CN108456874B - Graphite boat electrode introducing device of tubular PECVD (plasma enhanced chemical vapor deposition) equipment - Google Patents
Graphite boat electrode introducing device of tubular PECVD (plasma enhanced chemical vapor deposition) equipment Download PDFInfo
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- CN108456874B CN108456874B CN201711382216.9A CN201711382216A CN108456874B CN 108456874 B CN108456874 B CN 108456874B CN 201711382216 A CN201711382216 A CN 201711382216A CN 108456874 B CN108456874 B CN 108456874B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/507—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using external electrodes, e.g. in tunnel type reactors
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/517—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using a combination of discharges covered by two or more of groups C23C16/503 - C23C16/515
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Resistance Heating (AREA)
Abstract
The invention discloses a graphite boat electrode leading-in device of tubular PECVD equipment, which comprises graphite boat feet arranged on a graphite boat and a supporting component used for supporting the graphite boat, wherein a graphite boat seat corresponding to the graphite boat feet is arranged on the supporting component, and the graphite boat seat is electrically connected with a graphite boat electrode rod through a connecting component. The graphite boat electrode introducing device of the tubular PECVD equipment has the advantages of high electrode counter efficiency, high reliability and the like.
Description
Technical Field
The invention mainly relates to the technical field of semiconductor processing, in particular to a graphite boat electrode introducing device of a tubular PECVD device.
Background
The tubular PECVD equipment is coating deposition equipment in semiconductor processing, is widely applied to coating and deposition processes in integrated circuits, discrete devices and solar photovoltaic industries, and is particularly suitable for occasions with high requirements on junction depth and uniformity indexes. The specific principle is that a high-frequency power supply is utilized to excite gas glow discharge to form plasma, and decomposition, combination, excitation and ionization of process gas molecules are promoted under the action of an electromagnetic field, so that the generation of reactive groups is accelerated, and the deposition temperature of a film is reduced. So that the chemical deposition reaction which originally can be carried out under the high-temperature condition can be carried out at a lower temperature (400 ℃), thereby effectively avoiding the diffusion of doping impurities in the substrate under the high-temperature condition and reducing the internal stress of the film. The film coating is a key link in the production of photovoltaic cells, and the performance of tubular PECVD equipment directly influences the efficiency and the capacity of the cells.
The tubular PECVD equipment utilizes radio frequency power supply discharge to ionize process gas so as to realize a film coating function, and the graphite boat enables two adjacent boat sheets to be mutually a cathode and an anode through specific structural combination, so the discharge can be realized only by introducing the positive electrode and the negative electrode of the radio frequency power supply onto the graphite boat. In the conventional tubular PECVD (Plasma Enhanced Chemical vapor deposition, which is fully called Plasma Enhanced Chemical vapor deposition) equipment, the graphite boat electrode introducing mode is that electrode rods of positive and negative electrodes of a radio frequency power supply are inserted into two electrode introducing holes at corresponding positions of the graphite boat. In each process period, the graphite boat needs to enter and exit the reaction chamber once, the graphite boat needs to be a counter electrode when entering the reaction chamber, and the conventional counter electrode has two modes:
1. one is a middle counter electrode mode: the push boat (graphite boat loading mechanism) carries the graphite boat to rapidly advance from the upper position, when the graphite boat is close to the electrode rod, the push boat descends from the upper position to the middle position, then the push boat slowly advances (the speed is too high and the impact is generated), the electrode introducing hole of the graphite boat is embedded into the electrode rod, and the push boat continues to descend until the push boat is separated from the graphite boat and then retreats out of the reaction chamber. However, the middle electrode mode has a middle position, which prolongs the boat feeding time, thus prolonging the process period, and simultaneously prolonging the boat feeding time also leads to the increase of the opening time of the furnace door, which also increases the process temperature reduction range of the reaction chamber, thus increasing the temperature return time, further prolonging the process period and reducing the capacity of the equipment.
2. Another mode is an upper counter electrode mode: the push boat is fed from the upper position at a constant speed, the electrode introducing hole of the graphite boat is directly embedded into the electrode rod, then the push boat descends, the graphite boat drives the electrode rod of the radio frequency power supply to descend together until the graphite boat falls on the tube wall of the quartz process tube, and then the push boat continues to descend until the graphite boat is separated from the graphite boat and then exits from the reaction chamber. The upper counter electrode mode can save the time for pushing the middle counter electrode in the boat, but the requirement on the elasticity of the electrode rod is high, and the electrode rod is easy to generate permanent deformation at the temperature of about 400 ℃, so that the position deviation of the electrode rod is caused, the condition that the graphite boat is not used for the electrode rod is generated, and the reliability of the equipment is reduced.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: aiming at the technical problems in the prior art, the invention provides a graphite boat electrode introducing device of a tubular PECVD device, which has high electrode pair efficiency and electrode introducing reliability.
In order to solve the technical problems, the technical scheme provided by the invention is as follows:
the utility model provides a tubular PECVD equipment graphite boat electrode introducing device, is including installing the graphite boat foot on the graphite boat and the supporting component who is used for supporting the graphite boat, be provided with the graphite boat seat corresponding with graphite boat foot on the supporting component, graphite boat seat is connected with graphite boat electrode bar electricity through a connecting component.
As a further improvement of the above technical solution:
the number of the graphite boat feet is four, and the graphite boat feet are respectively positioned at four corners of the graphite boat.
The graphite boat comprises a graphite boat seat, a graphite boat support and a support assembly, wherein the graphite boat seat is arranged on the insulation support rods in a sleeved mode, two graphite boat feet of the graphite boat correspond to the graphite boat seat, and insulation spacer sleeves are sleeved on the insulation support rods and correspond to the other two graphite boat feet.
And the insulating support rod is provided with a limiting assembly for limiting the insulating spacer bush.
The limiting assembly comprises limiting sleeves located on two sides of the insulating spacer bush, and the limiting sleeves on two sides of the insulating spacer bush are sleeved on the insulating support rod and connected through a connecting rod.
The insulating support rod is a ceramic support rod.
The connecting assembly comprises a supporting plate, an electrode rod sleeve, an insulating seat and an electrode leading-in rod, wherein one end of the electrode rod sleeve is connected with the graphite boat electrode rod, and the other end of the electrode rod sleeve is inserted into the insulating seat; the insulating seat is fixed on the supporting plate, one end of the electrode introducing rod is connected with the electrode rod sleeve in the insulating sleeve, and the other end of the electrode introducing rod is fixedly connected with the graphite boat seat.
The graphite boat seat is provided with a through hole, and the electrode introducing rod penetrates into the through hole and is fastened through nuts at two ends of the electrode introducing rod.
The both ends of electrode introducing rod all are equipped with the external screw thread, electrode rod cover is equipped with the internal thread, electrode introducing rod and electrode rod cover threaded connection.
The connecting assembly further comprises an electrode rod sleeve pressing plate, the insulating sleeve clamp is arranged between the electrode rod sleeve pressing plate and the supporting plate, and the electrode rod sleeve pressing plate is fastened and connected with the supporting plate through bolts.
Compared with the prior art, the invention has the advantages that:
according to the graphite boat electrode leading-in device of the tubular PECVD equipment, the graphite boat electrode rod is connected with the graphite boat seat on the supporting component through the connecting component, a counter electrode is not needed, the graphite boat is directly placed on the supporting component, and the graphite boat foot is ensured to correspond to the graphite boat seat, so that the leading-in of a graphite boat power supply can be realized, the time of the graphite boat for the counter electrode is saved, the process time is saved, and the electrode leading-in reliability is greatly improved.
Drawings
FIG. 1 is a schematic view of the present invention.
FIG. 2 is a second schematic structural diagram of the present invention.
Fig. 3 is a schematic structural view of the support plate of the present invention.
FIG. 4 is a schematic view of the structure of the graphite boat foot and the graphite boat seat of the present invention.
FIG. 5 is a diagram of an embodiment of the present invention in a specific application.
The reference numbers in the figures denote: 1. a first electrode rod sleeve; 2. a second electrode rod sleeve; 3. a connecting assembly; 31. a first electrode lead-in rod; 32. a first ceramic support rod; 33. a first graphite boat mount; 34. a first electrode connecting rod; 35. a second graphite boat mount; 36. a first ceramic spacer; 37. a third graphite boat seat; 38. a fourth graphite boat seat; 39. a second electrode connecting rod; 40. a second ceramic support rod; 41. a fifth graphite boat seat; 42. a second ceramic spacer sleeve; 43. a sixth graphite boat mount; 44. a second electrode lead-in rod; 51. a support plate; 52. a first platen; 53. a first electrode insulating base; 54. a second platen; 55. a second electrode insulating base; 4. graphite boat feet; 5. a graphite boat; 6. an electrode rod.
Detailed Description
The invention is further described below with reference to the figures and the specific embodiments of the description.
As shown in fig. 1 to fig. 5, the graphite boat electrode introducing apparatus for tubular PECVD equipment of the present embodiment includes graphite boat pins 4 mounted on a graphite boat 5 and a supporting component for supporting the graphite boat 5, wherein a graphite boat seat corresponding to the graphite boat pins 4 is disposed on the supporting component, and the graphite boat seat is electrically connected with an electrode rod 6 of the graphite boat 5 through a connecting component 3. According to the graphite boat electrode introducing device of the tubular PECVD equipment, the electrode rod 6 of the graphite boat 5 is connected with the graphite boat seat on the supporting component through the connecting component 3, no counter electrode is needed, the graphite boat 5 is directly placed on the supporting component, and the graphite boat foot 4 is ensured to correspond to the graphite boat seat, so that the introduction of the power supply of the graphite boat 5 can be realized, the time of the graphite boat 5 for the electrode is saved, the process time is saved, and the electrode introducing reliability is greatly improved.
In this embodiment, the number of the graphite boat legs 4 is four, and the four graphite boat legs are respectively located at four corners of the graphite boat 5; the graphite boat comprises a graphite boat seat (33) and a graphite boat seat (38), wherein the graphite boat seat (33) and the graphite boat seat (38) are respectively sleeved on the insulating support rods in a corresponding manner, two graphite boat feet 4 of the graphite boat 5 correspond to the graphite boat seats (33 and 38), insulating spacers (36 and 42) are sleeved on the insulating support rods in positions corresponding to the other two graphite boat feet 4, and limiting components for limiting the insulating spacers are arranged on the insulating support rods; the limiting assembly comprises limiting sleeves located on two sides of the insulating spacer bush, the limiting sleeves on two sides of the insulating spacer bush are arranged on the insulating support rod and connected through a connecting rod, specifically, the limiting sleeves all adopt graphite boat seats, two ends of the first ceramic spacer bush 36 are respectively provided with a second graphite boat seat 35 and a third graphite boat seat 37, and two ends of the second ceramic spacer bush 42 are respectively provided with a fifth graphite boat seat 41 and a sixth graphite boat seat 43.
In this embodiment, the connecting assembly 3 includes a supporting plate 51, an electrode rod sleeve (including a first electrode rod sleeve 1 and a second electrode rod sleeve 2), an insulating base (including a first electrode insulating base 53 and a second electrode insulating base 55), and an electrode introducing rod (including a first electrode introducing rod 31 and a second electrode introducing rod 44), wherein one end of the electrode rod sleeve is connected with the electrode rod 6 of the graphite boat 5, and the other end of the electrode rod sleeve is inserted into the insulating base; the insulating seat is fixed on the supporting plate 51, one end of the electrode lead-in rod is connected with the electrode rod sleeve in the insulating sleeve, and the other end of the electrode lead-in rod is fixedly connected with the graphite boat seat; the graphite boat seat is provided with a through hole, and the electrode leading-in rod penetrates into the through hole and is fastened through nuts at two ends of the electrode leading-in rod. The two ends of the electrode introducing rod are provided with external threads, the electrode rod sleeve is provided with internal threads, and the electrode introducing rod is in threaded connection with the electrode rod sleeve. In addition, the connecting assembly 3 further comprises an electrode rod sleeve pressing plate (comprising a first pressing plate 52 and a second pressing plate 54), the insulating sleeve is clamped between the electrode rod sleeve pressing plate and the supporting plate 51, and the electrode rod sleeve pressing plate and the supporting plate 51 are fastened and connected through bolts.
The graphite boat electrode introducing device of the tubular PECVD equipment is further described by combining an example as follows:
both ends of the first electrode leading-in rod 31 are provided with enough long threads, one end of the first electrode leading-in rod is screwed into a first electrode rod sleeve 1 with internal threads, the first electrode rod sleeve 1 is locked on the supporting plate 51 through a nut, the other end of the first electrode leading-in rod 31 passes through a through hole below the first graphite boat seat 33, and both ends of the first graphite boat seat 33 are locked through nuts; both ends of the first electrode connecting rod 34 are provided with enough long threads, and pass through the through holes on the first graphite boat seat 33, the second graphite boat seat 35 and the third graphite boat seat 37 from left to right once, and are locked by nuts at both sides of each graphite boat seat; the middle parts of the first graphite boat seat 33, the second graphite boat seat 35 and the third graphite boat seat 37 are provided with through holes slightly larger than the outer diameter of the first ceramic support rod 32, and the three graphite boat seats are connected in series by the first ceramic support rod 32; wherein, a first ceramic spacer 36 is sleeved on the first ceramic support rod 32 between the second graphite boat seat 35 and the third graphite boat seat 37.
Similarly, both ends of the second electrode introducing rod 44 are provided with threads long enough, and one end of the second electrode introducing rod is screwed into the second electrode rod sleeve 2 with internal threads, wherein the second electrode rod sleeve 2 is locked on the supporting plate 51 through a nut, and the other end of the second electrode introducing rod 44 passes through a through hole below the sixth graphite boat seat 43 and is locked at both ends of the sixth graphite boat seat 43 through nuts; both ends of the second electrode connecting rod 39 are provided with enough long threads, pass through the through holes on the sixth graphite boat seat 43, the fifth graphite boat seat 41 and the fourth graphite boat seat 38 from left to right once, and are locked by nuts at both sides of each graphite boat seat; through holes slightly larger than the outer diameter of the second ceramic support rod 40 are formed among the fourth graphite boat seat 38, the fifth graphite boat seat 41 and the sixth graphite boat seat 43, the three graphite boat seats are connected in series through the second ceramic support rod 40, and a second ceramic spacer 42 is arranged between the fourth graphite boat seat 38 and the fifth graphite boat seat 41.
The first ceramic spacer 36 may insulate the graphite boat foot 4 falling thereon from the second graphite boat seat 35 and the third graphite boat seat 37. The second ceramic spacer 42 may insulate the graphite boat foot 4 falling thereon from the fifth graphite boat seat 41 and the sixth graphite boat seat 43.
The first pressure plate 52 and the second pressure plate 54 are fixed on the support plate 51 through bolts, wherein the first electrode insulation seat 53 is positioned between the first pressure plate 52 and the support plate 51, and the second electrode insulation seat 55 is positioned between the second pressure plate 54 and the support plate 51; the first electrode rod sleeve 1 is inserted into the first electrode insulation seat 53 and connected with the first electrode leading-in rod 31, and the second electrode rod sleeve 2 is inserted into the second electrode insulation seat 55 and connected with the second electrode leading-in rod 44. The first electrode insulator 53 insulates the first electrode rod bushing 1 from the support plate 51, and the second electrode insulator 55 insulates the second electrode rod bushing 2 from the support plate 51 to prevent the positive and negative electrodes from being short-circuited by the communication through the support plate 51.
The electrode rod 6 is connected with a second electrode leading-in rod 44 through a second electrode rod sleeve 2, and the second electrode leading-in rod 44 is connected with the fourth graphite boat seat 38 through a second electrode connecting rod 39; the electrode rod 6 is connected with a first electrode leading-in rod 31 through a first electrode rod sleeve 1, and the first electrode leading-in rod 31 is connected with a first graphite boat seat 33; two boat feet in the diagonal direction of the four boat feet of the graphite boat 5 are mutually positive and negative. When the graphite boat 5 is placed on the ceramic support rod, two opposite boat legs are respectively placed on the first graphite boat seat 33 and the fourth graphite boat seat 38, and the other two opposite boat legs are respectively placed on the first ceramic spacer 36 and the second ceramic spacer 42; the positive and negative electrode rods 6 are respectively introduced into the graphite boat 5 through the first graphite boat holder 33 and the fourth graphite boat holder 38.
The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above-mentioned embodiments, and all technical solutions belonging to the idea of the present invention belong to the protection scope of the present invention. It should be noted that modifications and embellishments within the scope of the invention may be made by those skilled in the art without departing from the principle of the invention.
Claims (7)
1. The graphite boat electrode introducing device of the tubular PECVD equipment is characterized by comprising graphite boat feet (4) arranged on a graphite boat (5) and a supporting component for supporting the graphite boat (5), wherein a graphite boat seat corresponding to the graphite boat feet (4) is arranged on the supporting component, and the graphite boat seat is electrically connected with a graphite boat electrode rod (6) through a connecting component (3);
the number of the graphite boat feet (4) is four, and the four graphite boat feet are respectively positioned at four corners of the graphite boat (5);
the graphite boat seat is sleeved on the insulating support rods, two graphite boat feet (4) of the graphite boat (5) correspond to the graphite boat seat, and insulating spacer sleeves are sleeved on the insulating support rods at positions corresponding to the other two graphite boat feet (4);
the connecting assembly (3) comprises a supporting plate (51), an electrode rod sleeve, an insulating seat and an electrode leading-in rod, wherein one end of the electrode rod sleeve is connected with the graphite boat electrode rod (6), and the other end of the electrode rod sleeve is inserted into the insulating seat; the insulating seat is fixed on the supporting plate (51), one end of the electrode introducing rod is connected with an electrode rod sleeve in the insulating sleeve, and the other end of the electrode introducing rod is fixedly connected with the graphite boat seat.
2. The graphite boat electrode lead-in device of tubular PECVD equipment as recited in claim 1, wherein the insulating support rod is provided with a limiting component for limiting the insulating spacer.
3. The graphite boat electrode lead-in device of the tubular PECVD apparatus as recited in claim 2, wherein the limiting assembly comprises limiting sleeves at two sides of the insulating spacer sleeve, and the limiting sleeves at two sides of the insulating spacer sleeve are sleeved on the insulating support rod and connected through a connecting rod.
4. The graphite boat electrode lead-in device for tubular PECVD apparatus as in one of claims 1 to 3, wherein the insulating support rods are ceramic support rods.
5. The graphite boat electrode lead-in device of tubular PECVD equipment as recited in claim 1, wherein the graphite boat seat is provided with a through hole, and the electrode lead-in rod penetrates into the through hole and is fastened by nuts at two ends of the electrode lead-in rod.
6. The graphite boat electrode lead-in device of tubular PECVD equipment as recited in claim 1, wherein both ends of the electrode lead-in rod are provided with external threads, the electrode rod is sleeved with internal threads, and the electrode lead-in rod is in threaded connection with the electrode rod sleeve.
7. The graphite boat electrode lead-in device of the tubular PECVD equipment as recited in claim 1, wherein the connection assembly (3) further comprises an electrode rod sleeve pressing plate, the insulating sleeve is clamped between the electrode rod sleeve pressing plate and the support plate, and the electrode rod sleeve pressing plate and the support plate are fastened and connected through a bolt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711382216.9A CN108456874B (en) | 2017-12-20 | 2017-12-20 | Graphite boat electrode introducing device of tubular PECVD (plasma enhanced chemical vapor deposition) equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711382216.9A CN108456874B (en) | 2017-12-20 | 2017-12-20 | Graphite boat electrode introducing device of tubular PECVD (plasma enhanced chemical vapor deposition) equipment |
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| CN108456874A CN108456874A (en) | 2018-08-28 |
| CN108456874B true CN108456874B (en) | 2020-04-03 |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112820665B (en) * | 2019-07-30 | 2023-12-08 | 拉普拉斯新能源科技股份有限公司 | Furnace door structure for semiconductor processing equipment |
| CN111058016B (en) * | 2019-12-26 | 2022-11-25 | 北京北方华创微电子装备有限公司 | Electrode mechanism of semiconductor process furnace and semiconductor process furnace |
| CN111139460A (en) * | 2019-12-27 | 2020-05-12 | 北京北方华创微电子装备有限公司 | Radio frequency leading-in device and semiconductor processing equipment |
| CN112760620A (en) * | 2020-12-22 | 2021-05-07 | 苏州腾晖光伏技术有限公司 | Coating piece of crystalline silicon solar cell, graphite boat and application of coating piece |
| CN114411122B (en) * | 2022-01-20 | 2023-03-21 | 北京北方华创微电子装备有限公司 | Semiconductor processing equipment and process chamber thereof |
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| JP2005133128A (en) * | 2003-10-29 | 2005-05-26 | Canon Inc | Apparatus and method for plasma treatment |
| CN200968774Y (en) * | 2006-10-31 | 2007-10-31 | 北京七星华创电子股份有限公司 | Electric pole introducing arrangement used for heating graphite boat |
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| CN108456874A (en) | 2018-08-28 |
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