating bearing comprises the first vacuum operating bearing 23a and the second true bearing 23b, makes the junction of first, second cooling axle 24a, 24b and cabinet 1 have excellent sealing property; Above-mentioned barrier driving mechanism 25 comprises first 25a of barrier driving mechanism and second baffle driving mechanism 25b, makes engaging and opening precisely of win baffle plate 21a and second baffle 21b, thereby guarantees the quality of substrate coating layer.And above-mentioned first and second vacuum operating bearing 23a, 23b are installed on respectively on the inwall of left and right side plate 13,11 of above-mentioned cabinet 1, and above-mentioned first, second magnetic fluid 22a, 22b are installed in respectively on the outer wall of left plate 13 of above-mentioned cabinet 1 and with above-mentioned first, second vacuum operating bearing 23a, 23b and are on the same axial line.The right-hand member of the above-mentioned first cooling axle 24a and the right bearing of the above-mentioned first vacuum operating bearing 23a articulate, the left end of the above-mentioned first cooling axle 24a passes the left bearing of the above-mentioned first vacuum operating bearing 23a, the above-mentioned first magnetic fluid 22a with articulating successively and is connected with above-mentioned first 25a of barrier driving mechanism, and the above-mentioned first baffle plate 21a is installed on the above-mentioned first cooling 24a by screw and open holes 214a; The right-hand member of the above-mentioned second cooling axle 24b and the right bearing of the above-mentioned second vacuum operating bearing 23b articulate, the left end of the above-mentioned second cooling axle 24b passes the left bearing of the above-mentioned second vacuum operating bearing 23b, the above-mentioned second magnetic fluid 22b with articulating successively, and above-mentioned second baffle 21b is fixed on the above-mentioned second cooling axle 24b by screw and open holes 214b.When the above-mentioned first baffle plate 21a and second baffle 21b fasten and dock above-mentioned annular seal space 10 is separated into annular seal space 10a and lower seal chamber 10b; After opening, above-mentioned first baffle plate 21a and second baffle 21b make above-mentioned evaporation source and disposable plates be in the space connected state so that the plated film of substrate.In conjunction with Fig. 7, particularly, the above-mentioned second baffle 21b of the side direction of the above-mentioned first baffle plate 21a extends to form the first Access Division 211a, the above-mentioned first baffle plate 21a of the side direction of above-mentioned second baffle 21b extends to form the second Access Division 211b that fastens and dock with the above-mentioned first Access Division 211a, when the above-mentioned first Access Division 211a engages butt joint with the above-mentioned second Access Division 211b above-mentioned annular seal space 10 is separated into upper and lower annular seal space 10a, 10b; When opening, the above-mentioned first Access Division 211a and the above-mentioned second Access Division 211b make above-mentioned evaporation source and disposable plates be in the space connected state so that the plated film of substrate, make the baffle plate 21a that wins engage joint with second baffle 21b on the one hand and have excellent sealing property, the impurity that intercepts to greatest extent in the substrate coating passes through to pollute substrate with the joint that engages of second baffle 21b from the first baffle plate 21a, thereby has improved the quality of substrate coating layer; Can guarantee on the other hand to remove and make evaporation source and disposable plates be in the space connected state behind the impurity so that the carrying out of substrate coating, thereby guarantee the quality of substrate coating layer.Closed Fig. 3, more specifically, as follows:
The preferably, the above-mentioned first baffle plate 21a engages the area of the area sum in when butt joint greater than above-mentioned disposable plates with second baffle 21b, and the distance between the inwall of the back plate 12 of the rear surface of the above-mentioned first baffle plate 21a and above-mentioned cabinet 1, between the inwall of the right side plate 11 of the right surface of the above-mentioned first baffle plate 21a and above-mentioned cabinet 1, between the inwall of the left plate 13 of the above-mentioned first baffle plate 21a left surface and above-mentioned cabinet 1 is all less than 10 millimeters; Distance between the inwall of the front door of the front surface of above-mentioned second baffle 21b and above-mentioned cabinet 1, between the inwall of the left plate 13 of the left surface of above-mentioned second baffle 21b and above-mentioned cabinet 1, between the inwall of the right side plate 11 of the right surface of above-mentioned second baffle 21b and above-mentioned cabinet 1 is all less than 10 millimeters; Wherein, optimally, the phase mutual edge distance between them is remained in 5 millimeters.Make that on the one hand the baffle plate of being made up of the first baffle plate 21a and second baffle 21b 21 can intercept impurity to greatest extent, guarantee the quality of substrate coating layer on the disposable plates; Guarantee to intercept effectively between first and second baffle plate 21a, 21b and the cabinet 1 impurity on the other hand and pass through, can make rotation between baffle plate 21 and the cabinet 1 more reliable and do not have an interference again from the gap location between them.
The preferably, above-mentioned first 25a of barrier driving mechanism comprises the first motor 251a, first driving toothed gear (not annotating among the figure) and the first follower gear 253a, the above-mentioned first motor 251a is installed in by the first support 250a on the outer wall of left plate 13 of above-mentioned cabinet 1 and with above-mentioned first driving toothed gear and is connected, the above-mentioned first follower gear 253a is installed on the above-mentioned first cooling axle 24a and goes up and be meshed with above-mentioned first driving toothed gear, make and win that the 25a of barrier driving mechanism is simple in structure, transmission precisely and can work more reliably.Above-mentioned second baffle driving mechanism 25b comprises the second motor 251b, the second driving toothed gear 252b, the second follower gear (not shown), the above-mentioned second motor 251b is installed in by the second support 250b on the outer wall of left plate 13 of above-mentioned cabinet 1 and with the above-mentioned second driving toothed gear 252b and is connected, above-mentioned second follower gear is installed on the above-mentioned second cooling axle 24b and goes up and be meshed with the above-mentioned second driving toothed gear 252b, make that second baffle driving mechanism 25b is simple in structure, transmission precisely and can work more reliably.Particularly, described first and second motor 251a, 251b are oscillating cylinder or servomotor, can control accurately the motion of first, second baffle plate 21a, 21b.
The preferably, above-mentioned cooling axle 24 comprises: axis body 241, this axis body 241 in axial direction has the cooling chamber 246 of hollow; Fixedly connected by welded seal technology with above-mentioned axis body 241 and have import 2451 and outlet 2450 in refrigeration cycle chamber 245, this refrigeration cycle chamber 245, above-mentioned import 2451 is communicated with above-mentioned cooling chamber 246; Input tube 243, this input tube 243 and the 245 tight sockets of above-mentioned refrigeration cycle chamber; Circulation tube 242, this circulation tube 242 is with above-mentioned input tube 243 tight sockets and be suspended from the above-mentioned cooling chamber 246, and an end of above-mentioned circulation tube 242 is communicated with above-mentioned input tube 243, and the other end is communicated with above-mentioned cooling chamber 246; And output tube 244, this output tube 244 is communicated with the 245 tight sockets of above-mentioned refrigeration cycle chamber and with the outlet 2450 of above-mentioned refrigeration cycle chamber 245.Wherein, arrow indication among the flow direction of the heat-eliminating medium of cooling axle 24 such as Fig. 3 can increase cooling performance like this.By the cooling axle of forming by axis body 241, refrigeration cycle chamber 245, input tube 243, circulation tube 242 and output tube 244 24, on the one hand can be discharged to the utility model substrate coating to the heat of fixed thereon baffle plate 21 with outside the annular seal space 10 of processing mechanism 100, baffle plate 21 is in work under the preferable temperature to guarantee the homogeneity of substrate coating layer; Guaranteeing on the other hand that cooling axle 24 can be in works under the preferable temperature prolonging the life-span and the transmission accuracy of cooling axle 24, in case baffle plate driving mechanism 25 produces vibrations and noise and then influences the quality of substrate coating layer in transmission process.
Secondly, please join Fig. 4 to Fig. 6, Fig. 4 to Fig. 6 has showed the cooling axle 24` of the transmission that cooperatively interacts and the structural representation of transmission shaft 26, and transmission shaft 26 and the assembling synoptic diagram that cools off axle 24`.Wherein, the structure overwhelming majority of cooling axle 24 is all identical among cooling axle 24` and Fig. 3, and distinctive points only is: this cooling 24` is provided with projection 240`.Therefore, selectively, in another embodiment of the utility model, above-mentioned baffle mechanism also comprises transmission shaft 26, one end of this transmission shaft 26 and above-mentioned vacuum operating bearing articulate, this transmission shaft 26 is across above-mentioned annular seal space 10 and one end and the pivot joint of above-mentioned vacuum operating bearing, the other end of above-mentioned transmission shaft 26 has the groove 260 that fastens and dock with the projection 240` of above-mentioned cooling axle 24`, the end of above-mentioned cooling axle 24` docks with above-mentioned transmission shaft 26, and the other end passes above-mentioned vacuum operating bearing with articulating successively, above-mentioned magnetic fluid and be connected with above-mentioned barrier driving mechanism 25, above-mentioned baffle plate 21 is installed on the above-mentioned transmission shaft 26 by screw and open holes 261.By cooperating of projection 240` and groove 260, it is simple and reliable to make that a cooling axle 24` is connected with transmission shaft 26, and makes the processing of cooling off a 24` and transmission shaft 26 simply to reduce its cost.Particularly, above-mentioned groove 260 engages joint with above-mentioned projection 240` and is positioned at above-mentioned vacuum operating bearing, is convenient to cool off the mounting or dismounting and the maintenance of a 24` and transmission shaft 26.
Once more, please consult Fig. 7 again, Fig. 7 has showed the structural representation of the utility model substrate coating with baffle plate one embodiment of processing mechanism.In Fig. 7, the cross section of being somebody's turn to do the baffle plate of being made up of the first baffle plate 21a and second baffle 21b 21 is rectangular, and the first Access Division 211a of the first baffle plate 21a is curved, the second Access Division 211b of second baffle 21b is curved, be provided with the first stiffening web 210a in the first baffle plate 21a, be provided with the second stiffening web 210b in second baffle 21b.By cross section rectangular first, second baffle plate 21a, 21b and first, second stiffening web 210a, 210b, reduce first, second baffle plate 21a, 21b flexible deformation's degree to greatest extent, thereby make first, second baffle plate 21a, the 21b can more reliable work; By arcual first, second Access Division 211a, 211b, make the baffle plate 21a that wins have excellent sealing property with the joint that engages of second baffle 21b.
At last, see also Fig. 8, Fig. 8 has showed the structural representation of the utility model substrate coating with another embodiment of baffle plate of processing mechanism.In Fig. 8, the cross section of being somebody's turn to do the baffle plate 21` that is made up of the first baffle plate 21a` and second baffle 21b` is at right angles trapezoidal, the first Access Division 211a` of the above-mentioned first baffle plate 21a` is curved, the second Access Division 211b` of above-mentioned second baffle 21b` is curved, can reduce first, second baffle plate 21a`, 21b` flexible deformation's degree to greatest extent, thereby first, second baffle plate 21a`, 21b` can be worked more reliably; By arcual first, second Access Division 211a`, 211b`, make the baffle plate 21a` that wins have excellent sealing property with the joint that engages of second baffle 21b`.
Cooling axle 24 of the present utility model and be connected in baffle plate 21 on the cooling axle 24, making baffle plate 21 and cooling axle 24 can be under the preferable temperature works, the impurity everywhere that on the one hand can prevent to be deposited on the baffle plate 21 peels off the annular seal space 10 that has polluted the utility model substrate coating usefulness processing mechanism 100 when being subjected to different thermal stresses, thereby provides the extremely vacuum environment of excellence for the plated film of substrate; Can promote on the other hand and the transmission accuracy that cools off the axle 24 barrier driving mechanisms 25 that are connected, make the baffle plate 21 that is connected on the cooling axle 24 to work more accurately, thereby reduce when substrate coating begins the influence of the impurity of evaporation and unstable gas to greatest extent to the substrate coating layer, and then make the substrate coating layer more even, its composition is purer, its performance is more stable, and the substrate coating layer is more firm with being connected of substrate surface and reliable, has therefore improved the quality and the ordinary life of substrate coating layer.Simultaneously, because the utility model substrate coating makes the utility model substrate coating have extremely excellent vacuum environment with processing mechanism 100 with the magnetic fluid of processing mechanism 100, thereby satisfy the requirement of substrate coating in the vacuum.
The utility model substrate coating is with the concrete shape of processing mechanism 100 related evaporation sources and disposable plates, and the principle of work of oscillating cylinder or servomotor to be those of ordinary skills known according to actual needs, no longer be described in detail at this.
Above disclosed only is preferred embodiments of the present utility model, can not limit the interest field of the utility model certainly with this, and therefore the equivalent variations of being done according to the utility model claim still belongs to the scope that the utility model is contained.
Claims (9)
1. substrate coating processing mechanism, comprise cabinet, disposable plates and evaporation source, described cabinet is hollow structure, described hollow structure forms annular seal space, described evaporation source and described disposable plates are arranged in the described annular seal space, and described disposable plates is positioned at described evaporation source top, it is characterized in that: also comprise baffle mechanism, described baffle mechanism comprises baffle plate, magnetic fluid, cooling axle and barrier driving mechanism, described magnetic fluid is installed on the described cabinet, it is outer and be connected with an end of described cooling axle that described barrier driving mechanism is positioned at described cabinet, the other end of described cooling axle passes described magnetic fluid with articulating and stretches in the described annular seal space, described baffle plate is fixedlyed connected with described cooling axle, described baffle plate is placed in the described annular seal space and between described evaporation source and described disposable plates, described baffle plate is isolated or is opened described evaporation source and is connected with the space of described disposable plates, the described cooling axle of described barrier driving mechanism's driving, and described cooling axle drives a described baffle plate and rotates.
2. substrate coating processing mechanism as claimed in claim 1 is characterized in that: the edge is perpendicular to the rectangular trapezoidal or rectangle in the cross section of the axial described baffle plate of described cooling, and the described baffle plate rectangular in the cross section is provided with stiffening web.
3. substrate coating processing mechanism as claimed in claim 1, it is characterized in that: described baffle plate comprises first baffle plate and second baffle, described cooling axle comprises the first cooling axle and the second cooling axle, one side of described first baffle plate is installed on the described first cooling axle, the opposite side of described first baffle plate extends to form first Access Division to described second baffle, one side of described second baffle is installed on the described second cooling axle, and the opposite side of described second baffle extends to form second Access Division that fastens and dock with described first Access Division to described first baffle plate, isolates described evaporation source and be connected with the space of described disposable plates when described first Access Division and the engaging butt joint of described second Access Division.
4. substrate coating processing mechanism as claimed in claim 3, it is characterized in that: the area sum when described first baffle plate engages butt joint with described second baffle is greater than the area of described disposable plates, and the distance of the lateral margin of described first baffle plate and the corresponding inwall of described cabinet is less than 10 millimeters, and the distance of the lateral margin of described second baffle and the corresponding inwall of described cabinet is less than 10 millimeters.
5. substrate coating processing mechanism as claimed in claim 1, it is characterized in that: described baffle mechanism also comprises transmission shaft and vacuum operating bearing, described transmission shaft has groove, described cooling axle has the projection that fastens and dock with described groove, described transmission shaft articulates with described vacuum operating bearing respectively across described annular seal space and two ends, and described vacuum operating bearing is fixedlyed connected with described cabinet.
6. substrate coating processing mechanism as claimed in claim 5 is characterized in that: described groove engages joint with described projection and is positioned at described vacuum operating bearing.
7. substrate coating processing mechanism as claimed in claim 1, it is characterized in that: described barrier driving mechanism comprises motor, driving toothed gear and follower gear, described motor is installed on the outer wall of described cabinet and with described driving toothed gear and is connected, and described follower gear is installed on described cooling axle and goes up and be meshed with described driving toothed gear.
8. substrate coating processing mechanism as claimed in claim 7 is characterized in that: described motor is oscillating cylinder or servomotor.
9. substrate coating processing mechanism as claimed in claim 1 is characterized in that, described cooling axle comprises:
Axis body, described axis body in axial direction has the cooling chamber of hollow;
The refrigeration cycle chamber, fixedly connected with described axis body in described refrigeration cycle chamber, and described refrigeration cycle chamber has import and outlet, and described import is communicated with described cooling chamber;
Input tube, described input tube is fixedlyed connected with described refrigeration cycle chamber;
Circulation tube, described circulation tube is fixedlyed connected with described input tube and is suspended from the described cooling chamber, and an end of described circulation tube is communicated with described input tube, and the other end is communicated with described cooling chamber; And
Output tube, described output tube is fixedly connected with described refrigeration cycle chamber and be communicated with the outlet of described refrigeration cycle chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202368402U CN201538813U (en) | 2009-09-30 | 2009-09-30 | Processing mechanism for coating film on substrate |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2009202368402U CN201538813U (en) | 2009-09-30 | 2009-09-30 | Processing mechanism for coating film on substrate |
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| CN201538813U true CN201538813U (en) | 2010-08-04 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101665913B (en) * | 2009-09-30 | 2012-05-23 | 东莞宏威数码机械有限公司 | Processing device used for vacuum coating |
| CN110036135A (en) * | 2016-12-14 | 2019-07-19 | 株式会社神户制钢所 | Target block piece mechanism and the film formation device for having the target block piece mechanism |
| CN110699644A (en) * | 2018-07-09 | 2020-01-17 | 君泰创新（北京）科技有限公司 | Vacuum coating equipment and vacuum coating method thereof |
| CN114481036A (en) * | 2022-01-19 | 2022-05-13 | 安徽光智科技有限公司 | Crucible baffle for coating film |
-
2009
- 2009-09-30 CN CN2009202368402U patent/CN201538813U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101665913B (en) * | 2009-09-30 | 2012-05-23 | 东莞宏威数码机械有限公司 | Processing device used for vacuum coating |
| CN110036135A (en) * | 2016-12-14 | 2019-07-19 | 株式会社神户制钢所 | Target block piece mechanism and the film formation device for having the target block piece mechanism |
| CN110699644A (en) * | 2018-07-09 | 2020-01-17 | 君泰创新（北京）科技有限公司 | Vacuum coating equipment and vacuum coating method thereof |
| CN110699644B (en) * | 2018-07-09 | 2022-01-04 | 德运创鑫(北京)科技有限公司 | Vacuum coating equipment and vacuum coating method thereof |
| CN114481036A (en) * | 2022-01-19 | 2022-05-13 | 安徽光智科技有限公司 | Crucible baffle for coating film |
| CN114481036B (en) * | 2022-01-19 | 2023-12-05 | 安徽光智科技有限公司 | Crucible baffle for coating film |
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