CN113337802A

CN113337802A - Window without dead angle

Info

Publication number: CN113337802A
Application number: CN202110797612.8A
Authority: CN
Inventors: 薛蒙晓
Original assignee: Suzhou Youlun Vacuum Equipment Technology Co ltd
Current assignee: Suzhou Youlun Vacuum Equipment Technology Co ltd
Priority date: 2021-07-14
Filing date: 2021-07-14
Publication date: 2021-09-03
Also published as: CN114592178A; CN114592178B

Abstract

The application provides a window at no dead angle, including setting up observation window on vacuum evaporation machine's cavity door and setting in the main cavity and with the fixed reflection piece of main cavity body rear panel, the structure of observation window includes from outside to inside: the outer glass and the mounting frame are fixed on the cavity door, the extending pieces are arranged in the main cavity and connected with the mounting frame, an inclination angle a is formed between the extending pieces and a vertical line of the inner wall of the cavity door, the mounting frame is provided with a first through hole, the first through hole corresponds to the outer glass in position, the number of the extending pieces is two, the two extending pieces are vertically arranged on the upper side and the lower side of the first through hole, one or two of the extending pieces have a reflection function, and the reflection piece has a reflection function relative to one surface of the cavity door; light in the main cavity passes through first through-hole and reaches outer glass and get into people's eye after the reflection of extension piece and/or reflection member, and the extension piece blocks the coating by vaporization material of evaporation and prevents that coating by vaporization material from passing through first through-hole.

Description

Window without dead angle

Technical Field

The invention relates to the technical field of vacuum evaporation machines, in particular to a window without a dead angle.

Background

The vacuum evaporation plating machine is used for evaporating and gasifying a coating material (or called a coating material) by means of current heating, electron beam bombardment heating, ion source bombardment and the like under a vacuum condition, and then enabling gasified particles to fly to the surface of a substrate to be condensed, and finally forming a thin film. The vacuum evaporation has the advantages of simple film forming method, high film purity and compactness, unique film structure and performance and the like, thereby being widely applied. In the processing technique of vacuum evaporation, a crucible is adopted to gasify a coating material under the vacuum condition, and the crucible comprises: the evaporation coating device comprises an evaporation coating cavity and an evaporation coating source arranged in the evaporation coating cavity, wherein the evaporation coating source is heated to evaporate evaporation coating materials evaporated in the evaporation coating source, the evaporation coating materials are upwards evaporated in a fan-shaped structure, a coating pot with an umbrella-shaped structure for bearing a coated workpiece is arranged above a crucible, and the coated workpiece is fixed on the coating pot, so that evaporation coating material molecules are deposited on the coated workpiece to form a coated film.

In the process of coating, the operation state in the main cavity of the vacuum evaporation machine, the condition of evaporation materials in the crucible, the rotation condition of the plating pot, the state of the heating lamp and the like can be observed visually through the window. The window of the existing vacuum evaporator comprises a handle, a rotating shaft, outer layer glass and rotating glass from outside to inside, wherein the rotating glass rotates synchronously with the rotating shaft, and then the condition in a cavity of the vacuum evaporator is observed through an observation hole on a defending plate. Because the position of the rotary glass facing the observation hole can be coated with the film, the position of the rotary glass which is not coated with the film is observed facing the observation hole in the next observation, and the rotary glass can not be observed again after being coated with the film for a plurality of times, so that the rotary glass in the cavity door needs to be replaced frequently. In the window in the prior art, the rear half part in the crucible is influenced by the right side wall of the crucible, so that the rear half part cannot be observed, and the rear half part is an observation dead angle.

In view of the above, the present invention provides a blind-corner-free window, which can observe the condition inside the main cavity of the vacuum evaporation machine without blind corner, and has no parts to be replaced due to film coating.

Disclosure of Invention

The invention aims to provide a blind-corner-free window, which can observe the condition in a main cavity of a vacuum evaporation machine without blind corners and is free from parts needing to be replaced due to film coating.

According to the window without the dead angle, light in the crucible is reflected by the reflector 22, then is reflected by the lower surface of the upper extending piece 131, penetrates through the first through hole 121 to reach the outer layer glass 11 or directly penetrates through the first through hole 121 to reach the outer layer glass 11, the conditions of the back half part and the right side wall in the crucible can be observed, and the observation dead angle is eliminated; simultaneously, the extension piece plays the dual function of reflected light with the evaporation material that makes things convenient for people's eye to observe the interior condition of main cavity and block evaporation and pass the first through-hole of mounting bracket, does not have evaporation material and passes the first through-hole and the cavity door through-hole of mounting bracket, outer glass can not by the coating film, outer glass need not change, can be with no problem for several years, wherein, the lower surface of top extension piece can be plated more after the coating film and brighter, do not influence the effect of reflection, consequently do not have the part that needs to be changed because of the coating film. The present applicant has completed the present application on this basis.

The utility model provides a window at no dead angle, is including setting up observation window 1 on vacuum evaporation machine's cavity door and setting in the main cavity and with the fixed reflection part 2 of main cavity body rear panel, observation window 1's structure includes from outside-in: the glass cabinet comprises outer glass 11, a mounting frame 12 and extension pieces 13, wherein the outer glass 11 and the mounting frame 12 are fixed on a cavity door, the extension pieces 13 are arranged in a main cavity and are connected with the mounting frame 12, an inclination angle a is formed between the extension pieces 13 and a vertical line of the inner wall of the cavity door, the mounting frame 12 is provided with first through holes 121, the first through holes 121 correspond to the outer glass 11 in position, the number of the extension pieces 13 is two, the two extension pieces 13 are arranged on the upper side and the lower side of the first through holes 121, one or two of the extension pieces 13 have a reflection function, and the reflection piece 2 has a reflection function relative to one surface of the cavity door; light in the main cavity passes through the first through hole 121 after the light is reflected by the extension piece 13 and/or the reflection piece 2 and reaches the outer glass 11 to enter human eyes, evaporation materials in a crucible arranged on the bottom plate of the main cavity are upwards evaporated in a cone shape at a scattering angle b during film coating, and the extension piece 13 blocks the evaporated evaporation materials to prevent the evaporation materials from passing through the first through hole 121.

In some embodiments, the distance between the surface of the evaporation material in the crucible and the bottom plate of the main cavity during the coating process is H, the distance between the center point of the surface of the evaporation material in the crucible and the cavity door is L, the extending member 13 disposed above is the upper extending member 131, the extending member 13 disposed below is the lower extending member 132, and when the distance between the lowest point of the upper extending member 131 of the observation window 1 and the bottom plate of the main cavity is greater than H + L × cotb, the extending member 13 plays a dual role of reflecting light and blocking the evaporated evaporation material from passing through the first through hole 121; when the distance between the lowest point of the upper extension piece 131 of the observation window 1 and the bottom plate of the main cavity is less than or equal to H + L × cotb, the extension piece 13 plays a role of reflecting light.

Further, when the distance between the lowest point of the upper extension 131 of the observation window 1 and the bottom plate of the main cavity is equal to or less than H + L × cotb, it is simultaneously satisfied that the connecting line between the leftmost point of the surface of the evaporation material in the crucible and the rightmost point of the upper edge of the crucible is an included angle c with the vertical line of the inner wall of the cavity door, the distance between the leftmost point of the surface of the evaporation material in the crucible and the cavity door is L1, and the distance between the highest point of the upper extension 131 of the observation window 1 and the bottom plate of the main cavity is greater than H + L1 × cotc.

When the distance between the lowest point of the upper extension 131 of the observation window 1 and the bottom plate of the main cavity is equal to or less than H + L × cotb, the evaporation material which does not need to be blocked by the extension 13 and does not evaporate at this time passes through the first through hole 121, a small amount of evaporation material other than the scattering angle b is negligible, and the outer glass 11 is not replaced for several years, but the surface of the evaporation material in the crucible is lower than the upper surface of the crucible, the crucible is bowl-shaped, the side wall of the crucible may cause visual influence when observing the evaporation material in the crucible, and when the distance between the highest point of the upper extension 131 of the observation window 1 and the bottom plate of the main cavity is equal to or less than H + L1 × cotc, human eyes cannot observe any evaporation material in the crucible through the observation window 1, and are completely blocked by the right side wall of the crucible, so that the condition of the evaporation material in the crucible can be observed, the height of the observation window 1 on the cavity door is the lowest, and the distance between the highest point of the extending piece 131 above the observation window 1 and the bottom plate of the main cavity is larger than H + L1 Xcotc.

Further, when the distance between the lowest point of the upper extending member 131 of the observation window 1 and the bottom plate of the main cavity is greater than H + L × cotb, it is simultaneously satisfied that, by a connecting line between the center point of the surface of the evaporation material in the crucible and the highest point of the lower extending member 132, an included angle between the connecting line and a vertical line of the inner wall of the cavity door is d, the length of the lower extending member 132 is M, and the distance between the upper extending member 131 and the lower extending member 132 on the mounting bracket 12 is less than or equal to M × cosa + M × sina × cotd.

When the distance between the lowest point of the upper extension piece 131 of the observation window 1 and the bottom plate of the main chamber is greater than H + L × cotb, in the range of the scattering angle b, the evaporation material of the extension piece 13 is required to block evaporation, and the conditions of the extension piece 13 for blocking the evaporation material are as follows: the distance between the upper extending member 131 and the lower extending member 132 on the mounting frame 12 is equal to or less than M × cosa + M × sina × cotd, and if the distance between the upper extending member 131 and the lower extending member 132 on the mounting frame 12 is greater than M × cosa + M × sina × cotd, the evaporated evaporation material passes through the first through hole 121 and the cavity door through hole to be coated on the inner surface of the outer glass 11, and after the inner surface of the outer glass 11 is coated, the outer glass 11 needs to be replaced regularly, which is the situation that human eyes cannot observe the inside of the main cavity through the outer glass 11.

In some embodiments, the reflection member 2 includes a reflection fixing portion 21 and a reflection mirror 22, the reflection fixing portion 21 is fixed to the rear panel of the main cavity, the reflection mirror 22 is connected to the reflection fixing portion 21, the reflection mirror 22 has an inclination angle with the rear panel of the main cavity, the inclination angle is 10 ° to 80 °, light in the crucible is reflected by the reflection mirror 22, and then reflected by the lower surface of the upper extension member 131 and then passes through the first through hole 121 to reach the outer layer glass 11 or directly passes through the first through hole 121 to reach the outer layer glass 11, so that the conditions of the rear half part and the right side enclosure in the crucible can be observed.

The prior art window can observe the condition of the first half part in the crucible, but the second half part in the crucible, especially the part close to the right side wall of the crucible in the crucible and the right side wall of the crucible cannot be observed, the prior art is called as an observation dead angle, because the surface of the evaporation material in the crucible is lower than the upper surface of the crucible, the crucible is in a bowl shape, the right side wall of the crucible can cause visual influence when the evaporation material in the crucible is observed, and therefore, the prior art always has the observation dead angle. But the window of this application, at first observation window 1 is different with prior art's structure completely, does not have the part that needs to be changed because of the coating film to all improve on observation angle's width and observation comfort level, set up reflector 2 simultaneously and eliminate and observe the dead angle.

Further, the reflector 2 is located at the middle lower part of the rear panel of the main cavity.

Further, the light is reflected to the upper surface of the lower extension member 132 through the lower surface of the upper extension member 131, the upper surface of the lower extension member 132 passes through the first through hole 121 to reach the outer glass 11 after being reflected, both the lower surface of the upper extension member 131 and the upper surface of the lower extension member 132 have a reflection function, or the light is reflected through the lower surface of the upper extension member 131 and then directly passes through the first through hole 121 to reach the outer glass 11, the lower surface of the upper extension member 131 has a reflection function, and the condition of the front half part in the crucible is observed; when observing the pot that plates of upper place in the main cavity body, light directly passes first through-hole 121 and reachs outer glass 11 after the upper surface reflection of extension 132 down, or and light directly passes first through-hole 121 and reachs outer glass 11, and the upper surface of extension 132 down all has the reflection function.

In some embodiments, the observation window 1 has one or more observation windows 1, the observation window 1 is disposed in the middle of the cavity door, the observation windows 1 are regularly distributed on the cavity door, and the position of the observation window 1, the length of the extension piece 13, the inclination angle a of the extension piece 13, the reflection function of the extension piece 13, and the distance between the upper extension piece 131 and the lower extension piece 132 on the mounting frame 12 are adjusted according to actual needs.

In some embodiments, the cavity door is provided with a through hole, the outer glass 11 is fixed at a position corresponding to the through hole of the cavity door, and the outer glass 11 is fixed on the outer wall of the cavity door outside the through hole of the cavity door, or fixed on the inner wall of the cavity door inside the through hole of the cavity door, or fixed inside the through hole of the cavity door.

Further, the first through holes 121 of the cavity door through hole, the outer layer glass 11 and the mounting frame 12 are one of square, rectangle, circle or ellipse, and the shapes of the cavity door through hole, the outer layer glass 11 and the mounting frame 12 are the same or different.

Further, the observation window 1 further comprises a hollow fixing piece 14, the hollow fixing piece 14 is used for fixing the outer layer glass 11 and the cavity door, the hollow fixing piece 14 is fixed with the cavity door through a screw, and the shape of the hollow part of the hollow fixing piece 14 is the same as that of the outer layer glass 11.

In some embodiments, the mounting frame 12 further includes a cavity door fixing portion 122 and an extension fixing portion 123, the first through hole 121 is disposed on the cavity door fixing portion 122, the cavity door fixing portion 122 is fixed to the cavity door, the extension fixing portion 123 is located in the main cavity, and the extension fixing portion 123 is connected to the extension 13.

Further, the extension fixing part 123 and the extension 13 are fixed by a screw or a bolt, and the inclination angle a of the extension 13 can be adjusted by an external force by adjusting the tightness of the screw or the bolt.

Drawings

Fig. 1 is a schematic structural diagram of a blind-corner-free window and a main cavity in embodiment 1 of the present application.

Fig. 2 is a schematic structural diagram of an observation window and a main cavity door of a blind-corner-free window in embodiment 1 of the present application.

Fig. 3 is a schematic view of a blind window according to the present invention.

Fig. 4 is a light path diagram of light reflection of the blind-corner-free window of the present application.

Description of the main element symbols:

the structure comprises an observation window 1, a reflector 2, outer glass 11, a mounting frame 12, an extension piece 13, a hollow fixing piece 14, a first through hole 121, a cavity door fixing part 122, an extension piece fixing part 123, an upper extension piece 131, a lower extension piece 132, a reflection fixing part 21 and a reflector 22.

Detailed Description

The following examples are described to aid in the understanding of the present application and are not, and should not be construed to, limit the scope of the present application in any way.

In the following description, those skilled in the art will recognize that components may be described throughout this discussion as separate functional units (which may include sub-units), but those skilled in the art will recognize that various components or portions thereof may be divided into separate components or may be integrated together (including being integrated within a single system or component).

Also, connections between components or systems within the figures are not intended to be limited to direct connections. Rather, data between these components may be modified, reformatted, or otherwise changed by the intermediate components. Additionally, additional or fewer connections may be used. It should also be noted that the terms "coupled," "connected," or "input" and "fixed" are understood to encompass direct connections, indirect connections, or fixed through one or more intermediaries.

In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "side", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings or orientations or positional relationships commonly recognized in the product of the application, and are only used for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present application.

Example 1:

a window without dead angle, as shown in fig. 1-4, comprises an observation window 1 arranged on a cavity door of a vacuum evaporation machine and a reflecting piece 2 arranged in a main cavity and fixed with a rear panel of the main cavity, wherein the structure of the observation window 1 comprises from outside to inside: the glass cabinet comprises outer glass 11, a mounting frame 12 and extension pieces 13, wherein the outer glass 11 and the mounting frame 12 are fixed on a cavity door, the extension pieces 13 are arranged in a main cavity and are connected with the mounting frame 12, an inclination angle a is formed between the extension pieces 13 and a vertical line of the inner wall of the cavity door, the mounting frame 12 is provided with first through holes 121, the first through holes 121 correspond to the outer glass 11 in position, the number of the extension pieces 13 is two, the two extension pieces 13 are arranged on the upper side and the lower side of the first through holes 121, one or two of the extension pieces 13 have a reflection function, and the reflection piece 2 has a reflection function relative to one surface of the cavity door; light in the main cavity passes through the first through hole 121 after the light is reflected by the extension piece 13 and/or the reflection piece 2 and reaches the outer glass 11 to enter human eyes, evaporation materials in a crucible arranged on the bottom plate of the main cavity are upwards evaporated in a cone shape at a scattering angle b during film coating, and the extension piece 13 blocks the evaporated evaporation materials to prevent the evaporation materials from passing through the first through hole 121.

When coating film, the distance between the surface of the evaporation material in the crucible and the bottom plate of the main cavity is H, the distance between the center point of the surface of the evaporation material in the crucible and the cavity door is L, the extending piece 13 arranged above is the upper extending piece 131, the extending piece 13 arranged below is the lower extending piece 132, and when the distance between the lowest point of the upper extending piece 131 of the observation window 1 and the bottom plate of the main cavity is more than H + L multiplied by cotb, the extending piece 13 has double functions of reflecting light and blocking the evaporated evaporation material from passing through the first through hole 121; when the distance between the lowest point of the upper extension piece 131 of the observation window 1 and the bottom plate of the main cavity is less than or equal to H + L × cotb, the extension piece 13 plays a role of reflecting light. When the distance between the lowest point of the upper extension piece 131 of the observation window 1 and the bottom plate of the main cavity body is less than or equal to H + L × cotb, it is simultaneously satisfied that the connecting line between the leftmost point of the surface of the evaporation material in the crucible and the rightmost point of the upper edge of the crucible is an included angle c with the vertical line of the inner wall of the cavity door, the distance between the leftmost point of the surface of the evaporation material in the crucible and the cavity door is L1, and the distance between the highest point of the upper extension piece 131 of the observation window 1 and the bottom plate of the main cavity body is greater than H + L1 × cotc. As shown in the observation window in the middle of fig. 3, the position of the observation window 1 is a critical point of a cone when the evaporation material in the crucible is evaporated upward in a cone shape with a scattering angle b during film coating, and when the distance between the lowest point of the upper extension piece 131 of the observation window 1 and the bottom plate of the main cavity is equal to H + L × cotb, and when the distance between the lowest point of the upper extension piece 131 of the observation window 1 and the bottom plate of the main cavity is equal to or less than H + L × cotb, the evaporation material which is not evaporated and does not need to be blocked by the extension piece 13 at this time passes through the first through hole 121, a small amount of the evaporation material other than the scattering angle b can be ignored, the outer glass 11 is not replaced for several years, but the surface of the evaporation material in the crucible is lower than the upper surface of the crucible, the crucible is in a bowl shape, and the side wall of the crucible has a visual effect when the evaporation material in the crucible is observed, as shown in the lower observation window of fig. 3, the position of the observation window 1 is a critical point where the distance between the highest point of the upper extension piece 131 of the observation window 1 and the bottom plate of the main cavity body is equal to H + L1 × cotc, that is, a critical point where the highest point of the upper extension piece 131 and the connecting line just come into contact with each other, and when the distance between the highest point of the upper extension piece 131 of the observation window 1 and the bottom plate of the main cavity body is equal to or less than H + L1 × cotc, human eyes cannot observe any vapor deposition material in the crucible through the observation window 1, and the line of sight is completely blocked by the right side enclosure of the crucible, so that the height of the observation window 1 on the cavity door is the lowest in order to observe the state of the vapor deposition material in the crucible, and the distance between the highest point of the upper extension piece 131 of the observation window 1 and the bottom plate of the main cavity body is greater than H + L1 × cotc. When the distance between the lowest point of the upper extending member 131 of the observation window 1 and the bottom plate of the main cavity is greater than H + L × cotb, it is simultaneously satisfied that, by using a connection line between the central point of the surface of the evaporation material in the crucible and the highest point of the lower extending member 132, an included angle between the connection line and a vertical line of the inner wall of the cavity door is d, the length of the lower extending member 132 is M, and the distance between the upper extending member 131 and the lower extending member 132 on the mounting frame 12 is less than or equal to M × cosa + M × sina × cotd. When the distance between the lowest point of the upper extension piece 131 of the observation window 1 and the bottom plate of the main chamber is greater than H + L × cotb, in the range of the scattering angle b, the evaporation material of the extension piece 13 is required to block evaporation, and the conditions of the extension piece 13 for blocking the evaporation material are as follows: as shown in the upper observation window 1 of fig. 3, the distance between the upper extending member 131 and the lower extending member 132 on the mounting frame 12 is smaller than or equal to M × cosa + M × sina × cotd, and the distance between the upper extending member 131 and the lower extending member 132 on the mounting frame 12 is larger than M × cosa + M × sina × cotd, so that the evaporated evaporation material is not blocked by the upper extending member 131 and the lower extending member 132, the evaporation material may pass through the first through hole 121 and the cavity door through hole to be coated on the inner surface of the outer glass 11, and after the inner surface of the outer glass 11 is coated, a human eye cannot observe the main cavity through the outer glass 11, and the outer glass 11 needs to be replaced periodically.

The reflecting piece 2 comprises a reflecting fixing part 21 and a reflecting mirror 22, the reflecting fixing part 21 is fixed with the rear panel of the main cavity, the reflecting mirror 22 is connected with the reflecting fixing part 21, the reflecting mirror 22 and the rear panel of the main cavity have an inclination angle of 10-80 degrees, as shown in fig. 4, light in the crucible is reflected by the reflecting mirror 22, then reflected by the lower surface of the upper extending piece 131 and then passes through the first through hole 121 to reach the outer layer glass 11 or directly passes through the first through hole 121 to reach the outer layer glass 11, and the conditions of the rear half part and the right side enclosure in the crucible can be observed. The prior art window can observe the condition of the first half part in the crucible, but the second half part in the crucible, especially the part close to the right side wall of the crucible in the crucible and the right side wall of the crucible cannot be observed, the prior art is called as an observation dead angle, because the surface of the evaporation material in the crucible is lower than the upper surface of the crucible, the crucible is in a bowl shape, the right side wall of the crucible can cause visual influence when the evaporation material in the crucible is observed, and therefore, the prior art always has the observation dead angle. But the window of this application, at first observation window 1 is different with prior art's structure completely, does not have the part that needs to be changed because of the coating film to all improve on observation angle's width and observation comfort level, set up reflector 2 simultaneously and eliminate and observe the dead angle. The reflector 2 is located in the middle-lower part of the rear panel of the main cavity. As shown in fig. 4, the light is reflected to the upper surface of the lower extension member 132 through the lower surface of the upper extension member 131, the upper surface of the lower extension member 132 is reflected to reach the outer glass 11 through the first through hole 121, both the lower surface of the upper extension member 131 and the upper surface of the lower extension member 132 have a reflection function, or the light is reflected through the lower surface of the upper extension member 131 to reach the outer glass 11 directly through the first through hole 121, the lower surface of the upper extension member 131 has a reflection function, and the condition of the front half inside the crucible is observed; when observing the pot that plates of upper place in the main cavity body, light directly passes first through-hole 121 and reachs outer glass 11 after the upper surface reflection of extension 132 down, or and light directly passes first through-hole 121 and reachs outer glass 11, and the upper surface of extension 132 down all has the reflection function.

The number of the observation windows 1 is 2, and the two observation windows 1 are arranged up and down. The cavity door is provided with a through hole, the outer layer glass 11 is fixed at the position corresponding to the through hole of the cavity door, and the outer layer glass 11 is fixed on the outer wall of the cavity door at the outer side of the through hole of the cavity door, or fixed on the inner wall of the cavity door at the inner side of the through hole of the cavity door, or fixed inside the through hole of the cavity door. The cavity door through hole and the outer layer glass 11 are circular, and the first through hole 121 of the mounting frame 12 is square. The observation window 1 further comprises a hollow fixing piece 14, the hollow fixing piece 14 is used for fixing the outer layer glass 11 and the cavity door, the hollow fixing piece 14 is fixed with the cavity door through screws, and the shape of the hollow part of the hollow fixing piece 14 is the same as that of the outer layer glass 11. The mounting rack 12 further includes a cavity door fixing portion 122 and an extending member fixing portion 123, the first through hole 121 is disposed on the cavity door fixing portion 122, the cavity door fixing portion 122 is fixed to the cavity door, the extending member fixing portion 123 is located in the main cavity, and the extending member fixing portion 123 is connected to the extending member 13. The extension fixing part 123 is fixed to the extension 13 by a screw or a bolt, and the inclination angle a of the extension 13 can be adjusted by an external force by adjusting the tightness of the screw or the bolt.

While various aspects and embodiments have been disclosed herein, it will be apparent to those skilled in the art that other aspects and embodiments can be made without departing from the spirit of the disclosure, and that several modifications and improvements can be made without departing from the spirit of the disclosure. The various aspects and embodiments disclosed herein are presented by way of example only and are not intended to limit the present disclosure, which is to be controlled in the spirit and scope of the appended claims.

Claims

1. The utility model provides a window at no dead angle, its characterized in that, including observation window (1) and setting reflection piece (2) that set up on vacuum evaporation machine's cavity door in the main cavity and fixed with main cavity body rear panel, the structure of observation window (1) includes from outside to inside: the glass door comprises outer layer glass (11), a mounting frame (12) and extension pieces (13), wherein the outer layer glass (11) and the mounting frame (12) are fixed on the cavity door, the extension pieces (13) are arranged in the main cavity and connected with the mounting frame (12), an inclination angle a is formed between the extension pieces (13) and the vertical line of the inner wall of the cavity door, the mounting frame (12) is provided with first through holes (121), the first through holes (121) correspond to the outer layer glass (11), the number of the extension pieces (13) is two, the two extension pieces (13) are arranged on the upper side and the lower side of the first through holes (121) up and down, one or two of the extension pieces (13) have a reflection function, and the reflection piece (2) has a reflection function relative to one side of the cavity door; light rays in the main cavity chamber pass through the first through hole (121) after being reflected by the extending piece (13) and/or the reflecting piece (2) and reach the outer layer glass (11) to enter human eyes, evaporation materials in a crucible arranged on a bottom plate of the main cavity body are upwards evaporated in a cone shape at a scattering angle b during film coating, and the extending piece (13) blocks the evaporated evaporation materials to prevent the evaporation materials from passing through the first through hole (121).

2. The blind window without dead angle of claim 1, wherein, the distance between the surface of the evaporation material in the crucible and the bottom plate of the main cavity body is H, the distance between the center point of the surface of the evaporation material in the crucible and the cavity door is L, the extending piece (13) arranged above is the upper extending piece (131), the extending piece (13) arranged below is the lower extending piece (132), when the distance between the lowest point of the upper extending piece (131) of the observation window (1) and the bottom plate of the main cavity body is more than H + L x cotb, the extending piece (13) plays the dual role of reflecting light and blocking the evaporated evaporation material from passing through the first through hole (121); when the distance between the lowest point of the upper extension piece (131) of the observation window (1) and the bottom plate of the main cavity body is less than or equal to H + L multiplied by cotb, the extension piece (13) plays a role of reflecting light.

3. The blind window of claim 2, wherein when the distance between the lowest point of the upper extension piece (131) of the observation window (1) and the bottom plate of the main cavity is not more than H + L x cotb, it is satisfied that the distance between the leftmost point of the surface of the evaporation material in the crucible and the rightmost point along the upper edge of the crucible is C, the distance between the leftmost point of the surface of the evaporation material in the crucible and the door of the cavity is L1, and the distance between the highest point of the upper extension piece (131) of the observation window (1) and the bottom plate of the main cavity is more than H + L1 x cotc.

4. The blind window of claim 2, wherein when the distance between the lowest point of the upper extension (131) of the observation window (1) and the bottom plate of the main chamber is greater than H + L x cotb, it is satisfied that the distance between the connecting line between the center point of the surface of the evaporation material in the crucible and the highest point of the lower extension (132) is M, the angle between the connecting line and the vertical line of the inner wall of the chamber door is d, and the distance between the upper extension (131) and the lower extension (132) on the mounting frame (12) is equal to or less than M x cosa + M x sina x cotd.

5. The window without dead angle as claimed in claim 1, wherein the reflector (2) comprises a reflection fixing part (21) and a reflector (22), the reflection fixing part (21) is fixed with the rear panel of the main cavity, the reflector (22) is connected with the reflection fixing part (21), the reflector (22) and the rear panel of the main cavity have an inclination angle of 10-80 degrees, after the light in the crucible is reflected by the reflector (22), the light is reflected by the lower surface of the upper extending part (131), passes through the first through hole (121) and reaches the outer layer glass (11) or directly passes through the first through hole (121) and reaches the outer layer glass (11), and the conditions of the rear half part and the right side periphery in the crucible can be observed.

6. Blind-corner-free window according to claim 5, wherein the reflector (2) is located in the lower-middle part of the rear panel of the main cavity; the light rays are reflected to the upper surface of the lower extending piece (132) through the lower surface of the upper extending piece (131), the upper surface of the lower extending piece (132) penetrates through the first through hole (121) to reach the outer layer glass (11) after being reflected, the lower surface of the upper extending piece (131) and the upper surface of the lower extending piece (132) both have a reflecting function, or the light rays are reflected through the lower surface of the upper extending piece (131) and then directly penetrate through the first through hole (121) to reach the outer layer glass (11), the lower surface of the upper extending piece (131) has a reflecting function, and the condition of the front half part in the crucible is observed; when observing the pot that plates of top in the main cavity body, light directly passes through first through-hole (121) and reachs outer glass (11) after the upper surface reflection of below extension piece (132), or/and light directly passes through first through-hole (121) and reachs outer glass (11), and the upper surface of below extension piece (132) all has the reflex function.

7. The blind-corner-free window according to claim 1, wherein the observation window (1) comprises one or more observation windows (1), the observation window (1) is arranged in the middle of the cavity door, the observation windows (1) are regularly distributed on the cavity door, and the position of the observation window (1), the length of the extension piece (13), the inclination angle a of the extension piece (13), the reflection function of the extension piece (13) and the distance between the upper extension piece (131) and the lower extension piece (132) on the mounting frame (12) are adjusted according to actual requirements.

8. The blind-corner-free window as claimed in claim 1, wherein the cavity door is provided with a through hole, the outer glass (11) is fixed at a position corresponding to the through hole of the cavity door, and the outer glass (11) is fixed on the outer wall of the cavity door outside the through hole of the cavity door, or on the inner wall of the cavity door inside the through hole of the cavity door, or is fixed inside the through hole of the cavity door.

9. The blind window without dead angle as claimed in claim 8, wherein the observation window (1) further comprises a hollow fixing member (14), the hollow fixing member (14) is used for fixing the outer glass (11) and the cavity door, the hollow fixing member (14) is fixed with the cavity door through screws, and the shape of the hollow part of the hollow fixing member (14) is the same as that of the outer glass (11).

10. The blind window without dead angle as claimed in claim 1, wherein the mounting bracket (12) further comprises a cavity door fixing portion (122) and an extension fixing portion (123), the first through hole (121) is disposed on the cavity door fixing portion (122), the cavity door fixing portion (122) is fixed to the cavity door, the extension fixing portion (123) is located in the main cavity, and the extension fixing portion (123) is connected to the extension (13).