CN208266262U - A kind of coating machine observation device - Google Patents
A kind of coating machine observation device Download PDFInfo
- Publication number
- CN208266262U CN208266262U CN201820415268.5U CN201820415268U CN208266262U CN 208266262 U CN208266262 U CN 208266262U CN 201820415268 U CN201820415268 U CN 201820415268U CN 208266262 U CN208266262 U CN 208266262U
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- China
- Prior art keywords
- sliding slot
- dust cover
- pair
- glasses
- primary mirror
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Abstract
The utility model discloses a kind of coating machines to observe device, it is characterized in that, mainly by hollow body (1), the image collection component being arranged on hollow body (1) front end, and observation assembly of the setting in hollow body (1) rear end are formed.The image collection component on hollow body front end is arranged in by dust cover in the utility model, primary mirror piece and pair of glasses composition, its dust cover can prevent well target molecule to be deposited in primary mirror piece and pair of glasses, and primary mirror piece and pair of glasses form a refracting telescope, not only prevented in target Molecular Adsorption to eyepiece very well, and operator just can clearly observe the plated film situation of substrate by pair of glasses, the eyes of operator are not required to opposite with the strong light in coating machine, ensure that the utility model can solve existing plated film observation device and be easy for a long time using on rear eyepiece by a large amount of target Molecular Adsorption, with the defect of inconvenient observation.
Description
Technical field
The utility model relates to a kind of plated film observation devices, in particular to a kind of coating machine to observe device.
Background technique
Resistance evaporation film steams equipment generally by the resistance being arranged in coating machine makes its surface component with original to heat target
Son group or ionic species are evaporated out, and the atomic group of target or ion is made to be deposited in substrate surface, pass through film forming procedure
(scatterplot-island structure-fan walks structure-layer growth) forms film.Operator is by being arranged in plated film gate when hindering evaporation film
On plated film observation device the plated film situation of substrate is observed in real time, in order to which the evaporation capacity to target controls.
However, existing plated film observation device is mainly made of hollow body and eyepiece, operator is directly to pass through mesh
Mirror is observed in real time come the plated film situation to substrate, and this plated film observation device is not there is only after long-time use, eyepiece
On can be adsorbed a large amount of target molecule, the problem of there is also inconvenient observations, cause the clarity of eyepiece to reduce, cause to operate
Person cannot well be observed the substrate coating situation in coating machine, to make operator can not accurately be to the steaming of target
Hair amount is controlled, the serious coating quality for affecting substrate.
Utility model content
The purpose of the utility model is to overcome existing plated film observation device, there is only long-times to use on rear eyepiece
It is easy by a large amount of target Molecular Adsorption, there is also the defects of inconvenient observation, provide a kind of coating machine observation device.
The purpose of this utility model passes through following technical proposals reality: a kind of coating machine observation device, mainly by hollow master
The image collection component on hollow body front end is arranged in body, and the observation assembly composition of hollow body rear end is arranged in；Institute
Stating image collection component includes the dust cover being connected with hollow body, the primary mirror piece being inclined on dust cover inner wall, with
And the pair of glasses for being inclined on dust cover inner wall and being parallel to each other with primary mirror piece；The pair of glasses is located under primary mirror piece
Side.
Main sliding slot and secondary sliding slot are tiltedly installed on the further dust cover, and main sliding slot and secondary sliding slot tilt respectively
It is arranged on dust cover；The pair sliding slot is located at the lower section of main sliding slot and is parallel to each other with main sliding slot；The primary mirror piece is mounted on
It on main sliding slot and can slide, the pair of glasses is mounted on secondary sliding slot and can slide.
The quantity of the main sliding slot and secondary sliding slot is two；Described two main sliding slots are symmetricly set on the inner wall of dust cover
On, described two pair sliding slots are symmetricly set on the inner wall of dust cover.
The observation assembly includes the cavity body being connected with hollow body rear end, and is arranged in the intracorporal eyepiece of cavity.
When observing the plated film situation of substrate, the eyes of operator are burnt operator by the strong light in coating machine in order to prevent
To hurt, is additionally provided with filtering apparatus in the cavity body, the filtering apparatus includes the mounting rack being connected by hinge with cavity body,
With the filter disc being arranged on mounting rack.
In order to make the dust cover of the utility model convenient for peace and disassembly, it is provided with mounting plate on the hollow body, it is described
Dust cover connects on a mounting board.
The utility model have the following advantages that compared with prior art and the utility model has the advantages that
(1) the utility model structure is simple, easy to use, produces and use that cost is relatively low, and the utility model setting exists
Image collection component on hollow body front end can be prevented well by dust cover, primary mirror piece and pair of glasses composition, dust cover
Target molecule is deposited in primary mirror piece and pair of glasses, and primary mirror piece and pair of glasses form a refracting telescope, not only prevent very well
In target Molecular Adsorption to eyepiece, and operator just can clearly observe the plated film situation of substrate, operation by pair of glasses
The eyes of person are not required to opposite with the strong light in coating machine, ensure that the utility model can solve existing plated film and see
Device is examined to be easy using on rear eyepiece by the defect of a large amount of target Molecular Adsorption and inconvenient observation for a long time.
(2) the primary mirror piece of the utility model is arranged on dust cover by main sliding slot, and pair of glasses passes through secondary sliding slot setting and exists
On dust cover, it is more convenient to make the installation and removal of primary mirror piece and pair of glasses, and effectively prevent primary mirror piece and pair of glasses by target
Material molecular contamination.
(3) filtering apparatus of the utility model setting can ensure that the eyes of operator will not be burnt by the strong light in coating machine
Wound, protects the eyes of operator well.
Detailed description of the invention
Fig. 1 is the overall structure diagram of the utility model.
Fig. 2 is the structural schematic diagram of the image collection component of the utility model.
Fig. 3 is the structural schematic diagram of the observation assembly of the utility model.
Fig. 4 is the cross-sectional view of the dust cover of the utility model.
In above-mentioned attached drawing, the corresponding component names of appended drawing reference are as follows:
1-hollow body, 2-dust covers, 3-cavity bodies, 4-mounting plates, 5-primary mirror pieces, 6-pair of glasses, 7-main cunnings
Slot, 8-secondary sliding slots, 9-hinges, 10-eyepieces, 11-mounting racks, 12-filter discs.
Specific embodiment
The utility model is described in further detail below with reference to embodiment, but the embodiments of the present invention is simultaneously
It is without being limited thereto.
Embodiment
As shown in figures 1-4, the utility model discloses a kind of coating machines to observe device, mainly by hollow body 1, image
Acquisition component and observation assembly composition.Wherein, the image collection component is as shown in Figure 2 comprising dust cover 2, primary mirror piece
5 and pair of glasses 6.The observation assembly is as shown in Figure 3 comprising cavity body 3 and eyepiece 10.
When implementation, supporter and carrier of the hollow body 1 as image collection component and observation assembly, in the present embodiment in
Empty main body 1 realizes that hollow body 1 is actual in use, hollow body 1 runs through using hollow cylindrical body made of stainless steel
Coating machine is fixed on plated film gate by welding behind the door.Hollow body 1 is arranged in the image collection component
On front end, i.e., image collection component is arranged in hollow body 1 and is located on one end of plated film gate inner wall.The observation assembly is set
It sets on the rear end of hollow body 1, i.e. image collection component is arranged in hollow body 1 and is located at coating machine outdoors on one end of wall.
Further, the image collection component is as shown in Figure 2 comprising dust cover 2, primary mirror piece 5 and pair of glasses 6.
Dust cover 2 is arranged on hollow body 1, which is fixed by screws on hollow body 1, is easily installed and dismantles, should
Dust cover 2 is circular hollow body, and both ends are equipped with opening, and 2 inner wall of dust cover is equipped with two for installing primary mirror piece 5
A main sliding slot 7, this two main sliding slots 7 are symmetricly set on two inner walls of dust cover 2；Meanwhile it being additionally provided on dust cover 2 for pacifying
Two secondary sliding slots 8 of pair of glasses 6 are filled, this two secondary sliding slots 8 are symmetricly set on two inner walls of dust cover 2, and secondary sliding slot 8 and master
Sliding slot 7 is inclined at respectively on dust cover 2, and secondary sliding slot 8 be located at main sliding slot 7 lower section and with main 7 keeping parallelism of sliding slot.It is anti-
Dust hood 2 can effectively prevent primary mirror piece 5 and pair of glasses 6 by target molecular contamination.Primary mirror piece 5 and pair of glasses 6 tilt respectively to be set
It sets on dust cover 2, and primary mirror piece 5 is movably connected on main sliding slot 7, pair of glasses 6 is movably connected on secondary sliding slot 8, pair of glasses 6
Positioned at primary mirror piece 5 lower section and be parallel to each other with primary mirror piece 5, so that pair of glasses 6 and primary mirror piece 5 is formed a refracting telescope, primary mirror
Piece 5 and pair of glasses 6 are not required to other components when installing and are fixed, in order to replace.In use, primary mirror piece 5 is for acquiring plated film
The substrate coating image of acquisition is reflected into pair of glasses 6 by the substrate coating image in machine, the primary mirror piece 5, and producer can lead to
Cross the substrate coating situation in observation assembly coating machine visible in detail.The inclination of main sliding slot 7 and secondary sliding slot 8 in the present embodiment
Angle is the tilt angle of pair of glasses 6 and primary mirror piece 5, and the tilt angle of main sliding slot 7 is that primary mirror piece 5 can be made to collect completely
Subject to substrate coating image, secondary 8 tilt angle of sliding slot with the tilt angle of main sliding slot 7 it is consistent.Meanwhile coating machine is to substrate
The case where strong light can be generated when plated film, the image of the acquisition of primary mirror piece 5 is made to be easy to appear exposure, therefore, the primary mirror in the present embodiment
Piece 5 and pair of glasses 6 use plated film lens preferentially to realize.
Still further, the observation assembly is as shown in figure 3, include cavity body 3 and eyepiece 10.Cavity body 3 is arranged in
In empty main body 1, that is, hollow body 1 is set and is located at coating machine outdoors on one end of wall, is fixed on by welding
The shape of empty main body 1, the cavity body 3 is consistent with the shape of hollow body 1.Eyepiece 10 is arranged in cavity body 3, and eyepiece 10 exists
It is fixed on the inner wall of cavity body 3 in the present embodiment by limiting card, peace is primarily to facilitate come fixed eyepiece 10 using limiting card
Dress and replacement.Eyepiece 10 in the present embodiment uses transparent convex lens to realize, allows an operator to more pure and fresh observe
The case where substrate coating.
Further, the strong light in order to prevent in coating machine is burnt the eyes of operator, is also provided in cavity body 3
Filtering apparatus, the filtering apparatus are as shown in Figure 3 comprising mounting rack 11 and filter disc 12.Mounting rack 11 is connected to sky by hinge 9
On cavity 3, which is separately fixed on mounting rack 11 and cavity body 3 by screw, and cavity body 3 is made to be able to achieve free movement.
Its filter disc 12 is arranged in cavity body 3, is fixed in cavity body 3 in the present embodiment using limiting card, because coating machine is in plated film
It can generate dazzling strong light, and in order to make filter disc 12 realize the protection to the eyes of operator well, the filter disc 12 is preferential
It is realized using color screen.
In order in actual use, convenient for the installation and removal of dust cover 2, be provided on hollow body 1 as shown in Figure 1
For installing the mounting plate 4 of dust cover 2, which is fixed on by welding on hollow body 1, and the mounting plate 4
And between cavity body 3 and dust cover 2, dust cover 2 is fixed by screws on mounting plate 4.
It when specifically used, move to cavity body 3 and is come into full contact with hollow body 1, be that filter disc 12 can block eyepiece completely
10.Power on, make coating machine to substrate coating, primary mirror piece 5 is acquired the substrate coating image in coating machine, primary mirror piece
5 and the substrate coating image of acquisition is reflected into pair of glasses 6, and obtained substrate coating image is reflected by pair of glasses 6
On eyepiece 10, operator by filter disc 12 just can substrate visible in detail plated film situation, the substrate that just can be arrived according to the observation
Plated film situation controls the evaporation capacity of target, to ensure the coating quality of substrate.Specific in use, 5 He of primary mirror piece
Pair of glasses 6 be obliquely installed after form a refracting telescope, meanwhile, dust cover 2 can also prevent target molecule from floating towards 5 He of primary mirror piece
Pair of glasses 6, therefore, the primary mirror piece 5 and pair of glasses 6 and dust cover 2 being obliquely installed match, and can prevent target Molecular Adsorption very well
Onto eyepiece 10.And primary mirror piece 5 and pair of glasses 6 are plated film lens, target molecule just will not influence primary mirror piece 5 and pair of glasses 6
Clarity, so that the existing plated film observation device of the utility model very good solution is deposited after prolonged use, eyepiece
On the problem of being adsorbed a large amount of target molecule and inconvenient observation.
As described above, the utility model can be realized well.
Claims (6)
1. a kind of coating machine observes device, which is characterized in that mainly by hollow body (1), be arranged in hollow body (1) front end
Image collection component, and observation assembly of the setting in hollow body (1) rear end form；The image collection component includes in
The dust cover (2) that empty main body (1) is connected, the primary mirror piece (5) being inclined on dust cover (2) inner wall, and be obliquely installed
The pair of glasses (6) being parallel to each other on dust cover (2) inner wall and with primary mirror piece (5)；The pair of glasses (6) is located at primary mirror piece (5)
Lower section.
2. a kind of coating machine according to claim 1 observes device, it is characterised in that: be provided on the dust cover (2)
Main sliding slot (7) and secondary sliding slot (8), and main sliding slot (7) and secondary sliding slot (8) are inclined at respectively on dust cover (2)；It is described secondary sliding
Slot (8) is located at the lower section of main sliding slot (7) and is parallel to each other with main sliding slot (7)；The primary mirror piece (5) is mounted on main sliding slot (7)
And can slide, the pair of glasses (6) is mounted on secondary sliding slot (8) and can slide.
3. a kind of coating machine according to claim 2 observes device, it is characterised in that: the main sliding slot (7) and secondary sliding slot
(8) quantity is two；Described two main sliding slots (7) are symmetricly set on the inner wall of dust cover (2), described two pair sliding slots
(8) it is symmetricly set on the inner wall of dust cover (2).
4. a kind of coating machine according to claim 3 observes device, it is characterised in that: the observation assembly include with it is hollow
The cavity body (3) that main body (1) is connected, and the eyepiece (10) being arranged in cavity body (3).
5. a kind of coating machine according to claim 4 observes device, it is characterised in that: be additionally provided on the cavity body (3)
Filtering apparatus, the filtering apparatus include the mounting rack (11) being connected by hinge (9) with cavity body (3), and setting is being pacified
Shelve the filter disc (12) on (11).
6. a kind of coating machine according to claim 5 observes device, it is characterised in that: be arranged on the hollow body (1)
Have mounting plate (4), the dust cover (2) is mounted on mounting plate (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820415268.5U CN208266262U (en) | 2018-03-26 | 2018-03-26 | A kind of coating machine observation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820415268.5U CN208266262U (en) | 2018-03-26 | 2018-03-26 | A kind of coating machine observation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208266262U true CN208266262U (en) | 2018-12-21 |
Family
ID=64674936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820415268.5U Expired - Fee Related CN208266262U (en) | 2018-03-26 | 2018-03-26 | A kind of coating machine observation device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208266262U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114540784A (en) * | 2021-07-14 | 2022-05-27 | 苏州佑伦真空设备科技有限公司 | Wide window of observation angle |
-
2018
- 2018-03-26 CN CN201820415268.5U patent/CN208266262U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114540784A (en) * | 2021-07-14 | 2022-05-27 | 苏州佑伦真空设备科技有限公司 | Wide window of observation angle |
| CN114540784B (en) * | 2021-07-14 | 2023-09-05 | 苏州佑伦真空设备科技有限公司 | Window with wide observation angle |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181221 Termination date: 20210326 |
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| CF01 | Termination of patent right due to non-payment of annual fee |