CN205710906U - Electrode graphite boat and chemical vapor depsotition equipment before and after one - Google Patents
Electrode graphite boat and chemical vapor depsotition equipment before and after one Download PDFInfo
- Publication number
- CN205710906U CN205710906U CN201620162229.XU CN201620162229U CN205710906U CN 205710906 U CN205710906 U CN 205710906U CN 201620162229 U CN201620162229 U CN 201620162229U CN 205710906 U CN205710906 U CN 205710906U
- Authority
- CN
- China
- Prior art keywords
- graphite
- electrically conductive
- boat
- block
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
The utility model discloses electrode graphite boat before and after one, including: the boat body that the odd number graphite flake arranged by uniform intervals and even number graphite flake are constituted, odd number graphite flake and even number graphite flake are concatenated by graphite rod, the front bottom end of boat body is provided with electrically conductive graphite block before at least one, is provided with electrically conductive graphite block after at least one bottom the rear end of boat body.This utility model also proposed a kind of chemical vapor depsotition equipment using above-mentioned electrode graphite boat front and back.This utility model is respectively arranged at two ends with electrically conductive graphite before and after boat body, and positive and negative electrode bar is by contacting with electrically conductive graphite, and before and after boat body, two ends introduce both positive and negative polarity, make the electric fields uniform that boat body produces.
Description
Technical field
This utility model relates to photovoltaic cell technical field of processing equipment, the chemical vapor depsotition equipment of electrode graphite boat before and after particularly relating to a kind of electrode graphite boat front and back and using this.
Background technology
In photovoltaic cell processing industry, graphite boat is the silicon chip carrier in chemical vapor depsotition equipment, the principle of chemical vapor depsotition equipment is made by microwave or radio frequency etc. and makes the gas ionization containing thin film composed atom, it is being partially formed plasma, the parallel-plate coated graphite boat inserting solar silicon wafers is carried out chemical gaseous phase deposition, forms desired thin film.
nullPrior art has occurred in that graphite boat structure，Such as Fig. 1、Shown in 2，Publication No. is the utility model patent of CN102534564A，Including: the graphite boat body being connected with electrode stem，Graphite boat body is by strange battery lead plate 2、Even battery lead plate 3、Spacer block 4 in the middle of upper electrode、Spacer block 5 in bottom electrode、Spacer block 6 in symmetrical bottom electrode、Electrode spacer block 8 and graphite boat foot 9 form，Graphite boat body two ends all have two electrode holes，And in two electrode holes of every one end，Superposed electrode hole is arranged at being positioned on the middle spacer block 6 of upper electrode at graphite boat body two ends，Lower electrode hole be separately positioned in bottom electrode spacer block 5 with on spacer block 6 in symmetrical bottom electrode，In this bottom electrode, spacer block 5 is respectively provided at graphite boat body two ends with spacer block 6 in symmetrical bottom electrode，The spacing of two electrode holes at graphite boat body two ends is equal.
This utility model arranges electrode hole the two-sided of graphite boat, electrode stem 1 can be met and can insert electrode hole respectively from two ends, graphite boat go-cart rotates 180 degree of possible smooth operation, but this graphite boat uses the mode that in conventional art, positive and negative electrode introduces with one end from boat body, this can cause the Electric Field Distribution inequality of graphite boat, front end electric field is compared rear end battery and has been weakened or increased, and the film thickness uniformity of silicon chip is poor, largely effects on the quality of production of solaode.
Utility model content
For solving above-mentioned technical problem, the utility model proposes electrode graphite boat and chemical vapor depsotition equipment before and after one, positive and negative electrode can respectively before and after this before and after electrode graphite boat two ends introduce, make the electric fields uniform that boat body produces, the film thickness uniformity of silicon chip is good.
The technical solution adopted in the utility model is, electrode graphite boat before and after design one, including: the boat body that the odd number graphite flake arranged by uniform intervals and even number graphite flake are constituted, odd number graphite flake and even number graphite flake are concatenated by graphite rod.Odd number graphite flake and even number graphite flake are all placed with hollow-out parts, and the hollow-out parts horizontal alignment on odd number graphite flake and even number graphite flake.
The front bottom end of odd number graphite flake is provided with auricle under the front end forward extended out, and is fitted with spacer block or front electrically conductive graphite block under front end under adjacent front end between auricle, and the front bottom end of boat body is provided with electrically conductive graphite block before at least one.It is provided with auricle on the rear end stretched out backward in the middle part of the rear end of odd number graphite flake, adjacent rear end is fitted with between auricle spacer block on rear end.
It is provided with auricle under the rear end stretched out backward bottom the rear end of even number graphite flake, is fitted with spacer block or rear electrically conductive graphite block under rear end under adjacent rear end between auricle, bottom the rear end of boat body, is provided with electrically conductive graphite block after at least one.The front center of even number graphite flake is provided with auricle on the front end forward extended out, and adjacent front end is fitted with between auricle spacer block on front end.
Protruding odd number graphite flake bottom front electrically conductive graphite block, protrude even number graphite flake bottom rear electrically conductive graphite block, the bottom surface, two ends of boat body is provided with four spikes.
In one embodiment, the both sides of boat body are odd number graphite flake, the rear end of boat body be symmetrically arranged on two with two after electrically conductive graphite block, the both sides, front end of boat body are also arranged with two front electrically conductive graphite blocks.After two, electrically conductive graphite block lays respectively at two outermost of boat body rear end, two front electrically conductive graphite blocks spacer block respectively and under two one front end, outermost interval of boat body.
Preferably, before the bottom outside face and two of electrically conductive graphite block, the bottom outside face of electrically conductive graphite block is arc surface after two.
This utility model also proposed a kind of chemical vapor depsotition equipment using above-mentioned electrode graphite boat front and back, including: boiler tube, it is located at the graphite boat in this boiler tube and electrode assembly, this boiler tube is by cavity, it is positioned at protecgulum and the bonnet composition at cavity two ends, electrode assembly includes that two electrodes being provided separately and being fixed on protecgulum and bonnet fix bar and positive and negative electrode bar, positive and negative electrode bar uses fixed block to be fixed on electrode to fix on bar respectively, and extend in whole graphite boat length, graphite boat is placed on positive and negative electrode masthead face, positive and negative electrode bar contacts energising with front electrically conductive graphite block and rear electrically conductive graphite block respectively.
This utility model is respectively equipped with electrically conductive graphite in the front-end and back-end of boat body, and positive and negative electrode bar is by contacting with electrically conductive graphite, and before and after boat body, two ends introduce, and make the electric fields uniform that boat body produces.The front-end and back-end of boat body are all arranged with two electrically conductive graphites so that after boat body rotates 180 °, still can contact energising with positive and negative electrode bar, use and be convenient to.
Accompanying drawing explanation
Below in conjunction with embodiment and accompanying drawing, this utility model is described in detail, wherein:
Fig. 1 is the front schematic view of graphite boat in prior art；
Fig. 2 is the end construction schematic diagram of graphite boat in prior art；
Fig. 3 is the front schematic view that in this utility model, electrode accesses from boat body two ends；
Fig. 4 is the plan structure schematic diagram of boat body in this utility model；
Fig. 5 is the front schematic view of odd number graphite flake in this utility model；
Fig. 6 is the front schematic view of even number graphite flake in this utility model；
Fig. 7 is the front-end architecture schematic diagram of boat body in preferred embodiment；
Fig. 8 is the rear end structure schematic diagram of boat body in preferred embodiment；
Fig. 9 is the front schematic view of chemical vapor depsotition equipment in this utility model；
Figure 10 is the schematic top plan view of chemical vapor depsotition equipment in this utility model.
Detailed description of the invention
As shown in Figure 3,4, electrode graphite boat before and after the utility model proposes, including: boat body 1, odd number graphite flake 11 and even number graphite flake 12 that boat body 1 is arranged by interleaved are constituted, odd number graphite flake 11 and even number graphite flake 12 are concatenated by graphite rod, and after concatenation, the spacing distance between odd number graphite flake 11 and even number graphite flake 12 is consistent.The height of odd number graphite flake 11, length, thickness are all consistent with even number graphite flake 12, and odd number graphite flake 11 and even number graphite flake 12 be all placed with hollow-out parts, and the hollow-out parts horizontal alignment on odd number graphite flake 11 and even number graphite flake 12.
As shown in Fig. 5,7,8, the front bottom end of odd number graphite flake 11 is provided with auricle 110 under the front end forward extended out, spacer block 13 or front electrically conductive graphite block 14 under front end it is fitted with between auricle 110 under adjacent front end, at least it is provided with front electrically conductive graphite block 14 between auricle 110 under a pair adjacent front end, that is, say, that the front bottom end of boat body 1 is provided with electrically conductive graphite block 14 before at least one.It is provided with auricle 111 on the rear end stretched out backward in the middle part of the rear end of odd number graphite flake 11, adjacent rear end is fitted with between auricle 111 spacer block 15 on rear end.
As shown in Fig. 6,7,8, auricle 120 under the rear end stretched out backward it is provided with bottom the rear end of even number graphite flake 12, spacer block 16 or rear electrically conductive graphite block 17 under rear end it is fitted with between auricle 120 under adjacent rear end, at least it is provided with rear electrically conductive graphite block 17 between auricle 120 under a pair adjacent rear end, it is to say, electrically conductive graphite block 17 after being provided with at least one bottom the rear end of boat body 1.The front center of even number graphite flake 12 is provided with auricle 121 on the front end forward extended out, and adjacent front end is fitted with between auricle 121 spacer block 18 on front end.
As shown in Figure 7,8, after separating adjacent odd number graphite flake 11 and adjacent even number graphite flake 12 with spacer block, graphite rod passes spacer block and graphite flake, is fixing graphite rod two ends, two ends with nut.The bottom surface, two ends of boat body 1 is additionally provided with four spikes 19 for supporting boat body 1, and these four spacer blocks propping up spike 19 corresponding with above it link into an integrated entity.Odd number graphite flake 11 is protruded bottom front electrically conductive graphite block 14.Even number graphite flake 12 is protruded bottom rear electrically conductive graphite block 17.When graphite boat has only needed unidirectional stroke, the two ends of boat body 1 only need to be respectively provided with electrically conductive graphite block 17 after a front electrically conductive graphite block 14 and, positive and negative electrode bar contacts energising with two electrically conductive graphite blocks respectively, the two ends energising of boat body 1 can be ensured, making its two ends electric fields uniform, the film thickness uniformity of silicon chip is good.
In preferred embodiment of the present utility model, as shown in Figure 7,8, the both sides of boat body 1 are odd number graphite flake 11, make the both sides symmetrical shape of whole boat body 1, the rear end of boat body 1 be symmetrically arranged on two with two after electrically conductive graphite block 17, the both sides, front end of boat body 1 are also arranged with two front electrically conductive graphite blocks 14, and boat body 1 shape, rear electrically conductive graphite block 17, front electrically conductive graphite block 14 are arranged to symmetry, after facilitating boat body 1 to rotate 180 °, still can contact energising with anelectrode bar and negative electrode bar respectively.
Wherein, contact with positive and negative electrode bar for convenience, after these two, electrically conductive graphite block 17 lays respectively at two outermost of boat body 1 rear end, these two front electrically conductive graphite blocks 14 spacer block 13 respectively and under two one front end, outermost interval of boat body 1, optimizing further, before two, the bottom outside face of electrically conductive graphite block 14 is arc surface, and after two, the bottom outside face of electrically conductive graphite block 17 is also arc surface, arc surface can increase the contact area of electrically conductive graphite block and electrode stem, contact more stable, more can meet conduction needs.
Such as Fig. 9, shown in 10, this utility model also proposed a kind of chemical vapor depsotition equipment using above-mentioned electrode graphite boat front and back, including: boiler tube, it is located at the graphite boat in this boiler tube and electrode assembly, protecgulum 2 and bonnet 3 that this boiler tube by cavity, is positioned at cavity two ends form, electrode assembly includes that two electrodes being provided separately and being fixed between protecgulum 2 and bonnet 3 fix bar 4, anelectrode bar 5 and negative electrode bar 6, anelectrode bar 5 and negative electrode bar 6 use fixed block to be fixed on electrode respectively and fix on bar 4, and extend in whole graphite boat length.Boat body 1 is placed on positive and negative electrode masthead face, and the position of anelectrode bar 5 and negative electrode bar 6 coordinates with front electrically conductive graphite block 15 and rear electrically conductive graphite block 17 respectively, it is ensured that positive and negative electrode accesses from the two ends of boat body 1.
Shown in Fig. 10, anelectrode bar 5 coordinates with the position of rear electrically conductive graphite block 17, anelectrode bar 5 conducts electricity from the rear end of boat body 1, negative electrode bar 6 coordinates with the position of front electrically conductive graphite block 14, negative electrode bar 6 conducts electricity from the front end of boat body 1, can certainly be arranged to the position of anelectrode bar 5 coordinate with front electrically conductive graphite block 14, the position of negative electrode bar 6 is arranged to coordinate with rear electrically conductive graphite block 17.Owing to the front electrically conductive graphite block 14 of two on boat body 1 is symmetrical, after two, electrically conductive graphite block 17 is the most symmetrical, therefore after boat body 1 rotates 180 °, still energising can be contacted with positive and negative electrode bar, so electric field imports from graphite boat rear and front end, graphite boat afterbody electric field is reduced with graphite boat front portion electric field difference, and whole graphite boat electric field is more uniform.
The foregoing is only preferred embodiment of the present utility model, not in order to limit this utility model, all any amendment, equivalent and improvement etc. made within spirit of the present utility model and principle, within should be included in protection domain of the present utility model.
Claims (9)
1. an electrode graphite boat before and after, including: the boat body (1) that the odd number graphite flake (11) arranged by uniform intervals and even number graphite flake (12) are constituted, described odd number graphite flake (11) and even number graphite flake (12) are concatenated by graphite rod, it is characterised in that
The front bottom end of described odd number graphite flake (11) is provided with auricle (110) under the front end forward extended out, being fitted with spacer block under front end (13) or front electrically conductive graphite block (14) under adjacent front end between auricle (110), the front bottom end of described boat body (1) is provided with electrically conductive graphite block (14) before at least one；
It is provided with auricle (120) under the rear end stretched out backward bottom the rear end of described even number graphite flake (12), it is fitted with spacer block under rear end (16) or rear electrically conductive graphite block (17) under adjacent rear end between auricle (120), bottom the rear end of described boat body (1), is provided with electrically conductive graphite block (17) after at least one.
2. electrode graphite boat front and back as claimed in claim 1, it is characterised in that be provided with auricle (111) on the rear end stretched out backward in the middle part of the rear end of described odd number graphite flake (11), adjacent rear end is fitted with between auricle (111) spacer block on rear end (15)；
The front center of described even number graphite flake (12) is provided with auricle (121) on the front end forward extended out, and adjacent front end is fitted with between auricle (121) spacer block on front end (18).
3. electrode graphite boat front and back as claimed in claim 2, it is characterised in that odd number graphite flake (11) is protruded in described front electrically conductive graphite block (14) bottom, even number graphite flake (12) is protruded in described rear electrically conductive graphite block (17) bottom.
4. electrode graphite boat front and back as claimed in claim 3, it is characterised in that the bottom surface, two ends of described boat body (1) is provided with four spikes (19).
5. electrode graphite boat before and after as described in any one of Claims 1-4, it is characterized in that, the both sides of described boat body (1) are odd number graphite flake (11), the rear end of described boat body (1) be symmetrically arranged on two with two after electrically conductive graphite block (17), the both sides, front end of described boat body (1) are also arranged with two front electrically conductive graphite blocks (14).
6. electrode graphite boat front and back as claimed in claim 5, it is characterized in that, after said two, electrically conductive graphite block (17) lays respectively at two outermost of boat body (1) rear end, before said two electrically conductive graphite block (14) respectively and boat body (1) two outermost interval one front end under spacer block (13).
7. electrode graphite boat front and back as claimed in claim 6, it is characterised in that after described two, before the bottom outside face and described two of electrically conductive graphite block (17), the bottom outside face of electrically conductive graphite block (14) is arc surface.
8. electrode graphite boat before and after as described in any one of claim 1,2,3,4,6,7, it is characterized in that, described odd number graphite flake (11) and even number graphite flake (12) are all placed with hollow-out parts, and the hollow-out parts horizontal alignment on odd number graphite flake (11) and even number graphite flake (12).
9. the chemical vapor depsotition equipment of electrode graphite boat before and after any of the above-described item of use, including: boiler tube, it is located at the graphite boat in this boiler tube and electrode assembly, this boiler tube is by cavity, it is positioned at protecgulum (2) and bonnet (3) composition at cavity two ends, described electrode assembly includes that two electrodes being provided separately and being fixed between described protecgulum (2) and bonnet (3) fix bar (4) and positive and negative electrode bar, described positive and negative electrode bar uses fixed block to be fixed on described electrode to fix on bar respectively, and extend in whole graphite boat length, it is characterized in that, described graphite boat is placed on positive and negative electrode masthead face, positive and negative electrode bar contacts energising with front electrically conductive graphite block (14) and rear electrically conductive graphite block (17) respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620162229.XU CN205710906U (en) | 2016-03-03 | 2016-03-03 | Electrode graphite boat and chemical vapor depsotition equipment before and after one |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620162229.XU CN205710906U (en) | 2016-03-03 | 2016-03-03 | Electrode graphite boat and chemical vapor depsotition equipment before and after one |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205710906U true CN205710906U (en) | 2016-11-23 |
Family
ID=57334235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620162229.XU Active CN205710906U (en) | 2016-03-03 | 2016-03-03 | Electrode graphite boat and chemical vapor depsotition equipment before and after one |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205710906U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105568257A (en) * | 2016-03-03 | 2016-05-11 | 深圳市捷佳伟创新能源装备股份有限公司 | Graphite boat with front and rear electrodes and chemical vapor deposition equipment |
| WO2019148519A1 (en) * | 2018-02-02 | 2019-08-08 | 深圳丰盛装备股份有限公司 | Tubular pecvd electrode structure |
| CN110965048A (en) * | 2019-12-04 | 2020-04-07 | 江苏菲沃泰纳米科技有限公司 | Coating equipment and electrode device and application thereof |
-
2016
- 2016-03-03 CN CN201620162229.XU patent/CN205710906U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105568257A (en) * | 2016-03-03 | 2016-05-11 | 深圳市捷佳伟创新能源装备股份有限公司 | Graphite boat with front and rear electrodes and chemical vapor deposition equipment |
| WO2019148519A1 (en) * | 2018-02-02 | 2019-08-08 | 深圳丰盛装备股份有限公司 | Tubular pecvd electrode structure |
| CN110965048A (en) * | 2019-12-04 | 2020-04-07 | 江苏菲沃泰纳米科技有限公司 | Coating equipment and electrode device and application thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105568257B (en) | Electrode graphite boat and chemical vapor depsotition equipment before and after a kind of | |
| CN205710906U (en) | Electrode graphite boat and chemical vapor depsotition equipment before and after one | |
| WO2005117173A3 (en) | A novel approach to make a high performance membrane electrode assembly (mea) for a pem fuel cell | |
| WO2007116244A3 (en) | Method of fabricating electrodes with low contact resistance for batteries and double-layer capacitors | |
| CN215481256U (en) | Semiconductor processing equipment and process chamber thereof | |
| CN214753673U (en) | Tray and slide glass device | |
| WO2015138038A3 (en) | Ultracapacitors with high frequency response | |
| CN214881818U (en) | Graphite boat | |
| CN106128906B (en) | Vertical type graphene film field-transmitting cathode and preparation method thereof, electrode | |
| KR20110018996A (en) | Plasma generation apparatus | |
| CN203062081U (en) | Seal welding tool | |
| TW200511676A (en) | Surge absorber and manufacturing method thereof | |
| CN105555002A (en) | Dynamic parallel-plate plasma generator | |
| CN202022977U (en) | Graphite boat electrode structure | |
| CN205491411U (en) | Developments parallel -plate plasma generator | |
| CN208127115U (en) | A kind of ceramic shell magnetic reed switch | |
| CN210846938U (en) | Ultrasonic atomization sheet | |
| CN209748842U (en) | vacuum heating coil electrode for atomic layer deposition equipment | |
| CN207800541U (en) | Atomospheric pressure glow discharge ion source | |
| CN203178458U (en) | High repeatability standard bubble discharging model device | |
| CN209397262U (en) | Plasma enhanced chemical vapor deposition electrode assembly | |
| TW201130149A (en) | Method for producing an emitter electrode for a crystalline silicon solar cell, and corresponding silicon solar cell | |
| JP2005286008A (en) | Electric double layer capacitor | |
| CN207474475U (en) | The closed type three-dimensional groove silicon detector in minimum dead zone | |
| CN207353625U (en) | Beam brushes flat line slip ring |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |