CN112391614B

CN112391614B - Boat transportation structure

Info

Publication number: CN112391614B
Application number: CN202011260511.9A
Authority: CN
Inventors: 甘新荣; 林佳继; 刘群; 朱太荣; 林依婷
Original assignee: Shenzhen Laplace Energy Technology Co Ltd
Current assignee: Laplace New Energy Technology Co ltd
Priority date: 2019-10-23
Filing date: 2019-10-23
Publication date: 2022-12-06
Anticipated expiration: 2039-10-23
Also published as: CN112391615A; CN110904439A; CN110904439B; CN112391614A

Abstract

The invention discloses a boat transportation structure, which comprises a boat and a boat support; the boat is arranged on the boat support, and the boat paddle is arranged below the boat support; the boat comprises a top plate, a bottom plate and slot rods, wherein the top plate is connected with the bottom plate through the slot rods, and the slot rods are distributed between the top plate and the bottom plate; the boat support comprises a vertical plate and a side plate, and the vertical plate and the side plate are surrounded to form the boat support; through holes are formed in the vertical plate and/or the side plate; the side plates are provided with handles which are arranged at two ends of the side plates, and the bottom of each handle is provided with a placement groove; through holes are distributed on the vertical plate and/or the side plate, positioning grooves are arranged at the upper edge of the side plate and distributed at the upper edge of the side plate; a part for increasing friction force is arranged in the positioning groove; the invention provides a boat transportation structure which is simple in structure, reasonable in design and light in weight.

Description

Boat transportation structure

This patent is filed under the number: 8978 patent entitled divisional application of small boat transportation structure

Technical Field

The invention relates to the field of semiconductor or photovoltaic material processing, in particular to semiconductor processing equipment.

Background

Semiconductor or photovoltaic materials are widely applied to industries such as electronics, new energy and the like, the semiconductor and photovoltaic materials can be applied to products generally through chemical treatment, a CVD technology is one of the treatment modes, namely CVD (chemical vapor deposition), the CVD technology is currently widely applied to semiconductor or photovoltaic material processing, common processing equipment includes PECVD, LPCVD, APCVD and the like, diffusion processes such as phosphorus diffusion, boron diffusion and the like can be adopted in addition to CVD to process raw materials, many related equipment exist in the industry at present, corresponding equipment can be selected to process according to specific processing requirements, processing of the semiconductor or photovoltaic materials is generally realized by feeding sheet materials into a furnace to react under certain temperature and pressure conditions, devices are generally adopted to load or move materials to be processed, processed or processed in the process of processing the semiconductor or photovoltaic materials, and the loaded or moved devices are generally called as graphite boats, small boats or flower baskets in the industry.

In the traditional equipment, the material to be processed is placed in a vertical inserting mode, and the problem of uneven film coating on the material to be processed caused by interference or shielding of process gas flow exists in the processing process; the material deformation of treating processing still appears easily in the form of vertical inserted sheet, and equipment carries out the piece rate that leads to treating processing material easily among the automatic plug in-process too high, and degree of automation is difficult.

Disclosure of Invention

The invention overcomes the defects of the prior art and provides a novel boat transportation structure with simple structure, reasonable design and light weight.

The technical scheme of the invention is as follows:

the utility model provides a boat transportation structure which characterized in that: comprises a boat, a boat support and a boat paddle; the boat is arranged on the boat support, and the boat oar is arranged below the boat support; the boat comprises a top plate, a bottom plate and slot rods, wherein the top plate is connected with the bottom plate through the slot rods, and the slot rods are distributed between the top plate and the bottom plate; notches are distributed on each groove rod, and the corresponding notches on each groove rod are positioned on the same horizontal plane; the small boat also comprises a connecting rod, and the connecting rod is connected with two adjacent groove rods; the connecting rod is provided with a handle, and the handle and the gravity center of the whole boat are positioned on the same horizontal plane.

The boat support comprises a vertical plate and a side plate, and the vertical plate and the side plate are surrounded to form the boat support; through holes are formed in the vertical plate and/or the side plate; handles are arranged on the side plates and arranged at two ends of the side plates, and a placing groove is formed in the bottom of each handle; through holes are distributed on the vertical plate and/or the side plate, positioning grooves are arranged at the upper edge of the side plate and distributed at the upper edge of the side plate; a part for increasing friction force is arranged in the positioning groove;

the boat oar comprises a fixing part for fixing the boat support and a stabilizing part connected with the control equipment; the thickness of the fixing part is smaller than that of the stabilizing part, and a smooth transition part is arranged between the fixing part and the stabilizing part; one end of the stabilizing part is provided with a fixing structure; the paddle fixing part is provided with one or more through holes, and the shape of each through hole is matched with that of the paddle fixing part; a limiting piece is arranged at one end of the boat and paddle fixing part far away from the stabilizing part; the through holes are distributed on the fixing part; the limiting part adopts a circular boss.

Further, the top plate and the bottom plate are arranged in parallel; the bottom plate is provided with a through hole or a through groove.

Furthermore, the distance between the adjacent notches and the distance between the adjacent boats are in a multiple relationship; the orientation of the notch is matched with the overall shape of the boat.

Furthermore, the boat is made of non-conductive, high-temperature resistant and pressure resistant materials; the boat support is made of non-conductive, high-temperature resistant and pressure resistant materials.

Furthermore, the handle is cylindrical or cuboid; a placing groove is formed in one end or the middle position of the bottom of the handle, which is close to the side plate, and the placing groove is a circular groove or a rectangular groove; or the end of the bottom of the handle far away from the side plate is provided with a placing groove, and the end of the handle is provided with a limiting block.

Furthermore, the boat support and the boat oar are made of non-conductive, high-temperature resistant and pressure resistant materials.

Further, the device also comprises boat supports with handles arranged on two sides, and the two boat paddles are symmetrically arranged on two sides of the boat supports.

Furthermore, a groove matched with the boat oar is arranged on a handle at a corresponding position on the boat support.

Further, the handle setting of boat support is at the both ends of boat support curb plate, and the handle bottom of one end sets up the rectangle recess or the circular recess of cutting, and the handle bottom of the other end sets up same recess to set up the location breach in the recess intermediate position.

Furthermore, the positioning notch is matched with the transition part of the paddle.

The invention has the advantages that:

the scheme has simple structure and reasonable design; the scheme is that the transportation structure is composed of a small boat, a boat support and a boat paddle, wherein a top plate and a bottom plate of the small boat are connected through a groove rod to form a containing space for containing a boat plate of a material to be processed; the to-be-processed insert is transversely arranged in the boat, and the boat support is movably arranged on the boat paddle, so that the problems of interference of process gas flow and uneven film coating can be avoided; compared with Shan Zhoujiang, the paddle structure of the paddle structure has the advantage that after the paddle structure is used for fixing the paddle, the stability of the paddle structure is far higher than that of a single paddle. The riser that the boat held in the palm the structure is located the air inlet position of diffusion air current in the stove pipe, and the curb plate is arranged along the air current direction, and corresponding through hole through setting up will reduce the hindrance to the diffusion air current. The top edge department of curb plate sets up the constant head tank, also can set up the part that increases frictional force in the constant head tank, reduces the emergence of dragging the boat phenomenon. The boat oar passes through the locating part and the transition portion stabilizes the both sides handle that the boat held in the palm, has avoided the skew condition of quartz boat bracket emergence.

This scheme sets up the handle on the curb plate, and general handle setting is at the curb plate both ends. The handle is arranged at the position, so that the space of the boat support in the length direction matched with the boat paddle can be reduced as much as possible, and larger or more quartz boats can be placed.

Drawings

FIG. 1 is a perspective view of a boat;

FIG. 2 is a side view of the boat;

FIG. 3 is an enlarged schematic view at A in FIG. 2;

FIG. 4 is a top view of the boat dispensing stator plate;

FIG. 5 is an overall view of the boat;

FIG. 6 is an enlarged view of a portion of AF from FIG. 5 in accordance with the invention;

FIG. 7 is an enlarged view of a portion of AG of FIG. 5 according to the present invention.

FIG. 8 is a view showing the overall structure of the boat holder;

FIG. 9 is an enlarged view of a portion of AF from FIG. 8 of the present invention;

FIG. 10 is an enlarged view of a portion of AG of FIG. 8 according to the present invention.

The labels in the figure are: the structure comprises a top plate 1, a bottom plate 2, a groove rod 3, a notch 31, a handle 4, a connecting rod 5, a boat paddle 6, a fixing part 7, a stabilizing part 8, a transition part 9, a limiting part 10, a through hole 11, a boat support 12, a positioning notch 15, a side plate 16, a vertical plate 17, a handle 18, an upper edge 19, a placing groove 20 and a through hole 21.

Detailed Description

The invention is further described with reference to the following figures and detailed description. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

The embodiment is as follows:

a boat transportation structure comprises a boat, a boat support and a boat paddle; the boat is arranged on the boat support, and the boat oar is arranged below the boat support; the novel boat shown in figure 1 comprises a top plate 1, a bottom plate 2 and a groove rod 3; the top plate 1 and the bottom plate 2 are connected by a channel bar 3 to form a placing space for placing a boat plate of a material to be processed. The boat has simple integral structure and light self weight, and the load range is improved as much as possible.

The groove rods 3 are distributed between the top plate 1 and the bottom plate 2, and the number of the groove rods 3, the shape of the top plate 1 and the shape of the bottom plate 2 are matched with the boat plate. For example, the boat plate is rectangular, the whole boat is formed into a rectangular parallelepiped, and four slot bars 3 are distributed at four corners of the top plate 1 and the bottom plate 2. As shown in fig. 2 and 3, a notch 31 is distributed on each grooved bar 3 to provide a space for placing a boat plate of a material to be processed. The corresponding notches 31 on each groove rod 3 are positioned on the same horizontal plane, and boat plates are placed in the notches to form a small boat with controllable height. The boat plate placed in parallel has a better thermal field than the traditional boat plate, and the boat plate is parallel to the plane of the material to be processed and the heat radiation direction, so that the heat can radiate the whole boat, and a uniform temperature field can be effectively obtained. After the anti-reflection film plating process, the material to be processed can not generate the phenomenon of winding plating. The orientation of the notch 31 is matched with the overall shape of the boat as much as possible, so as to improve the effect of stabilizing the boat plate of the boat. For example, when the boat is a rectangular parallelepiped, the notches 31 of the four grooved bars 3 are arranged two by two symmetrically. The notch 31 is arranged at the position of the groove rod 3 close to the inner side of the boat, so that the boat plate needing to be horizontally placed can be more easily inserted into the boat, and the boat plate is supported and stabilized by the notch 31.

The distance between the adjacent notches 31 of the groove rods 3 and the distance between the adjacent boats can be set according to the requirements of different automatic equipment. Preferably, the distance between adjacent slots 31 is multiplied by the spacing between adjacent boats, which further facilitates interleaving of boat plates by automated equipment. As shown in fig. 4, the bottom plate 2 is provided with through holes or through grooves as many as possible to reduce the weight of the boat while maintaining the bearing strength of the boat. Preferably, in the case of a rectangular parallelepiped boat, the bottom plate 2 provided with the through holes or through grooves is U-shaped as a whole.

The top plate 1 is arranged in parallel with the bottom plate 2, and provides a space for placing the boat plate as much as possible to the maximum. Since the top plate 1 and the bottom plate 2 are disposed in non-parallel with each other, a part of the space is not used for horizontally placing the boat plate, thereby wasting unnecessary space and increasing the self weight of the boat.

Still include connecting rod 5 to cuboid boat is the example, and connecting rod 5 connects the groove stick 3 that is located the boat left and right sides to firm boat overall structure, increase of strength. The connecting rod 5 is provided with a handle 4, and the handle 4 and the gravity center of the whole boat are positioned on the same horizontal plane. The shape of the handle 4 can be set according to actual needs, generally adopts a rectangular shape, obviously can also adopt other shapes, and only the manipulator of the automation equipment is convenient to take, place and avoid. The handle 4 and the center of gravity of the whole boat are positioned on the same horizontal plane, which is favorable for the stability of taking and placing the boat and is not easy to deviate in transportation.

The boat is made of non-conductive, high-temperature resistant and pressure resistant materials. The preferred material is quartz or silicon carbide material, so as to reduce the self weight as much as possible, improve the placing quantity of the whole boat to the boat plate, and meet the non-conductive and high temperature resistant characteristics of the boat.

As shown in fig. 5 to 7, in the novel boat paddle structure, a limiting member 10 is disposed on the boat paddle 6, and the limiting member 10 limits the movement of the boat tray 12, so as to stabilize the boat tray 12. The limiting member 10 may be a circular boss, or may be other similar structures having limiting function.

One end of the paddle 6 is provided with a fixing structure, and the fixing structure can be formed by arranging a connecting hole at one end of the paddle 6, which is connected with the control equipment, so that the paddle 6 can be conveniently and stably fixed. Specifically, the boat paddle 6 comprises a fixing part 7 for fixing the boat support 12 and a stabilizing part 8 connected with a control device of the boat paddle, the thickness of the fixing part 7 is smaller than that of the stabilizing part 8, and a smooth transition part 9 is arranged between the fixing part 7 and the stabilizing part 8. The transition portion 9 is generally changed in a gradual linear manner, but may be changed in other manners as long as it can be matched with the placing groove 20 on the handle 18 of the boat support 12. The fixing part 7 of the paddle 6 is provided with one or more through holes 11, the shape of the through holes 11 is adapted to the fixing part 7 of the paddle 6 (for example, the paddle 1 is in a long strip shape, and the through holes 11 are also in a long strip shape), and the through holes 11 are distributed on the fixing part 7. The structure of the paddle 6 reduces the dead weight as much as possible under the condition of ensuring the strength of the paddle 6 in the load range. The through-hole 11 not only reduces its own weight but also reduces the obstruction of the diffused gas in the quartz furnace tube.

The paddle 6 is made of non-conductive, high-temperature resistant and pressure resistant materials, preferably quartz or silicon carbide materials, so that the self weight is reduced as much as possible, the load limit is improved, and the capacity is enlarged.

The paddle support structure of the paddle structure also comprises a boat support 12 with handles 18 arranged on two sides, and the two paddles 6 are symmetrically arranged on two sides of the boat support 12. Compared with the traditional single paddle 6, the novel paddle 6 has the advantages that after the boat support 12 is fixed, the stability of the boat support 12 is far higher than that of the single paddle 6. The strength of the novel paddle 6 structure in the load range thereof is as low as possible, and the self weight thereof is as low as possible.

The handles 18 of the boat support 12 are arranged at two ends of a side plate of the boat support 12, the bottom of the handle 18 at one end is provided with a cut rectangular placing groove 20 or a round placing groove 20, the bottom of the handle 18 at the other end is provided with the same placing groove 20, and a positioning notch 15 is arranged in the middle of the placing groove 20. The arrangement of the placing groove 20 is convenient for the boat holder 12 to be matched with the boat paddle 6.

The handle 18 at one end of the boat holder 12 is provided at the stopper 10 of the boat paddle 6, and the handle 18 at the other end is provided at the transition portion 9 of the boat paddle 6. As shown in fig. 9 and 8, the paddle 6 is engaged with the boat receiver 12 at the AF and AG positions in the corresponding drawings. The boat paddle 6 is used for stabilizing handles 18 at two sides of the boat support 12 through the limiting part 10 and the transition part 9, so that the situation that the quartz boat support 12 is deviated is avoided. Specifically, as shown in fig. 8, the handle at AG of the boat support 12 is placed on one side of the limiting member 10 of the paddle 6 close to the stabilizing portion 8; the handle at AF of the boat holder 12 is placed at the transition part 9 of the boat paddle 6, or at one end of the fixing part 7 of the boat paddle 6 near the transition part 9. The transition portion 9 also forms a structure that restricts the movement of the boat rest 12.

A novel boat holds in palm structure, includes riser 17, curb plate 16, and riser 17 and curb plate 16 surround and form the boat and hold in the palm, set up through hole 21 on riser 17 and/or the curb plate 16. The boat support is surrounded by the vertical plate 17 and the side plate 16, and the shape of the boat support is more rectangular generally. The boat support needs to bear a quartz boat, so that the whole volume of the boat support is large, the dead weight of the boat support is large, and the load of the boat support is limited. The strength of the boat support within the load range is only required to be ensured, and the dead weight of the boat support can be reduced and the load of the boat support can be increased by providing one or more through holes 21. Specifically, the through-holes 21 may be provided in the vertical plate 17 and the side plate 16. The shape of the through-holes 21 may be regular or irregular, such as rectangular, circular, diamond, pentagonal, etc. The currently preferred scheme is as follows: the shapes of the through holes 21 on the vertical plate 17 and the side plate 16 are matched with the shapes of the vertical plate 17 and the side plate 16. Only one large through hole 21 is provided in the vertical plate 17 and the side plate 16, and the through hole 21 is as large as possible while ensuring the strength of the boat rest within the load range thereof. The boat support is made of non-conductive, high-temperature-resistant and pressure-resistant materials, and preferably made of quartz or silicon carbide materials, so that the weight of the boat support is reduced as much as possible, the processing quantity of the whole equipment to the boat support is increased, and the characteristics of non-conductivity and high-temperature resistance of the boat support are met. Specifically, the vertical plate 17 of the boat support structure is located at an air inlet (not shown) of the furnace tube for diffusing the gas flow, and the through holes 21 formed in the vertical plate 17 reduce the obstruction to the diffused gas. The side plate 16 is arranged along the airflow direction, and the through holes 21 arranged on the side plate 16 can reduce the obstruction to the diffused airflow.

A locating slot (not shown) is provided at the upper edge 19 of the side plate 16. The positioning grooves are distributed on the upper edge 19 of the side plate 16, so that the quartz boat products can be positioned and placed conveniently. Preferably, corresponding external parts may be provided in the positioning grooves, by which the probability of occurrence of a boat dragging phenomenon, such as protruding parts increasing friction, is reduced.

Preferably, the side plate 16 is provided with a handle 18, and generally the handle 18 is provided at both ends of the side plate 16, and a plurality of handles 18 may be provided as necessary. The side plates 16 are provided with handles 18, so that the space of the boat support in the length direction matched with the boat paddles can be reduced as much as possible, and larger or more quartz boats can be placed. As shown in fig. 8, a mounting groove 20 is formed at the bottom of the handle 18. The handle 18 is generally cylindrical or rectangular in shape as a whole, and naturally, other shapes may be provided as needed. The bottom of the handle 18 near one end or the middle position of the side plate 16 is provided with a placement groove 20, and the placement groove 20 is circular or rectangular. The bottom of the handle 18 is provided with the placing groove 20, so that the placing groove is convenient to be matched with the boat oar for use, and the situation that the boat oar and the boat support fall off is not easy to happen. Or the end of the bottom of the handle 18 far away from the side plate 16 is provided with a placing groove 20, and the end of the handle 18 is provided with a limit block, so that the boat oar and the boat bracket are prevented from being separated. Obviously, the handle 18 provided with the stopper may not be provided with the seating groove 20.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and decorations can be made without departing from the spirit of the present invention, and these modifications and decorations should also be regarded as being within the scope of the present invention.

Claims

1. The utility model provides a boat transportation structure which characterized in that: comprises a boat and a boat support; the boat is arranged on the boat support, and the boat oar is arranged below the boat support; the boat comprises a top plate, a bottom plate and slot rods, wherein the top plate is connected with the bottom plate through the slot rods, and the slot rods are distributed between the top plate and the bottom plate; notches are distributed on each groove rod, and the corresponding notches on each groove rod are positioned on the same horizontal plane; the small boat also comprises a connecting rod, and the connecting rod is connected with two adjacent groove rods; the connecting rod is provided with a handle, and the handle and the gravity center of the whole boat are positioned on the same horizontal plane;

the boat support comprises a vertical plate and a side plate, and the vertical plate and the side plate are surrounded to form the boat support; through holes are formed in the vertical plates and/or the side plates; the side plates are provided with handles which are arranged at two ends of the side plates, and the bottom of each handle is provided with a placement groove; through holes are distributed on the vertical plate and/or the side plate, positioning grooves are arranged at the upper edge of the side plate and distributed at the upper edge of the side plate; a part for increasing friction force is arranged in the positioning groove;

the boat oar comprises a fixing part for fixing the boat support and a stabilizing part connected with the control equipment; the thickness of the fixing part is smaller than that of the stabilizing part, and one end of the stabilizing part is provided with a fixing structure; the paddle fixing part is provided with one or more through holes, and the shape of each through hole is matched with that of the paddle fixing part; a limiting piece is arranged at one end of the boat and paddle fixing part far away from the stabilizing part; the through holes are distributed on the fixing part;

the handles of the boat support are arranged at two ends of the side plate of the boat support, the bottom of the handle at one end is provided with a cut rectangular groove or a round groove, the bottom of the handle at the other end is provided with the same groove, and the middle position of the groove is provided with a positioning notch; the arrangement of the groove is convenient for the cooperation of the boat support and the boat paddle.

2. The canoe transport structure of claim 1, wherein: the top plate and the bottom plate are arranged in parallel; the bottom plate is provided with a through hole or a through groove.

3. The canoe transport structure of claim 1, wherein: the distance between the adjacent notches and the distance between the adjacent boats are in a multiple relationship; the orientation of the notch is matched with the overall shape of the boat.

4. The canoe transport structure of claim 1, wherein: the boat is made of non-conductive, high-temperature resistant and pressure resistant materials; the boat support is made of non-conductive, high-temperature resistant and pressure resistant materials.

5. The canoe transport structure of claim 1, wherein: the handle is cylindrical or cuboid; a placing groove is formed in one end or the middle position of the bottom of the handle, which is close to the side plate, and the placing groove is a circular groove or a rectangular groove; or the end of the bottom of the handle far away from the side plate is provided with a placing groove, and the end of the handle is provided with a limiting block.