CN102321877B - Electrode introduction device - Google Patents
Electrode introduction device Download PDFInfo
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- CN102321877B CN102321877B CN 201110261064 CN201110261064A CN102321877B CN 102321877 B CN102321877 B CN 102321877B CN 201110261064 CN201110261064 CN 201110261064 CN 201110261064 A CN201110261064 A CN 201110261064A CN 102321877 B CN102321877 B CN 102321877B
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- graphite boat
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Abstract
The invention relates to plasma enhanced chemical vapor deposition equipment, and discloses an electrode introduction device, which comprises two parallel electrodes brackets, wherein one end of each electrode bracket is connected with a furnace door electrode, and the other end of the electrode bracket is a metal contact and is connected with an electrode block on a graphite boat. The electrode introduction device also comprises a connecting rod penetrating through a furnace door, wherein one end of the connecting rod extending into the inner side of the furnace door is connected with a graphite boat supporting rod, and the graphite boat supporting rod is at least two parallel silicon carbide rods. In the invention, the electrode introduction device adopts a lapped joint mode, the metal contacts are directly connected with the furnace door electrodes through the graphite boat supporting rods, two graphite pads on the graphite boat act as the two electrode blocks, and a bulge is arranged on each metal contact at the position contacted with a groove on the electrode block, accordingly, the contact is good, and the degree of automation is high; the silicon carbide dual rods can withstand the temperature of over 1000 DEG C and are not easily deformed, so the stability of electrode contact is improved; and a mechanical mechanism is simple, the cost is low, and the assembly difficulty is reduced.
Description
Technical field
The present invention relates to plasma enhanced chemical vapor deposition equipment, particularly relate to a kind of electrode introducing device.
Background technology
Four pipe horizontal plasmas strengthen chemical vapour deposition, and (Plasma Enhanced Chemical Vapor Deposition, PECVD) function of equipment is, utilizes high-frequency electric field to excite in the quartzy cavity of high vacuum, decomposition technique gas SiH
4, NH
3, at the formation of deposits Si of sample surfaces
3N
4Film.Deposit Si
3N
4The time, Si does not only grow
3N
4As antireflective coating, generated a large amount of hydrogen atoms simultaneously, these hydrogen atoms not only have the surface passivation effect, dislocation, surperficial dangling bonds in simultaneously can well passivation silicon, thereby carrier mobility in the raising silicon chip has the effect of body passivation, improves battery sheet efficiency of conversion greatly.This automation degree of equipment height is one of equipment of most critical on the manufacture of solar cells line.
Among the horizontal PECVD of four pipes, it is the key part of equipment that electrode is introduced.Electrode is introduced stability and the reliability that directly influences apparatus and process.The electrode introducing device that tradition is used adopts joint form, and the electrode contact of fire door is connected to contact base on the insulcrete firmly, and the electrode contact of metal material closely contacts with contact base by the deadweight of graphite boat, finishes electrode and connects; When getting boat, only need graphite boat is lifted gently, electrode contact is and contact base is thrown off voluntarily.The kind electrode mode of connection only is applicable to manually puts boat, is not suitable for mechanical manipulator and gets boat automatically, can not satisfy the requirement of large-scale production.
And, among the horizontal PECVD of four pipes, the cantilever fire door is the feeding drawing mechanism of equipment, it is one of most important structure that guarantees technology, the cantilever door structure that tradition is used, it is the mechanism of two bar scoops, graphite boat drops on the metal scoop, and the metal scoop carries out thin-film deposition along with graphite boat enters reaction chamber jointly, because deposition process temperature is higher, the stainless steel scoop heats in reaction chamber for a long time, easy deformation, and the metal scoop is heavier, and structure is complicated, difficulty of processing is big, and the distortion of stainless steel scoop directly has influence on device interior and introduces the electrode stability in contact.
Summary of the invention
(1) technical problem that will solve
The technical problem to be solved in the present invention is how to realize among the horizontal PECVD of four pipes cooperating consistence and raising electrode stability in contact between electrode introducing device and the mechanical manipulator automatic clamping and placing graphite boat.
(2) technical scheme
In order to solve the problems of the technologies described above, the invention provides a kind of electrode introducing device, it comprises: two electrode suppors that are set up in parallel; One end of each electrode suppor links to each other with a fire door electrode, and the other end is metal contact, links to each other with electrode block on the graphite boat.
Wherein, described electrode block has two, lays respectively at the graphite boat both sides, and has groove on every cube electrode piece.
Wherein, on described each metal contact, be provided with projection with the position of electrode block contact grooves.
Wherein, the direction of described groove depression is identical with the direction of described projection protrusion.
Wherein, described graphite boat is placed on the graphite boat support bar, and described graphite boat support bar links to each other with fire door is inboard, and described graphite boat support bar is at least two Globars arranged side by side.
Wherein, Globar end arranged side by side is provided with the metal contiguous block, so that Globar is fixedly connected.
Wherein, described Globar is provided with at least two bracing frames, in order to support graphite boat.
Wherein, support frame as described above is metal supporting frames, is provided with insulcrete with the graphite boat position contacting on it; Be arranged with insulation covering on the Globar of at least one side of support frame as described above.
Wherein, two described electrode suppors are kept apart itself and conductive component on every side by the insulation module.
Wherein, described electrode block adopts the graphite cushion block.
(3) beneficial effect
The electrode introducing device that technique scheme provides, on the one hand, adopt joint form, rely on electrode suppor with metal contact directly and the fire door electrode couple together, two graphite cushion blocks on the graphite boat serve as two electrode blocks, on each metal contact, be provided with projection with the contacted position of electrode block upper groove.When putting boat, mechanical manipulator falls graphite boat gently, and metal contact closely contacts with two electrode blocks of graphite boat, finishes electrode and connects; When getting boat, only need graphite boat is lifted gently, metal contact and graphite boat electrode block are thrown off voluntarily, and be simple and reasonable, economical, increased level of automation, and satisfy requirement of massive production; On the other hand, use single pole clamping silicon carbide double stick structure, graphite boat is fallen on the double stick, relies on graphite boat bracing frame location, relies on the ceramic plate insulation, because silicon carbide double stick heatproof when the PECVD reaction chamber carries out thin-film deposition, is out of shape very little at more than 1000 degree; And single pole clamping silicon carbide double stick structure, mechanical mechanism is simple, and cost is low, and assembly difficulty reduces, and the quality of whole cantilever is light, can prevent the deflection of cantilever, has improved the electrode stability in contact, avoids disconnecting because the cantilever distortion causes the electrode contact.
Description of drawings
Fig. 1 is the structural representation that supports the cantilever fire door of graphite boat in the embodiment of the invention;
Fig. 2 is the structural representation of electrode introducing device in the embodiment of the invention.
Wherein, 1: the metal contiguous block; 2: the ceramic insulation cover; 3: Globar; 4: the ceramic insulation plate; 5: metal supporting frames; 6: grip block; 7: fire door; 8: metal list rod; 9: the first ceramic insulation plates; 10: the first electrode suppors; 11: the first graphite electrode slabs; 12: the second ceramic insulation plates; 13: the second electrode suppors; 14: the metal electrode contact; 15: the second graphite electrode slabs; 16: graphite boat; 17: the first fire door electrodes; 18: the second fire door electrodes.
Embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples are used for explanation the present invention, but are not used for limiting the scope of the invention.
Fig. 1 shows the structural representation of cantilever fire door of the support graphite boat of the embodiment of the invention, and Fig. 2 shows the structural representation of the electrode introducing device of the embodiment of the invention.
With reference to Fig. 2, this electrode introducing device links to each other with the electrode block of fire door electrode with graphite boat 16, and electric charge is introduced graphite boat 16 by fire door 7 positions.The electrode introducing device specifically comprises first electrode suppor 10 and second electrode suppor 13, one end of two electrode suppors links to each other with the second fire door electrode 18 with the first fire door electrode 17 of fire door electrode respectively, the other end of two electrode suppors is metal electrode contact 14, the electric charge of fire door electrode can be sent to graphite boat 16 by metal electrode contact 14.
First graphite electrode slab 11 and second graphite electrode slab 15 are set respectively in the both sides of graphite boat 16, first graphite electrode slab 11 is graphite block between the sheet of graphite boat 16, second graphite electrode slab 15 is for protruding the graphite block of graphite boat 16, two electrode block belows are respectively arranged with groove, correspondingly, at metal electrode contact 14 projection is set, the direction of electrode block groove depression is identical with the direction of its electrode in contact contact projection, and this structure setting can guarantee that electrode block contacts with the close fitting of metal electrode contact 14.
In order to guarantee that electrode suppor when conduction can not produce charge affects to conductive component on every side, so adopting the insulation module keeps apart electrode suppor and conductive component, two blocks of stacked ceramic insulation plates of preferred employing, the i.e. first ceramic insulation plate 9 and the second ceramic insulation plate 12 are folded between two blocks of ceramic insulation plates to realize that electrode suppor and external conductive parts keep apart with electrode suppor.
The electrode introducing device of present embodiment adopts joint form, rely on electrode suppor with metal contact directly and the fire door electrode couple together, the electrode stability in contact is affected because of the distortion of graphite boat support bar easily.
For this reason, be provided with the structure of cantilever fire door in the present embodiment, with reference to Fig. 1, it comprises the union lever that passes fire door 7, and union lever one end is used for being connected with external manipulation mechanism in fire door 7 outsides, the union lever the other end stretches into the fire door inboard, is used for connecting the graphite boat support bar.In the present embodiment, the single rod 8 of union lever preferable alloy, the graphite boat support bar is preferably two Globars arranged side by side 3, and Globar 3 firmly is connected with metal list rod 8 by two grip blocks 6, and the end that Globar 3 is not fixed on the metal list rod 8 adopts metal contiguous block 1 fixedly connected.In the present embodiment, the quantity of the diameter of Globar 3 and grip block 6 is decided according to the weight of its graphite boat that will accept 16, if graphite boat 16 weight are when big, and diameter that can corresponding increase Globar 3, and the quantity of corresponding increase grip block 6, to improve the weight capacity of Globar 3.
Globar 3 is positioned at fire door 7 inboards, is in the environment that carries out thin film deposition in the reaction chamber.For being placed on, graphite boat 16 do not conduct electricity with Globar 3 when carrying out thin film deposition on the Globar 3, on Globar 3, be used for placing the position of graphite boat 16, two metal supporting frames 5 are set, to support the two ends of graphite boat 16 respectively, metal supporting frames 5 upper surfaces are provided with ceramic insulation plate 4, make graphite boat 16 and metal supporting frames 5 insulation.The both sides external of metal supporting frames 5 is namely placed the two ends of graphite boat 16 positions, is arranged with ceramic insulation cover 2 at Globar 3, avoids graphite boat 16 to contact with Globar 3, metal contiguous block 1 or grip block 6 and electric conduction phenomena takes place.
Use the cantilever fire door of present embodiment, when graphite boat 16 need carry out thin film deposition, only need be placed on the metal supporting frames 5 on the Globar 3, Globar 3 carries out thin film deposition along with graphite boat 16 enters reaction chamber jointly.
As can be seen from the above embodiments, one aspect of the present invention, adopt joint form, rely on electrode suppor with metal contact directly and the fire door electrode couple together, two graphite cushion blocks on the graphite boat serve as two electrode blocks, on each metal contact, be provided with projection with the contacted position of electrode block upper groove.When putting boat, mechanical manipulator falls graphite boat gently, and metal contact closely contacts with two electrode blocks of graphite boat, finishes electrode and connects; When getting boat, only need graphite boat is lifted gently, metal contact and graphite boat electrode block are thrown off voluntarily, and be simple and reasonable, economical, increased level of automation, and satisfy requirement of massive production; On the other hand, use single pole clamping silicon carbide double stick structure, graphite boat is fallen on the double stick, relies on graphite boat bracing frame location, relies on the ceramic plate insulation, because silicon carbide double stick heatproof when the PECVD reaction chamber carries out thin-film deposition, is out of shape very little at more than 1000 degree; And single pole clamping silicon carbide double stick structure, mechanical mechanism is simple, and cost is low, and assembly difficulty reduces, and the quality of whole cantilever is light, can prevent the deflection of cantilever, has improved the electrode stability in contact, avoids disconnecting because the cantilever distortion causes the electrode contact.
The above only is preferred implementation of the present invention; should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the technology of the present invention principle; can also make some improvement and replacement, these improvement and replacement also should be considered as protection scope of the present invention.
Claims (8)
1. the electrode introducing device is characterized in that, comprising: two electrode suppors that are set up in parallel; One end of each electrode suppor links to each other with a fire door electrode, and the other end is metal contact, links to each other with electrode block on the graphite boat;
Described electrode block has two, lays respectively at the graphite boat both sides, and has groove on every cube electrode piece;
On described each metal contact, be provided with projection with the position of electrode block contact grooves.
2. electrode introducing device as claimed in claim 1 is characterized in that, the direction of described groove depression is identical with the direction that described projection is protruded.
3. electrode introducing device as claimed in claim 1 is characterized in that, described graphite boat is placed on the graphite boat support bar, and described graphite boat support bar links to each other with fire door is inboard, and described graphite boat support bar is at least two Globars arranged side by side.
4. electrode introducing device as claimed in claim 3 is characterized in that, Globar end arranged side by side is provided with the metal contiguous block, so that Globar is fixedly connected.
5. electrode introducing device as claimed in claim 3 is characterized in that, described Globar is provided with at least two bracing frames, in order to support graphite boat.
6. electrode introducing device as claimed in claim 5 is characterized in that, support frame as described above is metal supporting frames, is provided with insulcrete with the graphite boat position contacting on it; Be arranged with insulation covering on the Globar of at least one side of support frame as described above.
7. electrode introducing device as claimed in claim 1 is characterized in that, two described electrode suppors are kept apart itself and conductive component on every side by the insulation module.
8. electrode introducing device as claimed in claim 1 is characterized in that, described electrode block adopts the graphite cushion block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110261064 CN102321877B (en) | 2011-09-05 | 2011-09-05 | Electrode introduction device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110261064 CN102321877B (en) | 2011-09-05 | 2011-09-05 | Electrode introduction device |
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| Publication Number | Publication Date |
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| CN102321877A CN102321877A (en) | 2012-01-18 |
| CN102321877B true CN102321877B (en) | 2013-08-07 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108456874A (en) * | 2017-12-20 | 2018-08-28 | 湖南红太阳光电科技有限公司 | A kind of Tubular PECVD device graphite boat electrode inlet device |
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| CN104372308B (en) * | 2014-11-26 | 2017-11-03 | 乐山新天源太阳能科技有限公司 | Silicon nitride film preparation device |
| CN104561930A (en) * | 2015-01-08 | 2015-04-29 | 北京七星华创电子股份有限公司 | Graphite boat pushing device for horizontal semiconductor equipment |
| CN207967023U (en) * | 2018-02-02 | 2018-10-12 | 深圳丰盛装备股份有限公司 | A kind of electrode mechanism of tubular type PECVD |
| CN207958500U (en) * | 2018-02-02 | 2018-10-12 | 深圳丰盛装备股份有限公司 | A kind of reaction chamber fire door door structure of tubular type PECVD |
| CN109440085A (en) * | 2018-12-21 | 2019-03-08 | 无锡华源晶电科技有限公司 | A kind of high production capacity PECVD device of 10 pipes |
| CN110517974B (en) * | 2019-07-30 | 2020-12-08 | 深圳市拉普拉斯能源技术有限公司 | Semiconductor processing equipment |
| CN111058016B (en) * | 2019-12-26 | 2022-11-25 | 北京北方华创微电子装备有限公司 | Electrode mechanism of semiconductor process furnace and semiconductor process furnace |
| CN111139460A (en) * | 2019-12-27 | 2020-05-12 | 北京北方华创微电子装备有限公司 | Radio frequency leading-in device and semiconductor processing equipment |
| CN111485227A (en) * | 2020-04-13 | 2020-08-04 | 徐玮祎 | Graphite boat electrode butt joint device for plasma enhanced chemical vapor deposition equipment |
| CN111636058B (en) * | 2020-05-22 | 2022-06-28 | 湖南红太阳光电科技有限公司 | Tubular PECVD preheats system experimental apparatus |
| CN116334595B (en) * | 2023-02-18 | 2023-11-17 | 阳光中科（福建）能源股份有限公司 | Boat bearing block for improving conductivity of perc battery piece coating process |
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| CN200968774Y (en) * | 2006-10-31 | 2007-10-31 | 北京七星华创电子股份有限公司 | Electric pole introducing arrangement used for heating graphite boat |
| CN201665538U (en) * | 2010-04-02 | 2010-12-08 | 江苏双良锅炉有限公司 | Electrode short-circuit-proof structure on hydrogenation furnace chassis |
| CN202226917U (en) * | 2011-09-05 | 2012-05-23 | 北京七星华创电子股份有限公司 | Electrode lead-in device |
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| CN200968774Y (en) * | 2006-10-31 | 2007-10-31 | 北京七星华创电子股份有限公司 | Electric pole introducing arrangement used for heating graphite boat |
| CN201665538U (en) * | 2010-04-02 | 2010-12-08 | 江苏双良锅炉有限公司 | Electrode short-circuit-proof structure on hydrogenation furnace chassis |
| CN202226917U (en) * | 2011-09-05 | 2012-05-23 | 北京七星华创电子股份有限公司 | Electrode lead-in device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108456874A (en) * | 2017-12-20 | 2018-08-28 | 湖南红太阳光电科技有限公司 | A kind of Tubular PECVD device graphite boat electrode inlet device |
| CN108456874B (en) * | 2017-12-20 | 2020-04-03 | 湖南红太阳光电科技有限公司 | Graphite boat electrode introducing device of tubular PECVD (plasma enhanced chemical vapor deposition) equipment |
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| CN102321877A (en) | 2012-01-18 |
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Owner name: BEIJING GUIYUAN KEDIAN MICROELECTRONICS TECHNOLOGY Free format text: FORMER OWNER: QIXINGHUACHUANG ELECTRONIC CO., LTD., BEIJING Effective date: 20150114 |
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Effective date of registration: 20150114 Address after: 100015, No. 1 Jiuxianqiao East Road, Beijing, Chaoyang District (M2 electronic equipment factory) Patentee after: Beijing Si Yuan Electrical electronic technology limited liability company Address before: 100016, No. 1, Jiuxianqiao East Road, Beijing, Chaoyang District, building No. 2, M2 Patentee before: Qixinghuachuang Electronic Co., Ltd., Beijing |