CN112811912B - 一种高性能氮化硅陶瓷基片的批量化烧结方法 - Google Patents

一种高性能氮化硅陶瓷基片的批量化烧结方法 Download PDF

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CN112811912B
CN112811912B CN202110075093.4A CN202110075093A CN112811912B CN 112811912 B CN112811912 B CN 112811912B CN 202110075093 A CN202110075093 A CN 202110075093A CN 112811912 B CN112811912 B CN 112811912B
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silicon nitride
powder
sintering method
nitride ceramic
ceramic substrate
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CN112811912A (zh
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张辉
刘学建
蒋金弟
姚秀敏
黄政仁
陈忠明
黄健
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Shanghai Institute of Ceramics of CAS
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Shanghai Institute of Ceramics of CAS
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Priority to PCT/CN2022/072351 priority patent/WO2022156635A1/zh
Priority to EP22742114.6A priority patent/EP4282844A4/en
Priority to JP2023543223A priority patent/JP7627769B2/ja
Priority to US18/261,180 priority patent/US12466772B2/en
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CN202110075093.4A 2021-01-20 2021-01-20 一种高性能氮化硅陶瓷基片的批量化烧结方法 Active CN112811912B (zh)

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Application Number Priority Date Filing Date Title
CN202110075093.4A CN112811912B (zh) 2021-01-20 2021-01-20 一种高性能氮化硅陶瓷基片的批量化烧结方法
PCT/CN2022/072351 WO2022156635A1 (zh) 2021-01-20 2022-01-17 一种高性能氮化硅陶瓷基片的批量化烧结方法
EP22742114.6A EP4282844A4 (en) 2021-01-20 2022-01-17 Batch sintering method for high-performance silicon nitride ceramic substrate
JP2023543223A JP7627769B2 (ja) 2021-01-20 2022-01-17 高性能窒化ケイ素セラミック基板のバッチ焼結方法
US18/261,180 US12466772B2 (en) 2021-01-20 2022-01-17 Batch sintering method for high-property silicon nitride ceramic substrate

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CN112811912B (zh) * 2021-01-20 2021-11-02 中国科学院上海硅酸盐研究所 一种高性能氮化硅陶瓷基片的批量化烧结方法
CN113463198A (zh) * 2021-06-17 2021-10-01 江苏富乐德半导体科技有限公司 一种氮化硅陶瓷制备方法
CN113620716B (zh) * 2021-09-02 2022-11-29 北京中材人工晶体研究院有限公司 一种氮化硅陶瓷基板及其制备方法
CN114044682A (zh) * 2021-11-29 2022-02-15 上海材料研究所 一种水基浆料凝胶注模成型制备高导热氮化硅陶瓷的方法
CN114951653A (zh) * 2022-05-26 2022-08-30 南京泉峰汽车精密技术股份有限公司 薄片螺旋结构mim件脱脂烧结工艺
CN115611637B (zh) * 2022-08-19 2023-10-27 江苏方达正塬电子材料科技有限公司 一种隔离粉及其制备方法
CN115259864A (zh) * 2022-09-26 2022-11-01 江苏富乐华功率半导体研究院有限公司 一种电子陶瓷坯体的排胶方法
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CN119241255A (zh) * 2024-09-30 2025-01-03 江苏海古德半导体科技有限公司 一种高导热氮化硅陶瓷坯体的排胶工艺
CN119191853B (zh) * 2024-09-30 2025-06-27 江苏富乐华功率半导体研究院有限公司 一种超高导热氮化硅瓷片的制备方法

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5122486A (en) * 1988-02-22 1992-06-16 Ngk Spark Plug Co., Ltd. Method of producing silicon-nitride-based sintered body
US6013357A (en) * 1996-08-27 2000-01-11 Dowa Mining Co., Ltd. Power module circuit board and a process for the manufacture thereof
JP2002053376A (ja) * 2000-08-08 2002-02-19 Toyota Central Res & Dev Lab Inc 窒化ケイ素セラミックスの焼結方法
CN1522986A (zh) * 2003-09-03 2004-08-25 华南理工大学 一种提高氮化硅陶瓷抗氧化性能的表面改性方法
JP2012218983A (ja) * 2011-04-11 2012-11-12 Hitachi Metals Ltd 窒化珪素質セラミックス焼結体の製造方法および焼成容器
CN102795860A (zh) * 2012-07-11 2012-11-28 北京中材人工晶体研究院有限公司 一种氮化硅陶瓷球的制备方法
CN104016694A (zh) * 2014-06-18 2014-09-03 北京中材人工晶体研究院有限公司 一种异形陶瓷的制备方法
CN106518089A (zh) * 2016-11-25 2017-03-22 中国工程物理研究院材料研究所 一种高性能大尺寸氮化硅陶瓷材料的制备方法
CN108495831A (zh) * 2016-03-28 2018-09-04 日立金属株式会社 氮化硅烧结基板、氮化硅烧结基板片、回路基板和氮化硅烧结基板的制造方法
CN109987944A (zh) * 2019-03-06 2019-07-09 清华大学 一种高导热氮化硅陶瓷基板及其制备方法
CN110818428A (zh) * 2019-12-03 2020-02-21 清华大学 一种共晶增强增韧氮化硅陶瓷的制备方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5945970A (ja) * 1982-08-31 1984-03-15 住友電気工業株式会社 窒化硅素の焼結方法
JP5339214B2 (ja) * 2010-03-01 2013-11-13 日立金属株式会社 窒化珪素基板の製造方法および窒化珪素基板
JP5673847B2 (ja) * 2011-10-11 2015-02-18 日立金属株式会社 窒化珪素基板および窒化珪素基板の製造方法
KR101751531B1 (ko) 2014-03-31 2017-06-27 니혼 파인 세라믹스 가부시키가이샤 질화 규소 기판 제조방법
JP7062229B2 (ja) * 2018-06-07 2022-05-06 Ｕｂｅ株式会社 板状の窒化ケイ素質焼結体およびその製造方法
CN112912356B (zh) 2018-11-01 2023-05-02 Ube 株式会社 氮化硅基板的制造方法以及氮化硅基板
CN112811912B (zh) * 2021-01-20 2021-11-02 中国科学院上海硅酸盐研究所 一种高性能氮化硅陶瓷基片的批量化烧结方法

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5122486A (en) * 1988-02-22 1992-06-16 Ngk Spark Plug Co., Ltd. Method of producing silicon-nitride-based sintered body
US6013357A (en) * 1996-08-27 2000-01-11 Dowa Mining Co., Ltd. Power module circuit board and a process for the manufacture thereof
JP2002053376A (ja) * 2000-08-08 2002-02-19 Toyota Central Res & Dev Lab Inc 窒化ケイ素セラミックスの焼結方法
CN1522986A (zh) * 2003-09-03 2004-08-25 华南理工大学 一种提高氮化硅陶瓷抗氧化性能的表面改性方法
JP2012218983A (ja) * 2011-04-11 2012-11-12 Hitachi Metals Ltd 窒化珪素質セラミックス焼結体の製造方法および焼成容器
CN102795860A (zh) * 2012-07-11 2012-11-28 北京中材人工晶体研究院有限公司 一种氮化硅陶瓷球的制备方法
CN104016694A (zh) * 2014-06-18 2014-09-03 北京中材人工晶体研究院有限公司 一种异形陶瓷的制备方法
CN108495831A (zh) * 2016-03-28 2018-09-04 日立金属株式会社 氮化硅烧结基板、氮化硅烧结基板片、回路基板和氮化硅烧结基板的制造方法
CN106518089A (zh) * 2016-11-25 2017-03-22 中国工程物理研究院材料研究所 一种高性能大尺寸氮化硅陶瓷材料的制备方法
CN109987944A (zh) * 2019-03-06 2019-07-09 清华大学 一种高导热氮化硅陶瓷基板及其制备方法
CN110818428A (zh) * 2019-12-03 2020-02-21 清华大学 一种共晶增强增韧氮化硅陶瓷的制备方法

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
Elimination of grain boundaries and its effect on the properties of silicon nitride ceramics;Feng Hu et.al;《Ceramics International》;20200204;12606-12612 *
氮化硅陶瓷的制备及性能研究进展;王会阳 等;《江苏陶瓷》;20111231;4-7 *
高导热氮化硅陶瓷基板材料研究现状;郑彧 等;《真空电子技术》;20181231;13-17 *
高性能氮化硅陶瓷的制备与应用新进展;吴庆文 等;《陶瓷学报》;20180228;13-19 *

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