CN202796887U - Graphite boat sheet - Google Patents
Graphite boat sheet Download PDFInfo
- Publication number
- CN202796887U CN202796887U CN 201220404164 CN201220404164U CN202796887U CN 202796887 U CN202796887 U CN 202796887U CN 201220404164 CN201220404164 CN 201220404164 CN 201220404164 U CN201220404164 U CN 201220404164U CN 202796887 U CN202796887 U CN 202796887U
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- CN
- China
- Prior art keywords
- graphite boat
- silicon chip
- boat sheet
- cavity
- chip location
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
A graphite boat sheet comprises a graphite boat sheet body (1), silicon chip positioning cavities (2) arranged on the middle part of the graphite boat sheet body (1), and a circumferential graphite boat technology nail (3) fixed on each silicon chip positioning cavity(2), and the graphite boat sheet is characterized in that the cross section of each silicon chip positioning cavity(2) is I-shaped.
Description
Technical field
The utility model relates to a kind of graphite boat sheet.
Background technology
Have one program to be called the PECVD plated film in the production and processing of solar silicon wafers, its effect is the solar energy conversion ratio that improves silicon chip.This operation is just used graphite boat.Silicon chip is put in the graphite boat, produces the chemistry reflection through certain condition, plate a skim at silicon chip surface.
A kind of carrier of graphite boat during as solar battery sheet coated with antireflection film, its structure and size directly affect conversion efficiency and the production efficiency of silicon chip, and existing graphite boat comprises: the graphite accessories such as graphite boat sheet, ceramic jacket, ceramic bar, graphite bars, graphite spacer block.Its operation principle is: uncoated silicon chip is placed on the stuck point of graphite boat sheet, can puts the silicon chip of fixed qty on each boat sheet, then, graphite boat is placed in the body of wall of PECVD vacuum coating equipment, adopt the pecvd process plated film that discharges.After plated film finishes, take out graphite boat, silicon chip is unloaded from graphite boat take off.
The graphite boat sheet is the important component part that forms graphite boat, is for the fixing device of plated film silicon chip.Silicon chip is inserted on the graphite boat sheet in the actual process, finishes coating process.
The silicon chip positioning chamber of existing graphite boat boat sheet is that graphite flake is cavate for one by one perforation, and such graphite boat sheet exists silicon chip to fix not tight problem owing to the space between silicon chip and the graphite boat sheet,
The utility model content
The purpose of this utility model is to solve above-mentioned deficiency, the graphite boat sheet that provide a kind of and can make the plated film of silicon chip even, solar conversion efficiency is high.
Realize that the utility model purpose technical scheme is: a kind of graphite boat sheet, comprise graphite boat sheet body, be positioned at the silicon chip location cavity at graphite boat sheet body middle part, be fixed on the peripheral graphite boat technique nail of each silicon chip location cavity, the cross section of described silicon chip positioning chamber is alphabetical I type.
Above-mentioned graphite boat sheet, described silicon chip positioning chamber are the cavity of graphite boat sheet body surface.
Above-mentioned graphite boat sheet, described silicon chip positioning chamber is equipped with on the positive and negative surface of graphite boat sheet body, and it is the cavity that does not run through the graphite boat body that accounts for graphite boat sheet body thickness 1/5 for the degree of depth.
Above-mentioned graphite boat sheet, described silicon chip positioning chamber is equipped with on the positive and negative surface of graphite boat sheet body, and it is 0.5 millimeter the cavity that does not run through the graphite boat body for the degree of depth.
Above-mentioned graphite boat sheet, described graphite boat sheet body single face has 7 ~ 13 of silicon chip positioning chambers.
Above-mentioned graphite boat sheet, described silicon chip positioning chamber horizontal center line and horizontal plane form the angle of 5 ~ 10 degree.
Above-mentioned graphite boat sheet, described graphite boat technique nail is arranged on the cavity periphery of each graphite boat body, and each cavity periphery has 3 graphite boat technique nails.
Above-mentioned graphite boat sheet, the positive and negative of graphite boat body all have the groove of UNICOM's silicon chip location cavity.
The utlity model has positive effect: (1) is simple in structure; (2) offer silicon chip location cavity at the graphite boat sheet, and slot at the graphite boat sheet, vacuumize in the silicon chip film-coated process, so that silicon chip is fixed on the graphite boat sheet more closely; (3) silicon chip location cavity and the angle that becomes 5 ~ 10 degree are convenient to better installation and the extraction of silicon chip.
Description of drawings
Content of the present utility model is easier to be expressly understood in order to make, and the below is described in further detail the utility model, wherein according to specific embodiment also by reference to the accompanying drawings
Fig. 1 is the utility model structural representation.
Wherein: 1 graphite boat sheet body, 2 silicon chips location cavity, 3 graphite boat techniques nail, 4 grooves.
Embodiment
Embodiment (1)
See Fig. 1, the utlity model has graphite boat sheet body 1, be positioned at the silicon chip location cavity 2 at graphite boat sheet body 1 middle part, be fixed on the peripheral graphite boat technique nail 3 of each silicon chip location cavity 2, the cross section of described silicon chip location cavity 2 is alphabetical I type, be equipped with silicon chip location cavity 2 on graphite boat sheet body 1 positive and negative surface, it is the cavity that does not run through graphite boat body 1 that accounts for graphite boat sheet body 1 thickness 1/5 for the degree of depth, 2.5 millimeters of graphite boat sheet body thickness, 0.5 millimeter of silicon chip location cavity depth, whole silicon chip location cavity is square, and quantity is each 7 of positive and negatives.Silicon chip location cavity 2 horizontal center lines and horizontal plane form the angle of 5 degree; Graphite boat technique nail 3 is arranged on the cavity periphery of each graphite boat body 1, and each cavity periphery has 3 graphite boat technique nails 3; The positive and negative of graphite boat body 1 all has the groove 4 of UNICOM's silicon chip location cavity 2.
Above-described specific embodiment; the purpose of this utility model, technical scheme and beneficial effect are further described; institute is understood that; the above only is specific embodiment of the utility model; be not limited to the utility model; all within spirit of the present utility model and principle, any modification of making, be equal to replacement, improvement etc., all should be included within the protection range of the present utility model.
Claims (8)
1. graphite boat sheet, comprise graphite boat sheet body (1), be positioned at the silicon chip location cavity (2) at graphite boat sheet body (1) middle part, be fixed on the peripheral graphite boat technique nail (3) of each silicon chip location cavity (2), it is characterized in that: the cross section of described silicon chip location cavity (2) is alphabetical I type.
2. described graphite boat sheet according to claim 1, it is characterized in that: described silicon chip location cavity (2) is the cavity on graphite boat sheet body (1) surface.
3. described graphite boat sheet according to claim 1 and 2, it is characterized in that: be equipped with silicon chip location cavity (2) on the positive and negative surface of graphite boat sheet body (1), it is the cavity that does not run through graphite boat body (1) that accounts for graphite boat sheet body (1) thickness 1/5 for the degree of depth.
4. described graphite boat sheet according to claim 3, it is characterized in that: described silicon chip location cavity (2) is equipped with on the positive and negative surface of graphite boat sheet body (1), and it is 0.5 millimeter the cavity that does not run through graphite boat body (1) for the degree of depth.
5. want 1 described graphite boat sheet according to right, it is characterized in that: described graphite boat sheet body (1) single face has (2) 7 ~ 13 of silicon chip location cavitys.
6. described graphite boat sheet according to claim 1, it is characterized in that: described silicon chip location cavity (2) horizontal center line forms 5 ~ 10 angles of spending with horizontal plane.
7. described graphite boat sheet according to claim 1, it is characterized in that: described graphite boat technique nail (3) is arranged on the cavity periphery of each graphite boat body (1), and each cavity periphery has 3 graphite boat techniques nails (3).
8. described graphite boat sheet according to claim 1, it is characterized in that: graphite boat body (1) positive and negative all has the groove (4) of UNICOM's silicon chip location cavity (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220404164 CN202796887U (en) | 2012-08-15 | 2012-08-15 | Graphite boat sheet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220404164 CN202796887U (en) | 2012-08-15 | 2012-08-15 | Graphite boat sheet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202796887U true CN202796887U (en) | 2013-03-13 |
Family
ID=47824091
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220404164 Expired - Fee Related CN202796887U (en) | 2012-08-15 | 2012-08-15 | Graphite boat sheet |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202796887U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106191817A (en) * | 2016-09-23 | 2016-12-07 | 国家电投集团西安太阳能电力有限公司 | Solar silicon wafers plated film graphite boat piece and graphite boat |
-
2012
- 2012-08-15 CN CN 201220404164 patent/CN202796887U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106191817A (en) * | 2016-09-23 | 2016-12-07 | 国家电投集团西安太阳能电力有限公司 | Solar silicon wafers plated film graphite boat piece and graphite boat |
| CN106191817B (en) * | 2016-09-23 | 2018-10-16 | 国家电投集团西安太阳能电力有限公司 | Solar silicon wafers plated film graphite boat piece and graphite boat |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130313 Termination date: 20130815 |