CN112747598B - 热处理装置 - Google Patents

热处理装置 Download PDF

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Publication number
CN112747598B
CN112747598B CN202010138731.8A CN202010138731A CN112747598B CN 112747598 B CN112747598 B CN 112747598B CN 202010138731 A CN202010138731 A CN 202010138731A CN 112747598 B CN112747598 B CN 112747598B
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CN
China
Prior art keywords
door
tube
pipe
opening
adapter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202010138731.8A
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English (en)
Chinese (zh)
Other versions
CN112747598A (zh
Inventor
中西裕也
辻本洋平
西冈昌浩
青栁圭太
中窪尚生
笠次克尚
浅野真
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JTEKT Thermo Systems Corp
Original Assignee
Koyo Thermo Systems Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koyo Thermo Systems Co Ltd filed Critical Koyo Thermo Systems Co Ltd
Publication of CN112747598A publication Critical patent/CN112747598A/zh
Application granted granted Critical
Publication of CN112747598B publication Critical patent/CN112747598B/zh
Active legal-status Critical Current
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00—Furnaces of a kind not covered by any preceding group
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00—Furnaces of a kind not covered by any preceding group
    • F27B17/0016—Chamber type furnaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D1/00—Casings; Linings; Walls; Roofs
    • F27D1/18—Door frames; Doors, lids, removable covers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D1/00—Casings; Linings; Walls; Roofs
    • F27D1/18—Door frames; Doors, lids, removable covers
    • F27D1/1858—Doors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D9/00—Cooling of furnaces or of charges therein
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D9/00—Cooling of furnaces or of charges therein
    • F27D2009/0002—Cooling of furnaces
    • F27D2009/001—Cooling of furnaces the cooling medium being a fluid other than a gas
    • F27D2009/0013—Cooling of furnaces the cooling medium being a fluid other than a gas the fluid being water

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Furnace Housings, Linings, Walls, And Ceilings (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
  • Furnace Details (AREA)
  • Heat Treatment Of Articles (AREA)
CN202010138731.8A 2019-10-31 2020-03-03 热处理装置 Active CN112747598B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019-199263 2019-10-31
JP2019199263A JP7339853B2 (ja) 2019-10-31 2019-10-31 熱処理装置

Publications (2)

Publication Number Publication Date
CN112747598A CN112747598A (zh) 2021-05-04
CN112747598B true CN112747598B (zh) 2022-06-28

Family

ID=75645228

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010138731.8A Active CN112747598B (zh) 2019-10-31 2020-03-03 热处理装置

Country Status (4)

Country Link
JP (1) JP7339853B2 (ja)
KR (1) KR20210052142A (ja)
CN (1) CN112747598B (ja)
TW (1) TWI754910B (ja)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202254840U (zh) * 2011-12-15 2012-05-30 Ngk（苏州）精细陶瓷器具有限公司 气氛烧结炉的门结构
TW201411726A (zh) * 2012-09-10 2014-03-16 Koyo Thermo Sys Co Ltd 熱處理裝置
JP2014053550A (ja) * 2012-09-10 2014-03-20 Koyo Thermo System Kk 熱処理装置
CN104195300A (zh) * 2014-09-16 2014-12-10 苏州中门子科技有限公司 一种钢管的热处理系统及方法
CN104835760A (zh) * 2014-02-10 2015-08-12 光洋热系统株式会社 热处理装置
TW201911417A (zh) * 2017-07-27 2019-03-16 日商斯庫林集團股份有限公司 熱處理裝置之排氣方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH086722Y2 (ja) * 1990-04-18 1996-02-28 株式会社日阪製作所 容器用蓋の開閉装置
JP2995845B2 (ja) * 1990-10-17 1999-12-27 石川島播磨重工業株式会社 マッフル炉
JP2009162432A (ja) * 2008-01-08 2009-07-23 Nec Corp 加熱炉
JP5606174B2 (ja) * 2010-01-27 2014-10-15 株式会社日立国際電気 基板処理装置、基板処理方法、半導体装置の製造方法および反応室の閉塞方法。
JP5779957B2 (ja) * 2011-04-20 2015-09-16 東京エレクトロン株式会社 ローディングユニット及び処理システム
CN202830081U (zh) * 2012-02-24 2013-03-27 南京金陵节能电炉有限公司 箱式保护气氛退火炉
JP6208588B2 (ja) * 2014-01-28 2017-10-04 東京エレクトロン株式会社 支持機構及び基板処理装置
JP7386045B2 (ja) * 2019-10-31 2023-11-24 株式会社ジェイテクトサーモシステム 熱処理装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202254840U (zh) * 2011-12-15 2012-05-30 Ngk（苏州）精细陶瓷器具有限公司 气氛烧结炉的门结构
TW201411726A (zh) * 2012-09-10 2014-03-16 Koyo Thermo Sys Co Ltd 熱處理裝置
JP2014053550A (ja) * 2012-09-10 2014-03-20 Koyo Thermo System Kk 熱処理装置
CN104835760A (zh) * 2014-02-10 2015-08-12 光洋热系统株式会社 热处理装置
CN104195300A (zh) * 2014-09-16 2014-12-10 苏州中门子科技有限公司 一种钢管的热处理系统及方法
TW201911417A (zh) * 2017-07-27 2019-03-16 日商斯庫林集團股份有限公司 熱處理裝置之排氣方法

Also Published As

Publication number Publication date
KR20210052142A (ko) 2021-05-10
TW202118990A (zh) 2021-05-16
TWI754910B (zh) 2022-02-11
JP7339853B2 (ja) 2023-09-06
CN112747598A (zh) 2021-05-04
JP2021071259A (ja) 2021-05-06

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