WO2019148519A1 - Tubular pecvd electrode structure - Google Patents

Tubular pecvd electrode structure Download PDF

Info

Publication number
WO2019148519A1
WO2019148519A1 PCT/CN2018/075723 CN2018075723W WO2019148519A1 WO 2019148519 A1 WO2019148519 A1 WO 2019148519A1 CN 2018075723 W CN2018075723 W CN 2018075723W WO 2019148519 A1 WO2019148519 A1 WO 2019148519A1
Authority
WO
WIPO (PCT)
Prior art keywords
electrode
graphite block
rear electrode
connecting rod
graphite
Prior art date
Application number
PCT/CN2018/075723
Other languages
French (fr)
Chinese (zh)
Inventor
王俊朝
王飞龙
李学文
李军阳
Original Assignee
深圳丰盛装备股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 深圳丰盛装备股份有限公司 filed Critical 深圳丰盛装备股份有限公司
Publication of WO2019148519A1 publication Critical patent/WO2019148519A1/en

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the utility model relates to the technical field of solar cell equipment, and more particularly to an electrode mechanism of tubular PECVD.
  • PECVD Plasma Enhanced Chemical Vapor Deposition
  • plasma enhanced chemical weather deposition is the use of low temperature plasma as the energy source, the silicon wafer is placed on the cathode of the glow discharge under low pressure, and the silicon is replaced by glow discharge (or additional heating element). The sheet is heated to a predetermined temperature, and then an appropriate amount of a reaction gas is introduced, and the gas is subjected to a chemical reaction and a plasma reaction to form a solid film on the silicon wafer.
  • the present invention provides a tubular PECVD electrode mechanism, which reduces the damage caused by the pressure of the graphite boat on the quartz tube, and passes through the front graphite block and the rear graphite block. At the junction of the graphite boats, the closed loop is reached to achieve discharge.
  • a tubular PECVD electrode mechanism which is improved in that it comprises a front electrode guide rod, a rear electrode guide rod, a front graphite block and a rear graphite block, two The rear electrode guiding rods are arranged in parallel, and the front electrode guiding rod is located between two parallel rear electrode guiding rods;
  • the front electrode guiding rod includes a front electrode head, an insulating sleeve and a front electrode connecting rod, the front electrode connecting rod is located inside the insulating sleeve, and the front electrode head is connected to one end of the front electrode connecting rod;
  • the rear electrode guiding rod comprises a rear electrode head, an insulating sleeve and a rear electrode connecting rod, the rear electrode connecting rod is located inside the insulating sleeve, and the rear electrode head is connected to one end of the rear electrode connecting rod, the front electrode The head and the rear electrode are used to connect to an external power source;
  • the front graphite block is fixedly mounted in the middle of the two rear electrode guiding rods, and the front graphite block is electrically connected to the front electrode connecting rod;
  • the rear graphite block is fixedly mounted on the tail portions of the two rear electrode guiding rods, and
  • the rear graphite block is electrically connected to the rear electrode connecting rod;
  • the front graphite block and the rear graphite block are used for resting the graphite boat to realize discharge of the graphite boat.
  • the rear electrode guide has a push rod on one end thereof, and the rear electrode head is located at the top end of the push rod.
  • the push rod is provided with a furnace door and a support plate, and the furnace door is movably connected with the support plate, and the front electrode head is mounted on the support plate.
  • a plurality of adjusting screws are disposed between the furnace door and the support plate, and one end of the adjusting screw is movably mounted on the furnace door, and the other end of the adjusting screw is screwed to the supporting plate.
  • the front graphite block is provided with a through hole penetrating therethrough, and the rear electrode guide rod passes through the through hole of the front graphite block.
  • the front graphite block and the rear graphite block are each provided with an upwardly convex limiting protrusion.
  • the utility model has the beneficial effects that the electrode mechanism of the tubular PECVD of the utility model places the graphite boat on the front graphite block and the rear graphite block, and supports the graphite boat, thereby reducing the graphite boat to the quartz tube.
  • the damage caused by the pressure is reached by the front graphite block and the rear graphite block at the junction with the graphite boat to achieve a closed loop, thereby achieving discharge.
  • FIG. 1 is a perspective view showing the structure of an electrode mechanism of a tubular PECVD according to the present invention.
  • FIG. 2 is a schematic cross-sectional view of a front electrode guide of the present invention.
  • FIG 3 is a schematic structural view of a rear electrode guide rod of the present invention.
  • FIG. 4 and FIG. 5 are diagrams showing a specific embodiment of a tubular PECVD electrode mechanism according to the present invention.
  • the present invention discloses an electrode mechanism for tubular PECVD.
  • the electrode mechanism of the tubular PECVD includes a front electrode guide 10 and a rear electrode guide 20 .
  • Graphite block 30 and rear graphite block 40, two rear electrode guide rods 20 are arranged in parallel, and the front electrode guide rod 10 is located between two parallel rear electrode guide rods 20; as shown in Fig. 2, the front electrode
  • the guide rod 10 includes a front electrode tip 101, an insulating sleeve 102 and a front electrode connecting rod 103.
  • the front electrode connecting rod 103 is located inside the insulating sleeve 102, and the front electrode head 101 is connected to one end of the front electrode connecting rod 103.
  • the front electrode The guide bar 10 further includes a corundum rod 104, and the front electrode connecting rod 103 is located inside the corundum rod 104.
  • the rear electrode guiding rod 20 includes a rear electrode tip 201, an insulating sleeve 202, and a rear electrode connecting rod 203.
  • the rear electrode connecting rod 203 is located inside the insulating sleeve 202, and the rear electrode head 201 is connected to one end of the rear electrode connecting rod 203.
  • the front electrode head 201101 and the rear electrode head 201 are used for connection with an external power source.
  • the front graphite block 30 is fixedly mounted in the middle of the two rear electrode guides 20, and the front graphite block 30 is electrically connected to the front electrode connecting rod 103;
  • the rear graphite block 40 is fixedly mounted on The tail portions of the two rear electrode guides 20, and the rear graphite block 40 is electrically connected to the rear electrode connecting rod 203;
  • the front graphite block 30 and the rear graphite block 40 are used for resting the graphite boat to realize discharge of the graphite boat.
  • the present invention provides a specific embodiment for the electrode mechanism of the tubular PECVD.
  • the rear electrode guide 20 has a push rod 50 on one end thereof, and the rear electrode head 201 is located at the top end of the push rod 50; the push rod 50 is mounted with a furnace door 501 and a support plate 502, and the furnace door 501 is movably connected with the support plate 502, and the front electrode head 201101 is mounted on the support plate 502. on.
  • FIG. 5 the present invention provides a specific embodiment for the electrode mechanism of the tubular PECVD.
  • the rear electrode guide 20 has a push rod 50 on one end thereof, and the rear electrode head 201 is located at the top end of the push rod 50; the push rod 50 is mounted with a furnace door 501 and a support plate 502, and the furnace door 501 is movably connected with the support plate 502, and the front electrode head 201101 is mounted on the support plate 502. on.
  • a plurality of adjusting screws 503 are disposed between the furnace door 501 and the support plate 502, and one end of the adjusting screw 503 is movably mounted on the furnace door 501, and the other end of the adjusting screw 503 and the supporting plate 502 are Threaded connection;
  • the front graphite block 30 is provided with a through hole, and the rear electrode guide 20 passes through the through hole of the front graphite block 30;
  • the front graphite block 30 and the rear graphite block 40 Upper limit protrusions are provided on the upper side, and the position of the graphite boat 60 is limited by the limit protrusions to prevent the graphite boat 60 from sliding off from the front graphite block 30 and the rear graphite block 40.
  • the electrode mechanism of the tubular PECVD of the present invention places the graphite boat 60 on the front graphite block 30 and the rear graphite block 40, and supports the graphite boat 60 when the graphite boat enters the quartz tube. At the same time, the damage caused by the pressure of the graphite boat 60 on the quartz tube is reduced, and the front graphite block 30 and the rear graphite block 40 are connected to the graphite boat 60 to reach a closed loop, thereby achieving discharge.

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Electromagnetism (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

A tubular PECVD electrode structure, relating to the technical field of solar cell devices, and comprising a front electrode guide rod (10), rear electrode guide rods (20), a front graphite block (30), and a rear graphite block (40). The two rear electrode guide rods (20) are disposed in parallel, and the front electrode guide rod (10) is located between the two parallel rear electrode guide rods (20); the front electrode guide rod (10) comprises a front electrode tip (101), an insulating sleeve (102), and a front electrode connecting rod (103); each rear electrode guide rod (20) comprises a rear electrode tip (201), an insulating sleeve (202), and a rear electrode connecting rod (203); the front electrode tip (101) and the rear electrode tip (201) are used for being connected to an external power source; the front graphite block (30) is fixedly mounted at the middle portions of the two rear electrode guide rods (20), and is electrically connected to the front electrode connecting rod (103); the rear graphite block (40) is fixedly connected at the tail portions of the two rear electrode guide rods (20), and is electrically connected to the rear electrode connecting rod (203). The structure achieves the following effect: a graphite boat (60) is placed on the front graphite block (30) and the rear graphite block (40), so as to support the graphite boat (60), thereby reducing the damage caused by the pressure on a quartz tube by the graphite boat (60).

Description

一种管式PECVD的电极机构Electrode mechanism of tubular PECVD 技术领域Technical field
本实用新型涉及太阳能电池设备技术领域，更具体的说，本实用新型涉及一种管式PECVD的电极机构。The utility model relates to the technical field of solar cell equipment, and more particularly to an electrode mechanism of tubular PECVD.
背景技术Background technique
PECVD(Plasma Enhanced Chemical Vapor Deposition)等离子体增强化学气象沉积是利用低温等离子体做能量源，硅片置于低气压下辉光放电的阴极上，利用辉光放电(或另加发热体)使硅片升温到预定的温度，然后通入适量的反应气体，气体经一秕化学和等离子体反应，在硅片上形成固态薄膜。PECVD (Plasma Enhanced Chemical Vapor Deposition) plasma enhanced chemical weather deposition is the use of low temperature plasma as the energy source, the silicon wafer is placed on the cathode of the glow discharge under low pressure, and the silicon is replaced by glow discharge (or additional heating element). The sheet is heated to a predetermined temperature, and then an appropriate amount of a reaction gas is introduced, and the gas is subjected to a chemical reaction and a plasma reaction to form a solid film on the silicon wafer.
随着PECVD设备技术的发展，单管的产能也越来越大，相应的真空反应管的直径也越来越大，相应的石墨舟的尺寸和重量也越来越大，对石英管的局部压力也越来越大。With the development of PECVD equipment technology, the production capacity of single tubes is also increasing, and the diameter of the corresponding vacuum reaction tubes is also increasing. The size and weight of the corresponding graphite boats are also increasing, and the parts of the quartz tubes are larger. The pressure is getting bigger and bigger.
实用新型内容Utility model content
为了克服现有技术的不足，本实用新型提供一种管式PECVD的电极机构，该管式PECVD的电极机构减少了石墨舟对石英管的压力造成的损坏，通过前石墨块和后石墨块与石墨舟相接处，达到闭环，从而实现放电。In order to overcome the deficiencies of the prior art, the present invention provides a tubular PECVD electrode mechanism, which reduces the damage caused by the pressure of the graphite boat on the quartz tube, and passes through the front graphite block and the rear graphite block. At the junction of the graphite boats, the closed loop is reached to achieve discharge.
本实用新型解决其技术问题所采用的技术方案是：一种管式PECVD的电极机构，其改进之处在于：包括前电极导杆、后电极导杆、前石墨块以及后石墨块，两条后电极导杆平行设置，所述前电极导杆位于两条平行的后电极导杆之间；The technical solution adopted by the utility model to solve the technical problem is: a tubular PECVD electrode mechanism, which is improved in that it comprises a front electrode guide rod, a rear electrode guide rod, a front graphite block and a rear graphite block, two The rear electrode guiding rods are arranged in parallel, and the front electrode guiding rod is located between two parallel rear electrode guiding rods;
所述的前电极导杆包括前电极头、绝缘套以及前电极连接杆，所述前电极连接杆位于绝缘套内部，前电极头连接在前电极连接杆的一端；The front electrode guiding rod includes a front electrode head, an insulating sleeve and a front electrode connecting rod, the front electrode connecting rod is located inside the insulating sleeve, and the front electrode head is connected to one end of the front electrode connecting rod;
所述的后电极导杆包括后电极头、绝缘套管以及后电极连接杆，所述后电极连接杆位于绝缘套管内部，后电极头连接在后电极连接杆的一端，所述的前电极头和后电极头用于与外部电源连接；The rear electrode guiding rod comprises a rear electrode head, an insulating sleeve and a rear electrode connecting rod, the rear electrode connecting rod is located inside the insulating sleeve, and the rear electrode head is connected to one end of the rear electrode connecting rod, the front electrode The head and the rear electrode are used to connect to an external power source;
所述的前石墨块固定安装在两条后电极导杆的中部，且前石墨块与前电极连接杆电性连接；所述的后石墨块固定安装在两条后电极导杆的尾部，且后石墨块与后电极连接杆电性连接；所述的前石墨块和后石墨块上用于搁置石墨舟，实现对石墨舟的放电。The front graphite block is fixedly mounted in the middle of the two rear electrode guiding rods, and the front graphite block is electrically connected to the front electrode connecting rod; the rear graphite block is fixedly mounted on the tail portions of the two rear electrode guiding rods, and The rear graphite block is electrically connected to the rear electrode connecting rod; the front graphite block and the rear graphite block are used for resting the graphite boat to realize discharge of the graphite boat.
在上述的结构中，所述后电极导杆的一端上具有推杆，所述后电极头位于推杆的顶端。In the above structure, the rear electrode guide has a push rod on one end thereof, and the rear electrode head is located at the top end of the push rod.
在上述的结构中，所述的推杆上安装有炉门和支撑板，且炉门与支撑板之间活动连接，所述的前电极头安装在支撑板上。In the above structure, the push rod is provided with a furnace door and a support plate, and the furnace door is movably connected with the support plate, and the front electrode head is mounted on the support plate.
在上述的结构中，所述的炉门与支撑板之间设置有多个调节螺杆，且调节螺杆的一端活动安装在炉门上，调节螺杆的另一端与支撑板螺纹连接。In the above structure, a plurality of adjusting screws are disposed between the furnace door and the support plate, and one end of the adjusting screw is movably mounted on the furnace door, and the other end of the adjusting screw is screwed to the supporting plate.
在上述的结构中，所述的前石墨块上设置有贯穿的通孔，所述后电极导杆从前石墨块的通孔中穿过。In the above structure, the front graphite block is provided with a through hole penetrating therethrough, and the rear electrode guide rod passes through the through hole of the front graphite block.
在上述的结构中，所述的前石墨块和后石墨块上均设置有向上凸起的限位凸块。In the above structure, the front graphite block and the rear graphite block are each provided with an upwardly convex limiting protrusion.
本实用新型的有益效果是：本实用新型的此种管式PECVD的电极机构，将石墨舟放置在前石墨块和后石墨块上，对石墨舟起到支撑作用，减少了石墨舟对石英管的压力造成的损坏，通过前石墨块和后石墨块与石墨舟相接处，达到闭环，从而实现放电。The utility model has the beneficial effects that the electrode mechanism of the tubular PECVD of the utility model places the graphite boat on the front graphite block and the rear graphite block, and supports the graphite boat, thereby reducing the graphite boat to the quartz tube. The damage caused by the pressure is reached by the front graphite block and the rear graphite block at the junction with the graphite boat to achieve a closed loop, thereby achieving discharge.
附图说明DRAWINGS
图1为本实用新型的一种管式PECVD的电极机构的立体结构示意图。1 is a perspective view showing the structure of an electrode mechanism of a tubular PECVD according to the present invention.
图2为本实用新型的前电极导杆的剖面示意图。2 is a schematic cross-sectional view of a front electrode guide of the present invention.
图3为本实用新型的后电极导杆的结构示意图。3 is a schematic structural view of a rear electrode guide rod of the present invention.
图4、图5为本实用新型的一种管式PECVD的电极机构的具体实施例图。4 and FIG. 5 are diagrams showing a specific embodiment of a tubular PECVD electrode mechanism according to the present invention.
具体实施方式Detailed ways
下面结合附图和实施例对本实用新型进一步说明。The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
以下将结合实施例和附图对本实用新型的构思、具体结构及产生的技术效果进行清楚、完整地描述，以充分地理解本实用新型的目的、特征和效果。显然，所描述的实施例只是本实用新型的一部分实施例，而不是全部实施例，基于本实用新型的实施例，本领域的技术人员在不付出创造性劳动的前提下所获得的其他实施例，均属于本实用新型保护的范围。另外，专利中涉及到的所有联接/连接关系，并非单指构件直接相接，而是指可根据具体实施情况，通过添加或减少联接辅件，来组成更优的联接结构。本实用新型创造中的各个技术特征，在不互相矛盾冲突的前提下可以交互组合。The concept, the specific structure and the technical effects of the present invention will be clearly and completely described in conjunction with the embodiments and the accompanying drawings in order to fully understand the purpose, features and effects of the present invention. It is apparent that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments, based on the embodiments of the present invention, other embodiments obtained by those skilled in the art without creative efforts, All belong to the scope of protection of the present invention. In addition, all the coupling/joining relationships involved in the patents are not directly connected to the components, but rather may constitute a better coupling structure by adding or reducing the coupling accessories according to the specific implementation. The various technical features in the creation of the utility model can be combined and combined without conflicting conflicts.
参照图1、图2以及图3所示，本实用新型揭示了一种管式PECVD的电极机构，具体的，该管式PECVD的电极机构包括前电极导杆10、后电极导杆20、前 石墨块30以及后石墨块40，两条后电极导杆20平行设置，所述前电极导杆10位于两条平行的后电极导杆20之间；如图2所示，所述的前电极导杆10包括前电极头101、绝缘套102以及前电极连接杆103，所述前电极连接杆103位于绝缘套102内部，前电极头101连接在前电极连接杆103的一端，另外，前电极导杆10还包括刚玉杆104，前电极连接杆103位于刚玉杆104内部；如图3所示，所述的后电极导杆20包括后电极头201、绝缘套管202以及后电极连接杆203，所述后电极连接杆203位于绝缘套管202内部，后电极头201连接在后电极连接杆203的一端，所述的前电极头201101和后电极头201用于与外部电源连接。通过上述的结构，所述的前石墨块30固定安装在两条后电极导杆20的中部，且前石墨块30与前电极连接杆103电性连接；所述的后石墨块40固定安装在两条后电极导杆20的尾部，且后石墨块40与后电极连接杆203电性连接；所述的前石墨块30和后石墨块40上用于搁置石墨舟，实现对石墨舟的放电。Referring to FIG. 1 , FIG. 2 and FIG. 3 , the present invention discloses an electrode mechanism for tubular PECVD. Specifically, the electrode mechanism of the tubular PECVD includes a front electrode guide 10 and a rear electrode guide 20 . Graphite block 30 and rear graphite block 40, two rear electrode guide rods 20 are arranged in parallel, and the front electrode guide rod 10 is located between two parallel rear electrode guide rods 20; as shown in Fig. 2, the front electrode The guide rod 10 includes a front electrode tip 101, an insulating sleeve 102 and a front electrode connecting rod 103. The front electrode connecting rod 103 is located inside the insulating sleeve 102, and the front electrode head 101 is connected to one end of the front electrode connecting rod 103. In addition, the front electrode The guide bar 10 further includes a corundum rod 104, and the front electrode connecting rod 103 is located inside the corundum rod 104. As shown in FIG. 3, the rear electrode guiding rod 20 includes a rear electrode tip 201, an insulating sleeve 202, and a rear electrode connecting rod 203. The rear electrode connecting rod 203 is located inside the insulating sleeve 202, and the rear electrode head 201 is connected to one end of the rear electrode connecting rod 203. The front electrode head 201101 and the rear electrode head 201 are used for connection with an external power source. With the above structure, the front graphite block 30 is fixedly mounted in the middle of the two rear electrode guides 20, and the front graphite block 30 is electrically connected to the front electrode connecting rod 103; the rear graphite block 40 is fixedly mounted on The tail portions of the two rear electrode guides 20, and the rear graphite block 40 is electrically connected to the rear electrode connecting rod 203; the front graphite block 30 and the rear graphite block 40 are used for resting the graphite boat to realize discharge of the graphite boat. .
如图4、图5所示，对于所述的管式PECVD的电极机构，本实用新型提供了一具体实施例，所述后电极导杆20的一端上具有推杆50，所述后电极头201位于推杆50的顶端；所述的推杆50上安装有炉门501和支撑板502，且炉门501与支撑板502之间活动连接，所述的前电极头201101安装在支撑板502上。如图4所示，所述的炉门501与支撑板502之间设置有多个调节螺杆503，且调节螺杆503的一端活动安装在炉门501上，调节螺杆503的另一端与支撑板502螺纹连接；另外，所述的前石墨块30上设置有贯穿的通孔，所述后电极导杆20从前石墨块30的通孔中穿过；所述的前石墨块30和后石墨块40上均设置有向上凸起的限位凸块，通过限位凸块对石墨舟60进行位置的限定，防止石墨舟60从前石墨块30和后石墨块40上滑落。As shown in FIG. 4 and FIG. 5, the present invention provides a specific embodiment for the electrode mechanism of the tubular PECVD. The rear electrode guide 20 has a push rod 50 on one end thereof, and the rear electrode head 201 is located at the top end of the push rod 50; the push rod 50 is mounted with a furnace door 501 and a support plate 502, and the furnace door 501 is movably connected with the support plate 502, and the front electrode head 201101 is mounted on the support plate 502. on. As shown in FIG. 4, a plurality of adjusting screws 503 are disposed between the furnace door 501 and the support plate 502, and one end of the adjusting screw 503 is movably mounted on the furnace door 501, and the other end of the adjusting screw 503 and the supporting plate 502 are Threaded connection; in addition, the front graphite block 30 is provided with a through hole, and the rear electrode guide 20 passes through the through hole of the front graphite block 30; the front graphite block 30 and the rear graphite block 40 Upper limit protrusions are provided on the upper side, and the position of the graphite boat 60 is limited by the limit protrusions to prevent the graphite boat 60 from sliding off from the front graphite block 30 and the rear graphite block 40.
通过上述的结构，本实用新型的此种管式PECVD的电极机构，将石墨舟60放置在前石墨块30和后石墨块40上，对石墨舟60起到支撑作用，当石墨舟进入石英管内时，减少了石墨舟60对石英管的压力造成的损坏，通过前石墨块30和后石墨块40与石墨舟60相接处，达到闭环，从而实现放电。Through the above structure, the electrode mechanism of the tubular PECVD of the present invention places the graphite boat 60 on the front graphite block 30 and the rear graphite block 40, and supports the graphite boat 60 when the graphite boat enters the quartz tube. At the same time, the damage caused by the pressure of the graphite boat 60 on the quartz tube is reduced, and the front graphite block 30 and the rear graphite block 40 are connected to the graphite boat 60 to reach a closed loop, thereby achieving discharge.
以上是对本实用新型的较佳实施进行了具体说明，但本实用新型创造并不限于所述实施例，熟悉本领域的技术人员在不违背本实用新型精神的前提下还可做出种种的等同变形或替换，这些等同的变形或替换均包含在本申请权利要求所限定的范围内。The above is a detailed description of the preferred embodiment of the present invention, but the present invention is not limited to the embodiments, and those skilled in the art can make various equivalents without departing from the spirit of the present invention. Modifications or substitutions are intended to be included within the scope of the appended claims.

Claims (6)

  1. 一种管式PECVD的电极机构，其特征在于：包括前电极导杆、后电极导杆、前石墨块以及后石墨块，两条后电极导杆平行设置，所述前电极导杆位于两条平行的后电极导杆之间；An electrode mechanism for tubular PECVD, comprising: a front electrode guide rod, a rear electrode guide rod, a front graphite block and a rear graphite block, wherein two rear electrode guide rods are arranged in parallel, and the front electrode guide rod is located at two Between parallel rear electrode guides;
    所述的前电极导杆包括前电极头、绝缘套以及前电极连接杆，所述前电极连接杆位于绝缘套内部，前电极头连接在前电极连接杆的一端；The front electrode guiding rod includes a front electrode head, an insulating sleeve and a front electrode connecting rod, the front electrode connecting rod is located inside the insulating sleeve, and the front electrode head is connected to one end of the front electrode connecting rod;
    所述的后电极导杆包括后电极头、绝缘套管以及后电极连接杆，所述后电极连接杆位于绝缘套管内部，后电极头连接在后电极连接杆的一端，所述的前电极头和后电极头用于与外部电源连接；The rear electrode guiding rod comprises a rear electrode head, an insulating sleeve and a rear electrode connecting rod, the rear electrode connecting rod is located inside the insulating sleeve, and the rear electrode head is connected to one end of the rear electrode connecting rod, the front electrode The head and the rear electrode are used to connect to an external power source;
    所述的前石墨块固定安装在两条后电极导杆的中部，且前石墨块与前电极连接杆电性连接；所述的后石墨块固定安装在两条后电极导杆的尾部，且后石墨块与后电极连接杆电性连接；所述的前石墨块和后石墨块上用于搁置石墨舟，实现对石墨舟的放电。The front graphite block is fixedly mounted in the middle of the two rear electrode guiding rods, and the front graphite block is electrically connected to the front electrode connecting rod; the rear graphite block is fixedly mounted on the tail portions of the two rear electrode guiding rods, and The rear graphite block is electrically connected to the rear electrode connecting rod; the front graphite block and the rear graphite block are used for resting the graphite boat to realize discharge of the graphite boat.
  2. 根据权利要求1所述的一种管式PECVD的电极机构，其特征在于：所述后电极导杆的一端上具有推杆，所述后电极头位于推杆的顶端。The tubular PECVD electrode mechanism according to claim 1, wherein the rear electrode guide has a push rod on one end thereof, and the rear electrode head is located at a top end of the push rod.
  3. 根据权利要求2所述的一种管式PECVD的电极机构，其特征在于：所述的推杆上安装有炉门和支撑板，且炉门与支撑板之间活动连接，所述的前电极头安装在支撑板上。The tubular PECVD electrode mechanism according to claim 2, wherein the push rod is provided with a furnace door and a support plate, and the furnace door and the support plate are movably connected, the front electrode The head is mounted on the support plate.
  4. 根据权利要求3所述的一种管式PECVD的电极机构，其特征在于：所述的炉门与支撑板之间设置有多个调节螺杆，且调节螺杆的一端活动安装在炉门上，调节螺杆的另一端与支撑板螺纹连接。The electrode mechanism of a tubular PECVD according to claim 3, wherein a plurality of adjusting screws are arranged between the furnace door and the support plate, and one end of the adjusting screw is movably mounted on the furnace door, and is adjusted. The other end of the screw is threadedly coupled to the support plate.
  5. 根据权利要求1所述的一种管式PECVD的电极机构，其特征在于：所述的前石墨块上设置有贯穿的通孔，所述后电极导杆从前石墨块的通孔中穿过。The tubular PECVD electrode mechanism according to claim 1, wherein the front graphite block is provided with a through hole, and the rear electrode guide passes through the through hole of the front graphite block.
  6. 根据权利要求1所述的一种管式PECVD的电极机构，其特征在于：所述的前石墨块和后石墨块上均设置有向上凸起的限位凸块。The tubular PECVD electrode mechanism according to claim 1, wherein the front graphite block and the rear graphite block are each provided with an upwardly protruding limiting protrusion.
PCT/CN2018/075723 2018-02-02 2018-02-08 Tubular pecvd electrode structure WO2019148519A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201820204621.5 2018-02-02
CN201820204621.5U CN207967023U (en) 2018-02-02 2018-02-02 A kind of electrode mechanism of tubular type PECVD

Publications (1)

Publication Number Publication Date
WO2019148519A1 true WO2019148519A1 (en) 2019-08-08

Family

ID=63737539

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2018/075723 WO2019148519A1 (en) 2018-02-02 2018-02-08 Tubular pecvd electrode structure

Country Status (2)

Country Link
CN (1) CN207967023U (en)
WO (1) WO2019148519A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111485227A (en) * 2020-04-13 2020-08-04 徐玮祎 Graphite boat electrode butt joint device for plasma enhanced chemical vapor deposition equipment

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110931339B (en) * 2019-10-23 2022-04-22 深圳市拉普拉斯能源技术有限公司 Processing device for semiconductor or photovoltaic material
CN111058016B (en) * 2019-12-26 2022-11-25 北京北方华创微电子装备有限公司 Electrode mechanism of semiconductor process furnace and semiconductor process furnace
CN111139460A (en) * 2019-12-27 2020-05-12 北京北方华创微电子装备有限公司 Radio frequency leading-in device and semiconductor processing equipment

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5356475A (en) * 1993-02-22 1994-10-18 Lsi Logic Corporation Ceramic spacer assembly for ASM PECVD boat
CN102321877A (en) * 2011-09-05 2012-01-18 北京七星华创电子股份有限公司 Electrode introduction device
CN105483647A (en) * 2016-01-07 2016-04-13 深圳市捷佳伟创新能源装备股份有限公司 Plasma enhanced chemical vapor deposition device
CN105568257A (en) * 2016-03-03 2016-05-11 深圳市捷佳伟创新能源装备股份有限公司 Graphite boat with front and rear electrodes and chemical vapor deposition equipment
CN205710906U (en) * 2016-03-03 2016-11-23 深圳市捷佳伟创新能源装备股份有限公司 Electrode graphite boat and chemical vapor depsotition equipment before and after one
JP6069874B2 (en) * 2012-04-03 2017-02-01 株式会社Ihi Plasma processing equipment

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5356475A (en) * 1993-02-22 1994-10-18 Lsi Logic Corporation Ceramic spacer assembly for ASM PECVD boat
CN102321877A (en) * 2011-09-05 2012-01-18 北京七星华创电子股份有限公司 Electrode introduction device
JP6069874B2 (en) * 2012-04-03 2017-02-01 株式会社Ihi Plasma processing equipment
CN105483647A (en) * 2016-01-07 2016-04-13 深圳市捷佳伟创新能源装备股份有限公司 Plasma enhanced chemical vapor deposition device
CN105568257A (en) * 2016-03-03 2016-05-11 深圳市捷佳伟创新能源装备股份有限公司 Graphite boat with front and rear electrodes and chemical vapor deposition equipment
CN205710906U (en) * 2016-03-03 2016-11-23 深圳市捷佳伟创新能源装备股份有限公司 Electrode graphite boat and chemical vapor depsotition equipment before and after one

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111485227A (en) * 2020-04-13 2020-08-04 徐玮祎 Graphite boat electrode butt joint device for plasma enhanced chemical vapor deposition equipment

Also Published As

Publication number Publication date
CN207967023U (en) 2018-10-12

Similar Documents

Publication Publication Date Title
WO2019148519A1 (en) Tubular pecvd electrode structure
CN101610632A (en) The plasma torch that cooling agent and working gas annex
WO2019136770A1 (en) Pipe-type pecvd dual furnace door mechanism
TW200722371A (en) Fuel reformer for fuel cell
CN203750791U (en) Novel hot melt glue gun
CN110565075B (en) Graphite boat electrode butt joint device for tubular PECVD (plasma enhanced chemical vapor deposition) equipment
CN214458316U (en) Electrode structure of tubular PECVD equipment
CN103561535B (en) A kind of array type micro-hole cathode air discharge plasma jet device
CN208714666U (en) A kind of solar battery aluminum back printing equipment
WO2019148521A1 (en) Tubular pecvd furnace door adjustment mechanism
CN202434884U (en) Resonant cavity adjustable carbon dioxide laser tube
CN207317491U (en) A kind of heating plate for battery vacuum drying production line
CN208277398U (en) A kind of MPP pipe extrusion die
CN203923368U (en) A kind of diffuser for tubular type PECVD
CN207868257U (en) A kind of battery component
CN201745176U (en) Fuse machine
WO2019148520A1 (en) Tubular pecvd reaction chamber-mouth-door structure
CN202171942U (en) Press plate type top-drum seat of large drum
CN209323204U (en) Iron plate mechanism with heating tube positioning structure
CN215799709U (en) Soaking pit of non-oriented annealing unit
CN213232461U (en) Device for improving temperature rising efficiency of ionic nitriding
CN218596511U (en) Chemical vapor deposition device convenient to control temperature
CN210805807U (en) Metal grid line end fixing mechanism of photovoltaic membrane electrode grid line winding device
CN204710363U (en) A kind of Multifunction very small chemical instrument
CN215638690U (en) Drying heater capable of flexibly adjusting angle

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 18903194

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

32PN Ep: public notification in the ep bulletin as address of the adressee cannot be established

Free format text: NOTING OF LOSS OF RIGHTS PURSUANT TO RULE 112(1) EPC

122 Ep: pct application non-entry in european phase

Ref document number: 18903194

Country of ref document: EP

Kind code of ref document: A1