CN111485227A - Graphite boat electrode butt joint device for plasma enhanced chemical vapor deposition equipment - Google Patents
Graphite boat electrode butt joint device for plasma enhanced chemical vapor deposition equipment Download PDFInfo
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- CN111485227A CN111485227A CN202010285222.8A CN202010285222A CN111485227A CN 111485227 A CN111485227 A CN 111485227A CN 202010285222 A CN202010285222 A CN 202010285222A CN 111485227 A CN111485227 A CN 111485227A
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- graphite boat
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Plasma Technology (AREA)
Abstract
The invention discloses a graphite boat electrode butt joint device for plasma enhanced chemical vapor deposition equipment, which comprises a workbench, wherein the upper surface of the workbench is provided with an electrode butt joint mechanism, two slide rail mechanisms are symmetrically arranged on the upper surface of the workbench and positioned at two sides of the electrode butt joint mechanism, one opposite side of each slide rail mechanism is fixedly connected with a protection mechanism, the two slide rail mechanisms are respectively provided with a fixing mechanism, and the two fixing mechanisms are respectively provided with a spring mechanism. The electrode butt joint mechanism is simple and convenient to mount and dismount.
Description
Technical Field
The invention belongs to the technical field of plasma enhanced chemical vapor deposition equipment, and particularly relates to a graphite boat electrode butt joint device for the plasma enhanced chemical vapor deposition equipment.
Background
The plasma enhanced chemical vapor deposition has the main advantages of low deposition temperature and small influence on the structure and physical properties of a matrix; the film has good thickness and component uniformity; the membranous tissue is compact and has few pinholes; the adhesive force of the film layer is strong; the application range is wide, and various metal films, inorganic films and organic films can be prepared.
When the graphite boat electrode butt-joint device of the plasma enhanced chemical vapor deposition equipment is installed and disassembled, the operation of the graphite boat electrode butt-joint device is troublesome because the connection position of the electrode is relatively small, and the installation and the disassembly of the electrode butt-joint device are inconvenient.
Disclosure of Invention
The present invention aims to solve the above problems and provide a graphite boat electrode docking device for a plasma enhanced chemical vapor deposition apparatus.
In order to solve the above problems, the present invention provides a technical solution:
the graphite boat electrode butt joint device for the plasma enhanced chemical vapor deposition equipment comprises a workbench, wherein an electrode butt joint mechanism is arranged on the upper surface of the workbench, two slide rail mechanisms are symmetrically arranged on the upper surface of the workbench and positioned on two sides of the electrode butt joint mechanism, one opposite side of each slide rail mechanism is fixedly connected with a protection mechanism, and each slide rail mechanism is provided with a fixing mechanism and a spring mechanism.
Preferably, the electrode docking mechanism includes a docking slot, the docking slot is vertically formed in the upper surface of the workbench, an electrode plug is inserted into the docking slot, the upper end of the electrode docking plug penetrates through a notch of the docking slot and extends to the outside of the workbench, and the upper surface of the electrode docking plug is fixedly connected with a cable.
Preferably, the two slide rail mechanisms respectively comprise a T-shaped sliding groove, the T-shaped sliding grooves are symmetrically arranged on the upper surface of the workbench about the butt joint groove, a T-shaped sliding block is connected inside each T-shaped sliding groove in a sliding mode, the upper ends of the T-shaped sliding blocks penetrate through the notches of the T-shaped sliding grooves and extend to the outer portion of the workbench, and a supporting rod is fixedly connected to the upper surface of each T-shaped sliding block, which is located on the outer portion of the T-shaped sliding groove.
Preferably, the two protection mechanisms comprise a protection sleeve which is in a semi-cylindrical shape, the protection sleeve is fixedly connected to the rod wall of one side of each of the two support rods in the opposite direction, a through hole is formed in the side wall of the top end of the protection sleeve, the through holes are in a semi-cylindrical shape, and a layer of first rubber protection pad is fixedly connected to the inner side wall of the protection sleeve.
Preferably, two the fixed establishment all includes a fixed orifices, two the fixed orifices is vertical form respectively and runs through and set up on two spinal branch vaulting poles, two the lower extreme drill way of fixed orifices runs through the T type slider setting that corresponds, two T type spout tank bottom all is the symmetry form and has seted up two fixed slots, two the equal sliding connection in fixed orifices inside has a dead lever, two the upper end of dead lever all runs through the upper end drill way that corresponds the fixed orifices and extends to the outside of bracing piece, two the lower extreme of dead lever all runs through the lower extreme drill way that corresponds the fixed orifices and the notch of fixed slot in proper order and extends to inside the fixed slot.
Preferably, the two spring mechanisms respectively comprise a spring groove which is annularly arranged, the two spring grooves are respectively arranged on inner side walls of fixing holes in the two supporting rods, the inner side walls of the spring grooves are respectively connected with an annular block in a sliding mode, the inner side walls of the annular blocks respectively penetrate through notches of the corresponding spring grooves and extend to the corresponding fixing holes, the inner side walls of the annular blocks are respectively fixedly connected to corresponding rod walls of the two fixing rods, a spring is fixedly connected to the upper surface of each annular block, the upper ends of the springs are respectively fixedly connected to top end groove walls of the two spring grooves, and the springs are respectively sleeved on the two fixing rods.
Preferably, the upper surfaces of the two fixing rods, which are positioned outside the fixing holes, are fixedly connected with a lifting rod, and a layer of rubber anti-skidding sleeve is fixedly sleeved on the outer side wall of the lifting rod.
Preferably, the inner side walls of the two through holes are fixedly connected with a layer of second rubber protective pad.
The invention has the beneficial effects that:
1. the invention relates to a graphite boat electrode butt joint device for plasma enhanced chemical vapor deposition equipment, which is characterized in that a T-shaped sliding groove, a T-shaped sliding block, a supporting rod, a protective sleeve, a through hole, a fixing groove, a fixing rod, a spring groove, an annular block, a spring and a lifting rod are arranged, when the graphite boat electrode butt joint device is installed, after an electrode butt joint mechanism is inserted, the fixing rod can be lifted through the lifting rod, so that the lower end of the fixing rod is separated from the fixing groove, the T-shaped sliding block can move, at the moment, the two protective sleeves can be moved to be abutted, and then the graphite boat electrode butt joint device is combined into a cylindrical fixing device, and the electrode butt joint structure is installed and fixed through the protective sleeves.
2. The invention relates to a graphite boat electrode butt joint device for plasma enhanced chemical vapor deposition equipment, which is characterized in that a protective sleeve, a through hole, a first rubber protective pad and a second rubber protective pad are arranged, after an electrode butt joint mechanism is installed, the joint of the electrode butt joint mechanism can be protected through the protective sleeve, and meanwhile, an electrode plug and a cable can be fixed through the first rubber protective pad and the second rubber protective pad, so that the electrode plug can be prevented from randomly shaking in the protective sleeve due to the irregular shape of the electrode plug, and further the electrode plug can be prevented from being damaged.
Description of the drawings:
for ease of illustration, the invention is described in detail by the following detailed description and the accompanying drawings.
FIG. 1 is a front cut-away view of the present invention;
FIG. 2 is a side cut-away view of the present invention;
FIG. 3 is a schematic structural view of a shielding mechanism according to the present invention;
FIG. 4 is an enlarged schematic view of portion A of FIG. 1 according to the present invention;
fig. 5 is an enlarged structural view of a portion B of fig. 1 according to the present invention.
In the figure: 1. a work table; 2. a motor docking mechanism; 21. a butt joint groove; 22. an electrode plug; 23. a cable; 3. a slide rail mechanism; 31. a T-shaped chute; 32. a T-shaped slider; 33. a support bar; 4. a protection mechanism; 41. a protective sleeve; 42. a through hole; 43. a first rubber protective pad; 5. a fixing mechanism; 51. a fixing hole; 52. fixing grooves; 53. fixing the rod; 6. a spring mechanism; 61. a spring slot; 62. a ring block; 63. a spring; 7. lifting a pull rod; 8. a rubber anti-slip sleeve; 9. a second rubber protection pad.
The specific implementation mode is as follows:
as shown in fig. 1 to 5, the following technical solutions are adopted in the present embodiment:
the graphite boat electrode butt-joint device for the plasma enhanced chemical vapor deposition equipment comprises a workbench 1, wherein an electrode butt-joint mechanism 2 is arranged on the upper surface of the workbench 1, two slide rail mechanisms 3 are symmetrically arranged on the upper surface of the workbench 1 and positioned on two sides of the electrode butt-joint mechanism 2, one opposite sides of the two slide rail mechanisms 3 are fixedly connected with a protection mechanism 4, a fixing mechanism 5 is arranged on each of the two slide rail mechanisms 3, a spring mechanism 6 is arranged on each of the two fixing mechanisms 5, the electrode butt-joint mechanism 2 is firstly butt-jointed and installed, the fixing mechanism 5 is pulled up through a lifting rod 7, the slide rail mechanisms 3 and the protection mechanism 4 can move, then the fixing mechanism 5 is fixed in position under the action of the spring mechanism 6, and at the moment, the electrode butt-joint mechanism 2 can be installed and fixed through the two protection mechanisms 4 together, and at the same time safeguards it.
The electrode docking mechanism 2 comprises a docking slot 21, the docking slot 21 is vertically formed in the upper surface of the workbench 1, an electrode plug 22 is inserted into the docking slot 21, the upper end of the electrode pair plug 22 penetrates through a notch of the docking slot 21 and extends to the outside of the workbench 1, a cable 23 is fixedly connected to the upper surface of the electrode pair plug 22, the electrode plug 22 is inserted into the docking slot 21, and the whole installation is simple and convenient.
Wherein, two slide rail mechanisms 3 all include a T-shaped sliding groove 31, two T-shaped sliding grooves 31 are symmetrically arranged on the upper surface of the workbench 1 about the butt joint groove 21, two T-shaped sliding grooves 31 are connected with a T-shaped sliding block 32, the upper ends of the two T-shaped sliding blocks 32 both penetrate through the notch of the T-shaped sliding groove 31 and extend to the outside of the workbench 1, the upper surfaces of the two T-shaped sliding blocks 32 positioned on the outside of the T-shaped sliding groove 31 are both fixedly connected with a supporting rod 33, two protection mechanisms 4 both include a protection sleeve 41 arranged in a semi-cylindrical shape, the two protection sleeves 41 are respectively and fixedly connected on the rod wall of one side of the two supporting rods 33 opposite to each other, the top end side walls of the two protection sleeves 41 are both provided with a through hole 42, the two through holes 42 are both arranged in a semi-cylindrical shape, the inner side walls of the two protection sleeves 41 are both, t type slider 32 can remove in T type spout 31, can do the opposite direction motion with two T type sliders 32 this moment, T type slider 32 drives two protective sleeve 41 synchronous motion to the counterbalance form through bracing piece 33 simultaneously, and then make two protective sleeve 41 combinations fix electrode plug 22 for the tube-shape protector, protect it when making motor plug 22 can 'T break away from at will, simultaneously can also extrude fixedly electrode plug 22 and cable 23 through first rubber protection pad 43 and second rubber protection pad 9, and then can avoid causing it to be fixed unstably in protective sleeve 41 inside because of electrode plug 22's irregular shape.
Wherein, two fixing mechanisms 5 respectively comprise a fixing hole 51, the two fixing holes 51 respectively penetrate and are arranged on two support rods 33 in a vertical manner, the lower end orifices of the two fixing holes 51 penetrate and are arranged on corresponding T-shaped sliders 32, the bottoms of the two T-shaped chutes 31 are respectively symmetrically provided with two fixing grooves 52, the two fixing holes 51 are internally and respectively connected with a fixing rod 53 in a sliding manner, the upper ends of the two fixing rods 53 respectively penetrate and are arranged on the upper end orifices of the corresponding fixing holes 51 and extend to the outside of the support rods 33, the lower ends of the two fixing rods 53 respectively penetrate and are sequentially arranged on the lower end orifices of the corresponding fixing holes 51 and the notches of the fixing grooves 52 and extend to the inside of the fixing grooves 52, the two spring mechanisms 6 respectively comprise a spring groove 61 arranged in an annular manner, the two spring grooves 61 are respectively arranged on the inner side walls of the fixing holes 51 arranged in the two support rods 33, the, the inner ring walls of the two annular blocks 62 respectively penetrate through the notches of the corresponding spring grooves 61 and extend to the inside of the corresponding fixing holes 51, the inner ring walls of the two annular blocks 62 are respectively and fixedly connected to the corresponding rod walls of the two fixing rods 53, the upper surfaces of the two annular blocks 62 are respectively and fixedly connected with a spring 63, the upper ends of the two springs 63 are respectively and fixedly connected to the top end groove walls of the two spring grooves 61, the two springs 63 are respectively sleeved on the two fixing rods 53, the upper surfaces, located outside the fixing holes 51, of the two fixing rods 53 are respectively and fixedly connected with a lifting rod 7, the outer side wall of the lifting rod 7 is fixedly sleeved with a layer of rubber anti-skidding sleeve 8, the two fixing rods 53 are lifted through the lifting rod 7, the lower ends of the two fixing rods 53 are respectively separated from the corresponding fixing grooves 52, the T-shaped sliding blocks 32 can move in the T-shaped sliding grooves 31, when the two fixing rods 53 respectively coincide with the two fixing grooves 52 close to each other, the lifting rod 7 is released, the spring 63 pushes the annular block 62 to descend, and the annular block 62 drives the fixing rods 53 to descend downwards into the corresponding fixing grooves 52, so that the T-shaped sliding block 32 can be fixed.
Wherein, the inner side walls of the two through holes 42 are fixedly connected with a layer of second rubber protection pad 9.
The using state of the invention is as follows: the invention relates to a graphite boat electrode butt joint device for plasma enhanced chemical vapor deposition equipment, when in use, firstly an electrode plug 22 is inserted into a butt joint groove 21, then two fixing rods 53 are lifted by a lifting rod 7, the lower ends of the two fixing rods 53 are separated from corresponding fixing grooves 52, so that a T-shaped sliding block 32 can move in a T-shaped sliding groove 31, at the moment, the two T-shaped sliding blocks 32 can move in opposite directions, when the two fixing rods 53 are respectively superposed with the two fixing grooves 52 which are close to each other, the lifting rod 7 is loosened, a spring 63 pushes an annular block 62 to descend, the annular block 62 drives the fixing rods 53 to descend downwards into the corresponding fixing grooves 52, the T-shaped sliding blocks 32 can be fixed, meanwhile, the T-shaped sliding blocks 32 drive two protecting sleeves 41 to synchronously move to be abutted against through a supporting rod 33, and then the two protecting sleeves 41 are combined into a cylindrical protector to fix the electrode plug 22, the motor plug 22 can not be separated randomly and is protected, meanwhile, the electrode plug 22 and the cable 23 can be extruded and fixed through the first rubber protective pad 43 and the second rubber protective pad 9, and therefore the fact that the electrode plug 22 is fixed and unstable inside the protective sleeve 41 due to the irregular shape of the electrode plug 22 can be avoided.
While there have been shown and described what are at present considered to be the fundamental principles of the invention and its essential features and advantages, it will be understood by those skilled in the art that the invention is not limited by the embodiments described above, which are merely illustrative of the principles of the invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the invention as defined by the appended claims and their equivalents.
Claims (8)
1. The graphite boat electrode butt-joint device for the plasma enhanced chemical vapor deposition equipment is characterized by comprising a workbench (1), wherein an electrode butt-joint mechanism (2) is arranged on the upper surface of the workbench (1), two sliding rail mechanisms (3) are symmetrically arranged on the upper surface of the workbench (1) and on two sides of the electrode butt-joint mechanism (2), one opposite sides of the sliding rail mechanisms (3) are fixedly connected with a protection mechanism (4), two fixing mechanisms (5) are arranged on the sliding rail mechanisms (3), and two spring mechanisms (6) are arranged on the fixing mechanisms (5).
2. The apparatus of claim 1, wherein the graphite boat electrode docking device comprises: electrode docking mechanism (2) include one and dock groove (21), dock groove (21) are vertical form and offer the upper surface at workstation (1), dock inside of groove (21) and insert and be equipped with an electrode plug (22), the notch of dock groove (21) is run through and extend to the outside of workstation (1) to the upper end of electrode pair plug (22), the upper surface fixedly connected with cable (23) of electrode pair plug (22).
3. The apparatus of claim 2, wherein the graphite boat electrode docking device comprises: two slide rail mechanism (3) all include a T type spout (31), two T type spout (31) are the upper surface that the symmetry form was seted up at workstation (1) about butt joint groove (21), two T type spout (31) inside equal sliding connection has a T type slider (32), two the notch that T type spout (31) were all run through to the upper end of T type slider (32) extends to the outside of workstation (1), two T type slider (32) are located the equal fixedly connected with in upper surface of T type spout (31) outside and have a bracing piece (33).
4. The apparatus of claim 3, wherein the graphite boat electrode docking device comprises: two protection machanism (4) all include one and are the protective sleeve section of thick bamboo (41) that half tube-shape set up, two on the pole wall of protective sleeve section of thick bamboo (41) fixed connection respectively two bracing piece (33) one side in opposite directions a through-hole (42), two have all been seted up on the top lateral wall of protective sleeve section of thick bamboo (41) through-hole (42) all are the semicircle setting, two the first rubber protection of equal fixedly connected with one deck fills up (43) on the inside wall of protective sleeve section of thick bamboo (41).
5. The apparatus of claim 4, wherein the graphite boat electrode docking device comprises: two fixed establishment (5) all include a fixed orifices (51), two fixed orifices (51) are vertical form respectively and run through set up on two spinal branch vaulting poles (33), two the lower extreme drill way of fixed orifices (51) runs through corresponding T type slider (32) and sets up, two T type spout (31) tank bottom all is the symmetry form and has seted up two fixed slots (52), two fixed orifices (51) inside equal sliding connection has a dead lever (53), two the upper end of dead lever (53) all runs through the upper end drill way that corresponds fixed orifices (51) and extends to the outside of bracing piece (33), two the lower extreme of dead lever (53) all runs through the lower extreme drill way that corresponds fixed orifices (51) and the notch of fixed slot (52) in proper order and extends to inside fixed slot (52).
6. The apparatus of claim 5, wherein the graphite boat electrode docking device comprises: two spring mechanism (6) all include one and are spring groove (61) that the annular set up, two spring groove (61) are seted up respectively on being located the inside fixed orifices (51) inside wall of two spinal branch vaulting poles (33), two the inside equal sliding connection of spring groove (61) has a ring block (62), two the interior rampart of ring block (62) runs through the notch that corresponds spring groove (61) respectively and extends to the inside that corresponds fixed orifices (51), two the interior rampart of ring block (62) is fixed connection respectively on the corresponding pole wall of two dead levers (53), two the equal fixed connection in upper surface of ring block (62) has a spring (63), two the upper end difference fixed connection of spring (63) is on the top cell wall of two spring grooves (61), two spring (63) overlap respectively on two dead levers (53).
7. The apparatus of claim 5, wherein the graphite boat electrode docking device comprises: two the equal fixedly connected with of upper surface that dead lever (53) are located fixed orifices (51) outside carries pull rod (7), it has one deck rubber antiskid sleeve (8) to fix the cover on the lateral wall of carrying pull rod (7).
8. The apparatus of claim 4, wherein the graphite boat electrode docking device comprises: and two second rubber protective pads (9) are fixedly connected to the inner side walls of the through holes (42).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010285222.8A CN111485227A (en) | 2020-04-13 | 2020-04-13 | Graphite boat electrode butt joint device for plasma enhanced chemical vapor deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010285222.8A CN111485227A (en) | 2020-04-13 | 2020-04-13 | Graphite boat electrode butt joint device for plasma enhanced chemical vapor deposition equipment |
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| Publication Number | Publication Date |
|---|---|
| CN111485227A true CN111485227A (en) | 2020-08-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010285222.8A Withdrawn CN111485227A (en) | 2020-04-13 | 2020-04-13 | Graphite boat electrode butt joint device for plasma enhanced chemical vapor deposition equipment |
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| CN (1) | CN111485227A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102321877A (en) * | 2011-09-05 | 2012-01-18 | 北京七星华创电子股份有限公司 | Electrode introduction device |
| CN202786425U (en) * | 2012-08-03 | 2013-03-13 | 海南汉能光伏有限公司 | PECVD (Plasma Enhanced Chemical Vapor Deposition) radio frequency electrode contact |
| CN205347569U (en) * | 2016-01-07 | 2016-06-29 | 深圳市捷佳伟创新能源装备股份有限公司 | Plasma enhancement mode chemical vapor deposition equipment |
| CN209104453U (en) * | 2018-12-26 | 2019-07-12 | 武汉华美高新材料有限公司 | The disposable protective device of electrode socket |
| WO2019148519A1 (en) * | 2018-02-02 | 2019-08-08 | 深圳丰盛装备股份有限公司 | Tubular pecvd electrode structure |
| CN209475810U (en) * | 2018-12-13 | 2019-10-11 | 江苏至臻环保设备有限公司 | A kind of filter bag being easily installed |
| CN110565075A (en) * | 2019-09-20 | 2019-12-13 | 苏州拓升智能装备有限公司 | Graphite boat electrode butt joint device for tubular PECVD equipment |
| CN110934703A (en) * | 2019-11-22 | 2020-03-31 | 江苏融医通医疗科技有限公司 | Upper limb fixing frame for hemodialysis |
-
2020
- 2020-04-13 CN CN202010285222.8A patent/CN111485227A/en not_active Withdrawn
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102321877A (en) * | 2011-09-05 | 2012-01-18 | 北京七星华创电子股份有限公司 | Electrode introduction device |
| CN202786425U (en) * | 2012-08-03 | 2013-03-13 | 海南汉能光伏有限公司 | PECVD (Plasma Enhanced Chemical Vapor Deposition) radio frequency electrode contact |
| CN205347569U (en) * | 2016-01-07 | 2016-06-29 | 深圳市捷佳伟创新能源装备股份有限公司 | Plasma enhancement mode chemical vapor deposition equipment |
| WO2019148519A1 (en) * | 2018-02-02 | 2019-08-08 | 深圳丰盛装备股份有限公司 | Tubular pecvd electrode structure |
| CN209475810U (en) * | 2018-12-13 | 2019-10-11 | 江苏至臻环保设备有限公司 | A kind of filter bag being easily installed |
| CN209104453U (en) * | 2018-12-26 | 2019-07-12 | 武汉华美高新材料有限公司 | The disposable protective device of electrode socket |
| CN110565075A (en) * | 2019-09-20 | 2019-12-13 | 苏州拓升智能装备有限公司 | Graphite boat electrode butt joint device for tubular PECVD equipment |
| CN110934703A (en) * | 2019-11-22 | 2020-03-31 | 江苏融医通医疗科技有限公司 | Upper limb fixing frame for hemodialysis |
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Application publication date: 20200804 |
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