CN204162786U - A kind of tubular type PECVD fool proof boat slurry - Google Patents
A kind of tubular type PECVD fool proof boat slurry Download PDFInfo
- Publication number
- CN204162786U CN204162786U CN201420653461.4U CN201420653461U CN204162786U CN 204162786 U CN204162786 U CN 204162786U CN 201420653461 U CN201420653461 U CN 201420653461U CN 204162786 U CN204162786 U CN 204162786U
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- China
- Prior art keywords
- boat
- slurry
- block
- fool proof
- graphite boat
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- 239000002002 slurry Substances 0.000 title claims abstract description 33
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 title claims abstract description 17
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 43
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 43
- 239000010439 graphite Substances 0.000 claims abstract description 43
- 230000008878 coupling Effects 0.000 claims abstract description 18
- 238000010168 coupling process Methods 0.000 claims abstract description 18
- 238000005859 coupling reaction Methods 0.000 claims abstract description 18
- 238000009434 installation Methods 0.000 claims abstract description 16
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 10
- 229910052742 iron Inorganic materials 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 17
- 238000000034 method Methods 0.000 abstract description 10
- 230000008569 process Effects 0.000 abstract description 8
- 239000010408 film Substances 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 230000003667 anti-reflective effect Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229920002472 Starch Polymers 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 238000013467 fragmentation Methods 0.000 description 2
- 238000006062 fragmentation reaction Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 235000019698 starch Nutrition 0.000 description 2
- 239000008107 starch Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003449 preventive effect Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- Silver Salt Photography Or Processing Solution Therefor (AREA)
Abstract
The utility model discloses a kind of tubular type PECVD fool proof boat slurry, described fool proof boat slurry comprises: graphite boat push-pull rod, set screw and lifting apparatus; Described lifting apparatus is installed on inside the slurry head of described fool proof boat slurry, is positioned at graphite boat pin Support Position; Two described graphite boat push-pull rods carry out connection location by described set screw; Described lifting apparatus comprises: stationary installation, coupling device and lift block; Described coupling device is placed in described in two to be lifted between block, described in connecting, lift block; The outside of block is lifted, for lifting block and described graphite boat push-pull rod is fixed by described described in described stationary installation is placed in.Fool proof boat that the utility model provides slurry is put askew about can effectively avoiding lifting in process of production when putting graphite boat, stopped potential safety hazard, improved device fabrication stability and quality product, reduce production cost.
Description
Technical field
The present invention relates to a kind of solar battery sheet processing technique field, relate in particular to a kind of tubular type PECVD fool proof boat slurry.
Background technology
People, to the continuous growth of solar cell demand, drive the continuous progress of solar cell fabrication process.In order to obtain the solar cell of high-quality, researchist is to each step of its production process and use material all to carry out research and development energetically.Because the quality of antireflective film can have a huge impact the quality of the performance of solar cell, therefore technician constantly to improve the preparation method of antireflective film and relevant equipment and material.
Among the preparation process of silicon solar cell, usually need to adopt thin film deposition processes to carry out the plated film of silicon chip, such as can adopt PECVD (Plasma Enhanced Chemical Vapor Deposition, plasma reinforced chemical vapour deposition) technique carries out the plated film of silicon nitride to silicon chip, to form antireflective film at silicon chip surface.
When carrying out silicon chip surface plated film, first uncoated silicon chip being inserted in graphite boat, then the graphite boat being loaded with silicon chip is placed in PECVD vacuum coating film equipment cavity, adopting suitable pecvd process to carry out plated film to silicon chip.After plated film terminates, from vacuum coating film equipment cavity, take out graphite boat and then the silicon chip through plated film is taken off from graphite boat.And existing graphite boat lift put time about easily put askew and there is no preventive measures.
In process of production, staff can lift puts graphite boat and operates, owing to being manual operations, therefore easily occur that graphite boat puts askew energy phenomenon, the generation to putting askew phenomenon about graphite boat do not dealt with by special protection or induction installation to push-and-pull boat slurry of the prior art.And if graphite boat put askew can not by Timeliness coverage, will cause that graphite boat damages, coil damage, and then produce a large amount of fragment, cause waste, and strengthen manufacturing cost.
Utility model content
In order to solve in prior art, when carrying out PECVD, because graphite boat puts askew and fragmentation rate that is that cause is high problem, the utility model provides a kind of tubular type PECVD fool proof boat slurry.
According to an aspect of the present utility model, provide a kind of tubular type PECVD fool proof boat to starch, it is characterized in that, described fool proof boat slurry comprises: graphite boat push-pull rod, set screw and lifting apparatus;
Described lifting apparatus is installed on inside the slurry head of described fool proof boat slurry, is positioned at graphite boat pin Support Position;
Two described graphite boat push-pull rods carry out connection location by described set screw;
Described lifting apparatus comprises: stationary installation, coupling device and lift block;
Described coupling device is placed in described in two to be lifted between block, described in connecting, lift block;
The outside of block is lifted, for lifting block and described graphite boat push-pull rod is fixed by described described in described stationary installation is placed in.
According to an embodiment of the present utility model, described coupling device is length-adjustable screw screw mandrel, and described coupling device is connected with described block of lifting by screw.
According to another embodiment of the present utility model, described screw and the described connection section lifting block are provided with pad.
According to another embodiment of the present utility model, described stationary installation is the circular arc iron plate of opening towards described graphite boat push-pull rod.
According to another embodiment of the present utility model, described in lift the rectangular parallelepiped can that block is hollow.
According to another embodiment of the present utility model, described in lift the direction long 3.7cm of block along described coupling device.
The fool proof boat slurry that the utility model provides adds lifting apparatus inside slurry head, efficiently solve lift in process of production put graphite boat about put askew problem, the problems such as the damage of askew caused graphite boat, coil damage and fragmentation rate are high are put about avoiding graphite boat, serve fool proof effect, improve stability and the production efficiency of equipment, stop the potential safety hazard in production process, reduce production cost.
Accompanying drawing explanation
By reading the detailed description done non-limiting example done with reference to the following drawings, other features, objects and advantages of the present utility model will become more obvious:
Figure 1 shows that the structural representation of an embodiment of a kind of tubular type PECVD fool proof boat slurry of the present utility model;
Figure 2 shows that the front view of an embodiment of the lifting apparatus of the fool proof boat slurry inside that the utility model provides;
Figure 3 shows that the vertical view of the lifting apparatus shown in Fig. 2;
Figure 4 shows that the side-view of the lifting apparatus shown in Fig. 2.
In accompanying drawing, same or analogous Reference numeral represents same or analogous parts.
Embodiment
Disclosing hereafter provides many different embodiments or example is used for realizing different structure of the present utility model.Of the present utility model open in order to simplify, hereinafter the parts of specific examples and setting are described.In addition, the utility model can in different example repeat reference numerals and/or letter.This repetition is to simplify and clearly object, itself does not indicate the relation between discussed various embodiment and/or setting.It should be noted that parts illustrated in the accompanying drawings are not necessarily drawn in proportion.The utility model eliminates the description of known assemblies and treatment technology and process to avoid unnecessarily limiting the utility model.
With reference to a kind of tubular type PECVD fool proof of figure 1, Fig. 1 boat slurry, it is characterized in that, described fool proof boat slurry comprises: graphite boat push-pull rod 1, set screw 2 and lifting apparatus 3; Described lifting apparatus 3 is installed on inside the slurry head of described fool proof boat slurry, is positioned at graphite boat pin Support Position; Two described graphite boat push-pull rods 3 carry out connection location by described set screw 2.
With reference to figure 2 ~ Fig. 4, described lifting apparatus 3 comprises: stationary installation 33, coupling device 32 and lift block 31.Wherein, described coupling device 32 is placed in described in two to be lifted between block 31, described in connecting, lift block 31.Preferably, described coupling device 32 is length-adjustable screw screw mandrel, and described coupling device 32 is connected with described block 31 of lifting by screw.In order to anti-skidding and prevent screw from coming off, preferred, described screw and the described connection section lifting block 31 are provided with pad.
The outside of block 31 is lifted, for being fixed with described graphite boat push-pull rod 1 by described block 31 of lifting described in described stationary installation 33 is placed in.Preferably, described stationary installation 33 is the circular arc iron plate of opening towards described graphite boat push-pull rod.The radian of circular arc and the radian of described graphite boat push-pull rod 1 match, and when being fixed installation, stationary installation 33 fixing catch of circular arc is connected on graphite boat push-pull rod 1, can more stably be connected and fixed lifting block 31 with graphite boat push-pull rod 1.
Preferably, described in lift the rectangular parallelepiped can that block 31 is hollow, its surfacing, when lifting graphite boat, there will not be the situation that left and right is askew, effectively prevent because graphite boat tilts uneven and production efficiency that is that cause is low problem.
In order to mate existing PECVD graphite boat, preferably, lift block 31 described in and lift best results along the direction of described coupling device 32 during long 3.7cm.
In order to coordinate different PECVD graphite boats, the fool proof boat slurry size that the utility model provides is advisable to be adapted to graphite boat.Now illustrate, the size when the fool proof boat slurry that this practicality provides is applied to Sai Ruida soft landing tubular type PECVD boiler tube (SRD) equipment.Wherein the length of coupling device 32 is 2.4cm, and diameter is Φ 0.5; The height of stationary installation 33 is 2.4cm; The described height lifting block 31 is 1.65cm, and wide is 4.0cm, and long is 3.0cm; Described stationary installation 33 is circular arc iron plate, and arc pin is 3.7cm to the far-end vertical range of lifting block 31 be connected with this circular arc iron plate.Adopt the fool proof boat of above-mentioned size design manufacture to starch and namely can save material, can obtain again and lift effect preferably, avoid the fragment tilting to cause due to graphite boat to increase problem.
The fool proof boat slurry that the utility model provides makes simple, is convenient to application; Stop the production safety hidden danger in PECVD process to greatest extent, improve production stability and the production efficiency of equipment, greatly reduce production cost.
Although describe in detail about example embodiment and advantage thereof, being to be understood that when not departing from the protection domain of spirit of the present utility model and claims restriction, various change, substitutions and modifications can being carried out to these embodiments.For other examples, those of ordinary skill in the art should easy understand in maintenance the utility model protection domain while, the order of processing step can change.
Claims (6)
1. a tubular type PECVD fool proof boat slurry, is characterized in that, described fool proof boat slurry comprises: graphite boat push-pull rod, set screw and lifting apparatus;
Described lifting apparatus is installed on inside the slurry head of described fool proof boat slurry, is positioned at graphite boat pin Support Position;
Two described graphite boat push-pull rods carry out connection location by described set screw;
Described lifting apparatus comprises: stationary installation, coupling device and lift block;
Described coupling device is placed in described in two to be lifted between block, described in connecting, lift block;
The outside of block is lifted, for lifting block and described graphite boat push-pull rod is fixed by described described in described stationary installation is placed in.
2. fool proof boat slurry according to claim 1, it is characterized in that, described coupling device is length-adjustable screw screw mandrel, and described coupling device is connected with described block of lifting by screw.
3. fool proof boat slurry according to claim 2, is characterized in that, described screw and the described connection section lifting block are provided with pad.
4. fool proof boat slurry according to claim 1, it is characterized in that, described stationary installation is the circular arc iron plate of opening towards described graphite boat push-pull rod.
5. fool proof boat according to claim 1 slurry, is characterized in that, described in lift the rectangular parallelepiped can that block is hollow.
6. fool proof boat according to claim 5 slurry, is characterized in that, described in lift the direction long 3.7cm of block along described coupling device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420653461.4U CN204162786U (en) | 2014-11-04 | 2014-11-04 | A kind of tubular type PECVD fool proof boat slurry |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420653461.4U CN204162786U (en) | 2014-11-04 | 2014-11-04 | A kind of tubular type PECVD fool proof boat slurry |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204162786U true CN204162786U (en) | 2015-02-18 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420653461.4U Active CN204162786U (en) | 2014-11-04 | 2014-11-04 | A kind of tubular type PECVD fool proof boat slurry |
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| CN (1) | CN204162786U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110904439A (en) * | 2019-10-23 | 2020-03-24 | 深圳市拉普拉斯能源技术有限公司 | Novel boat transportation structure |
-
2014
- 2014-11-04 CN CN201420653461.4U patent/CN204162786U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110904439A (en) * | 2019-10-23 | 2020-03-24 | 深圳市拉普拉斯能源技术有限公司 | Novel boat transportation structure |
| CN110904439B (en) * | 2019-10-23 | 2020-12-29 | 深圳市拉普拉斯能源技术有限公司 | Novel boat transportation structure |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220613 Address after: 314417 No. 1 Jisheng Road, Jiaxing City, Zhejiang Province Patentee after: Zhengtai Xinneng Technology Co.,Ltd. Address before: 310053 No. 1335 Bin'an Road, Binjiang District, Hangzhou City, Zhejiang Province Patentee before: CHINT SOLAR (ZHEJIANG) Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 314417 No. 1 Jisheng Road, Jiaxing City, Zhejiang Province Patentee after: Zhengtai Xinneng Technology Co.,Ltd. Address before: 314417 No. 1 Jisheng Road, Jiaxing City, Zhejiang Province Patentee before: Zhengtai Xinneng Technology Co.,Ltd. |