CN113077985A - 反铁电材料体系的mlcc脉冲功率电容器及制备方法 - Google Patents
反铁电材料体系的mlcc脉冲功率电容器及制备方法 Download PDFInfo
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- 239000003990 capacitor Substances 0.000 title claims abstract description 32
- 239000000463 material Substances 0.000 title claims abstract description 30
- 238000002360 preparation method Methods 0.000 title claims abstract description 10
- 239000000919 ceramic Substances 0.000 claims abstract description 18
- 239000010410 layer Substances 0.000 claims description 33
- 239000012528 membrane Substances 0.000 claims description 25
- 239000002356 single layer Substances 0.000 claims description 20
- 238000005245 sintering Methods 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 17
- 238000000498 ball milling Methods 0.000 claims description 15
- 239000000843 powder Substances 0.000 claims description 12
- 238000003825 pressing Methods 0.000 claims description 10
- 238000010345 tape casting Methods 0.000 claims description 9
- 238000010030 laminating Methods 0.000 claims description 8
- 239000002002 slurry Substances 0.000 claims description 8
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 7
- 238000000462 isostatic pressing Methods 0.000 claims description 7
- 239000011812 mixed powder Substances 0.000 claims description 7
- 229910052709 silver Inorganic materials 0.000 claims description 7
- 239000004332 silver Substances 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 238000001035 drying Methods 0.000 claims description 6
- 239000011230 binding agent Substances 0.000 claims description 5
- 239000002994 raw material Substances 0.000 claims description 5
- 238000002156 mixing Methods 0.000 claims description 4
- 238000012216 screening Methods 0.000 claims description 4
- 238000007873 sieving Methods 0.000 claims description 4
- 238000005303 weighing Methods 0.000 claims description 4
- 239000002131 composite material Substances 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 3
- 238000005520 cutting process Methods 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 238000009713 electroplating Methods 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 238000007650 screen-printing Methods 0.000 claims description 2
- 239000011521 glass Substances 0.000 abstract description 14
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 abstract description 10
- 238000002844 melting Methods 0.000 abstract description 10
- 239000004327 boric acid Substances 0.000 abstract description 9
- 230000008018 melting Effects 0.000 abstract description 9
- 238000004146 energy storage Methods 0.000 abstract description 7
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052796 boron Inorganic materials 0.000 abstract description 3
- 239000013078 crystal Substances 0.000 abstract description 3
- 229910052751 metal Inorganic materials 0.000 abstract description 3
- 239000002184 metal Substances 0.000 abstract description 3
- 239000011148 porous material Substances 0.000 abstract description 3
- 230000000052 comparative effect Effects 0.000 description 17
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 9
- 239000002904 solvent Substances 0.000 description 9
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 8
- 239000003989 dielectric material Substances 0.000 description 6
- 239000010936 titanium Substances 0.000 description 6
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 5
- 238000010344 co-firing Methods 0.000 description 5
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 239000002518 antifoaming agent Substances 0.000 description 4
- 239000002270 dispersing agent Substances 0.000 description 4
- 239000012071 phase Substances 0.000 description 4
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 4
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 3
- 238000005266 casting Methods 0.000 description 3
- 239000008367 deionised water Substances 0.000 description 3
- 229910021641 deionized water Inorganic materials 0.000 description 3
- 238000000227 grinding Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical group O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 229910052726 zirconium Inorganic materials 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000007790 solid phase Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 239000004677 Nylon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052810 boron oxide Inorganic materials 0.000 description 1
- 239000003985 ceramic capacitor Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 239000010431 corundum Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000012046 mixed solvent Substances 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 229940071182 stannate Drugs 0.000 description 1
- 125000005402 stannate group Chemical group 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- STCOOQWBFONSKY-UHFFFAOYSA-N tributyl phosphate Chemical group CCCCOP(=O)(OCCCC)OCCCC STCOOQWBFONSKY-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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Abstract
一种反铁电材料体系的MLCC脉冲功率电容器及制备方法,属于电子信息材料与元器件技术领域。该脉冲功率电容器为“介质层/(电极层/介质层)n”多层结构,介质层为(Pb1‑1.5aLaa)(Zr1‑b‑ cSnbTic)O3与H3BO3的复合陶瓷,(Pb1‑1.5aLaa)(Zr1‑b‑cSnbTic)O3的质量百分比99.1~99.9wt%,H3BO3的质量百分比0.1~0.9wt%。本发明通过在反铁电陶瓷中添加硼酸来引入玻璃骨架元素,在高温熔融状态下硼与金属元素生成玻璃相结构,有效填充了晶粒孔隙;同时,自生的玻璃相可以有效助熔,增加陶瓷致密度,进而提升储能密度,降低MLCC的电极成本。
Description
技术领域
本发明属于电子信息材料与元器件技术领域,具体涉及一种反铁电材料体系的MLCC脉冲功率电容器及制备方法。
背景技术
多层陶瓷电容器(简称MLCC),是电子设备中最常见且应用最广泛的无源电子元件之一,具有高容值、小体积、低损耗、高耐压等优异性能。MLCC按工作频段分类,可应用于高频(I类)、低频(II类)和微波频段,因此,不仅在手机、计算机主板、家用电器电路、医疗设备中有广泛应用,在航空航天、军事通信中也具有重要的应用价值。脉冲功率电容是对电源能量进行大量存储,并在特定负载上快速释放,从而获得极大的脉冲功率输出。这一应用特性对电容器介质有极高的要求,需要材料具有超高的储能密度、宽的温度和频率稳定性、快速的放电时间以及较高的充放电循环次数,同时要求储能模块的体积越来越小。
目前,应用广泛的陶瓷介质材料主要有铁电材料(钛酸钡等)、铅基反铁电材料(锆钛酸铅,锆锡酸铅等)以及线性介质(如二氧化钛,钛酸锶等)。而介质陶瓷普遍烧结温度较高,通常需要1250℃以上的高温才能充分结晶,实现致密烧结,而MLCC工艺中介质材料与涂覆的内电极需要一起高温烧结,为减少烧结失配等问题,只能选择一些熔点较高的稀有贵金属钯或铂,或者钯银银浆等作为内电极材料,例如,钯3银浆(即含钯30%的高温银浆)的熔点在1150℃左右。这极大地增加了MLCC的物料成本。因此,如何降低介质陶瓷与电极的共烧温度,是目前亟待解决的问题。为了降低介质陶瓷与电极的共烧问题,目前通常采用的方法是复合低熔点玻璃做助熔剂。但是,玻璃的介电常数通常较低(ε小于10),随着玻璃含量的增多,高温退火或者热处理过程中会析晶,导致陶瓷材料的介电性能恶化。
发明内容
本发明的目的在于,针对背景技术存在的缺陷,提出了一种反铁电材料体系的MLCC脉冲功率电容器及制备方法,有效解决了MLCC工艺中介质材料与内电极共烧温度失配的问题。本发明提供的脉冲功率电容器,通过在反铁电陶瓷中添加硼酸来引入玻璃骨架元素,在高温熔融状态下硼与金属元素生成玻璃相结构,有效填充了晶粒孔隙;同时,自生的玻璃相可以有效助熔,增加陶瓷致密度,进而提升储能密度,降低MLCC的电极成本。
为实现上述目的,本发明采用的技术方案如下:
一种反铁电材料体系的MLCC脉冲功率电容器,其特征在于,所述脉冲功率电容器为“介质层/(电极层/介质层)n”的多层结构,其中n为大于1的正整数;所述介质层为(Pb1-1.5aLaa)(Zr1-b-cSnbTic)O3反铁电陶瓷与H3BO3的复合陶瓷,其中,(Pb1-1.5aLaa)(Zr1-b- cSnbTic)O3的质量百分比为99.1wt%~99.9wt%,H3BO3的质量百分比为0.1wt%~0.9wt%;0<a≤0.02,0<b≤0.48,0<c≤0.06。
进一步地,所述介质层的厚度为85μm~90μm。
进一步地,所述电极层为金、银、铜等,厚度为1μm~5μm。
一种反铁电材料体系的MLCC脉冲功率电容器的制备方法,配合固相烧结法和流延工艺,使得玻璃骨架元素与铅基介质材料均匀固溶,来达到降低共烧温度的目的,其特征在于,包括以下步骤:
步骤1、按照“(Pb1-1.5aLaa)(Zr1-b-cSnbTic)O3的质量百分比为99.1wt%~99.9wt%,H3BO3的质量百分比为0.1wt%~0.9wt%”的比例称取各原料,混料,得到混合粉料;其中,0<a≤0.02,0<b≤0.48,0<c≤0.06;
步骤2、将步骤1得到的混合粉料加入球磨罐中,粉料:溶剂:锆球的质量比为1:1:2,进行一次球磨3~5h;
步骤3、将步骤2得到的一次球磨料烘干、过筛后,进行预烧,预烧温度为850~900℃,时间为2~3h;
步骤4、将步骤3得到的预烧料进行二次球磨,烘干,过筛,得到待流延粉料;
步骤5、将步骤4得到的待流延粉料和溶剂加入卧式滚动球磨机中,球磨16~24h,随后加入粘结剂,继续球磨16~24h,得到待流延浆料;其中,待流延粉料、溶剂和粘结剂的质量比为4:2:1;
步骤6、采用流延机制备出20μm~30μm的单层膜片,并筛选无明显暗纹的膜片,因单层膜片过薄无法承受高压,将4张单层膜片通过层叠机压制为1层,作为MLCC电容器的一层介质层,介质层厚度为85μm~90μm;
步骤7、在步骤6得到的膜片上涂覆电极、层叠,得到“介质层/(电极层/介质层)n”的多层结构,通过层压机干压后,裁剪,经等静压处理,得到生坯样品;
步骤8、将步骤7得到多层电容器生坯样品在1070~1250℃的温度下烧结0.5~1h,烧结结束后,自然冷却至室温,取出,涂端、烧银、电镀,即可得到所述MLCC脉冲功率电容器。
进一步地,步骤2中,所述溶剂为去离子水或乙醇。
进一步地,步骤3中,升温速率为1℃/min~3℃/min。
进一步地,步骤5中,所述溶剂包括甲苯、乙醇、消泡剂和分散剂,甲苯、乙醇、消泡剂和分散剂的质量比为48:32:1:1.5,消泡剂为乳化硅油,分散剂为磷酸三丁酯;所述粘结剂为PVB(聚乙烯醇缩丁醛酯),质量分数为3%。
进一步地,步骤6中,压制处理的压强为20~30MPa,保压时间为30~60s。
进一步地,步骤7中,干压处理的压强为20~30MPa,保压时间为30~60s;等静压处理的温度为60~70℃,压力为12000~15000psi,保压时间为10~20min。
进一步地,步骤7中,涂覆的电极层厚度为1~5μm,采用丝网印刷制得。
与现有技术相比,本发明的有益效果为:
本发明提供的一种反铁电材料体系的MLCC脉冲功率电容器,通过在反铁电陶瓷中添加硼酸来引入玻璃骨架元素,在高温熔融状态下硼与金属元素生成玻璃相结构,有效填充了晶粒孔隙;同时,自生的玻璃相可以有效助熔,增加陶瓷致密度,进而提升储能密度,降低MLCC的电极成本。
附图说明
图1为对比例(a)和实施例1(b)得到的单层膜片经烧结后得到的样品的表面形貌;
图2为对比例、实施例1和实施例2得到的单层膜片经烧结后得到的样品的电滞回线对比曲线;
图3为对比例(a)和实施例2(b)得到的单层膜片经烧结后得到的样品的表面形貌;
图4为对比例、实施例3和实施例4得到的单层膜片经烧结后得到的样品的电滞回线对比曲线。
具体实施方式
下面结合附图和实施例,详述本发明的技术方案。
实施例1
一种反铁电材料体系的MLCC脉冲功率电容器的制备方法,配合固相烧结法和流延工艺,使得玻璃骨架元素与铅基介质材料均匀固溶,来达到降低共烧温度的目的,其特征在于,包括以下步骤:
步骤1、按照“(Pb0.97La0.02)(Zr0.46Sn0.48Ti0.06)O3的质量百分比为99.31wt%,H3BO3的质量百分比为0.69wt%”的比例称取各原料PbO、La2O3、ZrO2、SnO2、TiO2、H3BO3,混料,得到混合粉料;
步骤2、将步骤1得到的混合粉料加入球磨罐中,粉料:去离子水:锆球的质量比为1:1:2,进行一次球磨4h;
步骤3、将步骤2得到的一次球磨料在90℃烘干、过筛后,装入刚玉坩埚中进行预烧处理,预烧温度为850℃,时间为2h,升温速率为3℃/min;
步骤4、预烧结束后,将粉料再次倒入尼龙罐,以相同的溶剂、球配比及球磨参数进行二次球磨(粉料:去离子水:锆球的质量比为1:1:2,时间4h),得到的浆料烘干、玛瑙研钵中研磨均匀后,过100目筛,得到待流延粉料;以上步骤是为了完成陶瓷的初步结晶,防止后续过程中铅的过渡挥发导致组分不均匀;
步骤5、将步骤4得到的待流延粉料和溶剂加入卧式滚动球磨机中,球磨16h,随后加入粘结剂PVB,继续球磨24h,得到待流延浆料;其中,待流延粉料、溶剂和粘结剂的质量比为4:2:1,溶剂为甲苯、乙醇、消泡剂和分散剂的混合溶剂,质量比为48:32:1:1.5;
步骤6、采用流延机制备出30μm的单层膜片,并筛选无明显暗纹的膜片;根据工程经验,流延浆料的粒径不能超过单层膜片厚度的十分之一,本实施例中浆料的平均粒径为1.5μm,故可以流延单层厚度为30μm的膜片;因单层膜片过薄无法承受高压,将4张单层膜片通过层叠机压制为1层,作为MLCC电容器的一层介质层;
步骤7、在步骤6得到的膜片上涂覆电极、层叠,得到“介质层/(电极层/介质层)5”的多层结构,通过层压机在30MPa的压强下干压30s后,根据版图进行切割,再经等静压处理,得到生坯样品,等静压处理的温度为60℃,压强为12000psi,保压时间为10min;等静压的目的是为了消除两层膜片的界面空隙,降低界面缺陷浓度;
步骤8、将步骤7得到的多层电容器生坯样品在1070℃的温度下烧结0.5h,烧结结束后,自然冷却至室温,取出,再经过涂覆端电极、焊接引线作为电容器的两极,即可得到所述MLCC脉冲功率电容器。因反铁电陶瓷介质一般为绝缘物质,需要外涂850℃熔点的高温银浆作电极,来进行高压测试。
实施例2
本实施例与实施例1相比,区别在于:步骤8中,烧结温度调整为1250℃。其余步骤与实施例1相同。
实施例3
本实施例与实施例1相比,区别在于:步骤1中,按照“(Pb0.97La0.02)(Zr0.46Sn0.48Ti0.06)O3的质量百分比为99.14wt%,H3BO3的质量百分比为0.86wt%”的比例称取各原料。其余步骤与实施例1相同。
实施例4
本实施例与实施例3相比,区别在于:步骤8中,烧结温度调整为1250℃。其余步骤与实施例3相同。
对比例
对比例与实施例1相比,区别在于:步骤1中,按照(Pb0.97La0.02)(Zr0.46Sn0.48Ti0.06)O3中各元素的比例称取各原料PbO、La2O3、ZrO2、SnO2、TiO2,混料,得到混合粉料。其余步骤与实施例1相同。
图1为对比例和实施例1得到的单层膜片经烧结后得到的样品的表面形貌;其中,(a)为对比例得到的单层膜片经烧结后得到的样品的表面形貌,(b)为实施例1单层膜片经烧结后得到的样品的表面形貌。由图1可知,对比例未添加硼酸的样品,表面和基体中孔隙率较高;而实施例1添加硼酸后,由于硼酸高温过程会分解为氧化硼,抑制了陶瓷晶粒的异常长大,使得陶瓷致密度变高。
图2为对比例(a)、实施例1(b)和实施例2(c)得到的单层膜片经烧结后得到的样品的电滞回线对比曲线;由图2可知,实施例1降低烧结温度后,储能密度仍能达到2.15J/cm3,是未添加硼酸(对比例)储能密度的2.5倍。表明,本发明方可以有效改善MLCC介质材料与涂覆的内电极烧结温度失配问题,进而降低MLCC电极成本。
图3为对比例(a)和实施例3(b)得到的单层膜片经烧结后得到的样品的表面形貌;由图3可知,实施例3添加硼酸后的样品的致密度变高。
图4为对比例(a)、实施例3(b)和实施例4(c)得到的单层膜片经烧结后得到的样品的电滞回线对比曲线。实施例3降低烧结温度后,储能密度仍能达到1.89J/cm3,是未添加硼酸(对比例)储能密度的2.2倍。
Claims (7)
1.一种反铁电材料体系的MLCC脉冲功率电容器,其特征在于,所述脉冲功率电容器为“介质层/(电极层/介质层)n”的多层结构,其中n为大于1的正整数;所述介质层为(Pb1- 1.5aLaa)(Zr1-b-cSnbTic)O3反铁电陶瓷与H3BO3的复合陶瓷,其中,(Pb1-1.5aLaa)(Zr1-b-cSnbTic)O3的质量百分比为99.1wt%~99.9wt%,H3BO3的质量百分比为0.1wt%~0.9wt%;0<a≤0.02,0<b≤0.48,0<c≤0.06。
2.根据权利要求1所述的反铁电材料体系的MLCC脉冲功率电容器,其特征在于,所述介质层的厚度为85μm~90μm。
3.根据权利要求1所述的反铁电材料体系的MLCC脉冲功率电容器,其特征在于,所述电极层为金、银或铜,厚度为1μm~5μm。
4.一种反铁电材料体系的MLCC脉冲功率电容器的制备方法,其特征在于,包括以下步骤:
步骤1、按照“(Pb1-1.5aLaa)(Zr1-b-cSnbTic)O3的质量百分比为99.1wt%~99.9wt%,H3BO3的质量百分比为0.1wt%~0.9wt%”的比例称取各原料,混料,得到混合粉料;其中,0<a≤0.02,0<b≤0.48,0<c≤0.06;
步骤2、将步骤1得到的混合粉料进行一次球磨3~5h;
步骤3、将步骤2得到的一次球磨料烘干、过筛后,进行预烧,预烧温度为850~900℃,时间为2~3h;
步骤4、将步骤3得到的预烧料进行二次球磨,烘干,过筛,得到待流延粉料;
步骤5、将步骤4得到的待流延粉料球磨16~24h,随后加入粘结剂,继续球磨16~24h,得到待流延浆料;
步骤6、制备20μm~30μm的单层膜片,并将4张单层膜片压制为1层,作为MLCC电容器的介质层;
步骤7、在步骤6得到的膜片上涂覆电极、层叠,得到“介质层/(电极层/介质层)n”的多层结构,通过层压机干压后,裁剪,经等静压处理,得到生坯样品;
步骤8、将步骤7得到的生坯样品在1070~1250℃的温度下烧结0.5~1h,烧结结束后,自然冷却至室温,取出,涂端、烧银、电镀,即可得到所述MLCC脉冲功率电容器。
5.根据权利要求4所述的反铁电材料体系的MLCC脉冲功率电容器的制备方法,其特征在于,步骤6中,压制处理的压强为20~30MPa,保压时间为30~60s。
6.根据权利要求4所述的反铁电材料体系的MLCC脉冲功率电容器的制备方法,其特征在于,步骤7中,干压处理的压强为20~30MPa,保压时间为30~60s;等静压处理的温度为60~70℃,压力为12000~15000psi,保压时间为10~20min。
7.根据权利要求4所述的反铁电材料体系的MLCC脉冲功率电容器的制备方法,其特征在于,涂覆的电极层厚度为1~5μm,采用丝网印刷制得。
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CN115894019A (zh) * | 2022-12-13 | 2023-04-04 | 西安交通大学 | 一种反铁电陶瓷材料及其低温烧结制备方法 |
CN115894019B (zh) * | 2022-12-13 | 2023-09-22 | 西安交通大学 | 一种反铁电陶瓷材料及其低温烧结制备方法 |
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