CN112687647A - 倒装芯片结构及其制备方法 - Google Patents
倒装芯片结构及其制备方法 Download PDFInfo
- Publication number
- CN112687647A CN112687647A CN202011578844.6A CN202011578844A CN112687647A CN 112687647 A CN112687647 A CN 112687647A CN 202011578844 A CN202011578844 A CN 202011578844A CN 112687647 A CN112687647 A CN 112687647A
- Authority
- CN
- China
- Prior art keywords
- bump
- metal
- layer
- seed layer
- chip structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002360 preparation method Methods 0.000 title claims abstract description 11
- 239000002184 metal Substances 0.000 claims abstract description 99
- 229910052751 metal Inorganic materials 0.000 claims abstract description 99
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 28
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 238000009713 electroplating Methods 0.000 claims abstract description 12
- 238000004140 cleaning Methods 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims description 17
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 16
- 238000002161 passivation Methods 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 11
- 229910052802 copper Inorganic materials 0.000 claims description 11
- 239000010949 copper Substances 0.000 claims description 11
- 239000010931 gold Substances 0.000 claims description 9
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 8
- 229910052737 gold Inorganic materials 0.000 claims description 8
- 229910052759 nickel Inorganic materials 0.000 claims description 8
- 238000007747 plating Methods 0.000 abstract description 15
- 238000009792 diffusion process Methods 0.000 abstract description 7
- 230000002159 abnormal effect Effects 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- ZBTDWLVGWJNPQM-UHFFFAOYSA-N [Ni].[Cu].[Au] Chemical compound [Ni].[Cu].[Au] ZBTDWLVGWJNPQM-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 125000004093 cyano group Chemical group *C#N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/60—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Electroplating Methods And Accessories (AREA)
- Wire Bonding (AREA)
Abstract
Description
Claims (10)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011578844.6A CN112687647A (zh) | 2020-12-28 | 2020-12-28 | 倒装芯片结构及其制备方法 |
PCT/CN2021/132273 WO2022142865A1 (zh) | 2020-12-28 | 2021-11-23 | 倒装芯片结构及其制备方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011578844.6A CN112687647A (zh) | 2020-12-28 | 2020-12-28 | 倒装芯片结构及其制备方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN112687647A true CN112687647A (zh) | 2021-04-20 |
Family
ID=75452651
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202011578844.6A Pending CN112687647A (zh) | 2020-12-28 | 2020-12-28 | 倒装芯片结构及其制备方法 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN112687647A (zh) |
WO (1) | WO2022142865A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022142865A1 (zh) * | 2020-12-28 | 2022-07-07 | 颀中科技(苏州)有限公司 | 倒装芯片结构及其制备方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07211722A (ja) * | 1994-01-26 | 1995-08-11 | Toshiba Corp | 半導体装置及び半導体装置実装構造体 |
CN101388374A (zh) * | 2007-09-10 | 2009-03-18 | 欣兴电子股份有限公司 | 芯片封装载板及其凸块焊盘结构 |
CN105355574A (zh) * | 2015-11-13 | 2016-02-24 | 颀中科技(苏州)有限公司 | 镍金凸块的制作方法及镍金凸块组件 |
CN109979834A (zh) * | 2019-03-29 | 2019-07-05 | 颀中科技(苏州)有限公司 | 用于半导体封装的凸块制造方法 |
CN112017978A (zh) * | 2020-08-26 | 2020-12-01 | 颀中科技(苏州)有限公司 | 一种芯片金属凸块的成型方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002261111A (ja) * | 2001-03-06 | 2002-09-13 | Texas Instr Japan Ltd | 半導体装置及びバンプ形成方法 |
CN112687647A (zh) * | 2020-12-28 | 2021-04-20 | 颀中科技(苏州)有限公司 | 倒装芯片结构及其制备方法 |
-
2020
- 2020-12-28 CN CN202011578844.6A patent/CN112687647A/zh active Pending
-
2021
- 2021-11-23 WO PCT/CN2021/132273 patent/WO2022142865A1/zh active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07211722A (ja) * | 1994-01-26 | 1995-08-11 | Toshiba Corp | 半導体装置及び半導体装置実装構造体 |
CN101388374A (zh) * | 2007-09-10 | 2009-03-18 | 欣兴电子股份有限公司 | 芯片封装载板及其凸块焊盘结构 |
CN105355574A (zh) * | 2015-11-13 | 2016-02-24 | 颀中科技(苏州)有限公司 | 镍金凸块的制作方法及镍金凸块组件 |
CN109979834A (zh) * | 2019-03-29 | 2019-07-05 | 颀中科技(苏州)有限公司 | 用于半导体封装的凸块制造方法 |
CN112017978A (zh) * | 2020-08-26 | 2020-12-01 | 颀中科技(苏州)有限公司 | 一种芯片金属凸块的成型方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022142865A1 (zh) * | 2020-12-28 | 2022-07-07 | 颀中科技(苏州)有限公司 | 倒装芯片结构及其制备方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2022142865A1 (zh) | 2022-07-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB02 | Change of applicant information | ||
CB02 | Change of applicant information |
Address after: 215000 No.166, Fengli street, Suzhou Industrial Park, Jiangsu Province Applicant after: CHIPMORE TECHNOLOGY Corp.,Ltd. Applicant after: Hefei Qizhong Sealing Technology Co.,Ltd. Address before: 215000 No.166, Fengli street, Suzhou Industrial Park, Jiangsu Province Applicant before: CHIPMORE TECHNOLOGY Corp.,Ltd. Applicant before: Hefei yisiwei sealing and Testing Technology Co.,Ltd. |
|
CB02 | Change of applicant information | ||
CB02 | Change of applicant information |
Address after: 215000 No.166, Fengli street, Suzhou Industrial Park, Jiangsu Province Applicant after: CHIPMORE TECHNOLOGY Corp.,Ltd. Applicant after: Hefei Qizhong Technology Co., Ltd Address before: 215000 No.166, Fengli street, Suzhou Industrial Park, Jiangsu Province Applicant before: CHIPMORE TECHNOLOGY Corp.,Ltd. Applicant before: Hefei Qizhong sealing and Testing Technology Co., Ltd |