CN112514038B - 涂布装置及涂布方法 - Google Patents

涂布装置及涂布方法 Download PDF

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Publication number
CN112514038B
CN112514038B CN201980051182.6A CN201980051182A CN112514038B CN 112514038 B CN112514038 B CN 112514038B CN 201980051182 A CN201980051182 A CN 201980051182A CN 112514038 B CN112514038 B CN 112514038B
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CN
China
Prior art keywords
nozzle
processing chamber
internal pressure
solution
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201980051182.6A
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English (en)
Chinese (zh)
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CN112514038A (zh
Inventor
五十川良则
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tazmo Co Ltd
Original Assignee
Tazmo Co Ltd
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Publication date
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Publication of CN112514038A publication Critical patent/CN112514038A/zh
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C15/00—Enclosures for apparatus; Booths
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/12—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by mechanical means
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B7/00—Single-crystal growth from solutions using solvents which are liquid at normal temperature, e.g. aqueous solutions
    • C30B7/02—Single-crystal growth from solutions using solvents which are liquid at normal temperature, e.g. aqueous solutions by evaporation of the solvent

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
CN201980051182.6A 2018-09-12 2019-08-29 涂布装置及涂布方法 Active CN112514038B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2018-170186 2018-09-12
JP2018170186A JP7112917B2 (ja) 2018-09-12 2018-09-12 塗布装置及び塗布方法
PCT/JP2019/033840 WO2020054440A1 (ja) 2018-09-12 2019-08-29 塗布装置及び塗布方法

Publications (2)

Publication Number Publication Date
CN112514038A CN112514038A (zh) 2021-03-16
CN112514038B true CN112514038B (zh) 2024-02-13

Family

ID=69777572

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201980051182.6A Active CN112514038B (zh) 2018-09-12 2019-08-29 涂布装置及涂布方法

Country Status (4)

Country Link
JP (1) JP7112917B2 (ja)
CN (1) CN112514038B (ja)
TW (1) TWI726414B (ja)
WO (1) WO2020054440A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI762153B (zh) * 2021-01-15 2022-04-21 陽程科技股份有限公司 塗佈頭塗層厚度控制之微調機構

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007134434A (ja) * 2005-11-09 2007-05-31 Tokyo Electron Ltd 塗布膜の成膜方法及びその装置
JP2007264187A (ja) * 2006-03-28 2007-10-11 Toppan Printing Co Ltd 塗布装置および塗布方法
KR20110058573A (ko) * 2009-11-26 2011-06-01 세메스 주식회사 건조 유닛을 포함하는 기판 처리 장치 및 이를 이용한 기판 처리 방법
CN102387869A (zh) * 2009-06-08 2012-03-21 中外炉工业株式会社 涂布装置、涂布方法及电子器件
JP2014053587A (ja) * 2012-08-09 2014-03-20 Denso Corp 有機半導体薄膜の製造方法、それを適用した有機半導体装置の製造方法および有機半導体装置
CN103903959A (zh) * 2012-12-26 2014-07-02 大日本网屏制造株式会社 减压干燥装置以及减压干燥方法
JP2014135393A (ja) * 2013-01-10 2014-07-24 Denso Corp 有機材料塗布装置およびその装置を用いた有機材料塗布方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005211734A (ja) 2004-01-28 2005-08-11 Toppan Printing Co Ltd 有機材料塗布装置及びその装置を用いた有機材料塗布方法
JP6498006B2 (ja) * 2015-03-25 2019-04-10 株式会社Ｓｃｒｅｅｎホールディングス 塗布方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007134434A (ja) * 2005-11-09 2007-05-31 Tokyo Electron Ltd 塗布膜の成膜方法及びその装置
JP2007264187A (ja) * 2006-03-28 2007-10-11 Toppan Printing Co Ltd 塗布装置および塗布方法
CN102387869A (zh) * 2009-06-08 2012-03-21 中外炉工业株式会社 涂布装置、涂布方法及电子器件
KR20110058573A (ko) * 2009-11-26 2011-06-01 세메스 주식회사 건조 유닛을 포함하는 기판 처리 장치 및 이를 이용한 기판 처리 방법
JP2014053587A (ja) * 2012-08-09 2014-03-20 Denso Corp 有機半導体薄膜の製造方法、それを適用した有機半導体装置の製造方法および有機半導体装置
CN103903959A (zh) * 2012-12-26 2014-07-02 大日本网屏制造株式会社 减压干燥装置以及减压干燥方法
JP2014135393A (ja) * 2013-01-10 2014-07-24 Denso Corp 有機材料塗布装置およびその装置を用いた有機材料塗布方法

Also Published As

Publication number Publication date
WO2020054440A1 (ja) 2020-03-19
JP2020043244A (ja) 2020-03-19
TW202030803A (zh) 2020-08-16
CN112514038A (zh) 2021-03-16
TWI726414B (zh) 2021-05-01
JP7112917B2 (ja) 2022-08-04

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