CN214881818U - Graphite boat - Google Patents
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- CN214881818U CN214881818U CN202121181198.XU CN202121181198U CN214881818U CN 214881818 U CN214881818 U CN 214881818U CN 202121181198 U CN202121181198 U CN 202121181198U CN 214881818 U CN214881818 U CN 214881818U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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Abstract
The utility model discloses be suitable for graphite boat technical field, provide a graphite boat, include: the graphite boat comprises a graphite boat main body, wherein the graphite boat main body comprises a plurality of graphite boat sheets which are sequentially arranged at intervals, and two adjacent graphite boat sheets are respectively connected with electrodes with different polarities; and the high-temperature-resistant insulating boat foot is used for supporting the graphite boat main body in the tube furnace and is fixedly connected with at least one graphite boat sheet. The graphite boat provided by the utility model avoids the problem that the plating layer is cracked and dropped to cause dust pollution in the tube furnace due to the fact that the plating layer is broken and dropped by breakdown of air between the plating layer of the inner wall of the tube furnace and the graphite boat sheet through arranging the high temperature resistant insulating boat foot, and avoids influencing the film coating process of the battery sheet; but also avoids the influence on the stability and the effect of the battery piece film coating process caused by the current fluctuation caused by the conduction between the graphite boat piece and the coating on the inner wall of the tube furnace; meanwhile, the number of the graphite boat pieces does not need to be reduced, the carrying quantity of the graphite boat is not influenced, and the capacity of the battery pieces is ensured.
Description
Technical Field
The utility model relates to a graphite boat technical field, concretely relates to graphite boat.
Background
With the continuous development of the solar photovoltaic industry, the scale of the solar photovoltaic market is continuously increased, but the market competition is fierce, so that in order to realize the flat-price internet surfing as soon as possible and the popularization and application in a wider range, each link of the whole industry strives to pursue and obtain the high-efficiency and low-cost battery. In the cell segment, it is very important to obtain a high-quality and low-cost cell. The graphite boat is a bearing tool for coating the battery piece by adopting a plasma enhanced chemical vapor deposition process.
In the prior art, the boat legs of the graphite boat are usually made of graphite materials, and during the chemical vapor deposition coating process of the graphite boat in the PECVD tube furnace, a conductive coating is gradually formed on the inner wall of the tube furnace, and the coating on the inner wall of the tube furnace and the boat legs will have homopolar charges because the boat legs and the graphite boat sheets connected with the boat legs have homopolar charges. Because the graphite boat pieces at the edge are adjacent to the coating layer of the inner wall of the tube furnace, the graphite boat pieces at the edge and the coating layer of the inner wall of the tube furnace are charged with opposite polarities. After high-frequency voltage is applied, breakdown air is generated to form conduction because the plating layer on the inner wall of the tubular furnace and the graphite boat sheet on the edge are too close, so that the plating layer on the charge breakdown air part is cracked and falls off, dust pollution occurs in the tubular furnace, and the film coating process of the battery piece is influenced; moreover, the process current fluctuation can be caused by the conduction of the plating layers of the graphite boat piece and the inner wall of the tube furnace, so that the reaction of the graphite boat is uneven during the process, and the stability and the effect of the battery piece coating process are influenced.
SUMMERY OF THE UTILITY MODEL
The utility model provides a graphite boat aims at solving the boat foot of the graphite boat among the prior art and adopts graphite preparation, has the graphite boat to carry out chemical meteorological deposition coating film process at the tubular furnace in, easily influences the problem of battery piece coating film technology because of tubular furnace inner wall cladding material is electrified.
The utility model discloses a realize like this, provide a graphite boat, include:
the graphite boat comprises a graphite boat main body, wherein the graphite boat main body comprises a plurality of graphite boat sheets which are sequentially arranged at intervals, and two adjacent graphite boat sheets are respectively connected with electrodes with different polarities; and
and the high-temperature-resistant insulating boat foot is used for supporting the graphite boat main body in the tube furnace and is fixedly connected with at least one graphite boat piece.
Preferably, the high-temperature-resistant insulating boat foot is an integrated ceramic boat foot.
Preferably, the high temperature resistant insulating boat foot includes:
a main body portion made of graphite; and
the high-temperature-resistant insulating layer wraps the main body part.
Preferably, the graphite boat main body includes:
the first graphite block is connected with the first electrode, each graphite boat sheet corresponding to the first electrode is respectively assembled and connected with the first graphite block, the high-temperature-resistant insulating boat foot is connected with the first graphite block through a first insulating connecting rod, and the high-temperature-resistant insulating boat foot is locked and fixed on the graphite boat sheet through an insulating nut fixed on the first insulating connecting rod;
and the second graphite block is connected with the second electrode, and the graphite boat pieces corresponding to the second electrode are respectively assembled and connected with the second graphite block.
Preferably, the insulating nut is a ceramic nut.
Preferably, the high-temperature-resistant insulating boat foot is provided with a filling hole which is formed by hollowing and is used for filling a conductive material, and the conductive material is used for communicating two adjacent graphite boat pieces with the same polarity.
Preferably, the graphite boat pieces comprise two outer graphite boat pieces located at the edges of two opposite sides of the graphite boat main body and a plurality of middle graphite boat pieces arranged between the two outer graphite boat pieces, the outer graphite boat pieces are respectively and electrically connected with the middle graphite boat pieces with the same polarity, and one high-temperature-resistant insulating boat foot is correspondingly arranged below each outer graphite boat piece.
Preferably, the total number of the graphite boat pieces is an odd number, the two outer graphite boat pieces have the same polarity, and the two outer graphite boat pieces are simultaneously and electrically connected with the middle graphite boat piece with the same polarity.
Preferably, the total number of the graphite boat pieces is an even number, and the polarities of the two outer graphite boat pieces are opposite, wherein one of the outer graphite boat pieces is electrically connected with the middle graphite boat piece with one polarity, and the other outer graphite boat piece is electrically connected with the middle graphite boat piece with the other polarity.
Preferably, the filling hole of the high-temperature-resistant insulating boat foot corresponding to one of the outer graphite boat pieces is filled with a conductive material, and the conductive material conducts the outer graphite boat piece and the middle graphite boat piece which is adjacent to the outer graphite boat piece and has the same polarity.
The utility model provides a graphite boat is through setting up high temperature resistant insulating boat foot, replace the traditional boat foot of being made by graphite material, like this graphite boat carries out the chemical meteorology deposition coating film process in the tubular furnace, because high temperature resistant insulating boat foot can not switch on graphite boat piece and the cladding material that the tubular furnace inner wall formed, just also avoided the cladding material of tubular furnace inner wall to be electrified, consequently can avoid the cladding material of tubular furnace inner wall and graphite boat piece to produce to puncture the air and form to switch on and lead to the cladding material cracked to drop and cause the problem that the dust pollution appears in the boiler tube, avoided influencing battery piece coating film process because of appearing the dust; moreover, the problem of current fluctuation caused by the conduction between the graphite boat sheet and the coating on the inner wall of the tube furnace is avoided, the uniform reaction of the graphite boat during the coating process is ensured, and the stability and the effect of the coating process of the battery sheet are ensured; meanwhile, the number of the graphite boat pieces does not need to be reduced, the carrying quantity of the graphite boat is not influenced, and the capacity of the battery pieces is ensured.
Drawings
Fig. 1 is a schematic structural diagram of a graphite boat according to an embodiment of the present invention;
fig. 2 is a schematic structural view of another graphite boat according to an embodiment of the present invention;
fig. 3 is a schematic structural view of a graphite boat placed in a tube furnace according to an embodiment of the present invention;
fig. 4 is a schematic structural view of a high temperature resistant insulating boat foot of a graphite boat according to an embodiment of the present invention;
fig. 5 is a schematic structural view of a high temperature resistant insulating boat foot of a graphite boat according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The embodiment of the utility model provides a graphite boat is through setting up high temperature resistant insulating boat foot 2, replace traditional boat foot of making by graphite material, like this graphite boat carries out the chemical meteorology deposition coating film process in the tubular furnace, because the high temperature resistant insulating boat foot 2 of graphite boat can not switch on graphite boat piece 11 and the cladding material that tubular furnace inner wall 100 formed, also avoided the cladding material of tubular furnace inner wall to be electrified, consequently can avoid the cladding material of tubular furnace inner wall and graphite boat piece to produce to puncture the air and form to switch on and lead to the cladding material cracked to drop and cause the problem that the dust pollution appears in the boiler tube, avoided influencing battery piece coating film process because of appearing the dust; moreover, the problem of current fluctuation caused by the conduction between the graphite boat piece 11 and the coating of the inner wall 100 of the tube furnace is avoided, the reaction uniformity of the graphite boat during the coating process is ensured, and the stability and the effect of the coating process of the battery piece are ensured; meanwhile, the number of the graphite boat pieces 11 does not need to be reduced, the carrying quantity of the graphite boat is not influenced, and the capacity of the battery pieces is ensured.
Example one
Referring to fig. 1 and fig. 2, an embodiment of the present invention provides a graphite boat, including:
the graphite boat comprises a graphite boat main body 1, wherein the graphite boat main body 1 comprises a plurality of graphite boat sheets 11 which are sequentially arranged at intervals, and two adjacent graphite boat sheets 11 are respectively connected with electrodes with different polarities; and
the high-temperature-resistant insulating boat foot 2 is used for supporting the graphite boat main body 1 in the tube furnace, and the high-temperature-resistant insulating boat foot 2 is fixedly connected with at least one graphite boat sheet 11.
In the embodiment of the present invention, the specific number of the graphite boat pieces 11 is not limited, and the number of the graphite boat pieces 11 may be an odd number or an even number. Wherein, the total number of the graphite boat pieces 11 shown in fig. 1 is 25, and the total number of the graphite boat pieces 11 shown in fig. 2 is 26. The high-temperature resistant insulating boat foot 2 can be fixedly connected with any one of the graphite boat pieces 11, and can also be fixedly connected with any two adjacent graphite boat pieces 11 with the same polarity.
In the embodiment of the present invention, in any two adjacent graphite boat pieces 11, one graphite boat piece 11 is connected with the positive electrode, and the other graphite boat piece 11 is connected with the negative electrode. And a mounting gap for placing the battery piece is formed between every two adjacent graphite boat pieces 11 at intervals, and the battery piece is placed in the mounting gap to carry out a film coating process.
As an embodiment of the present invention, the high temperature resistant insulating boat foot 1 includes two arranged at least below the graphite boat main body 1. As shown in FIG. 3, when the graphite boat is placed in a tube furnace for a CVD coating process, the refractory insulating boat legs 2 are brought into contact with the inner wall 100 of the tube furnace to support the entire graphite boat body 1 in the tube furnace.
The number of the high temperature resistant insulating boat legs 1 shown in fig. 1 and 2 is two, and the two high temperature resistant insulating boat legs 1 are respectively arranged below the edges of the two sides of the graphite boat main body 1. Two supporting legs 3 are arranged between the two high-temperature-resistant insulating boat legs 2, the two supporting legs 3 are used for supporting when the graphite boat is placed in a drying furnace for drying, and when the graphite boat is placed in a tube furnace for chemical vapor deposition coating process, the two supporting legs 3 are not contacted with the inner wall 100 of the tube furnace, so that the two supporting legs 3 can be made of high-temperature-resistant insulating materials or made of graphite. Preferably, the two supporting feet 3 are high-temperature-resistant insulating supporting feet.
In the embodiment of the utility model, the graphite boat is provided with the high temperature resistant insulating boat foot 2, and the graphite boat is in the process of chemical meteorology deposition coating process in the tube furnace, the high temperature resistant insulating boat foot 2 can not conduct the conductive coating formed by the graphite boat piece 11 and the inner wall 100 of the tube furnace, so that the graphite boat piece and the inner wall 100 of the tube furnace are insulated, and the conductive coating of the inner wall 100 of the tube furnace is also prevented from being electrified, therefore, the conductive coating of the inner wall of the tube furnace and the graphite boat piece 11 can be prevented from generating breakdown air to form conduction, the conductive coating can be cracked and dropped to cause dust pollution in the tube furnace, and the influence of dust on the coating process of the battery piece is avoided; moreover, the problem of current fluctuation caused by the conduction between the graphite boat sheet 11 and the coating on the inner wall of the tube furnace is avoided, the uniform reaction of the graphite boat during the coating process is ensured, and the stability and the effect of the coating process of the battery sheet are ensured; meanwhile, the high-temperature-resistant insulating boat foot 2 is only required to be made of high-temperature-resistant insulating materials, the polarity of the edge graphite boat piece 11 can be set at will, the number of the graphite boat pieces 11 does not need to be reduced, the carrying quantity of the graphite boat is not influenced, and the productivity of the battery piece is ensured.
As an embodiment of the utility model, the high temperature resistant insulating boat foot 1 is the ceramic boat foot of integral type. The high-temperature-resistant insulating boat foot 2 is made of ceramic materials integrally, and processing of the high-temperature-resistant insulating boat foot 2 is facilitated. The ceramic material has good high temperature resistance and insulation performance, and the ceramic material has low cost, so that the high temperature resistant insulation boat leg 2 has good high temperature resistance and insulation performance, and the processing cost is low. In addition, the high temperature resistant insulating boat foot 2 can also be integrally made of calcium silicate or magnesium silicate, namely the high temperature resistant insulating boat foot 2 can also be an integrated calcium silicate boat foot or an integrated magnesium silicate boat foot.
As an embodiment of the utility model, a plurality of graphite boat pieces 11 are including two outer graphite boat pieces 111 that are located the relative both sides edge of graphite boat main part 1 and set up graphite boat piece 112 in the middle of two a plurality of between outer graphite boat piece 111, and outer graphite boat piece 111 is connected with the middle graphite boat piece 112 electricity of homopolar respectively, and every outer graphite boat piece 111's below corresponds respectively and sets up a high temperature resistant insulating boat foot 2.
In this embodiment, the polarities of the two outer graphite boat pieces 111 may be the same or different. As shown in fig. 1, when the total number of the graphite boat pieces 11 is an odd number, the polarities of the two outer graphite boat pieces 111 are the same. As shown in fig. 2, when the total number of the graphite boat pieces 11 is an even number, the polarities of the two outer graphite boat pieces 111 are opposite.
As an embodiment of the present invention, the graphite boat main body 1 includes:
the first graphite block 12 is connected with the first electrode, and the graphite boat pieces 11 corresponding to the first electrode are respectively assembled and connected with the first graphite block 12; the high-temperature resistant insulating boat foot 2 is connected with a first graphite block 12 through a first insulating connecting rod (not shown), and the high-temperature resistant insulating boat foot 2 is locked and fixed on a graphite boat piece 11 through an insulating nut 14 fixed on the first insulating connecting rod; and
the second graphite blocks 15 connected with the second electrode are assembled and connected with the second graphite blocks 15 respectively corresponding to the graphite boat pieces 11 of the second electrode.
In this embodiment, the first electrode may be a positive electrode, and the second electrode may be a negative electrode. The first electrode may be a negative electrode, and the second electrode may be a positive electrode.
Wherein, the quantity of first graphite piece 12 is a plurality of, and a plurality of first graphite pieces 12 are connected through first insulating connecting rod and are assembled each other and connect into an organic whole, and first insulating connecting rod passes two high temperature resistant insulating boat feet 2 and two supporting legss 3 simultaneously, and each graphite boat piece 11 centre gripping that corresponds first electrode is between adjacent two first graphite pieces 12 or directly contacts with first graphite piece 12 to make each graphite boat piece 11 that corresponds first electrode keep switching on. Each high-temperature-resistant insulating boat foot 2 is locked on the graphite boat piece 11 through an insulating nut 14, and the two high-temperature-resistant insulating boat feet 2 are assembled and fixed with the first graphite block 12 and the graphite boat piece 11. In addition, the first graphite block 12 may have an integral structure.
The number of the second graphite blocks 15 is plural, the plural second graphite blocks 15 are assembled and connected into a whole by a second insulating connecting rod (not shown), and each graphite boat piece 11 corresponding to the second electrode is clamped between two adjacent second graphite blocks 15 or directly contacts with the second graphite block 15, so that each graphite boat piece 11 corresponding to the second electrode is conducted with each other. And locking nuts 17 are respectively fixed at two ends of the second insulating connecting rod, and the locking connection between the second graphite block 15 and the corresponding graphite boat piece 11 is realized by using the locking nuts 17. In addition, the second graphite block 15 may be of an integral structure. Wherein, first insulating connecting rod and second insulating connecting rod are ceramic rod.
In this embodiment, the high temperature resistant insulating boat leg 2 is locked to the graphite boat piece 11 through the insulating nut 14, so as to prevent the nut from being charged due to contact with the graphite boat piece 11, and further prevent the cladding layer on the inner wall of the tube furnace from being charged due to contact with the inner wall of the tube furnace, so as to further prevent the cladding layer on the inner wall of the tube furnace from being charged and from being communicated with the outer graphite boat piece 111 due to air breakdown.
As an embodiment of the utility model, the high temperature resistant insulating boat foot 2 still is provided with at least one fixed orifices 23, and the first insulation connecting rod passes fixed orifices 23. Wherein the first insulating connecting rod passes through the first graphite block 12 and the fixing hole 23 at the same time. Preferably, the number of the first insulating connecting rods is two, and the fixing holes 23 are correspondingly provided in two.
As a preferred embodiment of the present invention, the insulating nut 14 is a ceramic nut, which is easy to process and low in cost.
As an embodiment of the present invention, the graphite boat pieces 11 are connected by ceramic connecting rods 18 so that the graphite boat pieces 11 are fixedly connected as a whole.
As shown in fig. 1, in one embodiment of the present invention, the number of the graphite boat pieces 11 is an odd number, the two outer graphite boat pieces 111 have the same polarity, and the two outer graphite boat pieces 111 are electrically connected to the middle graphite boat piece 112 having the same polarity. Wherein, the total number of the graphite boat pieces 11 shown in fig. 1 is 25, and the polarities of the two outer graphite boat pieces 111 may be both positive or negative.
In this embodiment, the two outer graphite boat pieces 111 and the middle graphite boat piece 112 having the same polarity are electrically connected through the first graphite block 12. The two high-temperature-resistant insulating boat feet 2 are connected with the first graphite block 12 through a first insulating connecting rod, and the two high-temperature-resistant insulating boat feet 2 are locked on the adjacent graphite boat pieces 112 through insulating nuts 14 respectively.
As shown in fig. 2, in an embodiment of the present invention, the number of the graphite boat pieces 11 is an even number, and the polarities of the two outer graphite boat pieces 111 are opposite, wherein one of the outer graphite boat pieces 111 is electrically connected to the middle graphite boat piece 112 of one polarity, and the other outer graphite boat piece 111 is electrically connected to the middle graphite boat piece 112 of the other polarity. Among them, the total number of the graphite boat pieces 11 shown in fig. 2 is 26.
In this embodiment, the polarity of one of the outer graphite boat pieces 111 is positive, and the polarity of the other outer graphite boat piece 111 is negative.
Referring to fig. 2 and 4, as an embodiment of the present invention, the high temperature resistant insulating boat leg 2 is provided with a filling hole 24 formed by hollowing and used for filling a conductive material, and the conductive material is used for conducting two adjacent graphite boat pieces 11 with the same polarity. When the high-temperature-resistant insulating boat foot 2 needs to be conducted with two adjacent homopolar graphite boat pieces 11, the conducting materials can be directly filled in the filling holes 24 to realize the conduction of the two adjacent homopolar graphite boat pieces 11, and when the high-temperature-resistant insulating boat foot 2 does not need to be conducted with the adjacent graphite boat pieces 11, the conducting materials are not required to be filled in the filling holes 24, so that the high-temperature-resistant insulating boat foot 2 has good universality and can adapt to the graphite boat with the graphite boat pieces 11 in an even number or an odd number.
In this embodiment, when the number of the graphite boat pieces 11 is even, the high temperature resistant insulating boat leg 2 corresponding to one of the outer graphite boat pieces 111 is provided with a filling hole 24 formed by hollowing, the filling hole 24 is filled with a conductive material 25, and the conductive material 25 is used for conducting the outer graphite boat piece 111 and the adjacent middle graphite boat piece 112 with the same polarity. As shown in fig. 2, the right outer graphite boat piece 111 needs to be conducted to the adjacent middle graphite boat piece 112 having the same polarity as the outer graphite boat piece 111 through the right refractory insulating boat foot 2, and the left outer graphite boat piece 111 does not need to be conducted to the adjacent middle graphite boat piece 112 having the same polarity through the refractory insulating boat foot 2.
The high-temperature-resistant insulating boat leg 2 comprises a first high-temperature-resistant insulating boat leg 21 corresponding to one outer graphite boat piece 111 and a second high-temperature-resistant insulating boat leg 22 corresponding to the other outer graphite boat piece 111. One side face of the first high-temperature-resistant insulating boat foot 21 is in contact with one outer graphite boat piece 111, the other side face of the first high-temperature-resistant insulating boat foot 21 is in contact with the middle graphite boat piece 112 with the same polarity of the outer graphite boat piece 111, the outer graphite boat piece 111 is in contact with the middle graphite boat piece 112 with the same polarity by utilizing the conductive material 25 in the filling hole 24 of the first high-temperature-resistant insulating boat foot 21, so that the outer graphite boat piece 111 is electrically connected with the middle graphite boat piece 112 with the same polarity, and the outer graphite boat piece 111 is connected with the middle graphite boat piece 112 with the same polarity simply, easily and cost-effectively. Since the second refractory insulating boat foot 22 does not need to connect its corresponding outer graphite boat piece 111 with the adjacent middle graphite boat piece 112 of the same polarity, the second refractory insulating boat foot 22 does not need to be filled with conductive material in the filling hole.
As an embodiment of the present invention, the conductive material 25 is graphite. Other conductive materials are also possible.
As a preferred embodiment of the present invention, the filling hole 24 may be a directional hole, a circular hole or a polygonal hole. Preferably, the filling holes 24 may be polygonal holes, so as to increase the contact area between the conductive material 25 and the middle graphite boat piece 112 and the outer graphite boat piece 111, and to make the electrical contact between the outer graphite boat piece 111 and the middle graphite boat piece 112 with the same polarity more stable.
Example two
Referring to fig. 5, the present embodiment provides a graphite boat, which has substantially the same structure as the graphite boat of the first embodiment except that:
in the present embodiment, the high-temperature resistant insulating boat foot 2 includes:
a main body portion 25 made of graphite; and
a high temperature resistant insulating layer 26 wrapping the main body portion 25. In this embodiment, the refractory insulating layer 26 may be a ceramic layer, a calcium silicate layer, or a magnesium silicate layer.
In this embodiment, the high temperature resistant insulating boat foot 2 can be obtained by directly wrapping a layer of high temperature resistant insulating layer 26 on the graphite boat foot in the prior art, and the processing is simple and convenient.
In this embodiment, the high temperature resistant insulating boat leg 2 is insulated from the inner wall of the tube furnace by the high temperature resistant insulating layer 26 on the surface, and during the chemical vapor deposition coating process of the graphite boat in the tube furnace, the high temperature resistant insulating boat leg 2 will not conduct the conductive coating formed by the graphite boat sheet 11 and the inner wall 100 of the tube furnace, so as to avoid the electrification of the conductive coating on the inner wall of the tube furnace, and also avoid the influence of the electrification of the conductive coating on the inner wall of the tube furnace on the coating process of the battery sheet.
In this embodiment, if the high temperature resistant insulating boat leg 2 needs to connect two adjacent graphite boat pieces 11 with the same polarity, the openings 27 may be formed in the high temperature resistant insulating layer 26 in contact with the two graphite boat pieces 11, respectively, and the positions of the openings 27 are filled with a conductive material, so that the conductive material contacts the graphite boat pieces 11, and the connection between the two adjacent graphite boat pieces 11 may also be realized, and the conductive coating on the inner wall of the tube furnace may be prevented from being electrified due to the insulation between the high temperature resistant insulating layer 26 and the conductive coating on the inner wall of the tube furnace. When the high temperature resistant insulating boat legs 2 do not need to conduct the adjacent graphite boat pieces 11, the openings 27 do not need to be filled with a conductive material.
The embodiment of the utility model provides a graphite boat is through setting up high temperature resistant insulating boat foot 2, replace traditional boat foot of making by graphite material, like this graphite boat carries out the chemical meteorology deposition coating film process in the tubular furnace, because the high temperature resistant insulating boat foot 2 of graphite boat can not switch on graphite boat piece 11 and the cladding material that tubular furnace inner wall 100 formed, also avoided the cladding material of tubular furnace inner wall to be electrified, consequently can avoid the cladding material of tubular furnace inner wall and graphite boat piece to produce to puncture the air and form to switch on and lead to the cladding material cracked to drop and cause the problem that the dust pollution appears in the boiler tube, avoided influencing battery piece coating film process because of appearing the dust; moreover, the problem of current fluctuation caused by the conduction between the graphite boat piece 11 and the coating of the inner wall 100 of the tube furnace is avoided, the reaction uniformity of the graphite boat during the coating process is ensured, and the stability and the effect of the coating process of the battery piece are ensured; meanwhile, the number of the graphite boat pieces 11 does not need to be reduced, the carrying quantity of the graphite boat is not influenced, and the capacity of the battery pieces is ensured.
The above description is only exemplary of the present invention and should not be construed as limiting the present invention, and any modifications, equivalents and improvements made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.
Claims (10)
1. A graphite boat, comprising:
the graphite boat comprises a graphite boat main body, wherein the graphite boat main body comprises a plurality of graphite boat sheets which are sequentially arranged at intervals, and two adjacent graphite boat sheets are respectively connected with electrodes with different polarities; and
and the high-temperature-resistant insulating boat foot is used for supporting the graphite boat main body in the tube furnace and is fixedly connected with at least one graphite boat piece.
2. The graphite boat of claim 1, wherein the high temperature resistant insulating boat feet are one-piece ceramic boat feet.
3. The graphite boat of claim 1, wherein the high temperature resistant insulating boat foot comprises:
a main body portion made of graphite; and
the high-temperature-resistant insulating layer wraps the main body part.
4. The graphite boat of claim 1, wherein the graphite boat body comprises:
the first graphite block is connected with the first electrode, each graphite boat sheet corresponding to the first electrode is respectively assembled and connected with the first graphite block, the high-temperature-resistant insulating boat foot is connected with the first graphite block through a first insulating connecting rod, and the high-temperature-resistant insulating boat foot is locked and fixed on the graphite boat sheet through an insulating nut fixed on the first insulating connecting rod;
and the second graphite block is connected with the second electrode, and the graphite boat pieces corresponding to the second electrode are respectively assembled and connected with the second graphite block.
5. The graphite boat of claim 4, wherein the insulating nut is a ceramic nut.
6. The graphite boat of claim 2, wherein the refractory insulating boat legs are provided with filling holes formed by hollowing and used for filling with a conductive material for connecting two adjacent graphite boat pieces of the same polarity.
7. The graphite boat of claim 6, wherein the plurality of graphite boat pieces comprises two outer graphite boat pieces located at two opposite side edges of the graphite boat body and a plurality of middle graphite boat pieces disposed between the two outer graphite boat pieces, the outer graphite boat pieces are respectively electrically connected to the middle graphite boat pieces having the same polarity, and one high temperature resistant insulating boat foot is disposed under each outer graphite boat piece.
8. The graphite boat of claim 7, wherein the total number of the graphite boat pieces is an odd number, the two outer graphite boat pieces have the same polarity, and the two outer graphite boat pieces are electrically connected to the middle graphite boat piece having the same polarity at the same time.
9. The graphite boat of claim 7, wherein the total number of the graphite boat pieces is an even number, and the two outer graphite boat pieces have opposite polarities, wherein one of the outer graphite boat pieces is electrically connected to the middle graphite boat piece of one polarity, and the other of the outer graphite boat pieces is electrically connected to the middle graphite boat piece of the other polarity.
10. The graphite boat of claim 9, wherein the filling holes of the refractory insulating boat legs corresponding to one of the outer graphite boat pieces are filled with the conductive material, and the conductive material conducts the outer graphite boat piece and the intermediate graphite boat piece adjacent to and having the same polarity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121181198.XU CN214881818U (en) | 2021-05-28 | 2021-05-28 | Graphite boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121181198.XU CN214881818U (en) | 2021-05-28 | 2021-05-28 | Graphite boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214881818U true CN214881818U (en) | 2021-11-26 |
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ID=78935303
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121181198.XU Active CN214881818U (en) | 2021-05-28 | 2021-05-28 | Graphite boat |
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| CN (1) | CN214881818U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115631987A (en) * | 2022-08-23 | 2023-01-20 | 江苏微导纳米科技股份有限公司 | Boat foot, carrier and deposition equipment |
| CN117133693A (en) * | 2023-10-26 | 2023-11-28 | 江苏微导纳米科技股份有限公司 | Substrate carrier and coating equipment |
-
2021
- 2021-05-28 CN CN202121181198.XU patent/CN214881818U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115631987A (en) * | 2022-08-23 | 2023-01-20 | 江苏微导纳米科技股份有限公司 | Boat foot, carrier and deposition equipment |
| CN115631987B (en) * | 2022-08-23 | 2024-02-13 | 江苏微导纳米科技股份有限公司 | Boat foot, carrier and deposition equipment |
| CN117133693A (en) * | 2023-10-26 | 2023-11-28 | 江苏微导纳米科技股份有限公司 | Substrate carrier and coating equipment |
| CN117133693B (en) * | 2023-10-26 | 2024-01-30 | 江苏微导纳米科技股份有限公司 | Substrate carrier and coating equipment |
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