GB1135331A - Improvements in or relating to apparatus for coating articles by vacuum deposition - Google Patents
Improvements in or relating to apparatus for coating articles by vacuum depositionInfo
- Publication number
- GB1135331A GB1135331A GB915666A GB915666A GB1135331A GB 1135331 A GB1135331 A GB 1135331A GB 915666 A GB915666 A GB 915666A GB 915666 A GB915666 A GB 915666A GB 1135331 A GB1135331 A GB 1135331A
- Authority
- GB
- United Kingdom
- Prior art keywords
- relating
- vacuum deposition
- coating articles
- window
- reflecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/52—Means for observation of the coating process
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
1,135,331. Observation devices. EDWARD WILCOX & CO. Ltd. 16 Feb., 1967 [2 March, 1966], No. 9156/66. Heading F4B. An observation device for a vacuum metal deposition apparatus comprises a window 13 out of the direct path of material given off by a heated source 11, and one or more reflecting surfaces 14, which may be formed by the deposition of metal during use. The window 13 may be arranged at the end of a tube 12 projecting from the chamber wall, or may be screened by a reflecting surface forming part of the optical system (Fig. 2, not shown), or by a non-reflecting baffle (Fig. 3, not shown)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB915666A GB1135331A (en) | 1966-03-02 | 1966-03-02 | Improvements in or relating to apparatus for coating articles by vacuum deposition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB915666A GB1135331A (en) | 1966-03-02 | 1966-03-02 | Improvements in or relating to apparatus for coating articles by vacuum deposition |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1135331A true GB1135331A (en) | 1968-12-04 |
Family
ID=9866484
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB915666A Expired GB1135331A (en) | 1966-03-02 | 1966-03-02 | Improvements in or relating to apparatus for coating articles by vacuum deposition |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB1135331A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108396304A (en) * | 2018-06-05 | 2018-08-14 | 北京铂阳顶荣光伏科技有限公司 | A kind of observation device, evaporation coating device |
CN114540784A (en) * | 2021-07-14 | 2022-05-27 | 苏州佑伦真空设备科技有限公司 | Wide window of observation angle |
-
1966
- 1966-03-02 GB GB915666A patent/GB1135331A/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108396304A (en) * | 2018-06-05 | 2018-08-14 | 北京铂阳顶荣光伏科技有限公司 | A kind of observation device, evaporation coating device |
CN114540784A (en) * | 2021-07-14 | 2022-05-27 | 苏州佑伦真空设备科技有限公司 | Wide window of observation angle |
CN114540784B (en) * | 2021-07-14 | 2023-09-05 | 苏州佑伦真空设备科技有限公司 | Window with wide observation angle |
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