CN217265995U - Observation window of optical coating machine - Google Patents
Observation window of optical coating machine Download PDFInfo
- Publication number
- CN217265995U CN217265995U CN202123270008.4U CN202123270008U CN217265995U CN 217265995 U CN217265995 U CN 217265995U CN 202123270008 U CN202123270008 U CN 202123270008U CN 217265995 U CN217265995 U CN 217265995U
- Authority
- CN
- China
- Prior art keywords
- coating machine
- optical coating
- reflector
- mirror
- reflecting mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses an observation window of optical coating machine relates to optical coating machine technical field, has solved the technical problem that optical coating machine is difficult to observe the direct visual angle of the interior observation window of vacuum cavity when being in vacuum state outside the part among the correlation technique. The window glass body is arranged on a chamber door of the optical coating machine, the mounting frame is fixed in a vacuum chamber of the optical coating machine, the first reflector is movably mounted on the mounting frame, the second reflector is movably mounted on the mounting frame, the mirror surface of the first reflector is opposite to the mirror surface of the second reflector, and the transmission mechanism regulates and controls the distribution angle of the first reflector and/or the second reflector so that a plurality of regional image light rays in the vacuum chamber of the optical coating machine can be output from the window glass body through the first reflector and the second reflector. Through the observation window, the part images which are difficult to obtain originally can be directly observed outside the window glass body, the monitoring on the inside of an optical film coating machine is facilitated, and the production is guaranteed.
Description
Technical Field
The utility model relates to an optical coating machine technical field especially relates to an optical coating machine's observation window.
Background
An optical film-plating machine is a technological test instrument used in the fields of information science, system science and physics, and is characterized by that on the surface of optical component a layer (or several layers) of metal (or medium) film is plated. In the actual working process, the components in the vacuum cavity such as an electron gun crucible, a substrate umbrella stand and the like are difficult to directly observe from the observation window glass of the optical coating machine, and the improvement is needed to solve the problem that the abnormity cannot be timely treated.
SUMMERY OF THE UTILITY MODEL
The application provides an observation window of optical coating machine, has solved among the relevant art optical coating machine and has been in the vacuum state and be difficult to observe the inside direct outside-the-view component of observation window of vacuum cavity technical problem.
The application provides an observation window of optics coating machine, the observation window includes the window glass body, the installing frame, first speculum, second mirror and drive mechanism, the window glass body is located on the cavity door of optics coating machine, the installing frame is fixed in the vacuum cavity of optics coating machine, and the installing frame is close to the setting of window glass body, first speculum movable mounting is in the installing frame, second mirror movable mounting is in the installing frame, and the mirror surface of first speculum sets up with the mirror surface of second mirror relatively, drive mechanism regulates and control the distribution angle of first speculum and/or second mirror, so that a plurality of regional image light can be exported from the window glass body through first speculum and second mirror in the vacuum cavity of optics coating machine.
Optionally, the transmission mechanism includes a mechanism for regulating the rotation of the first reflector and the second reflector so as to output the image light of the top and/or the bottom of the chamber of the optical coating machine from the window glass body.
Optionally, the transmission mechanism comprises a mechanism for regulating the rotation of the first reflector and the second reflector, and the rotation axis of the rotation direction is parallel to the window glass body, so that the image light of the top and/or the bottom in the chamber of the optical coating machine is output from the window glass body.
Optionally, the transmission mechanism includes a mechanism for regulating the rotation of the first reflector and the second reflector so as to output the regional image light rays at the inner peripheral wall of the chamber of the optical coating machine from the window glass body.
Optionally, the transmission mechanism includes a first reflector and a second reflector which are regulated to rotate, and the rotating shaft of the rotating direction is perpendicular to the window glass body, so that the regional image light at the inner peripheral wall of the chamber of the optical coating machine is output from the window glass body.
Optionally, the transmission mechanism includes a fixed member, a rotating member, and a control member, the fixed member is connected to the rotating member, the fixed member is fixed to the mounting frame, the rotating member is connected to the first reflecting mirror or the second reflecting mirror, and the control member controls a rotation angle of the rotating member.
Optionally, the rotating member comprises a joint arrangement employing a steering engine, and the control member is to send a control signal to the steering engine.
Optionally, the transmission mechanism further comprises adjusting the height position of the first mirror and/or the second mirror.
Optionally, the image light of the electron gun crucible of the optical coater is output from the windowpane body via the first mirror and the second mirror.
Optionally, the image light output from the substrate of the optical coater is included from the windowpane body via the first mirror and the second mirror.
The beneficial effects of this application are as follows: the application provides an observation window of an optical coating machine, a mounting frame is relatively fixed near a window glass body of the observation window, a first reflector and a second reflector are movably mounted on the mounting frame, wherein a mirror surface of the first reflector is arranged opposite to a mirror surface of the second reflector, light emitted from a target object passes through the action of the first reflector and the second reflector, the other end of the mirror irradiates to the window glass body and is acquired by a worker observing outside glass, and in order to acquire an image of an object in a larger visual angle range in a vacuum chamber, a transmission mechanism is arranged to regulate the orientation angle of the first reflector or the second reflector or regulate the orientation angle of the first reflector and the second reflector so as to guide image light of a target area to the window glass; through the observation window, the part images which are difficult to obtain originally can be directly observed outside the window glass body, the monitoring on the inside of the optical coating machine is facilitated, and the production is guaranteed.
Drawings
In order to illustrate the embodiments of the present invention or the technical solutions in the prior art more clearly, the drawings used in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention.
Fig. 1 is a schematic view of a reflector in an observation window of an optical coating machine provided by the present application.
The attached drawings are marked as follows: 111-first mirror, 112-actuator, 113-second mirror.
Detailed Description
The embodiment of the application provides an observation window of an optical coating machine, and solves the technical problem that components outside the direct visual angle of the observation window in a vacuum cavity are difficult to observe when the optical coating machine is in a vacuum state in the related art.
In order to solve the technical problems, the general idea of the embodiment of the application is as follows:
the utility model provides an optical coating machine's observation window, the observation window includes the window glass body, the installing frame, first speculum, second mirror and drive mechanism, the window glass body is located on optical coating machine's chamber door, the installing frame is fixed in optical coating machine's vacuum chamber, and the installing frame is close to the setting of window glass body, first speculum movable mounting is in the installing frame, second mirror movable mounting is in the installing frame, and the mirror surface of first speculum sets up with the mirror surface of second mirror relatively, drive mechanism regulates and control the distribution angle of first speculum and/or second mirror, so that a plurality of regional image light can be exported from the window glass body through first speculum and second mirror in optical coating machine's the vacuum chamber.
In order to better understand the technical solution, the technical solution will be described in detail with reference to the drawings and the specific embodiments.
Referring to fig. 1, the present embodiment provides an observation window of an optical coating machine, the observation window includes a window glass body, a mounting frame, a first reflecting mirror 111, a second reflecting mirror 113, and a transmission mechanism 112. The window glass body is arranged on a chamber door of the optical coating machine, the mounting frame is fixed in a vacuum chamber of the optical coating machine and is arranged close to the window glass body, the first reflecting mirror 111 is movably mounted on the mounting frame, the second reflecting mirror 113 is movably mounted on the mounting frame, and therefore the first reflecting mirror 111 and the second reflecting mirror 113 are limited to be arranged close to the window glass body. As shown in fig. 1, the mirror surface of the first reflecting mirror 111 is opposite to the mirror surface of the second reflecting mirror 113, and the transmission mechanism 112 adjusts and controls the distribution angle of the first reflecting mirror 111 and/or the second reflecting mirror 113, so that the image light of a plurality of areas in the vacuum chamber of the optical coating machine can be output from the window glass body through the first reflecting mirror 111 and the second reflecting mirror 113.
Specifically, a first reflecting mirror 111 and a second reflecting mirror 113 are movably mounted on the mounting frame, wherein the mirror surface of the first reflecting mirror 111 is arranged opposite to the mirror surface of the second reflecting mirror 113, light emitted from a target object passes through the first reflecting mirror 111 and the second reflecting mirror 113, and is emitted to the window glass body at the other end of the mirror and is acquired by a worker observing outside the glass, and in order to acquire an image of the object with a larger visual angle range in the vacuum chamber, a transmission mechanism 112 is arranged to regulate the orientation angle of the first reflecting mirror 111 or the second reflecting mirror 113, or regulate the orientation angle of the first reflecting mirror 111 and the second reflecting mirror 113, so that the image light of the target area is guided to the window glass.
Through the observation window, the part images which are difficult to obtain originally can be directly observed outside the window glass body, the monitoring on the inside of the optical coating machine is facilitated, and the production is guaranteed.
As shown in FIG. 1, in one embodiment, in order to observe the object to be observed at the bottom inside the vacuum chamber, the light beam is reflected by the first reflecting mirror 111 and then by the second reflecting mirror 113 for multiple times and then is emitted to the window glass body at the right end of the mirror in the figure; on the basis of this, if the left and right positions are to be observed again, the first reflecting mirror 111, the second reflecting mirror 113, or the distribution angles of the first reflecting mirror 111 and the second reflecting mirror 113 need to be rotated, specifically, about the rotation axis parallel to the windowpane body, so that the image light is output from the right end of the mirror in the figure.
Similarly, in one possible embodiment, in order to observe the object to be observed at the top in the chamber of the optical coating machine, the light is reflected to the first reflector 111 by the second reflector 113, and the right end of the mirror in the pattern is emitted to the window glass body after multiple reflections; on the basis of this, if the left and right positions are to be observed again, the first reflecting mirror 111, the second reflecting mirror 113, or the distribution angles of the first reflecting mirror 111 and the second reflecting mirror 113 need to be rotated, specifically, about the rotation axis parallel to the windowpane body, so that the image light is output from the right end of the mirror in the figure.
Therefore, the transmission mechanism 112 of this embodiment regulates and controls the rotation of the first reflector 111 and the second reflector 113, and the rotation axis of the specific rotational direction is parallel to the window glass body, so that the image light of the top and/or bottom area in the chamber of the optical coating machine is output from the window glass body.
In one embodiment, in order to observe the object to be observed at the inner peripheral wall of the chamber of the optical coating machine (the peripheral side except the top and the bottom), the first reflecting mirror 111 and the second reflecting mirror 113, which are arranged at the distribution angles shown in fig. 1, need to be deflected by the driving mechanism 112, specifically, to rotate around the rotation axis perpendicular to the windowpane body, so that the area image light at the inner peripheral wall of the chamber of the optical coating machine is output from the windowpane body.
Alternatively, the transmission mechanism 112 includes a fixed member connected to the rotating member, the fixed member being fixed to the mounting frame, a rotating member connected to the first reflecting mirror 111 or the second reflecting mirror 113, and a control member for controlling a rotation angle of the rotating member.
The rotating member is connected to the first reflecting mirror 111 or the second reflecting mirror 113, which means that when the transmission mechanism 112 is required to drive the first reflecting mirror 111 to deflect, the rotating member is connected to the first reflecting mirror 111; if the transmission mechanism 112 is required to drive the second reflecting mirror 113 to deflect, the rotating member is connected with the second reflecting mirror 113; if the transmission mechanism 112 is required to drive the first reflecting mirror 111 and the second reflecting mirror 113 to deflect, two rotating members are provided and are respectively connected with the first reflecting mirror 111 and the second reflecting mirror 113.
Regarding the control element, this embodiment provides an implementable manner, where the rotating element is set up by using a joint of the steering engine, the control element is configured to send a control signal to the steering engine, control an output shaft of the steering engine to rotate to a specified position, and the steering engine keeps an angular position of the shaft unchanged when the control signal is continuously unchanged.
Optionally, the transmission mechanism 112 further includes adjusting the height position of the first reflecting mirror 111 and/or the second reflecting mirror 113. By adjusting the distribution angles of the first reflector 111 and the second reflector 113, the object to be observed in the vacuum cavity with a larger area range can be observed from the outside of the window glass body.
Through the observation window of the optical coating machine in this embodiment, the electron gun crucible and the substrate umbrella stand in the optical coating machine can be directly observed from the outside of the window glass body through the first reflecting mirror 111 and the second reflecting mirror 113, that is, image light of the electron gun crucible and the substrate umbrella stand of the optical coating machine can be output from the window glass body.
While the preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the appended claims be interpreted as including the preferred embodiment and all such alterations and modifications as fall within the scope of the invention.
It will be apparent to those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (9)
1. The utility model provides an observation window of optical coating machine which characterized in that, the observation window includes:
the window glass body is arranged on a chamber door of the optical coating machine;
the mounting frame is fixed in a vacuum chamber of the optical coating machine and is arranged close to the window glass body;
the first reflector is movably arranged on the mounting frame;
the second reflector is movably arranged on the mounting frame, and the mirror surface of the first reflector is opposite to the mirror surface of the second reflector; and
and the transmission mechanism regulates and controls the distribution angle and the height position of the first reflecting mirror and/or the second reflecting mirror so that the image light rays of a plurality of areas in the vacuum chamber of the optical coating machine can be output from the window glass body through the first reflecting mirror and the second reflecting mirror.
2. The optical coating machine viewing window of claim 1 wherein said actuator includes means for regulating the rotation of said first and second mirrors to cause image light from said windowpane body to be output from the top and/or bottom portion of the chamber of said optical coating machine.
3. The vision window of optical coating machine as claimed in claim 2, wherein said driving mechanism includes a mechanism for regulating the rotation of said first and second mirrors with a rotational axis in a rotational direction parallel to said windowpane body so that image light from the top and/or bottom of the chamber of said optical coating machine is output from said windowpane body.
4. The optical coating machine viewing window of claim 1 wherein said actuator includes means for regulating the rotation of said first and second mirrors to cause the output of regional image light from said windowpane body at the inner peripheral wall of the chamber of said optical coating machine.
5. The vision window of an optical coating machine as claimed in claim 4, wherein said driving mechanism includes means for regulating the rotation of said first and second mirrors with a rotational axis in a direction perpendicular to said windowpane body so that the image light of the region at the inner peripheral wall of the chamber of said optical coating machine is output from said windowpane body.
6. The observation window of an optical coating machine as claimed in claim 1, wherein said transmission mechanism comprises a fixed member, a rotating member and a control member;
first speculum movable mounting in the installing frame includes: the fixed part is connected with the rotating part, the fixed part is fixed relative to the mounting frame, and the rotating part is connected with the first reflecting mirror;
the second reflector movable mounting in the installing frame includes: the fixed piece is connected with the rotating piece, the fixed piece is fixed relative to the mounting frame, and the rotating piece is connected with the second reflecting mirror;
the control piece is used for controlling the rotation angle of the rotating piece.
7. The vision window of an optical coating machine as claimed in claim 6, wherein said rotating member comprises a joint arrangement using a steering engine, said control member being configured to send a control signal to said steering engine.
8. The vision window of an optical coater of claim 1 wherein said image light output from said windowpane body is received by said first mirror and said second mirror from an electron gun crucible of said optical coater.
9. The vision window of an optical coater of claim 1 wherein said image light output from said windowpane body is received by said first mirror and said second mirror from a substrate umbrella of said optical coater.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123270008.4U CN217265995U (en) | 2021-12-23 | 2021-12-23 | Observation window of optical coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123270008.4U CN217265995U (en) | 2021-12-23 | 2021-12-23 | Observation window of optical coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217265995U true CN217265995U (en) | 2022-08-23 |
Family
ID=82889505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202123270008.4U Active CN217265995U (en) | 2021-12-23 | 2021-12-23 | Observation window of optical coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217265995U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114540784A (en) * | 2021-07-14 | 2022-05-27 | 苏州佑伦真空设备科技有限公司 | Wide window of observation angle |
-
2021
- 2021-12-23 CN CN202123270008.4U patent/CN217265995U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114540784A (en) * | 2021-07-14 | 2022-05-27 | 苏州佑伦真空设备科技有限公司 | Wide window of observation angle |
| CN114540784B (en) * | 2021-07-14 | 2023-09-05 | 苏州佑伦真空设备科技有限公司 | Window with wide observation angle |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6081371A (en) | Surgical microscope including a first image and a changing projection position of a second image | |
| CN217265995U (en) | Observation window of optical coating machine | |
| US7394593B2 (en) | Transmitted-light base for a microscope, and method for regulating the illumination intensity of a transmitted-light base | |
| US4834071A (en) | Illuminance controller for light source and endoscope including the same | |
| JP5194169B2 (en) | An optical system that selectively provides either a collimated light beam or a convergent light beam | |
| CH700023B1 (en) | Scanning device. | |
| CN105242689B (en) | A kind of holder tracking vision system based on optical reflection | |
| US20030048530A1 (en) | Microscope having a system for reflecting in illumination | |
| JP2004004169A (en) | Microscope illuminator and microscope system | |
| CN101449962B (en) | Light source apparatus and endoscope apparatus | |
| JP2021193398A (en) | Three-dimensional surveying device | |
| JP3661487B2 (en) | Endoscope observation device | |
| JP2744615B2 (en) | Binocular microscope | |
| WO2016169154A1 (en) | Microscope lens and microscope system comprising microscope lens | |
| JP5616643B2 (en) | Stereomicroscope system | |
| CN102540755A (en) | Exposure apparatus, exposure method, and method of making panel substrate for display | |
| US6600598B1 (en) | Method and apparatus for producing diffracted-light contrast enhancement in microscopes | |
| JP2000199864A (en) | Endoscope illuminator | |
| JP3730934B2 (en) | Surgical microscope | |
| JP5208340B2 (en) | Transmission microscope equipment | |
| US20240151957A1 (en) | Microscopy system and method for operating a microscopy system | |
| US20240077714A1 (en) | Microscopy system and method for operating a microscopy system | |
| WO2019181553A1 (en) | Surgical microscope system | |
| JP2003084208A (en) | Microscope device | |
| JPH0973031A (en) | Movable lens barrel microscope |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |