CN204825048U - Silicon chip is boat oar equipment for vapour deposition - Google Patents
Silicon chip is boat oar equipment for vapour deposition Download PDFInfo
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- CN204825048U CN204825048U CN201520549334.4U CN201520549334U CN204825048U CN 204825048 U CN204825048 U CN 204825048U CN 201520549334 U CN201520549334 U CN 201520549334U CN 204825048 U CN204825048 U CN 204825048U
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- boat
- boat oar
- oar body
- dog
- block
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Abstract
The utility model relates to a silicon chip is boat oar equipment for vapour deposition, including boat oar body, push rod with this body coupling of boat oar, push rod connects on the slip case, slip case side is equipped with the lead screw cover, the lead screw cover cooperates with the turnscrew that sets up in the frame, the turnscrew is connected at the motor drive of frame with the setting, the slip case cooperates with the slide rail that sets up in the frame, be equipped with the ascending slide opening of opening on the boat oar body, be equipped with the dog in the slide opening, be equipped with reset spring between dog bottom and the boat oar body, reset spring is used for the ejecting boat oar in dog top, the dog is the inclined plane towards boat oar body head one side, the inclined plane extends to in the slide opening, the dog is vertical on one side of boat oar afterbody. The utility model discloses utilizing the preceding inclined plane of flexible dog and dog, putting the dislocation when putting at the graphite boat, the dog is retract down in the extrusion of inclined plane atress, and electrode and graphite boat prevent to wound, through the motion of transmission screw actuation boat oar body, the transmission is steady.
Description
Technical field
The utility model relates to silicon chip production unit technical field, particularly a kind of silicon chip vapour deposition boat oarage.
Background technology
Chemical vapour deposition (CVD) is that reactant gases decomposes concurrent biochemical reaction under certain condition, and the final solid matter that generates is deposited on matrix surface film forming a kind of technology then.In technique compared with other film deposition techniques, there is the advantages such as sedimentation velocity is fast, film quality is good, and be widely used in the fields such as electronics, photoelectron, surface modification.The shortcoming of this technology is that deposition process temperature is too high, general between (900 DEG C ~ 1200 DEG C), processed matrix at high temperature yielding, matrix grain is grown up, is caused substrate performance to change, the even alloy base material of some relative low melting point: as (Al alloy) cannot apply, and PECVD improves these shortcomings of CVD to a great extent.PECVD know-why utilizes low-temperature plasma to make energy source, sample is placed on the negative electrode of glow discharge under subatmospheric, glow discharge (or separately adding heating element) is utilized to make sample be warmed up to predetermined temperature, then appropriate reactant gases is passed into, gas, through series of chemical and plasma reaction, forms solid film at sample surfaces.The feature that PECVD method is different from other CVD method is that they can provide the intensity of activation needed for chemical vapor deposition processes containing a large amount of high-octane electronics in plasma body.The collision of electronics and gas molecule in space can promote the decomposition of gas molecule, chemical combination, excite and ionization process, generate active very high various chemical groups, thus significantly reduce the temperature range of CVD thin film deposition, make originally to need the CVD process at high temperature just can carried out to be realized at low temperatures.
Utility model content
For the deficiencies in the prior art, the purpose of this utility model is to provide a kind of silicon chip vapour deposition boat oarage.
The utility model solves the technical scheme that its technical problem adopts: a kind of silicon chip vapour deposition boat oarage, comprise boat oar body, the push rod be connected with described boat oar body, described push rod is connected on slip case, described slip case side is provided with screw set, described screw set coordinates with the turn-screw be arranged in frame, described turn-screw drives with the motor being arranged on frame and is connected, described slip case coordinates with the slide rail be arranged in frame, described boat oar body is provided with the slide opening of opening upwards, block is provided with in described slide opening, return spring is provided with between described stop bottom and described boat oar body, described return spring is used for described block top to eject boat oar, described block is inclined-plane towards boat oar body head side, described inclined-plane extends in slide opening, described block is vertical plane towards boat oar afterbody side.
Utilize the inclined-plane before flexible block and block in above-mentioned design, when graphite boat misplaces position, described block is retracted under the stressed extruding in inclined-plane, prevents wound electrode and graphite boat; The motion of boat oar body is driven, stable drive by turn-screw.
As the further improvement of the design, described boat oar body is connected by contiguous block with push rod, and described boat oar body and contiguous block junction are hinged with baffle plate, and described contiguous block is provided with the adjustment bolt of level, and described adjustment bolt end and baffle plate afterbody are fitted.Described baffle angle is adjustable, is convenient to support difform graphite boat, prevents graphite boat from damaging.
As the further improvement of the design, described block side is provided with sliding pawl, and described sliding pawl coordinates with the chute be arranged on boat oar body, and anti-stop block is stuck, is convenient to block and stretches smooth.
As the further improvement of the design, described slip case is provided with upper and lower two clamping plates, and described slip case side is provided with trimming bolt, and described trimming bolt withstands described clamping plate.Described clamping plate are convenient to the front and back position adjusting boat oar body, and described trimming bolt is convenient to the locus adjusting boat oar body, prevents boat oar body and equipment from colliding.
As the further improvement of the design, described boat oar body head is the conical surface, is convenient to guide boat oar body access arrangement.
The beneficial effects of the utility model are: the utility model utilizes the inclined-plane before flexible block and block, and when graphite boat misplaces position, described block is retracted under the stressed extruding in inclined-plane, prevents wound electrode and graphite boat; The motion of boat oar body is driven, stable drive by turn-screw.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the utility model is further illustrated.
Fig. 1 is side structure schematic diagram of the present utility model.
Fig. 2 is slip case schematic top plan view of the present utility model.
Fig. 3 is block position of the present utility model partial schematic diagram.
Fig. 4 is slip case of the present utility model and turn-screw fit structure schematic diagram.
1. boat oar bodies in the drawings, 2. block, 3. baffle plate, 4. adjust bolt, 5. contiguous block, 6. push rod, 7. clamping plate, 8. trimming bolt, 9. return spring, 10. slide rail, 11. turn-screws, 12. motors, 13. screw sets, 14. frames, 15. slip casees, 16. slide openings, 17. sliding pawls, 18. chutes.
Embodiment
The utility model is described in detail, illustrative examples wherein and illustrate and be only used for explaining the utility model below in conjunction with accompanying drawing and specific embodiment, but not as to restriction of the present utility model.
Embodiment: a kind of silicon chip vapour deposition boat oarage, comprise boat oar body 1, the push rod 6 be connected with described boat oar body 1, described push rod 6 is connected on slip case 15, described slip case 15 side is provided with screw set 13, described screw set 13 coordinates with the turn-screw 11 be arranged in frame 14, described turn-screw 11 drives with the motor 12 being arranged on frame 14 and is connected, described slip case 15 coordinates with the slide rail 10 be arranged in frame 14, described boat oar body 1 is provided with the slide opening 16 of opening upwards, block 2 is provided with in described slide opening 16, return spring 9 is provided with bottom described block 2 and between described boat oar body 1, described return spring 9 is for ejecting boat oar by described block 2 top, described block 2 is inclined-plane towards boat oar body 1 head side, described inclined-plane extends in slide opening 16, described block 2 is vertical plane towards boat oar afterbody side.
Utilize the inclined-plane before flexible block 2 and block 2 in above-mentioned design, when graphite boat misplaces position, described block 2 is retracted under the stressed extruding in inclined-plane, prevents wound electrode and graphite boat; Boat oar body 1 is driven to move by turn-screw 11, stable drive.
As the further improvement of the design, described boat oar body 1 is connected by contiguous block 5 with push rod 6, described boat oar body 1 is hinged with baffle plate 3 with contiguous block 5 junction, and described contiguous block 5 is provided with the adjustment bolt 4 of level, and described adjustment bolt 4 end and baffle plate 3 afterbody are fitted.Described baffle plate 3 adjustable angle, is convenient to support difform graphite boat, prevents graphite boat from damaging.
As the further improvement of the design, described block 2 side is provided with sliding pawl 17, and described sliding pawl 17 coordinates with the chute 18 be arranged on boat oar body 1, and anti-stop block 2 is stuck, is convenient to block 2 and stretches smooth.
As the further improvement of the design, described slip case 15 is provided with upper and lower two clamping plates 7, and described slip case 15 side is provided with trimming bolt 8, and described trimming bolt 8 withstands described clamping plate 7.Described clamping plate 7 are convenient to the front and back position adjusting boat oar body 1, and described trimming bolt 8 is convenient to the locus adjusting boat oar body 1, prevents boat oar body 1 and equipment from colliding.
As the further improvement of the design, described boat oar body 1 head is the conical surface, is convenient to guide boat oar body 1 access arrangement.
The foregoing is only embodiment of the present utility model; not thereby the scope of the claims of the present utility model is limited; every utilize the utility model specification sheets and accompanying drawing content to do equivalent structure or equivalent flow process conversion; or be directly or indirectly used in other relevant technical fields, be all in like manner included in scope of patent protection of the present utility model.
Claims (5)
1. a silicon chip vapour deposition boat oarage, it is characterized in that, comprise boat oar body, the push rod be connected with described boat oar body, described push rod is connected on slip case, described slip case side is provided with screw set, described screw set coordinates with the turn-screw be arranged in frame, described turn-screw drives with the motor being arranged on frame and is connected, described slip case coordinates with the slide rail be arranged in frame, described boat oar body is provided with the slide opening of opening upwards, block is provided with in described slide opening, return spring is provided with between described stop bottom and described boat oar body, described return spring is used for described block top to eject boat oar, described block is inclined-plane towards boat oar body head side, described inclined-plane extends in slide opening, described block is vertical plane towards boat oar afterbody side.
2. a kind of silicon chip vapour deposition boat oarage according to claim 1, it is characterized in that, described boat oar body is connected by contiguous block with push rod, described boat oar body and contiguous block junction are hinged with baffle plate, described contiguous block is provided with the adjustment bolt of level, and described adjustment bolt end and baffle plate afterbody are fitted.
3. a kind of silicon chip vapour deposition boat oarage according to claim 1, it is characterized in that, described block side is provided with sliding pawl, and described sliding pawl coordinates with the chute be arranged on boat oar body.
4. a kind of silicon chip vapour deposition boat oarage according to claim 1, it is characterized in that, described slip case is provided with upper and lower two clamping plates, and described slip case side is provided with trimming bolt, and described trimming bolt withstands described clamping plate.
5. a kind of silicon chip vapour deposition boat oarage according to claim 1, it is characterized in that, described boat oar body head is the conical surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520549334.4U CN204825048U (en) | 2015-07-28 | 2015-07-28 | Silicon chip is boat oar equipment for vapour deposition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520549334.4U CN204825048U (en) | 2015-07-28 | 2015-07-28 | Silicon chip is boat oar equipment for vapour deposition |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204825048U true CN204825048U (en) | 2015-12-02 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520549334.4U Expired - Fee Related CN204825048U (en) | 2015-07-28 | 2015-07-28 | Silicon chip is boat oar equipment for vapour deposition |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204825048U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106756892A (en) * | 2016-11-16 | 2017-05-31 | 湖南红太阳光电科技有限公司 | A kind of graphite boat boat pushing mechanism for PECVD device |
| CN108456874A (en) * | 2017-12-20 | 2018-08-28 | 湖南红太阳光电科技有限公司 | A kind of Tubular PECVD device graphite boat electrode inlet device |
| CN110904439A (en) * | 2019-10-23 | 2020-03-24 | 深圳市拉普拉斯能源技术有限公司 | Novel boat transportation structure |
| CN114808116A (en) * | 2022-05-20 | 2022-07-29 | 中国电子科技集团公司第十一研究所 | Graphite boat applied to horizontal liquid phase epitaxy technology |
-
2015
- 2015-07-28 CN CN201520549334.4U patent/CN204825048U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106756892A (en) * | 2016-11-16 | 2017-05-31 | 湖南红太阳光电科技有限公司 | A kind of graphite boat boat pushing mechanism for PECVD device |
| CN108456874A (en) * | 2017-12-20 | 2018-08-28 | 湖南红太阳光电科技有限公司 | A kind of Tubular PECVD device graphite boat electrode inlet device |
| CN108456874B (en) * | 2017-12-20 | 2020-04-03 | 湖南红太阳光电科技有限公司 | Graphite boat electrode introducing device of tubular PECVD (plasma enhanced chemical vapor deposition) equipment |
| CN110904439A (en) * | 2019-10-23 | 2020-03-24 | 深圳市拉普拉斯能源技术有限公司 | Novel boat transportation structure |
| CN110904439B (en) * | 2019-10-23 | 2020-12-29 | 深圳市拉普拉斯能源技术有限公司 | Novel boat transportation structure |
| CN114808116A (en) * | 2022-05-20 | 2022-07-29 | 中国电子科技集团公司第十一研究所 | Graphite boat applied to horizontal liquid phase epitaxy technology |
| CN114808116B (en) * | 2022-05-20 | 2023-08-15 | 中国电子科技集团公司第十一研究所 | Graphite boat applied to horizontal liquid phase epitaxy technology |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151202 Termination date: 20180728 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |