CN207572343U - A kind of graphite boat piece of new structure - Google Patents
A kind of graphite boat piece of new structure Download PDFInfo
- Publication number
- CN207572343U CN207572343U CN201721673028.7U CN201721673028U CN207572343U CN 207572343 U CN207572343 U CN 207572343U CN 201721673028 U CN201721673028 U CN 201721673028U CN 207572343 U CN207572343 U CN 207572343U
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- CN
- China
- Prior art keywords
- silicon chip
- graphite boat
- stuck point
- boat piece
- positioning cavity
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model discloses a kind of graphite boat pieces of new structure, including graphite boat piece ontology, it is arranged with multiple silicon chip positioning cavities along its length on the tow sides of the graphite boat piece ontology, be equipped with multiple stuck points for being used to silicon chip is connected on silicon chip positioning cavity around the silicon chip positioning cavity, the stuck point fan-shaped cross section structure, the angle between the top edge of the silicon chip positioning cavity and the top edge of graphite boat piece ontology is 24 °.The utility model reduces the contact area of silicon chip and stuck point, makes silicon chip in coating process, is not easy stain occur in contact position, not only increases the coating effects of silicon chip, and reduces the coating cost of silicon chip, convenient for the placement and extraction of silicon chip.
Description
Technical field
The utility model is related to graphite boat piece technical fields, are related specifically to a kind of graphite boat piece of new structure.
Background technology
There is one of program to be called PECVD plated films in the production and processing of crystalline silicon solar cell piece, effect is on silicon chip
One layer of dielectric film, usually silicon nitride film are deposited, improves the solar energy conversion ratio of silicon chip.This process is loaded with graphite boat
Silicon chip.Silicon chip is put into graphite boat, chemical reaction is generated by certain condition, last layer film is deposited in silicon chip surface.
A kind of carrier when graphite boat is as silicon chip deposition medium film, structure and size directly affect the conversion of silicon chip
Efficiency and production efficiency, operation principle are：Uncoated silicon chip is placed on the stuck point of graphite boat piece, in each graphite boat piece
The silicon chip of fixed quantity can be put, is then placed on graphite boat in the cavity of PECVD vacuum coating equipments, using pecvd process
Carry out electric discharge plated film.After plated film, graphite boat is taken out, silicon chip from graphite boat piece is unloaded and is taken off.
It is in the prior art round stuck point for placing the stuck point overwhelming majority of uncoated silicon chip, is increased using such stuck point
The big contact area of silicon chip and stuck point, to during silicon chip film-coated, silicon chip easily being made to generate stain with stuck point contact position, no
But the coating effects of silicon chip are affected, and improve the coating cost of silicon chip, are brought to the plated film work of silicon chip larger
It is inconvenient；Another, the top edge overwhelming majority of existing silicon chip positioning cavity is parallel with the top edge of graphite boat piece ontology, uses
The silicon chip positioning cavity of such structure is not easy to the placement and extraction of silicon chip, placement to silicon chip and extract work bring compared with
Big inconvenience.
However in view of the deficiencies of the prior art, it is necessary to develop a kind of reasonable design, simple in structure, operation side by developer
Just the contact area of silicon chip and stuck point, is reduced, makes silicon chip in coating process, is not easy stain occur in contact position, not only carries
High coating effects of silicon chip, and reduce the coating cost of silicon chip, convenient for the new structure of placement and the extraction of silicon chip
Graphite boat piece.
Utility model content
Of the existing technology to solve the problems, such as, the utility model aim provides a kind of reasonable design, simple in structure, behaviour
Make contact area that is convenient, reducing silicon chip and stuck point, make silicon chip in coating process, be not easy stain occur in contact position, no
But the coating effects of silicon chip are improved, and reduce the coating cost of silicon chip, convenient for the novel knot of placement and the extraction of silicon chip
The graphite boat piece of structure.
For solution more than technical problem, what the utility model was realized using following technical scheme：
A kind of graphite boat piece of new structure, including graphite boat piece ontology, which is characterized in that in the graphite boat piece ontology
Tow sides on be arranged with multiple silicon chip positioning cavities along its length, be equipped with around the silicon chip positioning cavity
It is multiple for silicon chip to be connected to stuck points on silicon chip positioning cavity, the stuck point fan-shaped cross section structure, the silicon chip
Angle between the top edge of positioning cavity and the top edge of graphite boat piece ontology is 2-4 °.
In a preferred embodiment of the utility model, top edge and the graphite boat piece ontology of the silicon chip positioning cavity
Top edge between angle be 3 °.
In a preferred embodiment of the utility model, the quantity of the stuck point is 3, respectively the first stuck point, the
Two stuck points and third stuck point, first stuck point are arranged on the lower part of silicon chip positioning cavity side, the second stuck point setting
On the top of silicon chip positioning cavity opposite side, the third stuck point is arranged on the downside of silicon chip positioning cavity and close to the first stuck point
Side on.
In a preferred embodiment of the utility model, the cross section of the silicon chip positioning cavity is square.
Compared with prior art, the utility model sets that there are three fan-shaped cross section structures around silicon chip positioning cavity
Stuck point, adopt the structure the contact area for reducing silicon chip and stuck point, silicon chip made to be not easy in coating process in contact position
There is stain, not only increase the coating effects of silicon chip, and reduce the coating cost of silicon chip；Another, silicon chip positioning chamber
Angle between the top edge of body and the top edge of graphite boat piece ontology is 2-4 °, adopt the structure convenient for silicon chip placement and
It extracts, the placement and extraction work to silicon chip bring larger facility.
Description of the drawings
It in order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, in the premise not made the creative labor
Under, it can also be obtained according to these attached drawings other attached drawings.
Fig. 1 is the structure diagram of the utility model.
Fig. 2 is enlarged drawing at the A of Fig. 1.
Fig. 3 is enlarged drawing at the B of Fig. 2.
Specific embodiment
In order to be easy to understand technical means, creative features, achievable purpose and effectiveness of the utility model, under
Face combines and is specifically illustrating, and the utility model is expanded on further.
With reference to shown in Fig. 1-Fig. 3, the graphite boat piece of a kind of new structure that is provided in figure, including graphite boat piece ontology 100.
It is arranged with multiple silicon chip positioning cavities 110 along its length on the tow sides of graphite boat piece ontology 100,
Be equipped with multiple stuck points for being used to silicon chip 200 is connected on silicon chip positioning cavity 110 around silicon chip positioning cavity 110,
The cross section of silicon chip positioning cavity 110 is square in the present embodiment.
The quantity of stuck point is 3 in the present embodiment, respectively the first stuck point 111, the second stuck point 112 and third stuck point
113, the first stuck point 111 is arranged on the lower part in 110 left side of silicon chip positioning cavity, and the second stuck point 112 is arranged on silicon chip positioning chamber
On the top on 110 right side of body, third stuck point 113 is arranged on 110 downside of silicon chip positioning cavity and close to the side of the first stuck point 111
On.
Stuck point fan-shaped cross section structure, adopts the structure the contact area for reducing silicon chip 200 and stuck point, makes silicon
Piece 200 is not easy stain occur in contact position in coating process, not only increases the coating effects of silicon chip 200, and reduces
The coating cost of silicon chip 200.
Angle C between the top edge of silicon chip positioning cavity 110 and the top edge of graphite boat piece ontology 100 is 2-4 °, is adopted
Be convenient for the placement and extraction of silicon chip 200 with such structure, placement to silicon chip 200 and extract work bring it is larger just
Profit, in the present embodiment the angle C between the top edge of the top edge of silicon chip positioning cavity 110 and graphite boat piece ontology 100 be
3°。
The utility model sets the stuck point there are three fan-shaped cross section structure around silicon chip positioning cavity in summary,
The contact area for reducing silicon chip and stuck point is adopted the structure, makes silicon chip in coating process, is not easy to occur in contact position black
Point, not only increases the coating effects of silicon chip, and reduces the coating cost of silicon chip；Another, silicon chip positioning cavity it is upper
Angle between the top edge of edge and graphite boat piece ontology is 2-4 °, adopts the structure placement and extraction convenient for silicon chip,
Placement and extraction work to silicon chip bring larger facility.
The advantages of basic principle, main feature and the utility model of the utility model has been shown and described above.One's own profession
The technical staff of industry is it should be appreciated that the present utility model is not limited to the above embodiments, described in above embodiments and description
Only illustrate the principle of the utility model, the utility model can also on the premise of not departing from the spirit and scope of the utility model
There are various changes and modifications, these various changes and improvements fall within the scope of the claimed invention.The utility model will
Protection domain is asked to be defined by appended claims and its equivalent.
Claims (4)
1. a kind of graphite boat piece of new structure, including graphite boat piece ontology, which is characterized in that in the graphite boat piece ontology
Multiple silicon chip positioning cavities are arranged on tow sides along its length, are equipped with around the silicon chip positioning cavity more
It is a for silicon chip to be connected to stuck point on silicon chip positioning cavity, the stuck point fan-shaped cross section structure, the silicon chip is determined
Angle between the position top edge of cavity and the top edge of graphite boat piece ontology is 2-4 °.
2. a kind of graphite boat piece of new structure as described in claim 1, it is characterised in that：The silicon chip positioning cavity it is upper
Angle between the top edge of edge and graphite boat piece ontology is 3 °.
3. a kind of graphite boat piece of new structure as described in claim 1, it is characterised in that：The quantity of the stuck point is 3,
Respectively the first stuck point, the second stuck point and third stuck point, first stuck point are arranged on the lower part of silicon chip positioning cavity side,
Second stuck point is arranged on the top of silicon chip positioning cavity opposite side, and the third stuck point is arranged under silicon chip positioning cavity
On side and the side of close first stuck point.
4. a kind of graphite boat piece of new structure as described in claim 1, it is characterised in that：The horizontal stroke of the silicon chip positioning cavity
Section is square.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721673028.7U CN207572343U (en) | 2017-12-05 | 2017-12-05 | A kind of graphite boat piece of new structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721673028.7U CN207572343U (en) | 2017-12-05 | 2017-12-05 | A kind of graphite boat piece of new structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207572343U true CN207572343U (en) | 2018-07-03 |
Family
ID=62690293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721673028.7U Active CN207572343U (en) | 2017-12-05 | 2017-12-05 | A kind of graphite boat piece of new structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207572343U (en) |
-
2017
- 2017-12-05 CN CN201721673028.7U patent/CN207572343U/en active Active
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