CN2324161Y - Multi-purpose clam shape double-chamber ion film-coating machine - Google Patents
Multi-purpose clam shape double-chamber ion film-coating machine Download PDFInfo
- Publication number
- CN2324161Y CN2324161Y CN 98200971 CN98200971U CN2324161Y CN 2324161 Y CN2324161 Y CN 2324161Y CN 98200971 CN98200971 CN 98200971 CN 98200971 U CN98200971 U CN 98200971U CN 2324161 Y CN2324161 Y CN 2324161Y
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- source
- film
- chambers
- film coating
- plane
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- Expired - Fee Related
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Abstract
The utility model discloses a multi-purpose clam-shaped double-chamber ion film coating machine used in the field of surface plasma vapor deposition. The utility model is characterized in that each of the film coating chambers is composed of two parts, wherein one part of the film coating chamber is an immovable common body which is connected with a vacuum set, and the other part thereof is a front door which can be opened and closed; the top of each film coating chamber is provided with column-shaped arc sources or column-shaped magnetic control sputtering targets; plane arc sources or plane magnetic control sputtering targets are arranged on the wall of each film coating chamber. A film coating source can be opened alone to film a single layer of metal film or compound films as required, and any pair of column-shaped arc sources and plane arc sources can be opened to film multilayer films or alloy films.
Description
The utility model relates to the two chambers of a kind of multi-usage freshwater mussel shape ion film coating machine.Be applicable to surface plasma vapour deposition field, especially be adapted to plate multilayer film, alloy film, have that coating equipment is simple in structure, cost is low, easy and simple to handle, advantage such as have wide range of applications.
Freshwater mussel shape double-chamber vacuum coating equipment is simple with its device structure, cost is low, production efficiency is high and widely application.Current, freshwater mussel shape double-chamber vacuum coating equipment machine mainly is the evapourizing type coating equipment that adopts the thermal resistance evaporation source, and suitable plated film range of application is little.
The purpose of this utility model provides the two chambers of a kind of multi-usage freshwater mussel shape ion film coating machine.The column source can be installed by the central authorities of two coating chambers of coating equipment, can the mounting plane source on the plated film locular wall.Therefore, this coating equipment can carry out the plating of multi sphere ionic membrane, magnetron sputtering plating, not only can plate individual layer pure metal film, compound film, can also plate multilayer film or alloy film.
The utility model is achieved in that two coating chambers of coating equipment form by two portions, and a part is fixed sharing body (1), and it and vacuum unit (2) link.Another part is that the main body that can folding moves is also named Qianmen (3), and (4) install a column source (5), (6) respectively from the top at two Qianmens, and this column source can be rotary magnetron column arc source, also can be rotary magnetron column sputtering target.Difference mounting plane source (7), (8) on the wall of coating chamber, this plane source can be arc source, plane, also can be plane magnetic controlled sputtering target.Workpiece pivoted frame (9), (10) also are installed, inlet system (11), (12), and other auxiliary on the Qianmen respectively.
Fig. 1 is an embodiment sketch of the present utility model, and Fig. 1-a is a front view, and Fig. 1-b is a top view.Below in conjunction with the embodiment sketch the utility model is described further.
When utilizing the two chambers of multi-usage freshwater mussel shape ion film coating machine to carry out plated film, the Qianmen (3) that will install workpiece earlier fastens the good plated film that carries out later with fixed body (1).The dismounting and the installation of workpiece can be carried out in another Qianmen (4), treat that the first stove plated film is finished after, open Qianmen (3), shut Qianmen (4) and carry out new coating process.
Because coating chamber of the present utility model central authorities both can erection column arc source, again the column magnetron sputtering target can be installed.Both can mounting plane arc source on the wall, again can the mounting plane controlled sputtering source.Therefore, the user can only open any coating source according to the needs of producing, and adopts multi-arc ion coating technology or magnetron sputtering technique, carries out being coated with of individual layer pure metal film or compound film.Also can open simultaneously and appoint unification column source and plane source, adopt post arc source and arc source, plane, or post arc source and plane magnetic controlled sputtering target, or column-shape magnetron sputtering target and arc source, plane or column-shape magnetron sputtering target and plane magnetic controlled sputtering target be complementary, and carries out being coated with of multilayer film or alloy film.Therefore, this coating equipment is simple in structure, with low cost except having freshwater mussel shape double room filming machine equipment, can save beyond a fixed body, a cover electrical control system and the advantage of high production efficiency, also has advantage of many uses, a tractor serves several purposes.
Claims (5)
1. the two chambers of multi-usage freshwater mussel shape ion film coating machine, two coating chambers of coating equipment are formed by two portions, a part is fixed sharing body, it and vacuum machine set associative, another part is the main body that can folding moves, and also cries the Qianmen, and a column shape source is installed respectively from the top at two Qianmens, difference mounting plane source is also installed workpiece pivoted frame, inlet system and other auxiliary respectively on the wall of coating chamber in the Qianmen.
2. according to the two chambers of the described multi-usage freshwater mussel of claim 1. shape ion film coating machine, it is characterized in that: the column source of installing in the coating chamber can be rotary magnetron column arc source, also can be the rotary magnetron sputtering Style Columu Talget.
3. according to the two chambers of the described multi-usage freshwater mussel of claim 1. shape ion film coating machine, it is characterized in that: the plane source of installing on the plated film locular wall can be arc source, plane, also can be plane magnetic controlled sputtering target.
4. according to the two chambers of the described multi-usage freshwater mussel of claim 1. shape ion film coating machine, it is characterized in that: according to producing needs, can open any coating source separately, be coated with individual layer pure metal film or compound film.
5. according to the two chambers of the described multi-usage freshwater mussel of claim 1. shape ion film coating machine, it is characterized in that: according to producing needs, can open any pair of columnar source and plane source simultaneously, plating multilayer film or alloy film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 98200971 CN2324161Y (en) | 1998-02-09 | 1998-02-09 | Multi-purpose clam shape double-chamber ion film-coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 98200971 CN2324161Y (en) | 1998-02-09 | 1998-02-09 | Multi-purpose clam shape double-chamber ion film-coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2324161Y true CN2324161Y (en) | 1999-06-16 |
Family
ID=33958379
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 98200971 Expired - Fee Related CN2324161Y (en) | 1998-02-09 | 1998-02-09 | Multi-purpose clam shape double-chamber ion film-coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2324161Y (en) |
-
1998
- 1998-02-09 CN CN 98200971 patent/CN2324161Y/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |